公开(公告)号：US11703680B2

公开(公告)日：2023-07-18

申请号：US16625702

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G02B26/08 ,  B81B3/00 ,  G01J3/02 ,  G01J3/45

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  G01J3/021 ,  G01J3/0202 ,  G01J3/45 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136 ,  B81B2203/0154 ,  B81B2203/04

Abstract: An optical device includes: a base that includes a main surface; a movable unit that includes an optical function unit; and an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a first direction perpendicular to the main surface. The elastic support unit includes a lever, a first torsion support portion that extends along a second direction perpendicular to the first direction and is connected between the lever and the movable unit, and a second torsion support portion that extends along the second direction and is connected between the lever and the base. A torsional spring constant of the first torsion support portion is greater than a torsional spring constant of the second torsion support portion.

公开(公告)号：US11693230B2

公开(公告)日：2023-07-04

申请号：US16762174

申请日：2018-09-04

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: G02B26/08 ,  G02B7/182 ,  H02N1/00 ,  G02B26/10 ,  B81C1/00

CPC classification number: G02B26/0841 ,  B81C1/00555 ,  G02B7/1821 ,  G02B26/105 ,  H02N1/008 ,  B81B2201/042 ,  B81C2201/013 ,  B81C2201/0174 ,  B81C2201/0198

Abstract: In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

公开(公告)号：US11629947B2

公开(公告)日：2023-04-18

申请号：US16625693

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC: G01J3/02 ,  G01B9/02 ,  B81B3/00 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14 ,  G01J3/453

Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

公开(公告)号：USD899481S1

公开(公告)日：2020-10-20

申请号：US29667051

申请日：2018-10-18

Applicant: HAMAMATSU PHOTONICS K.K.

Designer： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

公开(公告)号：US12298132B2

公开(公告)日：2025-05-13

申请号：US18121164

申请日：2023-03-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto ,  Yutaka Kuramoto ,  Katsumi Shibayama ,  Noburo Hosokawa

IPC: G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G01J3/453 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14

Abstract: In an optical device, a base and a movable unit are constituted by a semiconductor substrate including a first semiconductor layer, an insulating layer, and a second semiconductor layer in this order from one side in a predetermined direction. The base is constituted by the first semiconductor layer, the insulating layer, and the second semiconductor layer. The movable unit includes an arrangement portion that is constituted by the second semiconductor layer. The optical function unit is disposed on a surface of the arrangement portion on the one side. The first semiconductor layer that constitutes the base is thicker than the second semiconductor layer that constitutes the base. A surface of the base on the one side is located more to the one side than the optical function unit.

公开(公告)号：US12189114B2

公开(公告)日：2025-01-07

申请号：US18584740

申请日：2024-02-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani ,  Yutaka Kuramoto ,  Daiki Suzuki

IPC: B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  H02N1/00

Abstract: An optical device includes a support portion, a movable portion; and a pair of torsion bars. An optical function portion is provided on one surface of the movable portion and a rib portion is provided on the other surface of the movable portion. The rib portion includes eight extending portions of first to eighth extending portions. When setting directions in which the first to eighth extending portions extend as first to eighth extending directions respectively, and setting an angle between the first and second extending directions as a first angle, an angle between the third and fourth extending directions as a second angle, an angle between the fifth and sixth extending directions as a third angle, and an angle between the seventh and eighth extending directions as a fourth angle, each of the first and second angle is larger than each of the third and fourth angle.

公开(公告)号：US12180063B2

公开(公告)日：2024-12-31

申请号：US16625701

申请日：2018-07-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

IPC: B81B3/00 ,  G01B9/02 ,  G02B26/08 ,  H02N1/00

Abstract: An optical device includes: a base; a movable portion including an optical function portion; an elastic support portion supporting the movable portion so that the movable portion is movable along a first direction; a first comb electrode provided to the base and including a plurality of first comb fingers; and a second comb electrode including a plurality of second comb fingers. The elastic support portion includes a torsion bar extending along a second direction perpendicular to the first direction and a lever. The second comb electrode is provided to a portion of at least one of the movable portion and the elastic support portion, the portion being located on the optical function portion side with respect to the torsion bar. The first comb finger and the second comb finger adjacent to each other face each other in a direction in which the movable portion has higher external force resistance, of the second direction and a third direction perpendicular to the first direction and the second direction.

公开(公告)号：US11953675B2

公开(公告)日：2024-04-09

申请号：US18072227

申请日：2022-11-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani ,  Yutaka Kuramoto ,  Daiki Suzuki

IPC: B81B3/00 ,  B81C1/00 ,  G02B7/182 ,  G02B26/08 ,  G02B26/10 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/0045 ,  B81C1/00555 ,  G02B7/1821 ,  G02B26/105 ,  H02N1/008 ,  B81B2201/042 ,  B81C2201/013 ,  B81C2201/0174 ,  B81C2201/0198

Abstract: An optical device includes a support portion a movable unit and a pair of torsion bars disposed on both sides of the movable unit on a first axis. The movable unit includes a main body portion, a ring-shaped portion surrounding the main body portion when viewed from a predetermined direction perpendicular to the first axis, two connection portions connecting the main body portion and the ring-shaped portion to each other, and a rib portion provided to the main body portion. Each of the two connection portions includes two connection regions that are separated from each other by a space and the each of the two connection region connects the main body portion and the ring-shaped portion to each other. The rib portion includes four extending portions radially extending between a center of the main body portion and the four connection regions respectively when viewed from the predetermined direction.

公开(公告)号：US11635290B2

公开(公告)日：2023-04-25

申请号：US17321716

申请日：2021-05-17

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomofumi Suzuki ,  Kyosuke Kotani ,  Tatsuya Sugimoto

IPC: G02B26/08 ,  G01B9/02 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/14 ,  G01J3/45 ,  G02B7/182 ,  G02B27/14 ,  G01J3/453

Abstract: An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

公开(公告)号：US11561388B2

公开(公告)日：2023-01-24

申请号：US16492672

申请日：2018-03-14

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tatsuya Sugimoto ,  Kyosuke Kotani ,  Tomofumi Suzuki ,  Katsumi Shibayama ,  Noburo Hosokawa ,  Nao Inoue ,  Masashi Ito ,  Yutaka Kuramoto

IPC: G02B6/06 ,  B81B3/00 ,  G01J3/45 ,  G02B6/35 ,  G02B26/08 ,  B81C3/00 ,  G02B6/293 ,  G01J3/02 ,  G01J3/453 ,  G01J5/02 ,  G01N21/35 ,  G02B26/06

Abstract: A light module includes an optical element and a base on which the optical element is mounted. The optical element has an optical portion which has an optical surface; an elastic portion which is provided around the optical portion such that an annular region is formed; and a pair of support portions which is provided such that the optical portion is sandwiched in a first direction along the optical surface and in which an elastic force is applied and a distance therebetween is able to be changed in accordance with elastic deformation of the elastic portion. The base has a main surface, and a mounting region in which an opening communicating with the main surface is provided. The support portions are inserted into the opening in a state where an elastic force of the elastic portion is applied.