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21.发明申请公开(公告)号：US20170176354A1
公开(公告)日：2017-06-22
申请号：US15451104
申请日：2017-03-06
IPC分类号： G01N23/201
CPC分类号： G01N23/201 , G01N2223/054 , H01L22/12
摘要： Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
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22.发明授权Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) 有权使用多角度X射线反射散射法（XRS）测量周期结构的方法和系统公开(公告)号：US09588066B2
公开(公告)日：2017-03-07
申请号：US14161942
申请日：2014-01-23
IPC分类号： G01N23/201 , H01L21/66
CPC分类号： G01N23/201 , G01N2223/054 , H01L22/12
摘要： Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
摘要翻译： 公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。 例如，通过X射线反射散射法测量样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个 入射角和多个方位角。 该方法还涉及收集散射的X射线束的至少一部分。
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23.发明申请METHODS AND SYSTEMS FOR MEASURING PERIODIC STRUCTURES USING MULTI-ANGLE X-RAY REFLECTANCE SCATTEROMETRY (XRS) 有权使用多角度X射线反射散射测量（XRS）测量周期结构的方法和系统公开(公告)号：US20150204802A1
公开(公告)日：2015-07-23
申请号：US14161942
申请日：2014-01-23
IPC分类号： G01N23/201
CPC分类号： G01N23/201 , G01N2223/054 , H01L22/12
摘要： Methods and systems for measuring periodic structures using multi-angle X-ray reflectance scatterometry (XRS) are disclosed. For example, a method of measuring a sample by X-ray reflectance scatterometry involves impinging an incident X-ray beam on a sample having a periodic structure to generate a scattered X-ray beam, the incident X-ray beam simultaneously providing a plurality of incident angles and a plurality of azimuthal angles. The method also involves collecting at least a portion of the scattered X-ray beam.
摘要翻译： 公开了使用多角度X射线反射散射法（XRS）测量周期性结构的方法和系统。 例如，通过X射线反射散射法测量样品的方法包括将入射的X射线束照射在具有周期性结构的样品上以产生散射的X射线束，入射的X射线束同时提供多个 入射角和多个方位角。 该方法还涉及收集散射的X射线束的至少一部分。
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24.发明申请Methods and Systems for Fabricating Platelets of a Monochromator for X-ray Photoelectron Spectroscopy 有权用于制造X射线光电子能谱仪的单色器血小板的方法和系统公开(公告)号：US20150052723A1
公开(公告)日：2015-02-26
申请号：US13975035
申请日：2013-08-23
CPC分类号： G01N23/20 , B23Q17/20 , G01N23/2273 , G21K1/06 , G21K2201/064 , H01J37/256 , Y10T29/49764 , Y10T29/49769 , Y10T29/49771 , Y10T29/53022
摘要： Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.
摘要翻译： 公开了用于制造用于X射线光电子能谱（XPS）的单色仪的血小板的方法和系统。 例如，制造用于X射线光电子能谱的单色仪的血小板的方法包括将晶体放置在X射线测量装置的台上，该晶体具有顶面。 该方法还包括通过X射线反射测量晶体的晶面的取向，晶体的顶表面下方的晶面并具有主轴。 该方法还包括通过测量从晶体顶表面反射的光束来测量晶体顶表面的表面角度。
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25.发明申请SYSTEM AND METHOD FOR CHARACTERIZING A FILM BY X-RAY PHOTOELECTRON AND LOW-ENERGY X-RAY FLUORESCENCE SPECTROSCOPY 有权用X射线光电子和低能量X射线荧光光谱表征薄膜的系统和方法公开(公告)号：US20130077742A1
公开(公告)日：2013-03-28
申请号：US13246488
申请日：2011-09-27
IPC分类号： G01N23/223 , G21K1/00
CPC分类号： G21K1/06 , G01N23/223 , G01N23/2273 , G01N2223/61 , G21K2201/062 , G21K2201/064
摘要： Systems and methods for characterizing films by X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a system for characterizing a film may include an X-ray source for generating an X-ray beam having an energy below the k-edge of silicon. A sample holder may be included for positioning a sample in a pathway of the X-ray beam. A first detector may be included for collecting an XPS signal generated by bombarding the sample with the X-ray beam. A second detector may be included for collecting an X-ray fluorescence (XRF) signal generated by bombarding the sample with the X-ray beam. Monitoring/estimation of the primary X-ray flux at the analysis site may be provided by X-ray flux detectors near and at the analysis site. Both XRF and XPS signals may be normalized to the (estimated) primary X-ray flux to enable film thickness or dose measurement without the need to employ signal intensity ratios.
