Silane composition, silicon film forming method and solar cell production method
    25.
    发明授权
    Silane composition, silicon film forming method and solar cell production method 失效
    硅烷组成,硅膜形成方法和太阳能电池的制备方法

    公开(公告)号:US07067069B2

    公开(公告)日:2006-06-27

    申请号:US10216790

    申请日:2002-08-13

    IPC分类号: C23C18/12 H01L31/028

    摘要: A silane composition for preparing a semiconductor thin films of a solar cell is disclosed. The silane composition contains a polysilane compound represented by the formula SinRm (n is an integer of 3 or more, m is an integer of n to (2n+2) and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more), and at least one silane compound selected from cyclopentasilane, cyclohexasilane and silylcyclopentasilane.

    摘要翻译: 公开了一种用于制备太阳能电池的半导体薄膜的硅烷组合物。 硅烷组合物含有下式表示的聚硅烷化合物(n为3以上的整数,m为n〜(2n + 2)的整数 )和m个R各自独立地为氢原子,烷基,苯基或卤素原子,条件是当全部m个R为氢原子且m = 2n时,n为7以上的整数 )和至少一种选自环戊硅烷,环己硅烷和甲硅烷基环戊硅烷的硅烷化合物。

    Silane composition, silicon film forming method and solar cell production method
    29.
    发明授权
    Silane composition, silicon film forming method and solar cell production method 失效
    硅烷组成,硅膜形成方法和太阳能电池的制备方法

    公开(公告)号:US07173180B2

    公开(公告)日:2007-02-06

    申请号:US11404921

    申请日:2006-04-17

    IPC分类号: H01L31/0256

    摘要: A silane composition for preparing a semiconductor thin films of a solar cell is disclosed. The silane composition contains a polysilane compound represented by the formula SinRm (n is an integer of 3 or more, m is an integer of n to (2n+2) and an m number of R's are each independently a hydrogen atom, alkyl group, phenyl group or halogen atom, with the proviso that when all the m number of R's are hydrogen atoms and m=2n, n is an integer of 7 or more), and at least one silane compound selected from cyclopentasilane, cyclohexasilane and silylcyclopentasilane.

    摘要翻译: 公开了一种用于制备太阳能电池半导体薄膜的硅烷组合物。 硅烷组合物含有下式表示的聚硅烷化合物(n为3以上的整数,m为n〜(2n + 2)的整数 )和m个R各自独立地为氢原子,烷基,苯基或卤素原子,条件是当全部m个R为氢原子且m = 2n时,n为7以上的整数 )和至少一种选自环戊硅烷,环己硅烷和甲硅烷基环戊硅烷的硅烷化合物。