公开(公告)号：US11076477B2

公开(公告)日：2021-07-27

申请号：US16115692

申请日：2018-08-29

Applicant: MKS Instruments, Inc.

Inventor： Ky Luu ,  Aaron T. Radomski ,  Dave Coffta

IPC: H01L23/40 ,  H05K1/02 ,  H01R4/02 ,  H01J37/32

Abstract: A clamp configured to be coupled to a printed circuit board to cool and compress one or more electrical connections subject to repeated power and thermal cycling. A first conductive column of the clamp is configured to compress a first electrical connection between a first power device lead and a first printed circuit board trace of the printed circuit board, and draw thermal energy away from the first power device lead. The first conductive column extends from a load spreading plate. The load spreading plate is an insulator that electrically isolates a fastener extending therefrom from the first conductive column. The fastener is configured to cooperate with the circuit board to connect the clamp to the circuit board, compress the load spreading plate against the first conductive column to compress the first electrical connection, and connect the clamp to ground.

公开(公告)号：US10930470B2

公开(公告)日：2021-02-23

申请号：US16710412

申请日：2019-12-11

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. Radomski ,  Ky Luu ,  Larry J. Fisk, II ,  Ross Reinhardt ,  Matthew G. Harrington ,  Amish Rughoonundon ,  Jesse N. Klein ,  Aaron M. Burry

IPC: H05B33/00 ,  H01J37/32 ,  H01L21/3065 ,  H05H1/46

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

公开(公告)号：US10546724B2

公开(公告)日：2020-01-28

申请号：US15974947

申请日：2018-05-09

Applicant: MKS Instruments, Inc.

Inventor： Aaron T. Radomski ,  Ky Luu ,  Larry J. Fisk, II ,  Ross Reinhardt ,  Matthew G. Harrington ,  Amish Rughoonundon ,  Jesse N. Klein ,  Aaron M. Burry

IPC: H05B33/00 ,  H01J37/32 ,  H01L21/3065 ,  H05H1/46

Abstract: A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load.

公开(公告)号：US10229816B2

公开(公告)日：2019-03-12

申请号：US15162960

申请日：2016-05-24

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Dennis M Brown ,  Aaron T. Radomski ,  Mariusz Oldziej ,  Yogendra K. Chawla ,  Daniel J. Lincoln

IPC: H01J37/32 ,  H03J7/08 ,  H03H11/28 ,  H05K7/20 ,  H03F1/02 ,  H03F1/32 ,  H03F1/56 ,  H03F3/189 ,  H03F3/217

Abstract: An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.

公开(公告)号：US20170345620A1

公开(公告)日：2017-11-30

申请号：US15162960

申请日：2016-05-24

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Dennis M. Brown ,  Aaron T. Radomski ,  Mariusz Oldziej ,  Yogendra K. Chawla ,  Daniel J. Lincoln

IPC: H01J37/32 ,  H03J7/08 ,  H03H11/28 ,  H05K7/20

CPC classification number: H01J37/32183 ,  H01J2237/334 ,  H03F1/0233 ,  H03F1/3223 ,  H03F1/56 ,  H03F3/189 ,  H03F3/217 ,  H03F2200/451 ,  H03H11/28 ,  H03J7/08 ,  H05K7/20136

Abstract: An eVC including coarse and fine tuning networks. The coarse tuning network includes a circuit: receiving a RF input signal from a RF generator; outputting a RF output signal to a reference terminal or load; and receiving a DC bias voltage. The circuit is switched between first and second states. A capacitance of the circuit is based on the DC bias voltage while in the first state and is not based on the DC bias voltage while in the second state. The fine tuning network is connected in parallel with the coarse tuning network and includes a varactor. The varactor includes: a first diode receiving the RF input signal; and a second diode connected in a back-to-back configuration with the first diode and outputting a RF output signal to the reference terminal or load. A capacitance of the varactor is based on a second received DC bias voltage.

公开(公告)号：US08736377B2

公开(公告)日：2014-05-27

申请号：US13663574

申请日：2012-10-30

Applicant: MKS Instruments, Inc.

Inventor： Amish Rughoonundon ,  Larry J. Fisk, II ,  Aaron T. Radomski

IPC: H03F3/04

CPC classification number: H03K4/026 ,  H03K5/00006

Abstract: A radio frequency (RF) generation module includes a power control module that receives first and second desired amplitudes of an output of the RF generation module in first and second respective states, and that outputs, based on the first and second desired amplitudes, input power setpoints corresponding to a transition from the first state to the second state. A frequency control module receives the input power setpoints and outputs frequency setpoints corresponding to the input power setpoints. A pulse shaping module receives the input power setpoints, the frequency setpoints, and an indication of when to transition from the first state to the second state, and transitions the output of the RF generation module from the first state to the second state based on the input power setpoints, the frequency setpoints, and the indication.

Abstract translation: 射频（RF）生成模块包括功率控制模块，其在第一和第二相应状态下接收RF产生模块的输出的第一和第二期望幅度，并且基于第一和第二期望幅度输出输入功率 设定值对应于从第一状态到第二状态的转变。 频率控制模块接收输入功率设定点并输出与输入功率设定值对应的频率设定值。 脉冲整形模块接收输入功率设定点，频率设定点以及何时从第一状态转换到第二状态的指示，并且基于该第一状态将RF产生模块的输出从第一状态转换到第二状态 输入功率设定值，频率设定值和指示。