公开(公告)号：US07716952B2

公开(公告)日：2010-05-18

申请号：US10552539

申请日：2004-04-06

Applicant: Gerhard Schötz ,  Karsten Bräuer ,  Heinz Fabian ,  Norbert Treber

Inventor： Gerhard Schötz ,  Karsten Bräuer ,  Heinz Fabian ,  Norbert Treber

IPC: C03B37/075 ,  C03B37/07 ,  C03B37/018 ,  C03C13/00 ,  C03C25/00 ,  G02B6/00 ,  G01N23/00

CPC classification number: C03B37/01291 ,  C03B37/01211 ,  C03B37/01426 ,  C03B37/01466 ,  C03B2201/12 ,  Y02P40/57

Abstract: In a known method for the production of a blank mold for optical fibers, a fluorine-doped SiO2 enveloping glass is produced on a core glass cylinder that rotates about its longitudinal axis, wherein a silicon-containing starting substance is fed to a plasma burner, said substance is then oxidized in a plasma flame assigned to the plasma burner to obtain SiO2 particles, the SiO2 particles are deposited by layers on the enveloping surface of the cylinder of the core glass cylinder in the presence of fluorine and sintered into the enveloping glass. The invention aims at providing an economical method, which builds upon the above-mentioned method, in order to produce a blank mold from which optical multi-mode fibers (52) can be obtained. In comparison with fibers (51) produced according to standard methods, said optical multi-mode fibers are characterized by high initial transmission in the UV wavelength range and good resistance with respect to brief UV radiation, more particularly in the 210-300 nm wavelength range. According to the invention, a plasma flame that irradiates an ultraviolet light having a wavelength of 214 nm with an intensity of at least 0.9 ?W—determined on the basis of plasma flame intensity measurement—is used for the formation and deposition of the SiO2 particles on the core glass.

Abstract translation: 在用于生产光纤空白模具的已知方法中，在围绕其纵向轴线旋转的芯玻璃圆筒上产生氟掺杂的SiO 2包封玻璃，其中含硅原料被供给到等离子体燃烧器， 然后将所述物质在分配给等离子体燃烧器的等离子体火焰中氧化以获得SiO 2颗粒，SiO 2颗粒在氟存在下通过层沉积在芯玻璃圆筒的圆筒的包络表面上并烧结到包封玻璃中。 本发明的目的在于提供一种以上述方法为基础的经济的方法，以便制造可得到光学多模光纤（52）的坯模。 与根据标准方法生产的纤维（51）相比，所述光学多模光纤的特征在于在UV波长范围内的初始透射率高，并且对于短暂的UV辐射具有良好的电阻，更特别地在210-300nm波长范围 。 根据本发明，使用基于等离子体火焰强度测量来测定波长为214nm的强度至少为0.9≤W的紫外光的等离子体火焰，用于SiO 2颗粒的形成和沉积 在核心玻璃上。

公开(公告)号：US20060213228A1

公开(公告)日：2006-09-28

申请号：US10552539

申请日：2004-04-06

Applicant: Gerhard Schotz ,  Karsten Brauer ,  Michael Hunermann ,  Richard Schmidt ,  Heinz Fabian ,  Norbert Treber

Inventor： Gerhard Schotz ,  Karsten Brauer ,  Michael Hunermann ,  Richard Schmidt ,  Heinz Fabian ,  Norbert Treber

IPC: C03B37/07 ,  C03B37/018

CPC classification number: C03B37/01291 ,  C03B37/01211 ,  C03B37/01426 ,  C03B37/01466 ,  C03B2201/12 ,  Y02P40/57

Abstract: In a known method for the production of a blank mold for optical fibers, a fluorine-doped SiO2 enveloping glass is produced on a core glass cylinder that rotates about its longitudinal axis, wherein a silicon-containing starting substance is fed to a plasma burner, said substance is then oxidized in a plasma flame assigned to the plasma burner to obtain SiO2 particles, the SiO2 particles are deposited by layers on the enveloping surface of the cylinder of the core glass cylinder in the presence of fluorine and sintered into the enveloping glass. The invention aims at providing an economical method, which builds upon the above-mentioned method, in order to produce a blank mold from which optical multi-mode fibers (52) can be obtained. In comparison with fibers (51) produced according to standard methods, said optical multi-mode fibers are characterized by high initial transmission in the UV wavelength range and good resistance with respect to brief UV radiation, more particularly in the 210-300 nm wavelength range. According to the invention, a plasma flame that irradiates an ultraviolet light having a wavelength of 214 nm with an intensity of at least 0.9 ?W—determined on the basis of plasma flame intensity measurement—is used for the formation and deposition of the SiO2 particles on the core glass.

