Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom
    21.
    发明授权
    Nanomechanical near-field grating apparatus and acceleration sensor formed therefrom 有权
    纳米机械近场光栅装置和由其形成的加速度传感器

    公开(公告)号:US07339738B1

    公开(公告)日:2008-03-04

    申请号:US11088313

    申请日:2005-03-23

    CPC classification number: G02B5/1828 G02B26/0808

    Abstract: A nanomechanical near-field grating device is disclosed which includes two sub-gratings vertically spaced by a distance less than or equal to an operating wavelength. Each sub-grating includes a plurality of line-elements spaced apart by a distance less than or equal to the operating wavelength. A light source (e.g., a VCSEL or LED) can provide light at the operating wavelength for operation of the device. The device can operate as an active grating, with the intensity of a reflected or transmitted portion of the light varying as the relative positions of the sub-gratings are controlled by an actuator. The device can also operate as a passive grating, with the relative positions of the sub-gratings changing in response to an environmentally-induced force due to acceleration, impact, shock, vibration, gravity, etc. Since the device can be adapted to sense an acceleration that is directed laterally or vertically, a plurality of devices can be located on a common substrate to form a multi-axis acceleration sensor.

    Abstract translation: 公开了纳米机械近场光栅装置,其包括垂直间隔小于或等于工作波长的距离的两个子光栅。 每个子光栅包括间隔开小于或等于工作波长的距离的多个线元件。 光源(例如,VCSEL或LED)可以在工作波长处提供用于设备操作的光。 器件可以作为有源光栅工作,随着子光栅的相对位置由致动器控制,光的反射或透射部分的强度变化。 该装置还可以作为无源光栅操作,其中子光栅的相对位置响应于由加速度,冲击,冲击,振动,重力等引起的环境引起的力而变化。由于该装置可以适应于感测 横向或垂直定向的加速度,多个装置可以位于公共基板上,以形成多轴加速度传感器。

    Optical interferometric sensor
    22.
    发明授权
    Optical interferometric sensor 有权
    光学干涉传感器

    公开(公告)号:US08154734B2

    公开(公告)日:2012-04-10

    申请号:US12428521

    申请日:2009-04-23

    CPC classification number: G01P15/093 G01H9/00

    Abstract: Embodiments of environmental stimulus sensors comprising multiple sources and detectors for interrogating one or more optically resonant cavities that are responsive to one or more environmental stimuli are disclosed. Such sensors have, among other advantages, improved immunity to source and/or detector noise.

    Abstract translation: 公开了包括用于询问响应于一个或多个环境刺激的一个或多个光学谐振腔的多个源和检测器的环境刺激传感器的实施例。 除此之外,这样的传感器具有改善对源和/或检测器噪声的免疫性。

    Accelerometer with enhanced DC stability
    23.
    发明授权
    Accelerometer with enhanced DC stability 有权
    加速度计具有增强的直流稳定性

    公开(公告)号:US08026714B2

    公开(公告)日:2011-09-27

    申请号:US12397680

    申请日:2009-03-04

    Inventor: Dustin Wade Carr

    CPC classification number: G01V7/00 G01P15/093 G01P15/097 G01P2015/0828

    Abstract: An accelerometer with improved immunity to sensitivity drift is disclosed. In some embodiments, the accelerometer comprises an actuator that induces a known acceleration on a reference frame. A signal based on this known acceleration is used to calibrate the accelerometer to mitigate the effects due to at least one of sensitivity drift, D.C. bias drift, sense laser wavelength drift, and resonant frequency drift.

