-
公开(公告)号：US20180108567A1
公开(公告)日：2018-04-19
申请号：US15845358
申请日：2017-12-18
Applicant: Infineon Technologies AG
Inventor： Stefan Barzen
IPC: H01L21/768 , H01L21/24 , H01L23/48
CPC classification number: H01L21/76898 , H01L21/24 , H01L21/76838 , H01L23/481
Abstract: A method for forming a semiconductor device comprises forming an insulation trench structure comprising insulation material extending into the semiconductor substrate from a surface of the semiconductor substrate. The insulation trench structure laterally surrounds a portion of the semiconductor substrate. The method further comprises modifying the laterally surrounded portion of the semiconductor substrate to form a vertical electrically conductive structure comprising an alloy material. The alloy material is an alloy of the semiconductor substrate material and at least one metal.
-
公开(公告)号：US09668056B2
公开(公告)日：2017-05-30
申请号：US13975954
申请日：2013-08-26
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Stefan Barzen , Marc Fueldner
CPC classification number: H04R19/04 , H04R7/00 , H04R19/005 , H04R31/00 , H04R31/003 , H04R31/006 , Y10T29/49005
Abstract: A sound transducer structure includes a membrane, a counter electrode, and a plurality of elevations. The membrane includes a first main surface, made of a membrane material, in a sound transducing region and an edge region of the membrane. The counter electrode is made of counter electrode material, and includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. The plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume.
-
公开(公告)号：US09628886B2
公开(公告)日：2017-04-18
申请号：US14275337
申请日：2014-05-12
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Stefan Barzen
CPC classification number: H04R31/003 , B81B3/0021 , B81B3/0086 , B81B2201/0221 , B81B2201/0257 , B81B2203/0127 , B81B2203/04 , B81C1/00158 , B81C2201/013 , H04R1/08 , H04R19/005 , H04R31/006 , H04R2201/003
Abstract: A MEMS device includes a backplate electrode and a membrane disposed spaced apart from the backplate electrode. The membrane includes a displaceable portion and a fixed portion. The backplate electrode and the membrane are arranged such that an overlapping area of the fixed portion of the membrane with the backplate electrode is less than maximum overlapping.
-
公开(公告)号：US20170041716A1
公开(公告)日：2017-02-09
申请号：US14818007
申请日：2015-08-04
Applicant: INFINEON TECHNOLOGIES AG
Inventor： Stefan Barzen
CPC classification number: H04R19/005 , H04R7/10 , H04R31/00 , H04R2307/025 , H04R2307/027
Abstract: According to an embodiment, a MEMS transducer includes a stator, a rotor spaced apart from the stator, and a multi-electrode structure including electrodes with different polarities. The multi-electrode structure is formed on one of the rotor and the stator and is configured to generate a repulsive electrostatic force between the stator and the rotor. Other embodiments include corresponding systems and apparatus, each configured to perform corresponding embodiment methods.
Abstract translation: 根据实施例，MEMS换能器包括定子，与定子间隔开的转子，以及包括具有不同极性的电极的多电极结构。 多电极结构形成在转子和定子中的一个上，并且构造成在定子和转子之间产生排斥静电力。 其他实施例包括相应的系统和装置，每个被配置为执行相应的实施方式。
-
公开(公告)号：US20170041708A1
公开(公告)日：2017-02-09
申请号：US14818836
申请日：2015-08-05
Applicant: Infineon Technologies AG
Inventor： Stefan Barzen
CPC classification number: H04R3/06 , H04R19/005 , H04R29/001 , H04R2201/003
Abstract: According to an embodiment, a method of operating a speaker with an acoustic pump includes generating a carrier signal having a first frequency by exciting the acoustic pump at the first frequency and generating an acoustic signal having a second frequency by adjusting the carrier signal. In such embodiments, the first frequency is outside an audible frequency range and the second frequency is inside the audible frequency range. Adjusting the carrier signal includes performing adjustments to the carrier signal at the second frequency. Other embodiments include corresponding systems and apparatus, each configured to perform corresponding embodiment methods.
Abstract translation: 根据一个实施例，一种用声泵操作扬声器的方法包括通过以第一频率激励声泵来产生具有第一频率的载波信号，并通过调节载波信号产生具有第二频率的声信号。 在这样的实施例中，第一频率在可听频率范围之外，第二频率在可听频率范围内。 调整载波信号包括以第二频率执行对载波信号的调整。 其他实施例包括相应的系统和装置，每个被配置为执行相应的实施方式。
-
Patent Agency Ranking
26.发明申请Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure 审中-公开用于制造声音传感器结构的声音传感器结构和方法公开(公告)号：US20170034634A1
公开(公告)日：2017-02-02
申请号：US15290877
申请日：2016-10-11
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Stefan Barzen , Marc Fueldner
CPC classification number: H04R19/04 , H04R7/00 , H04R19/005 , H04R31/00 , H04R31/003 , H04R31/006 , Y10T29/49005
Abstract: A sound transducer structure includes a membrane and a counter electrode. The membrane includes a first main surface in a sound transducing region made of a membrane material, and an edge region. The counter electrode includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. A plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume. The membrane and the counter electrode are arranged to provide a capacity therebetween. The membrane comprises a corrugation groove extending in the sound transducing region from the first main surface of the membrane into the free volume.