Abstract translation: 在用于生产光纤空白模具的已知方法中，在围绕其纵向轴线旋转的芯玻璃圆筒上产生氟掺杂的SiO 2包封玻璃，其中含硅起始 将物质进料到等离子体燃烧器，然后将所述物质在分配给等离子体燃烧器的等离子体火焰中氧化以获得SiO 2颗粒，SiO 2颗粒通过层 在氟化物存在下在芯玻璃圆筒的圆筒的包络表面上，并烧结到包络玻璃中。 本发明的目的在于提供一种以上述方法为基础的经济的方法，以便制造可得到光学多模光纤（52）的坯模。 与根据标准方法生产的纤维（51）相比，所述光学多模光纤的特征在于在UV波长范围内的初始透射率高，并且对于短暂的UV辐射具有良好的电阻，更特别地在210-300nm波长范围 。 根据本发明，使用基于等离子体火焰强度测量来测量具有至少0.9≤W的强度的波长为214nm的紫外光的等离子体火焰，用于形成和沉积SiO 2， 核心玻璃上的SUB> 2 颗粒。

公开(公告)号：US20060137401A1

公开(公告)日：2006-06-29

申请号：US10559736

申请日：2004-06-02

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: C03C21/00 ,  B28B11/00

CPC classification number: C03B37/02754 ,  C03B19/1469 ,  C03B37/01211 ,  C03B37/01228 ,  C03B2205/08 ,  C03B2205/14 ,  C03B2205/16 ,  Y02P40/57 ,  Y10T428/131

Abstract: The aim of the invention is to improve a known quartz glass cylinder for the production of an optical component, comprising an inner drilling, which is mechanically machined to size and provided with an etched structure by means of an etching treatment, subsequent to the mechanical machining, such that in the application thereof for production of pre-forms and optical fibres, few bubbles arise along the boundary surface between core and sleeve. Said aim is achieved, whereby the etched structure comprises striations with a maximum depth of 2.0 mm and a maximum width of 100 μm. A method for production of such a quartz glass cylinder mechanically machined to size is characterised in that the mechanical machining comprises several serial removal processes with successively lower removal depths, whereby after the last removal process the inner drilling has sub-surface striations with a maximum depth of 2 mm and the inner drilling is subsequently subjected to an etching treatment such that an etching removal with a maximum depth of 50 μm is achieved.

Abstract translation: 本发明的目的是改进已知的用于生产光学部件的石英玻璃圆筒，其包括内部钻孔，其通过机械加工机械加工成尺寸并通过蚀刻处理设置有蚀刻结构 使得在其用于生产预成型件和光纤的应用中，沿着芯和套筒之间的边界表面出现很少的气泡。 实现了所述目的，由此蚀刻结构包括最大深度为2.0mm，最大宽度为100μm的条纹。 用于生产机械加工尺寸的这种石英玻璃圆筒的方法的特征在于，机械加工包括几个连续去除工序，其连续下降的去除深度，由此在最后的去除工艺之后，内部钻削具有最大深度的子表面条纹 2mm，然后对内部钻孔进行蚀刻处理，使得实现最大深度为50um的蚀刻去除。

公开(公告)号：US06938443B1

公开(公告)日：2005-09-06

申请号：US10148817

申请日：2000-11-27

Applicant: Heinz Fabian

Inventor： Heinz Fabian

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/025 ,  C03B37/01

CPC classification number: C03B37/01211 ,  C03B2201/12 ,  C03B2201/31 ,  C03B2203/22

Abstract: The invention relates to a method for manufacture of a quartz glass preform for an optical fibre consisting of the following steps: preparation of a hollow cylinder made of porous quartz glass which exhibits an inner layer with a doping substance which increases the refractive index of quartz glass and an outer layer surrounding the inner layer, with a lower refractive index, and collapse of the hollow cylinder characterised by collapse of the porous hollow cylinder onto a quartz glass rod containing the doping substance.

Abstract translation: 本发明涉及一种用于制造光纤的石英玻璃预制件的方法，包括以下步骤：制备由多孔石英玻璃制成的中空圆柱体，该中空圆柱体具有增加石英玻璃的折射率的掺杂物质的内层 以及围绕内层的折射率较低的外层和中空圆筒的塌陷，其特征在于将多孔中空圆筒塌缩到含有掺杂物质的石英玻璃棒上。

公开(公告)号：US20050117863A1

公开(公告)日：2005-06-02

申请号：US10507944

申请日：2003-03-06

Applicant: Heinz Fabian ,  Thomas Miller

Inventor： Heinz Fabian ,  Thomas Miller

IPC: G02B6/00 ,  C03B37/012 ,  C03B37/027 ,  G02B6/02

CPC classification number: C03B37/02754 ,  C03B2205/14 ,  C03B2205/16 ,  Y02P40/57

Abstract: In the known method for producing an optical fiber, a coaxial arrangement comprising a core rod and an outer jacket tube is elongated, the coaxial arrangement being supplied in a vertical orientation to a heating zone and being softened therein zonewise, starting with the lower end thereof, and the optical fiber being withdraw downwards from the softened portion, whereby an annular gap existing between core rod and jacket tube is collapsed. Starting therefrom, in order to provided a method which makes it possible to produce optical fibers with a minimum curl and at low costs, the invention suggests that a quartz glass cylinder treated mechanically to its final dimension and having an outer diameter of at least 100 mm should be used as the jacket tube. An optical fiber obtained according to the method is characterized in that without the action of external forces it assumes a radius of curvature of at least 6 m.

