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公开(公告)号：US20100311203A1
公开(公告)日：2010-12-09
申请号：US12479139
申请日：2009-06-05
IPC分类号： H01L31/0216
CPC分类号： H01L31/1868 , H01L31/022425 , H01L31/072 , Y02E10/50 , Y02P70/521
摘要： Embodiments of the invention contemplate the formation of a high efficiency solar cell using a novel plasma oxidation process to form a passivation film stack on a surface of a solar cell substrate. In one embodiment, the methods include providing a substrate having a first type of doping atom on a back surface of the substrate and a second type of doping atom on a front surface of the substrate, plasma oxidizing the back surface of the substrate to form an oxidation layer thereon, and forming a silicon nitride layer on the oxidation layer.
摘要翻译： 本发明的实施例考虑使用新颖的等离子体氧化工艺形成高效太阳能电池，以在太阳能电池基板的表面上形成钝化膜堆叠。 在一个实施方案中，所述方法包括提供在衬底的背面上具有第一类型的掺杂原子的衬底和在衬底的前表面上的第二类型的掺杂原子，等离子体氧化衬底的背表面以形成 氧化层，并在氧化层上形成氮化硅层。
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公开(公告)号：US07838400B2
公开(公告)日：2010-11-23
申请号：US12175357
申请日：2008-07-17
申请人： Peter Borden
发明人： Peter Borden
CPC分类号： H01L31/02168 , Y02E10/50
摘要： A method of manufacturing a solar cell is provided. One surface of a semiconductor substrate is doped with a n-type dopant. The substrate is then subjected to a thermal oxidation process to form an oxide layer on one or both surfaces of the substrate. The thermal process also diffuses the dopant into the substrate, smoothing the concentration profile. The smoothed concentration gradient enables the oxide layer to act as a passivating layer. Anti-reflective coatings may be applied over the oxide layers, and a reflective layer may be applied on the surface opposite the doped surface to complete the solar cell.
摘要翻译： 提供一种制造太阳能电池的方法。 掺杂有n型掺杂剂的半导体衬底的一个表面。 然后对衬底进行热氧化处理以在衬底的一个或两个表面上形成氧化物层。 热处理也将掺杂剂扩散到衬底中，使浓度分布平滑。 平滑的浓度梯度使得氧化物层能够用作钝化层。 可以在氧化物层上施加抗反射涂层，并且可以在与掺杂表面相对的表面上施加反射层以完成太阳能电池。
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23.发明授权公开(公告)号：US07517709B1
公开(公告)日：2009-04-14
申请号：US11941253
申请日：2007-11-16
申请人： Peter Borden
发明人： Peter Borden
CPC分类号： H01L31/1804 , B23K26/0661 , B23K26/18 , B23K26/40 , B23K2101/40 , B23K2103/50 , H01L31/022425 , Y02E10/547 , Y02P70/521
摘要： A method for fabricating point contacts to the rear surface of a silicon solar cell by coating the rear surface with a masking layer and a laser absorptive layer and directing laser radiation to the rear surface to form openings therein after which doping material is applied through the openings and contacts are applied. The doping is preferably performed by plasma immersion ion implantation.
摘要翻译： 一种用于通过用掩模层和激光吸收层涂覆后表面并将激光辐射引导到后表面以在其中形成开口的方式来制造到硅太阳能电池的后表面的点接触，之后通过开口施加掺杂材料 并应用联系人。 掺杂优选通过等离子体浸没离子注入进行。
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24.发明申请公开(公告)号：US20070042390A1
公开(公告)日：2007-02-22
申请号：US11207351
申请日：2005-08-19
申请人： Peter Borden
发明人： Peter Borden
CPC分类号： G01N21/6428 , B82Y15/00 , G01N21/6456 , G03F7/70625
摘要： Critical Dimension (CD) of features on a semiconductor substrate may be indicated utilizing the site-specific binding properties of organic or biological molecules. In accordance with one embodiment of the present invention, a fluorescent tagged organic molecule is fabricated having a length corresponding to the desired CD. The semiconductor substrate is exposed to a solution containing the organic molecule. The solution is then removed and the structure analyzed for the presence of the fluorescent tag, indicating a feature having the desired CD. Fluorescent tagged biological molecules of known size such as peptides or proteins, or nucleic acids such as DNA or RNA, may also be employed for CD measurement. Alternatively, a CD marker molecule may be designed to exhibit preferential binding, such that it fails to bind to the substrate in instances of incomplete resist development or etching.
