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公开(公告)号：US20190383307A1
公开(公告)日：2019-12-19
申请号：US16468165
申请日：2017-12-08
Applicant: Edwards Japan Limited
Inventor： Keita Mitsuhashi , Tooru Miwata
Abstract: A vacuum pump includes a housing having an inlet port, a stator column provided upright inside the housing, a rotating body having a shape surrounding an outer periphery of the stator column, a support means for rotatably supporting the rotating body, and a driving means for driving the rotating body to rotate, wherein gas is sucked in from the inlet port by rotation of the rotating body, and the stator column is constituted of a cast material of aluminum alloy having a mechanical material property of an elongation of 5% or more.
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公开(公告)号：US20160138602A1
公开(公告)日：2016-05-19
申请号：US14899917
申请日：2014-06-06
Applicant: EDWARDS JAPAN LIMITED
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Keita Mitsuhashi
CPC classification number: F04D19/04 , F04D17/168 , F04D19/044 , F04D29/28 , F04D29/32 , F04D29/324 , F04D29/444 , F04D29/542 , F04D29/544 , F05D2240/122 , F05D2240/304 , F05D2250/70 , F05D2260/607
Abstract: A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.
Abstract translation: 提供一种真空泵，其抑制螺纹槽的排气侧出口中的气体产物的发生，并且长期保持泵的性能。 真空泵包括流入抑制壁，通过使沿着内周侧定子的外周面的排气方向延伸的脊部的排气侧端部比在吸入侧端部部分的转子旋转方向 流入抑制壁，其抑制在脊部中雕刻的线槽的排气侧出口中的气体的滞留。
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Patent Agency Ranking
公开(公告)号：US20240295221A1
公开(公告)日：2024-09-05
申请号：US18258886
申请日：2022-01-11
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yoshiyuki Sakaguchi
IPC: F04D19/04
CPC classification number: F04D19/042
Abstract: There are provided a vacuum pump which can effectively prevent stress corrosion cracking of a rotating body and has excellent corrosion resistance, and a rotating body of the vacuum pump. In a vacuum pump (e.g., a turbo-molecular pump 100) exhausting gas by rotation of a rotating body 103, the rotating body 103 has, on a surface thereof, a first area 1 covered with a first surface treatment layer 1A and a second area 2 covered with a second surface treatment layer 2A, and a boundary portion 3 between the first area 1 and the second area 2 has an area in which the surface treatment layers 1A and 1B of the first and second areas 1 and 2 overlap each other.
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公开(公告)号：US11680585B2
公开(公告)日：2023-06-20
申请号：US17769560
申请日：2020-10-27
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Takai , Tooru Miwata
CPC classification number: F04D29/5853 , F04D19/042 , F04D29/522 , F04D29/541 , F04D29/542 , F04D19/048
Abstract: A vacuum pump includes a rotor provided with a plurality of rotor blades and a rotor cylinder portion, a driving portion, a bearing, stator blades, a thread groove stator that is disposed downstream of the stator blades and has an inner peripheral surface facing an outer peripheral surface of the rotor cylinder portion, and a heat insulating wall disposed downstream of the thread groove. The heat insulating wall includes a ring-shaped annular portion, and a substantially cylindrical wall portion extending from an inner portion of the annular portion in the radial direction to the upstream side and forming a flow path on the outer peripheral surface side. A first corner portion is formed between an upstream-side surface of the annular portion and the outer peripheral surface of the wall portion, the first corner portion being formed in an arc shape.
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公开(公告)号：US11248625B2
公开(公告)日：2022-02-15
申请号：US16468165
申请日：2017-12-08
Applicant: Edwards Japan Limited
Inventor： Keita Mitsuhashi , Tooru Miwata
Abstract: A vacuum pump includes a housing having an inlet port, a stator column provided upright inside the housing, a rotating body having a shape surrounding an outer periphery of the stator column, a support means for rotatably supporting the rotating body, and a driving means for driving the rotating body to rotate, wherein gas is sucked in from the inlet port by rotation of the rotating body, and the stator column is constituted of a cast material of aluminum alloy having a mechanical material property of an elongation of 5% or more.
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公开(公告)号：US20210010479A1
公开(公告)日：2021-01-14
申请号：US17040799
申请日：2019-03-20
Applicant: Edwards Japan Limited
Inventor： Tooru Miwata , Yoshiyuki Takai , Yoshiyuki Sakaguchi
IPC: F04D19/04 , F04D29/58 , F04D29/048
Abstract: A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.
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公开(公告)号：US20190195238A1
公开(公告)日：2019-06-27
申请号：US16327154
申请日：2017-08-09
Applicant: Edwards Japan Limited
Inventor： Yoshiyuki Sakaguchi , Tooru Miwata , Nahoko Yoshihara
CPC classification number: F04D29/526 , F04D3/00 , F04D19/04 , F04D19/042 , F04D29/403
Abstract: A vacuum pump reduces a stress without reducing the rotation speed of a rotating cylindrical body. In an outlet port-side lower portion of a rotor cylindrical portion included in the vacuum pump, a smaller diameter portion having an outer diameter smaller than that of an inlet port-side portion of the rotor cylindrical portion is provided. A lowermost end portion (outlet port-side end portion) of the rotor cylindrical portion is designed longer than a thread groove exhaust element to provide an extending portion. In the extending portion, a smaller diameter portion having an outer diameter smaller than that of the inlet port-side portion of the rotor cylindrical portion which is opposed to the thread groove exhaust element is provided.
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