Abstract translation: 在已知的光纤制造方法中，包括芯棒和外护套管的同轴装置是细长的，同轴装置以垂直取向供应到加热区并且沿着其下端开始被软化， 并且光纤从软化部分向下退回，由此存在于芯棒和护套管之间的环形间隙被折叠。 从此开始，为了提供一种使得可以以最小卷曲并且以低成本制造光纤的方法，本发明提出了一种石英玻璃圆筒机械地处理到其最终尺寸并具有至少100mm的外径 应用作护套管。 根据该方法获得的光纤的特征在于，在没有外力的作用下，其呈现至少6μm的曲率半径。

公开(公告)号：US06715317B1

公开(公告)日：2004-04-06

申请号：US08897713

申请日：1997-07-21

Applicant: Karsten Bräuer ,  Frank Gänsicke ,  Helmut Friedrich ,  Heinz Fabian

Inventor： Karsten Bräuer ,  Frank Gänsicke ,  Helmut Friedrich ,  Heinz Fabian

IPC: C03B23047

CPC classification number: C03B23/047 ,  C03B23/043

Abstract: A glass composition to be softened is fed to a heating zone and is shaped continuously into a cylindrical component in a deformation zone, and the cross-sectional geometry of the component is determined. A feed device, a heating device, and a take-off device are provided, and a glass composition is supplied continuously by the feed device to the heating device, where it is softened, the component being formed from the softened glass composition by means of the take-off device under formation of a deformation zone. To produce a component with only slight deviations from the desired cross-sectional geometry and to provide a flexible apparatus suitable for this purpose, the glass composition is locally heated or cooled in at least one deformation area, which extends over only a part of the circumference of the deformation zone, as a function of a determined deviation of the cross-sectional geometry from a nominal geometry. Heating or cooling are provided, which act locally on at least one deformation area, which extends over only a part of the circumference of the deformation zone.

Abstract translation: 将要软化的玻璃组合物供给到加热区，并且在变形区域中连续成形为圆柱形部件，并且确定部件的横截面几何形状。 提供进料装置，加热装置和取出装置，并且通过进料装置将玻璃组合物连续供给到加热装置，在该加热装置中软化，由软化玻璃组合物形成的部件借助于 起飞装置形成一个变形区。 为了产生仅与所需横截面几何形状稍微偏离的部件，并提供适合于此目的的柔性装置，玻璃组合物在至少一个变形区域中被局部加热或冷却，该变形区域仅在圆周的一部分上延伸 的变形区域，作为横截面几何形状与标称几何形状的确定偏差的函数。 提供加热或冷却，其在至少一个仅在变形区的圆周的一部分延伸的变形区域上起作用。

公开(公告)号：US06380110B1

公开(公告)日：2002-04-30

申请号：US09484113

申请日：2000-01-14

Applicant: Waltraud Werdecker ,  Heinz Fabian ,  Udo Gertig ,  Johann Leist ,  Rolf Göbel

Inventor： Waltraud Werdecker ,  Heinz Fabian ,  Udo Gertig ,  Johann Leist ,  Rolf Göbel

IPC: C03B2000

CPC classification number: C03C1/026 ,  C03B19/1065 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/24 ,  C03C2201/26 ,  C03C2201/32 ,  C03C2201/80 ,  C03C2203/10 ,  C03C2203/54

Abstract: In a known process for the production of opaque quartz glass a blank is formed from synthetic SiO2 granulate and is heated at a vitrification temperature to form a body of opaque quartz glass. In order to provide on this basis a process for the production of pure opaque quartz glass with a homogenous pore distribution, high density, high viscosity and a low tendency to devitrify, it is proposed according to the invention that the SiO2 granulate to be used is a SiO2 granulate (21; 31) composed of at least partially porous agglomerates of SiO2 primary particles, with a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.8 g/cm3. A SiO2 granulate (21; 31) suitable for the implementation of the process is distinguished in that it is formed from at least partially porous agglomerates of SiO2 primary particles and in that it has a specific BET surface ranging from 1.5 m2/g to 40 m2/g and an apparent density of at least 0.6 g/cm3.