    Abstract translation: 公开了一种具有提高的对灵敏度漂移的抗扰度的加速度计。 在一些实施例中,加速度计包括在参考系上引起已知加速度的致动器。 基于这种已知加速度的信号用于校准加速度计以减轻由于灵敏度漂移,直流偏置漂移,感测激光波长漂移和谐振频率漂移中的至少一个引起的影响。

    Apparatus comprising a directionality-enhanced acoustic sensor
    24.
    发明授权
    Apparatus comprising a directionality-enhanced acoustic sensor 失效
    装置包括方向性增强的声传感器

    公开(公告)号:US07894618B2

    公开(公告)日:2011-02-22

    申请号:US11460626

    申请日:2006-07-28

    Inventor: Dustin Wade Carr

    CPC classification number: H04R1/406

    Abstract: An apparatus and method for discriminating a directional component of a propagating pressure wave using an array of operatively-coupled displacement sensors are disclosed. In accordance with the illustrative embodiment, each displacement sensor in the array comprises two parallel layers, at least one of which is movable. The output signal of each displacement sensor is based on the separation of the layers. The displacement sensors are operatively-coupled through a compressible fluid such that the response of one of the sensors to an input can cause an output signal in at least one of the other sensors. The operative-coupling of the displacement sensors amplifies relative phase information between their respective output signals, which results in improved directionality. Some embodiments of the present invention are particularly well-suited for use in microphones.

    Abstract translation: 公开了一种用于使用可操作地耦合的位移传感器的阵列来识别传播压力波的方向分量的装置和方法。 根据说明性实施例,阵列中的每个位移传感器包括两个平行的层,其中至少一个是可移动的。 每个位移传感器的输出信号基于层的分离。 位移传感器通过可压缩流体可操作地耦合,使得传感器之一对输入的响应可以在至少一个其它传感器中产生输出信号。 位移传感器的操作耦合放大了它们各自输出信号之间的相对相位信息,这导致改进的方向性。 本发明的一些实施例特别适用于麦克风。

    Accelerometer comprising an optically resonant cavity
    25.
    发明授权
    Accelerometer comprising an optically resonant cavity 失效
    加速度计包括光学谐振腔

    公开(公告)号:US07583390B2

    公开(公告)日:2009-09-01

    申请号:US12051647

    申请日:2008-03-19

    Inventor: Dustin Wade Carr

    Abstract: An accelerometer based on an optical displacement sensor is disclosed. An embodiment of the present invention directs a light beam toward an optically resonant cavity and detects both the reflected and transmitted optical beams that result from interaction with the optically resonant cavity. The optically resonant cavity has a cavity length that is based on the position of a proof mass that moves in response to an acceleration.

    Abstract translation: 公开了一种基于光学位移传感器的加速度计。 本发明的实施例将光束引导到光学谐振腔并且检测由与光学谐振腔的相互作用产生的反射和透射的光束。 光学谐振腔具有基于响应于加速度而移动的检验质量块的位置的腔体长度。

    Displacement sensor
    26.
    发明授权
    Displacement sensor 有权
    位移传感器

    公开(公告)号:US07551295B2

    公开(公告)日:2009-06-23

    申请号:US11421593

    申请日:2006-06-01

    Abstract: An apparatus and method for detecting multiple beams from a beamsplitter is disclosed. Some embodiments of the present invention are particularly well-suited for use in microphones, high-sensitivity pressure sensors, vibration sensors, and accelerometer applications. Some embodiments of the present invention generate a differential electrical output signal that is based on multiple detected optical signals. The differential output signal is generated in response to an environmental stimulus, such as a pressure differential or incident acoustic energy. In accordance with the illustrative embodiment, an optical displacement sensor redirects the transmitted beam back through the optically-resonant cavity with an angular offset. Due to the angular offset, the redirected beam (i.e., retransmitted beam) transits the cavity with an intra-cavity path length that corresponds to substantially full transmittance of the retransmitted beam in the absence of the environmental stimulus.

    Abstract translation: 公开了一种从分束器检测多个光束的装置和方法。 本发明的一些实施例特别适用于麦克风,高灵敏度压力传感器,振动传感器和加速度计应用。 本发明的一些实施例产生基于多个检测到的光信号的差分电输出信号。 差分输出信号是响应于诸如压力差或入射声能的环境刺激而产生的。 根据说明性实施例,光学位移传感器通过光学谐振腔将角度偏移重定向到透射光束。 由于角度偏移,重定向的波束(即,重新发射的波束)以在没有环境刺激的情况下对应于重发波束的基本上完全透射率的腔内路径长度来转移空腔。

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