VACUUM PUMP, ROTATING BODY, COVER PORTION, AND MANUFACTURING METHOD OF ROTATING BODY

    公开(公告)号:US20240295227A1

    公开(公告)日:2024-09-05

    申请号:US18258869

    申请日:2022-01-11

    发明人: Tooru Miwata

    IPC分类号: F04D29/66 F04D19/04 F04D29/60

    摘要: A vacuum pump which prevents dust generation from a shaft by avoiding contact between a top portion of the shaft and corrosive gas and includes a balance correction function for a rotating body. A vacuum pump includes a rotating body including a rotating shaft and a rotor blade which has a through hole, through which a top portion of the rotating shaft is caused to pass, and is fixed with the top portion, and a cover portion fixed to the rotating to cover the top portion and the through hole. The cover portion includes a balance correction function for the rotating body and corrosion resistance to exhaust gas. The cover portion, prevents contact between the top portion and corrosive gas and prevents dust generation from the shaft.

    Vacuum pump
    2.
    发明授权

    公开(公告)号:US11542950B2

    公开(公告)日:2023-01-03

    申请号:US17040799

    申请日:2019-03-20

    摘要: A vacuum pump capable of suppressing the solidification of gas in a normal operation of a pump is provided. Provided is a vacuum pump including a casing that has an inlet port for sucking gas from outside and an outlet port for exhausting the gas to the outside; a turbo-molecular-pump mechanism that is disposed in the casing and includes rotor blades and stator blades alternately arranged in multiple stages in an axial direction; a thread-groove-pump mechanism that is disposed in the casing and is connectedly disposed on an exhaust side of the turbo-molecular-pump mechanism; first temperature regulating means that is configured to regulate cooling of the turbo-molecular-pump mechanism; and second temperature regulating means that is configured to regulate heating of the thread-groove-pump mechanism.

    Connected thread groove spacer and vacuum pump

    公开(公告)号:US10823200B2

    公开(公告)日:2020-11-03

    申请号:US15780155

    申请日:2016-12-08

    IPC分类号: F04D29/54 F04D19/04 F04D17/16

    摘要: A thread groove pump portion, which is an exhaust element, is structured such that a Siegbahn structure is attached onto a cylindrical thread, and such that respective parts are connected to each other at this attachment section. A flow channel of the Siegbahn portion and a flow channel of the cylindrical thread (the thread groove pump portion) are connected to each other so as to substantially form a right angle when viewed from an axis direction of the vacuum pump, thus, the flow channel of the Siegbahn portion and the flow channel of the thread groove pump portion are connected to each other. the length of a compression flow channel of the thread groove pump portion can be increased in a radial direction due to the connected Siegbahn portion.

    VACUUM PUMP
    4.
    发明申请

    公开(公告)号:US20220412369A1

    公开(公告)日:2022-12-29

    申请号:US17762992

    申请日:2020-09-18

    摘要: A vacuum pump which suppresses occurrence of deposition caused by an exhaust gas is obtained. The vacuum pump includes: a pump portion including a shaft portion, a rotor disposed on an outer peripheral side of the shaft portion, and a stator disposed on the outer peripheral side of the rotor; a channel of the exhaust gas from the pump portion to an outlet port; and a shielding portion which suppresses contact of the exhaust gas with the shaft portion in the channel. Further, an end portion of the shielding portion has a surface opposed to the rotor.

    VACUUM PUMP AND COOLING COMPONENT THEREOF

    公开(公告)号:US20210207619A1

    公开(公告)日:2021-07-08

    申请号:US17057940

    申请日:2018-05-30

    IPC分类号: F04D29/58 F04D19/04

    摘要: A cooling component includes a plurality of port pairs a flow path through which refrigerant flows, the refrigerant communicating with each of the ports of the plurality of port pairs, and a setting means for setting a usage pattern of the plurality of port pairs. The plurality of port pairs are provided along a circumferential direction of the casing. The setting means sets a selected port pair such that the refrigerant is supplied from outside into the flow path using the first port of the selected port pair and refrigerant is discharged from the flow path to outside using the second port of the selected port pair, and sets another port pair such that the refrigerant cannot be supplied from outside into the flow path or discharged from the flow path using the other port pair.