摘要翻译： 公开了通过X射线光电子能谱（XPS）表征膜的系统和方法。 例如，用于表征胶片的系统可以包括用于产生具有低于硅的k边缘的能量的X射线束的X射线源。 可以包括样品保持器以将样品定位在X射线束的通路中。 可以包括第一检测器以收集通过用X射线束轰击样品而产生的XPS信号。 可以包括第二检测器，用于收集通过用X射线束轰击样品而产生的X射线荧光（XRF）信号。 在分析现场的X射线通量探测器附近和分析现场可以提供监测/估计分析现场的主要X射线通量。 XRF和XPS信号都可以归一化为（估计的）初级X射线通量，以实现膜厚度或剂量测量，而不需要使用信号强度比。
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26.发明授权Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy 有权用于制造用于X射线光电子能谱的单色仪的血小板的方法和系统公开(公告)号：US09297771B2
公开(公告)日：2016-03-29
申请号：US13975035
申请日：2013-08-23
IPC分类号： G01N23/20 , G01N23/227 , H01J37/256 , G21K1/06 , B23Q17/20
CPC分类号： G01N23/20 , B23Q17/20 , G01N23/2273 , G21K1/06 , G21K2201/064 , H01J37/256 , Y10T29/49764 , Y10T29/49769 , Y10T29/49771 , Y10T29/53022
摘要： Methods and systems for fabricating platelets of a monochromator for X-ray photoelectron spectroscopy (XPS) are disclosed. For example, a method of fabricating a platelet of a monochromator for X-ray photoelectron spectroscopy involves placing a crystal on a stage of an X-ray measuring apparatus, the crystal having a top surface. The method also involves measuring, by X-ray reflection, an orientation of a crystal plane of the crystal, the crystal plane beneath the top surface of the crystal and having a primary axis. The method also involves measuring a surface angle of the top surface of the crystal by measuring a light beam reflected from the top surface of the crystal.
摘要翻译： 公开了用于制造用于X射线光电子能谱（XPS）的单色仪的血小板的方法和系统。 例如，制造用于X射线光电子能谱的单色仪的血小板的方法包括将晶体放置在X射线测量装置的台上，该晶体具有顶表面。 该方法还包括通过X射线反射测量晶体的晶面的取向，晶体的顶表面下方的晶面并具有主轴。 该方法还包括通过测量从晶体顶表面反射的光束来测量晶体顶表面的表面角度。
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公开(公告)号：US07227637B2
公开(公告)日：2007-06-05
申请号：US11399841
申请日：2006-04-07
CPC分类号： G01N21/55 , G01B11/00 , G01J3/10 , G01J3/36 , G01N21/211
摘要： The subject invention relates to a broadband optical metrology system that segregates the broadband radiation into multiple sub-bands to improve overall performance. Each sub-band includes only a fraction of the original bandwidth. The optical path—the light path that connects the illuminator, the sample and the detector—of each sub-band includes a unique sub-band optical system designed to optimize the performance over the spectral range spanned by the sub-band radiation. All of the sub-band optical systems are arranged to provide small-spot illumination at the same measurement position. Optional purging of the individual sub-band optical paths further improves performance.
摘要翻译： 本发明涉及宽带光学测量系统，其将宽带辐射分离成多个子带以提高整体性能。 每个子带仅包括原始带宽的一部分。 光路 - 连接每个子带的照明器，样品和检测器的光路包括一个独特的子带光学系统，设计用于优化由子带辐射跨越的光谱范围的性能。 所有子带光学系统被布置成在相同的测量位置处提供小点照明。 各个子带光路的可选清洗进一步提高了性能。
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