Abstract translation: 声换能器结构包括膜和对电极。 膜包括由膜材料制成的声音传导区域中的第一主表面和边缘区域。 对电极包括与膜的第一主表面相对的自由体积的一侧平行于膜的第一主表面布置的第二主表面。 多个高度在声音传播区域中从对置电极的第二主表面延伸到自由体积中。 膜和对电极被布置成在它们之间提供容量。 膜包括在声音传播区域中从膜的第一主表面延伸到自由体积的波纹沟槽。
-
27.发明申请Sound Transducer Structure and Method for Manufacturing a Sound Transducer Structure 审中-公开用于制造声音传感器结构的声音传感器结构和方法公开(公告)号：US20140079277A1
公开(公告)日：2014-03-20
申请号：US13975954
申请日：2013-08-26
Applicant: Infineon Technologies AG
Inventor： Alfons Dehe , Stefan Barzen , Marc Fueldner
CPC classification number: H04R19/04 , H04R7/00 , H04R19/005 , H04R31/00 , H04R31/003 , H04R31/006 , Y10T29/49005
Abstract: A sound transducer structure includes a membrane, a counter electrode, and a plurality of elevations. The membrane includes a first main surface, made of a membrane material, in a sound transducing region and an edge region of the membrane. The counter electrode is made of counter electrode material, and includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. The plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume.
Abstract translation: 声换能器结构包括膜，对电极和多个高度。 膜包括在膜传播区域和膜的边缘区域中的由膜材料制成的第一主表面。 对电极由反电极材料制成，并且包括与膜的第一主表面相对的自由体积的一侧平行于膜的第一主表面排列的第二主表面。 多个高度在声音传播区域中从对置电极的第二主表面延伸到自由体积。
-
公开(公告)号：US11668683B2
公开(公告)日：2023-06-06
申请号：US17199211
申请日：2021-03-11
Applicant: Infineon Technologies AG
Inventor： Christoph Glacer , Stefan Barzen , Matthias Reinwald
CPC classification number: G01N29/2418 , G01N25/00 , G01N29/02 , H05B3/148 , H05B3/283 , G01N2291/021 , G01N2291/022 , G02B5/008 , H05B2203/032
Abstract: A thermal emitter includes a freestanding membrane supported by a substrate, wherein the freestanding membrane includes in a lateral extension a center section, a conductive intermediate section and a border section, wherein the conductive intermediate section laterally surrounds the center section and is electrically isolated from the center section, the conductive intermediate section including a conductive semiconductor material that is encapsulated in an insulating material, wherein the border section at least partially surrounds the intermediate section and is electrically isolated from the conductive intermediate section, and wherein a perforation is formed through the border section.
-
公开(公告)号：US11053117B2
公开(公告)日：2021-07-06
申请号：US16821145
申请日：2020-03-17
Applicant: Infineon Technologies AG
Inventor： Marc Fueldner , Stefan Barzen , Alfons Dehe , Gunar Lorenz
Abstract: In accordance with one exemplary embodiment, a production method for a double-membrane MEMS component comprises the following steps: providing a layer arrangement on a carrier substrate, wherein the layer arrangement has a first and second membrane structure spaced apart from one another and a counterelectrode structure arranged therebetween, wherein a sacrificial material is arranged in an intermediate region between the counterelectrode structure and the first and second membrane structures respectively spaced apart therefrom, and wherein the first membrane structure has an opening structure to the intermediate region with the sacrificial material and partly removing the sacrificial material from the intermediate region in order to obtain a mechanical connection structure comprising the sacrificial material between the first and second membrane structures, which mechanical connection structure is mechanically coupled between the first and second membrane structures and is mechanically decoupled from the counterelectrode structure.
-
公开(公告)号：US11039248B2
公开(公告)日：2021-06-15
申请号：US16268122
申请日：2019-02-05
Applicant: Infineon Technologies AG
Inventor： Stefan Barzen
Abstract: According to an embodiment, a microspeaker includes an acoustic micropump structure configured to pump at a first frequency above an upper audible frequency limit. The acoustic micropump structure is further configured to generate an acoustic signal having a second frequency by adjusting the pumping. Adjusting the pumping includes adjusting a direction of pumping for the acoustic micropump structure according to the second frequency. Adjusting the direction of pumping includes changing a direction of flow of an elastic medium through the acoustic micropump structure from a first direction to a second direction. The second frequency is below the upper audible frequency limit.
-
-
-
-
-
-
-
-
-
Search Results
73
records
(took 0.019 seconds)
