SYSTEM FOR SEPARATING A DICED SEMICONDUCTOR DIE FROM A DIE ATTACH TAPE
    25.
    发明申请
    SYSTEM FOR SEPARATING A DICED SEMICONDUCTOR DIE FROM A DIE ATTACH TAPE 有权
    用于从DIE连接胶带分离一个DICED SEMICONDUCTOR DIE的系统

    公开(公告)号:US20120145332A1

    公开(公告)日:2012-06-14

    申请号:US13398647

    申请日:2012-02-16

    IPC分类号: B32B38/10

    摘要: A system is disclosed for ejecting a semiconductor die from a tape to which the die is affixed during the wafer dicing process. In embodiments, the system includes an ejector tool including a support table, ejector pins and a pick-up arm. The support table is connected to a vacuum source for creating a negative pressure at an interface between the tape and support table. The support table further includes an aperture with one or more chamfered sidewalls. The vacuum source is connected to the aperture so that, upon placement of the tape on the support table with a die centered over the aperture, the vacuum source pulls a portion of the tape around the edges of the semiconductor die away from the die and into the space created by the chamfered edges.

    摘要翻译: 公开了一种系统,用于在晶片切割过程期间从模具固定到的带上弹出半导体管芯。 在实施例中,系统包括具有支撑台,顶针和拾取臂的顶出器工具。 支撑台连接到真空源,用于在带和支撑台之间的界面处产生负压。 支撑台还包括具有一个或多个倒角侧壁的孔。 真空源连接到孔口,使得当带子以孔为中心的模具放置在支撑台上时,真空源将半导体管芯的边缘周围的一部分带离开模具并且进入 由倒角边缘产生的空间。

    System for separating a diced semiconductor die from a die attach tape
    26.
    发明授权
    System for separating a diced semiconductor die from a die attach tape 有权
    用于将切割的半导体管芯与管芯附接带分离的系统

    公开(公告)号:US08499813B2

    公开(公告)日:2013-08-06

    申请号:US13398647

    申请日:2012-02-16

    IPC分类号: B32B38/10

    摘要: A system is disclosed for ejecting a semiconductor die from a tape to which the die is affixed during the wafer dicing process. In embodiments, the system includes an ejector tool including a support table, ejector pins and a pick-up arm. The support table is connected to a vacuum source for creating a negative pressure at an interface between the tape and support table. The support table further includes an aperture with one or more chamfered sidewalls. The vacuum source is connected to the aperture so that, upon placement of the tape on the support table with a die centered over the aperture, the vacuum source pulls a portion of the tape around the edges of the semiconductor die away from the die and into the space created by the chamfered edges.

    摘要翻译: 公开了一种系统,用于在晶片切割过程期间从模具固定到的带上弹出半导体管芯。 在实施例中,系统包括具有支撑台,顶针和拾取臂的顶出器工具。 支撑台连接到真空源,用于在带和支撑台之间的界面处产生负压。 支撑台还包括具有一个或多个倒角侧壁的孔。 真空源连接到孔口,使得当将带子放置在支撑台上,其中模具以孔为中心时,真空源将半导体管芯的边缘周围的一部分带离模具并且进入 由倒角边缘产生的空间。