    VACUUM PUMP, AND MAGNETIC BEARING DEVICE AND ANNULAR ELECTROMAGNET USED IN VACUUM PUMP

    公开(公告)号:US20200166041A1

    公开(公告)日:2020-05-28

    申请号:US16612911

    申请日:2018-04-20

    IPC分类号: F04D19/04 H02K7/09

    摘要: Bobbins of an annular electromagnet each have a bobbin body that has a coil wire wound around an outer periphery thereof and is attached to a respective tooth of an annular stator core by having the corresponding tooth inserted therethrough. A first flange portion in a rectangular hallow shape is provided on an end surface of the bobbin body near the center of the annular stator core and a second flange portion in a rectangular hallow shape is provided on the other end surface of the bobbin body. A coil winding amount increasing means is formed at least on the first flange portion or the second flange portion and increases the amount of winding of the coil wire wound around the bobbin body.

    VACUUM PUMP
    7.
    发明公开
    VACUUM PUMP 审中-公开

    公开(公告)号:US20240280115A1

    公开(公告)日:2024-08-22

    申请号:US18571958

    申请日:2022-07-21

    IPC分类号: F04D29/60 F04D19/04 F04D29/08

    摘要: A vacuum pump includes a contact portion that contacts a jig used to adjust the height of a seal member in an axial direction. At the time of assembling the vacuum pump in which a pump fixing component is arranged opposed to the outer periphery of a rotating body, the jig is positioned by the contact portion with the pump fixing component arranged on a base, and the pump fixing component is pressed in the direction of the base by the pressing portion of the positioned jig to adjust the height of the seal member in the axial direction. The pump fixing component is entirely lowered in the direction of the base by the adjustment.

    VACUUM PUMP AND ROTATING CYLINDER PROVIDED IN VACUUM PUMP

    公开(公告)号:US20240026888A1

    公开(公告)日:2024-01-25

    申请号:US18044815

    申请日:2021-10-01

    IPC分类号: F04D19/04 F04D29/32

    摘要: A lower portion of a cylindrical portion provided in a vacuum pump on the outlet port side has an extension portion extending to a further downstream side than a stationary part of a thread groove exhaust element. In the extension portion, the smaller the outer diameter, the smaller the stress applied to the inner diameter side during rotation. As such, the configuration including a reduced diameter portion reduces the stress applied to the inner diameter side of the cylindrical portion without lowering the rotation speed of the rotating body. Additionally, providing a gradually decreasing diameter structure in the extension portion reduces stress concentration at the reduced diameter portion.

    VACUUM PUMP, STATOR BLADE, AND SPACER
    9.
    发明公开

    公开(公告)号:US20230323890A1

    公开(公告)日:2023-10-12

    申请号:US18006290

    申请日:2021-07-30

    IPC分类号: F04D19/04 F04D29/26 F04D29/40

    摘要: In a vacuum pump in which the rotor blade in one stage has an outer diameter that is smaller at an outlet port side, or the rotor blade in one stage has an inner diameter that is larger at an outlet port side, at least one of an outer circumference portion or an inner circumference portion of the stator blade that is located immediately above the rotor blade having a smaller outer diameter or immediately above the rotor blade having a larger inner diameter has a tapered surface sloping down to an outlet port side. By providing the tapered surface, entering molecules are reflected at a right angle, sent toward an inner circumference side, and hit by the rotor blade in the upper stage. The molecules are thus sent to a next exhaustion stage.

    Vacuum pump
    10.
    发明授权

    公开(公告)号:US10260509B2

    公开(公告)日:2019-04-16

    申请号:US14899917

    申请日:2014-06-06

    摘要: A vacuum pump is provided, which suppresses occurrence of a gas product in an exhaust side outlet of a thread groove and maintains pump performance over a long period. The vacuum pump includes inflow suppressing walls formed by widening greater an exhaust side end portion of ridge portions, extended along a gas exhaust direction on an outer circumferential surface of an inner circumference side stator, forward in a rotor rotating direction than an intake side end portion, the inflow suppressing walls suppressing retention of gas in exhaust side outlets of thread grooves engraved among the ridge portions.