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公开(公告)号:US20180231702A1
公开(公告)日:2018-08-16
申请号:US15880404
申请日:2018-01-25
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Michael Anthony Klug , Pierre St. Hilaire , Mauro Melli , Christophe Peroz , Evgeni Poliakov
Abstract: Metasurfaces provide compact optical elements in head-mounted display systems to, e.g., incouple light into or outcouple light out of a waveguide. The metasurfaces may be formed by a plurality of repeating unit cells, each unit cell comprising two sets or more of nanobeams elongated in crossing directions: one or more first nanobeams elongated in a first direction and a plurality of second nanobeams elongated in a second direction. As seen in a top-down view, the first direction may be along a y-axis, and the second direction may be along an x-axis. The unit cells may have a periodicity in the range of 10 nm to 1 μm, including 10 nm to 500 nm or 300 nm to 500 nm. Advantageously, the metasurfaces provide diffraction of light with high diffraction angles and high diffraction efficiencies over a broad range of incident angles and for incident light with circular polarization.
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公开(公告)号:US20180217395A1
公开(公告)日:2018-08-02
申请号:US15879005
申请日:2018-01-24
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Michael Anthony Klug , Pierre St. Hilaire , Mauro Melli , Christophe Peroz , Evgeni Poliakov
CPC classification number: G02B27/4205 , G02B1/002 , G02B1/111 , G02B5/1847 , G02B27/0093 , G02B27/0172 , G02B27/4272 , G02B2027/014 , G02B2027/0174 , G02B2027/0178 , G02B2027/0185 , G02B2207/101
Abstract: Antireflection coatings for metasurfaces are described herein. In some embodiments, the metasurface may include a substrate, a plurality of nanostructures thereon, and an antireflection coating disposed over the nanostructures. The antireflection coating may be a transparent polymer, for example a photoresist layer, and may have a refractive index lower than the refractive index of the nanostructures and higher than the refractive index of the overlying medium (e.g., air). Advantageously, the antireflection coatings may reduce or eliminate ghost images in an augmented reality display in which the metasurface is incorporated.
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公开(公告)号:US20180095201A1
公开(公告)日:2018-04-05
申请号:US15723851
申请日:2017-10-03
Applicant: Magic Leap, Inc.
Inventor: Mauro Melli , Christophe Peroz
IPC: G02B5/18 , H01J37/317 , H01J37/305 , G02B27/42
CPC classification number: G02B5/1857 , G02B6/124 , G02B6/136 , G02B27/0172 , G02B27/4205 , G02B27/4272 , G02B2006/12188 , G02B2027/0125 , H01J37/3056 , H01J37/3171 , H01J2237/31708 , H01J2237/31711
Abstract: A method of fabricating non-uniform gratings includes implanting different densities of ions into corresponding areas of a substrate, patterning, e.g., by lithography, a resist layer on the substrate, etching the substrate with the patterned resist layer, and then removing the resist layer from the substrate, leaving the substrate with at least one grating having non-uniform characteristics associated with the different densities of ions implanted in the areas. The method can further include using the substrate having the grating as a mold to fabricate a corresponding grating having corresponding non-uniform characteristics, e.g., by nanoimprint lithography.
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公开(公告)号:US20170322418A1
公开(公告)日:2017-11-09
申请号:US15588350
申请日:2017-05-05
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Mauro Melli , Pierre St. Hilaire , Christophe Peroz , Evgeni Poliakov
Abstract: An optical system comprises an optically transmissive substrate comprising a metasurface which comprises a grating comprising a plurality of unit cells. Each unit cell comprises a laterally-elongated first nanobeam having a first width; and a laterally-elongated second nanobeam spaced apart from the first nanobeam by a gap, the second nanobeam having a second width larger than the first width. A pitch of the unit cells is 10 nm to 1 μm. The heights of the first and the second nanobeams are: 10 nm to 450 nm where a refractive index of the substrate is more than 3.3; and 10 nm to 1 μm where the refractive index is 3.3 or less.
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公开(公告)号:US20240273839A1
公开(公告)日:2024-08-15
申请号:US18616981
申请日:2024-03-26
Applicant: Magic Leap, Inc.
Inventor: Melanie Maputol WEST , Christophe Peroz , Mauro Melli
CPC classification number: G06T19/006 , B29D11/00 , G02B5/1814 , G02B6/24 , G02B27/0103 , G02B27/0172 , G02B27/4205 , G06F3/16 , G06T7/50 , G02B2027/0109 , G02B2027/0123 , G02B2027/014 , G02B2027/0178
Abstract: The present disclosure relates to display systems and, more particularly, to augmented reality display systems. In one aspect, a method of fabricating an optical element includes providing a substrate having a first refractive index and transparent in the visible spectrum. The method additionally includes forming on the substrate periodically repeating polymer structures. The method further includes exposing the substrate to a metal precursor followed by an oxidizing precursor. Exposing the substrate is performed under a pressure and at a temperature such that an inorganic material comprising the metal of the metal precursor is incorporated into the periodically repeating polymer structures, thereby forming a pattern of periodically repeating optical structures configured to diffract visible light. The optical structures have a second refractive index greater than the first refractive index.
