公开(公告)号：US06937114B2

公开(公告)日：2005-08-30

申请号：US10469482

申请日：2002-12-25

申请人： Mitsuhiro Furukawa ,  Kiyoharu Yamashita ,  Hiroshi Kurotake ,  Hiroyoshi Sekiguchi

发明人： Mitsuhiro Furukawa ,  Kiyoharu Yamashita ,  Hiroshi Kurotake ,  Hiroyoshi Sekiguchi

IPC分类号： H03H9/02 ,  H03H9/10 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64

CPC分类号： H03H9/14541 ,  H03H9/02661

摘要： A surface acoustic wave device includes a piezoelectric substrate and an electrode provided on the substrate. The electrode includes a first metal layer provided on the piezoelectric substrate and having a trapezoid shape in the cross section and a second metal layer provided over the piezoelectric substrate at the same position as the first metal layer over the piezoelectric substrate. By controlling the shape of side surfaces of the electrode, the surface acoustic wave device hardly vary in a propagation frequency.

摘要翻译： 表面声波装置包括压电基板和设置在基板上的电极。 电极包括设置在压电基板上的第一金属层，并且在压电基板上与第一金属层相同的位置处设置在压电基板上方的第二金属层。 通过控制电极侧面的形状，表面声波装置在传播频率上几乎不变化。

公开(公告)号：US08471433B2

公开(公告)日：2013-06-25

申请号：US12903326

申请日：2010-10-13

申请人： Toru Yamaji ,  Tetsuhiro Korechika ,  Koji Kawakita ,  Eiji Kawamoto ,  Mitsuhiro Furukawa ,  Kozo Murakami

发明人： Toru Yamaji ,  Tetsuhiro Korechika ,  Koji Kawakita ,  Eiji Kawamoto ,  Mitsuhiro Furukawa ,  Kozo Murakami

IPC分类号： H03H9/02 ,  H03H9/05

CPC分类号： H03H9/132 ,  H03H9/059 ,  H03H9/1092

摘要： An elastic wave device has the following elements: a piezoelectric substrate; an inter-digital transducer (IDT) electrode disposed on the piezoelectric substrate; internal electrodes disposed above the piezoelectric substrate and electrically connected to the IDT electrode; side walls disposed above the internal electrodes surrounding the IDT electrode; a cover disposed above the side walls so as to cover a space above the IDT electrode; an electrode base layer disposed on the internal electrodes outside the side walls; and connection electrodes disposed on the electrode base layer. Each connection electrode has a first connection electrode disposed on the electrode base layer, and a second connection electrode disposed on the first connection electrode. The horizontal sectional shape of the second connection electrode is non-circular.

摘要翻译： 弹性波器件具有以下元件：压电基片; 配置在所述压电基板上的数字式换能器（IDT）电极; 内部电极设置在压电基板上并电连接到IDT电极; 设置在围绕IDT电极的内部电极上方的侧壁; 设置在所述侧壁上方以覆盖所述IDT电极上方的空间的盖; 设置在侧壁外侧的内部电极上的电极基层; 以及设置在电极基底层上的连接电极。 每个连接电极具有设置在电极基底层上的第一连接电极和设置在第一连接电极上的第二连接电极。 第二连接电极的水平截面形状是非圆形的。

公开(公告)号：US07633213B2

公开(公告)日：2009-12-15

申请号：US11415076

申请日：2006-05-02

申请人： Ryouichi Takayama ,  Tetsuhiro Korechika ,  Koji Nomura ,  Mitsuhiro Furukawa

发明人： Ryouichi Takayama ,  Tetsuhiro Korechika ,  Koji Nomura ,  Mitsuhiro Furukawa

IPC分类号： H01L41/08

CPC分类号： H01H57/00 ,  H01H2057/006 ,  H01L41/094 ,  H02N1/006

摘要： An actuator includes a base, an arm having an elastic property and supported by the base, electrostatic-driving electrodes provided on the base and the arm, respectively, and a piezoelectric-driving layer. The piezoelectric-driving layer includes a first electrode layer on the arm, a piezoelectric layer on the first electrode layer, and a second electrode layer on the piezoelectric layer. This actuator can be driven quickly with a low voltage.

摘要翻译： 致动器包括基座，具有弹性的臂并由基座支撑，分别设置在基座和臂上的静电驱动电极和压电驱动层。 压电驱动层包括臂上的第一电极层，第一电极层上的压电层和压电层上的第二电极层。 该致动器可以以低电压快速驱动。

公开(公告)号：US06951047B2

公开(公告)日：2005-10-04

申请号：US10629633

申请日：2003-07-30

申请人： Muneko Tomioka ,  Kiyoharu Yamashita ,  Mitsuhiro Furukawa

发明人： Muneko Tomioka ,  Kiyoharu Yamashita ,  Mitsuhiro Furukawa

IPC分类号： H03H3/08 ,  H03H9/02 ,  H03H9/145 ,  H03H9/25 ,  H04R17/00 ,  H01L41/04 ,  H01L41/08 ,  H01L41/18 ,  H02N2/00

CPC分类号： H03H9/02992 ,  H03H3/08 ,  H03H9/02921 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/49128 ,  Y10T29/49144 ,  Y10T29/49156 ,  Y10T29/49794 ,  Y10T29/49798

摘要： A SAW element of the present invention includes a plurality of inter-digital transducer (IDT) electrodes on a piezoelectric substrate, grating reflector electrodes disposed on the sides of the IDT electrodes, and a plurality of pad electrodes led from the IDT electrodes and the grating reflector electrodes. A plurality of the pad electrodes includes isolated pad electrodes not directly opposed to the outer periphery of the SAW element, and adjacent pad electrodes directly opposed to the outer periphery thereof A connecting electrode between the isolated pad electrode and the adjacent pad electrode is removed by etching at least before dicing in order to prevent discharge from occurring due to pyroelectricity, and to prevent the electrodes from being damaged.

摘要翻译： 本发明的SAW元件包括在压电基板上的多个数字间换能器（IDT）电极，设置在IDT电极的侧面的光栅反射器电极和从IDT电极和光栅引出的多个焊盘电极 反射器电极。 多个焊盘电极包括不直接与SAW元件的外周直接相对的隔离焊盘电极和与其外周直接相对的相邻焊盘电极。隔离焊盘电极和相邻焊盘电极之间的连接电极通过蚀刻去除 至少在切割之前为了防止由于热电从而发生放电，并且防止电极被损坏。