Abstract translation: 在制造不透明石英玻璃的已知方法中，由合成SiO 2颗粒形成坯料，并在玻璃化温度下加热以形成不透明石英玻璃体。 为了在此基础上提供具有均匀孔分布，高密度，高粘度和低失透倾向的纯不透明石英玻璃的制备方法，根据本发明提出使用的SiO 2颗粒是 SiO 2颗粒（21; 31），其由SiO 2一次颗粒的至少部分多孔的附聚物组成，BET比表面积为1.5m 2 / g至40m 2 / g，表观密度为至少0.8g / cm 3。 适用于实施该方法的SiO 2颗粒（21; 31）的特征在于其由SiO 2一次颗粒的至少部分多孔的附聚物形成，并且其具有范围为1.5m 2 / g至40m 2的比BET表面积 / g，表观密度为0.6g / cm 3以上。

公开(公告)号：US5325230A

公开(公告)日：1994-06-28

申请号：US801813

申请日：1991-12-06

Applicant: Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

Inventor： Shigeru Yamagata ,  Kyoichi Inaki ,  Toshikatu Matsuya ,  Ralf Takke ,  Stephan Thomas ,  Heinz Fabian

IPC: C03B19/14 ,  C03B32/00 ,  C03C3/06 ,  C03C23/00 ,  G02B1/00 ,  G03F7/20 ,  C03C25/02

CPC classification number: G03F7/70958 ,  C03B19/1423 ,  C03B19/1453 ,  C03B32/00 ,  C03C23/007 ,  C03C3/06 ,  G02B1/00 ,  G03F7/70241 ,  C03B2201/07 ,  C03B2201/20 ,  C03B2201/21 ,  C03B2201/23 ,  C03B2207/06 ,  C03B2207/08 ,  C03B2207/12 ,  C03B2207/14 ,  C03B2207/20 ,  C03B2207/32 ,  C03B2207/36 ,  C03B2207/42 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2203/40 ,  C03C2203/54 ,  Y02P40/57 ,  Y10S65/90

Abstract: The invention relates to lenses, prisms or other optical members which are subjected to high-power ultraviolet light having a wavelength of about 360 nm or less, or ionizing radiation, particularly optical members for use in laser exposure apparatus for lithography, and to blanks for such optical members. The homogeneity of the refractive index distribution and the resistance to optical deterioration when the optical members are exposed for a long period of time to short wavelength ultraviolet light from a laser beam are improved. The optical members are made of high-purity synthetic silica glass material containing at least about 50 wt. ppm of OH groups, and are doped with hydrogen. The refractive index distribution caused by the fictive temperature distribution during heat treatment in the process of producing high-purity silica glass blanks for optical members in accordance with the present invention is offset by the combined refractive index distribution determined by the OH group concentration distribution or by the OH group concentration distribution and the Cl concentration distribution in the glass.

Abstract translation: 本发明涉及经受大约360nm或更小的波长的大功率紫外光的透镜，棱镜或其它光学构件，或者电离辐射，特别是用于光刻的激光曝光装置的光学构件，以及用于 这种光学构件。 当光学元件长时间暴露于来自激光束的短波长紫外光时，折射率分布的均匀性和光学劣化的抵抗性得到改善。 光学构件由含有至少约50重量％的高纯度合成石英玻璃材料制成。 ppm的OH基团，并掺杂氢气。 在根据本发明的用于制造用于光学部件的高纯度二氧化硅玻璃毛坯的过程中由热处理期间的假想温度分布引起的折射率分布由由OH基浓度分布或由OH基浓度分布确定的组合折射率分布或由 玻璃中的OH基浓度分布和Cl浓度分布。

公开(公告)号：US5315685A

公开(公告)日：1994-05-24

申请号：US898439

申请日：1992-06-15

Applicant: Heinz Fabian ,  Stephan Thomas

Inventor： Heinz Fabian ,  Stephan Thomas

IPC: A61B18/22 ,  C03C3/06 ,  C03C4/00 ,  G02B6/00 ,  G02B6/122 ,  G02B6/42 ,  G02B5/172

CPC classification number: C03C3/06 ,  A61B18/22 ,  C03C4/0085 ,  G02B6/122 ,  G02B6/4296 ,  C03B2201/07 ,  C03B2201/12 ,  C03B2201/23 ,  C03B2207/36 ,  C03C2201/23

Abstract: A component for the transmission of light of high energy density with a wavelength between 250 nm and 400 nm is made of synthetic, high-purity fused vitreous silica having a hydroxyl ion content in the range between 50 ppm and 1200 ppm and an under-stoichiometric content of oxygen for the achievement of a minimal transmission variation in the transmission of the light.

Abstract translation: 用于透射波长在250nm和400nm之间的高能量密度的光的组分由具有在50ppm和1200ppm之间的羟基离子含量和低于化学计量的合成的高纯度熔融玻璃石二氧化硅制成 用于实现光的透射中的最小透射变化的氧气含量。