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公开(公告)号:US20230417980A1
公开(公告)日:2023-12-28
申请号:US18464732
申请日:2023-09-11
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Mauro Melli , Pierre St. Hilaire , Christophe Peroz , Evgeni Poliakov
CPC classification number: G02B6/0076 , G02B6/0013 , G02B6/00 , G02B6/29316 , G02B27/0172 , G02B6/0026 , G02B6/0031 , G02B6/005 , G02B6/0065 , G02B6/1226
Abstract: A display system comprises a waveguide having light incoupling or light outcoupling optical elements formed of a metasurface. The metasurface is a multilevel (e.g., bi-level) structure having a first level defined by spaced apart protrusions formed of a first optically transmissive material and a second optically transmissive material between the protrusions. The metasurface also includes a second level formed by the second optically transmissive material. The protrusions on the first level may be patterned by nanoimprinting the first optically transmissive material, and the second optically transmissive material may be deposited over and between the patterned protrusions. The widths of the protrusions and the spacing between the protrusions may be selected to diffract light, and a pitch of the protrusions may be 10-600 nm.
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公开(公告)号:US20230273450A1
公开(公告)日:2023-08-31
申请号:US18311097
申请日:2023-05-02
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Michael Anthony Klug , Pierre St. Hilaire , Mauro Melli , Christophe Peroz , Evgeni Poliakov
CPC classification number: G02B27/4205 , G02B1/002 , G02B27/4272 , G02B27/0093 , G02B1/111 , G02B5/1847 , G02B27/0172 , G02B2027/0174 , G02B2027/0185 , G02B2027/014 , G02B2027/0178 , G02B2207/101
Abstract: Antireflection coatings for metasurfaces are described herein. In some embodiments, the metasurface may include a substrate, a plurality of nanostructures thereon, and an antireflection coating disposed over the nanostructures. The antireflection coating may be a transparent polymer, for example a photoresist layer, and may have a refractive index lower than the refractive index of the nanostructures and higher than the refractive index of the overlying medium (e.g., air). Advantageously, the antireflection coatings may reduce or eliminate ghost images in an augmented reality display in which the metasurface is incorporated.
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公开(公告)号:US11664194B2
公开(公告)日:2023-05-30
申请号:US17183090
申请日:2021-02-23
Applicant: Magic Leap, Inc.
Inventor: Victor Kai Liu , Mauro Melli
IPC: H01J37/317 , H01J37/302
CPC classification number: H01J37/3174 , H01J37/3026
Abstract: A Procedural EBL system implements a user-provided oracle function (e.g., associated with a specific pattern) to generate control instructions for electron beam drive electronics in an on-demand basis. A control system may invoke the oracle function to query the pattern at individual point locations (e.g., individual x,y locations), and/or it may query the pattern over an area corresponding to a current field being addressed by the beam and stage positioner, for example. This Procedural EBL configuration manages control and pattern generation so that the low-level drive electronics and beam column may remain unchanged, allowing it to leverage existing EBL technologies.
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公开(公告)号:US20220283438A1
公开(公告)日:2022-09-08
申请号:US17749838
申请日:2022-05-20
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Mauro Melli , Pierre St. Hilaire , Christophe Peroz , Evgeni Poliakov
IPC: G02B27/01 , H04N13/344 , G02B5/30 , H04N13/349 , G02B30/35
Abstract: An optical system comprises an optically transmissive substrate comprising a metasurface which comprises a grating comprising a plurality of unit cells. Each unit cell comprises a laterally-elongated first nanobeam having a first width; and a laterally-elongated second nanobeam spaced apart from the first nanobeam by a gap, the second nanobeam having a second width larger than the first width. A pitch of the unit cells is 10 nm to 1 μm. The heights of the first and the second nanobeams are: 10 nm to 450 nm where a refractive index of the substrate is more than 3.3; and 10 nm to 1 μm where the refractive index is 3.3 or less.
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公开(公告)号:US11231544B2
公开(公告)日:2022-01-25
申请号:US15342033
申请日:2016-11-02
Applicant: Magic Leap, Inc.
Inventor: Dianmin Lin , Mauro Melli , Pierre St. Hilaire , Christophe Peroz , Evgeni Poliakov
Abstract: A display system comprises a waveguide having light incoupling or light outcoupling optical elements formed of a metasurface. The metasurface is a multilevel (e.g., bi-level) structure having a first level defined by spaced apart protrusions formed of a first optically transmissive material and a second optically transmissive material between the protrusions. The metasurface also includes a second level formed by the second optically transmissive material. The protrusions on the first level may be patterned by nanoimprinting the first optically transmissive material, and the second optically transmissive material may be deposited over and between the patterned protrusions. The widths of the protrusions and the spacing between the protrusions may be selected to diffract light, and a pitch of the protrusions may be 10-600 nm.
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