摘要翻译： 半导体衬底上的特征的临界尺寸（CD）可以利用有机或生物分子的位点特异性结合特性来表示。 根据本发明的一个实施方案，制造具有对应于期望CD的长度的荧光标记的有机分子。 将半导体衬底暴露于含有机分子的溶液中。 然后除去溶液并分析荧光标记的存在，指示具有所需CD的特征。 已知尺寸的荧光标记的生物分子，例如肽或蛋白质，或核酸如DNA或RNA，也可用于CD测量。 或者，可以设计CD标记分子以显示优先结合，使得在不完全的抗蚀剂显影或蚀刻的情况下，其不能结合到基底。
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公开(公告)号：US20050088188A1
公开(公告)日：2005-04-28
申请号：US10977380
申请日：2004-10-29
申请人： Peter Borden , Jiping Li
发明人： Peter Borden , Jiping Li
IPC分类号： G01N21/956 , G01R31/311 , H01L21/66 , G01R31/302
CPC分类号： G01R31/311 , G01N21/95607 , G01N21/95684 , H01L22/12
摘要： A structure having a number of traces passing through a region is evaluated by using a beam of electromagnetic radiation to illuminate the region, and generating an electrical signal that indicates an attribute of a portion (also called “reflected portion”) of the beam reflected from the region. The just-described acts of “illuminating” and “generating” are repeated in another region, followed by a comparison of the generated signals to identify variation of a property between the two regions. Such measurements can identify variations in material properties (or dimensions) between different regions in a single semiconductor wafer of the type used in fabrication of integrated circuit dice, or even between multiple such wafers. In one embodiment, the traces are each substantially parallel to and adjacent to the other, and the beam has wavelength greater than or equal to a pitch between at least two of the traces. In one implementation the beam is polarized, and can be used in several ways, including, e.g., orienting the beam so that the beam is polarized in a direction parallel to, perpendicular to, or at 45° to the traces. Energy polarized parallel to the traces is reflected by the traces, whereas energy polarized perpendicular to the traces passes between the traces and is reflected from underneath the traces. Measurements of the reflected light provide an indication of changes in properties of a wafer during a fabrication process.
摘要翻译： 通过使用电磁辐射束照射该区域来评估具有通过区域的迹线数量的结构，并且生成指示从所述区域反射的光束的部分（也称为“反射部分”）的属性的属性的电信号 该区域。 在另一区域重复刚才描述的“照明”和“产生”的动作，随后比较生成的信号以识别两个区域之间的属性的变化。 这种测量可以识别在用于制造集成电路晶片的类型的单个半导体晶片中，或甚至在多个这样的晶片之间的不同区域之间的材料性质（或尺寸）的变化。 在一个实施例中，迹线各自基本上平行于并且彼此相邻，并且光束具有大于或等于至少两个迹线之间的间距的波长。 在一个实施例中，光束是极化的，并且可以以多种方式使用，包括例如使光束定向，使得光束在平行于垂直于或垂直于或相对于迹线成45°的方向上极化。 平行于迹线的能量被迹线反射，而垂直于迹线偏振的能量在迹线之间通过，并从迹线下方反射。 反射光的测量提供了在制造过程中晶片的性质变化的指示。
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公开(公告)号：US20050088187A1
公开(公告)日：2005-04-28
申请号：US10976587
申请日：2004-10-29
申请人： Peter Borden , Regina Nijmeijer , Beverly Klemme
发明人： Peter Borden , Regina Nijmeijer , Beverly Klemme
IPC分类号： G01R31/303 , G01R31/302 , G01N21/00 , G01R31/26
CPC分类号： G01R31/303
摘要： A coefficient of a function that relates a measurement from a wafer to a parameter used in making the measurement (such as the power of a beam used in the measurement) is determined. The coefficient is used to evaluate the wafer (e.g. to accept or reject the wafer for further processing), and/or to control fabrication of another wafer. In one embodiment, the coefficient is used to control operation of a wafer processing unit (that may include, e.g. an ion implanter), or a heat treatment unit (such as a rapid thermal annealer).
