Plasma deposition apparatus and method with controller
    21.
    发明授权
    Plasma deposition apparatus and method with controller 失效
    等离子体沉积设备及方法与控制器

    公开(公告)号:US06501082B1

    公开(公告)日:2002-12-31

    申请号:US09527562

    申请日:2000-03-16

    IPC分类号: G21K510

    摘要: A controlled plasma deposition system and method are provided including a vacuum vessel. An electron adding mass spectrometer is connected to a vacuum vessel for carrying out a gas treatment for a semi-conductor wafer. In the mass spectrometer, a gas in the vacuum vessel is incorporated, and electrons are added to the particles in the gas. Then the value of negative ions obtained by ionizing the particles, for example specific radicals, is measured. Once measured, the information is forwarded to a controller that may optimize the plasma deposition method.

    摘要翻译: 提供了包括真空容器的受控等离子体沉积系统和方法。 将电子加入质谱仪连接到用于对半导体晶片进行气体处理的真空容器。 在质谱仪中,并入真空容器中的气体,并将电子加到气体中的颗粒中。 然后测量通过电离粒子,例如特定基团获得的负离子的值。 一旦测量,信息被转发到可优化等离子体沉积方法的控制器。

    Substituted 2,4-diamino-1,3,5-triazines as herbicides
    23.
    发明授权
    Substituted 2,4-diamino-1,3,5-triazines as herbicides 失效
    取代的2,4-二氨基-1,3,5-三嗪作为除草剂

    公开(公告)号:US06399541B1

    公开(公告)日:2002-06-04

    申请号:US09381442

    申请日:1999-10-18

    IPC分类号: A01N4368

    CPC分类号: A01N43/68 C07D251/18

    摘要: The invention relates to novel substituted 2,4-diamino-1,3,5-triazines of the formula (I) in which R1 represents (in each case unsubstituted) phenyl or naphthyl R2 represents alkyl, R3 represents hydrogen, represents halogen or represents in each case optionally substituted alkyl, alkoxy, alkylthio, alkylsulphinyl or alkylsulphonyl, R4 represents hydrogen, represents halogen or represents optionally substituted alkyl, R5 represents hydrogen, represents halogen or represents optionally substituted alkyl, and R6 represents hydrogen or represents in each case optionally substituted alkyl, alkylcarbonyl or alkylsulphonyl, (but where the compound 2-amino-4-(1-phenyl-ethylamino)-6-trifluoromethyl-1,3,5-triazine is excluded), to processes for preparing the novel compounds and to their use as herbicides.

    摘要翻译: 本发明涉及式(I)的新的取代的2,4-二氨基-1,3,5-三嗪,其中R 1表示(在每种情况下未被取代的)苯基或萘基,R 2表示烷基,R 3表示氢,表示卤素,或各自表示 任选取代的烷基,烷氧基,烷硫基,烷基亚磺酰基或烷基磺酰基,R 4表示氢,表示卤素,或表示任选取代的烷基,R 5表示氢,表示卤素或表示任选取代的烷基,R 6表示氢或表示任意取代的烷基,烷基羰基 或烷基磺酰基(但不包括化合物2-氨基-4-(1-苯基 - 乙基氨基)-6-三氟甲基-1,3,5-三嗪)),制备新化合物的方法及其作为除草剂的用途 。

    Substituted 2,4-diamino-1,3,5-triazine as herbicide
    24.
    发明授权
    Substituted 2,4-diamino-1,3,5-triazine as herbicide 失效
    取代的2,4-二氨基-1,3,5-三嗪作为除草剂

    公开(公告)号:US06271178B1

    公开(公告)日:2001-08-07

    申请号:US09284089

    申请日:1999-04-07

    IPC分类号: C07D25152

    摘要: The invention relates to novel substituted 2,4-diamino-1,3,5-triazines of the formula (I) In which R1 represents hydrogen or optionally substitued alkyl, R2 represents formyl or represents in each case optionally substituted alkylcarbonyl, alkoxycarbonyl, alkylsulphonyl, arylcarbonyl or arylsulphonyl, R3 represents in each case optionally substituted alkyl or cycloalkyl, R4 represents hydrogen or alkyl, A represents oxygen or methylene, Ar represents in each case optionally substituted aryl or heterocyclyl, and z represents hydrogen, hydroxyl, cyano, nitrogen, halogen or represents in each case optionally substituted alkyl, alkoxy, alkylcarbonyl, alkoxycarbonyl, alkylthio, alkylsulphinyl, alkylsulphonyl, alkenyl or alkinyl, (except for three prior-art compounds), to processes and to novel intermediates for preparation of the novel compounds and to their use as herbicides.

    摘要翻译: 本发明涉及式(I)的新型取代的2,4-二氨基-1,3,5-三嗪其中R 1表示氢或任选取代的烷基,R 2表示甲酰基或在各自的情况下表示任选取代的烷基羰基,烷氧基羰基,烷基磺酰基, 芳基羰基或芳基磺酰基,R 3表示在任何情况下为任选取代的烷基或环烷基,R 4表示氢或烷基,A表示氧或亚甲基,Ar表示在各情况下为任选取代的芳基或杂环基,并且z表示氢,羟基,氰基,氮,卤素或 表示在各种情况下任选取代的烷基,烷氧基,烷基羰基,烷氧基羰基,烷硫基,烷基亚磺酰基,烷基磺酰基,烯基或炔基(除三种现有技术化合物之外),用于制备新化合物及其用途的方法和新型中间体 作为除草剂。

    Semiconductor device testing apparatus
    26.
    发明授权
    Semiconductor device testing apparatus 失效
    半导体器件测试仪器

    公开(公告)号:US6104204A

    公开(公告)日:2000-08-15

    申请号:US76665

    申请日:1998-05-12

    IPC分类号: G01R1/04 G01R31/26

    CPC分类号: G01R1/0458

    摘要: An IC tester is provided which is capable of preventing the temperature of an IC heated to a predetermined temperature from falling during the test. A box-like housing 70 constructed of a thermally insulating material is mounted on a performance board PB. An IC socket SK and a socket guide 35 are accommodated in a space bounded by the box-like housing 70 and the performance board PB. A through-aperture 71 is formed in the top wall of the housing 70 for passing an IC under test carried by a movable rod 60R of a Z-axis driver into and out of the interior of the housing 70. An opening/closing plate 72 is disposed over the housing 70 for movement in a horizontal direction. This plate 72 is adapted to close the through-aperture 71 of the housing 70 when the movable rod 60R is outside of the housing to thereby maintain the interior of the box-like 70 in an almost thermally insulated condition. In addition, a cover member 64 is disposed for closing the through-aperture 72A in the plate 72 when the IC under test is in contact with the IC socket to aid in maintaining the interior of the housing in a thermally insulated condition.

    摘要翻译: 提供一种IC测试器,其能够防止在测试期间加热到预定温度的IC的温度下降。 由隔热材料构成的盒状壳体70安装在执行板PB上。 IC插座SK和插座引导件35容纳在由盒状壳体70和执行板PB限定的空间中。 通孔71形成在壳体70的顶壁中,用于将被Z轴驱动器的可动杆60R承受的测试IC通入和移出壳体70的内部。开/关板72 设置在壳体70上以在水平方向上移动。 当可动杆60R位于壳体外部时,该板72适于封闭壳体70的通孔71,从而将盒状物70的内部保持在几乎绝热的状态。 此外,当被测试IC与IC插座接触以帮助将壳体的内部保持在绝热状态时,盖构件64被设置用于封闭板72中的通孔72A。