摘要翻译： 确定将来自晶片的测量与用于进行测量的参数（诸如在测量中使用的光束的功率）相关联的功能的系数。 该系数用于评估晶片（例如，接受或拒绝晶片以进行进一步处理）和/或控制另一晶片的制造。 在一个实施例中，系数用于控制晶片处理单元（可包括例如离子注入机）或热处理单元（例如快速热退火炉）的操作。
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27.发明授权High sensitivity, large detection area particle sensor for vacuum applications 失效用于真空应用的高灵敏度，大检测面积颗粒传感器
公开(公告)号：US5266798A
公开(公告)日：1993-11-30
申请号：US742798
申请日：1991-08-08
申请人： Peter Borden , Mark Nokes , Maurits Kain , James Stolz
发明人： Peter Borden , Mark Nokes , Maurits Kain , James Stolz
CPC分类号： G01N21/53 , G01N15/0205
摘要： A particle sensor which employs the principle that a particle passing through an intense laser beam will scatter light to a photodetector which then generates a measurable signal is provided. The particle sensor uses prisms and a cylindrical lens to compress the laser beam to make it very thin along the axis of particle motion but very wide in the plane perpendicular to particle motion, thereby simultaneously providing high beam intensity for enhanced sensitivity and a large detection area. The optical components of the sensor are mounted on separate sections which allows the optical components to be separately aligned and changed so that the sensor may be easily adapted to various applications.
摘要翻译： 提供了一种粒子传感器，其采用通过强激光束的粒子将光散射到然后产生可测量信号的光电检测器的原理。 粒子传感器使用棱镜和柱面透镜来压缩激光束，使其沿着粒子运动的轴线非常薄，但垂直于粒子运动的平面非常宽，从而同时提供高光束强度，增强灵敏度和大的检测面积 。 传感器的光学部件安装在分开的部分上，这允许光学部件被单独对准和改变，使得传感器可以容易地适应于各种应用。
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公开(公告)号：US5157678A
公开(公告)日：1992-10-20
申请号：US725785
申请日：1991-07-03
申请人： Peter Borden
发明人： Peter Borden
CPC分类号： G01N21/53 , G01N15/0205 , G01N2201/0231
摘要： A housing for a laser based particle monitor comprising a pair of pipes for directing particle flow through a chamber. In one embodiment, elbows are disposed on the piping such that the interior of the chamber cannot be viewed from a point outside the housing.
摘要翻译： 一种用于激光粒子监测器的壳体，包括用于引导颗粒流过腔室的一对管道。 在一个实施例中，弯管被布置在管道上，使得不能从壳体外部的点观察室的内部。
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公开(公告)号：US5055698A
公开(公告)日：1991-10-08
申请号：US504155
申请日：1990-04-03
申请人： Peter Borden
发明人： Peter Borden
CPC分类号： G11B23/505 , G11B33/1446
摘要： A real-time particle sensor is provided which can monitor particles near the surface of a disk in a computer disk drive system and in the region between disks in a multiple disk stack. A laser and lens are housed in a compact cartridge which is mounted on an actuator arm of a disk. Photocells which are also mounted on the actuator arm detect light scattered by particles passing through the laser beam, and so generate an electrical signal used to count the detected particles. The sensor's small size allows a separate sensor to fit in each of the regions between adjacent disks in a stack of disks, or near the surface of a single disk.
摘要翻译： 提供了一种实时粒子传感器，可以监测计算机磁盘驱动器系统中磁盘表面附近的颗粒以及多磁盘堆叠中磁盘之间的区域。 激光和透镜容纳在安装在盘的致动器臂上的紧凑型盒中。 也安装在致动器臂上的光电池检测通过激光束的颗粒散射的光，因此产生用于对所检测到的颗粒进行计数的电信号。 传感器的小尺寸允许单独的传感器装配在一堆磁盘或靠近单个磁盘表面的相邻磁盘之间的每个区域中。
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公开(公告)号：US11212888B2
公开(公告)日：2021-12-28
申请号：US16840371
申请日：2020-04-04
申请人： Peter Borden , Michele Klein
发明人： Peter Borden , Michele Klein
摘要： A variable hue task lamp with novel hue selection component is disclosed herein. The color and intensity of a task lamp is adjusted using a wireless connection from a device such as a smart phone, tablet, or computing device based upon an optimization method using a sample text or scene. The user first optimizes hue by adjusting the background color of the sample text or picture on the device. The optimum hue is then communicated to the task light, which sets light emitting diode intensities to match the optimum choice. Presets further localize choices in color space, and a comparison to white verifies the benefits of the chosen hue.
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