公开(公告)号：US5433574A

公开(公告)日：1995-07-18

申请号：US364003

申请日：1994-12-27

申请人： Hitoshi Kawano ,  Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Atsushi Okuno ,  Mitsuhiro Hayashi ,  Akio Nakamura

发明人： Hitoshi Kawano ,  Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Atsushi Okuno ,  Mitsuhiro Hayashi ,  Akio Nakamura

IPC分类号： F24F7/06 ,  B01L1/04 ,  B01L5/00 ,  B65G49/00 ,  H01L21/677 ,  B65B1/04

CPC分类号： B01L5/00 ,  B01L1/04 ,  Y10S414/14

摘要： A gas purge unit for a portable closed container is defined by a purge box including an opening, and a container stand around the opening on which a closed container is set; a gas supplying inlet coupled to a gas supplying source, and a gas discharging outlet; and a lifting mechanism for closing the opening from inside of the purge box and controlling the locking and unlocking operations of a locking mechanism provided in the lid of the container.

摘要翻译： 用于便携式密闭容器的气体净化单元由包括开口的清洗箱和围绕设置有密闭容器的开口的容器支架限定; 连接到气体供应源的气体供给入口和气体排出口; 以及用于从清洗箱内部关闭开口并控制设置在容器的盖中的锁定机构的锁定和解锁操作的提升机构。

公开(公告)号：US5303482A

公开(公告)日：1994-04-19

申请号：US826954

申请日：1992-01-28

申请人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

发明人： Teppei Yamashita ,  Masanao Murata ,  Tsuyoshi Tanaka ,  Teruya Morita ,  Hitoshi Kawano ,  Atsushi Okuno ,  Masanori Tsuda ,  Mitsuhiro Hayashi ,  Hiromi Morita

IPC分类号： H01L21/677 ,  F26B21/06

CPC分类号： H01L21/67769 ,  Y10S414/14

摘要： A wafer keeping apparatus includes a closed wafer keeping space, and an arrangement for circulating an inert gas through a filter and then through the wafer keeping space. In one embodiment, several wafer keeping shelves are each provided within the space, and the inert gas is supplied through a respective filter to flow across each shelf. In another embodiment, a plurality of wafer keeping spaces are each accessible through a respective door which forms an airtight seal when it is closed, and respective filters are provided on opposite sides of the space, the inert gas being supplied to the space through one filter and exiting the space through the other filter. In a further embodiment, several of the wafer keeping spaces are provided at angularly and vertically spaced locations in a rotatable stocker body provided within a casing, and several vertically spaced doors are provided on the casing to provide access to respective wafer keeping spaces in the stocker body.

摘要翻译： 晶片保存装置包括封闭的晶片保持空间，以及用于使惰性气体通过过滤器然后通过晶片保持空间循环的装置。 在一个实施例中，在该空间内分别提供几个晶片保持架，并且惰性气体通过相应的过滤器供应流过每个搁架。 在另一个实施例中，多个晶片保持空间各自可通过相应的门接近，门在关闭时形成气密密封，并且各个过滤器设置在空间的相对侧上，惰性气体通过一个过滤器 并通过另一个过滤器离开空间。 在另一个实施例中，几个晶片保持空间设置在设置在壳体内的可转动的储带架主体中的角度和垂直间隔的位置处，并且几个垂直间隔的门设置在壳体上以提供对存储器中的相应晶片保持空间的访问 身体。

公开(公告)号：US4984091A

公开(公告)日：1991-01-08

申请号：US199741

申请日：1988-05-27

申请人： Masanao Murata

发明人： Masanao Murata

IPC分类号： H04N1/00 ,  H04N1/036 ,  H04N1/40

CPC分类号： H04N1/40037 ,  H04N1/00283 ,  H04N1/036 ,  H04N1/40031

摘要： In an imaging apparatus, the position of an image displayed on the display screen of a display device is stepwise shifted by a device for effecting stepwise time-shifting of the time of an input video signal or a synchronizing signal. The shifted image is focused or projected while the position of the shifted image on a sensitizing surface or a projection surface is being shifted by a position shifting circuit.

摘要翻译： 在成像设备中，显示在显示设备的显示屏幕上的图像的位置由用于逐步时间移位输入视频信号或同步信号的时间的设备逐步偏移。 当移动的图像在感光表面或投影表面上的位置被位置移动电路移位时，偏移的图像被聚焦或投影。

公开(公告)号：US4486694A

公开(公告)日：1984-12-04

申请号：US380254

申请日：1982-05-20

申请人： Toshitsugu Ohba ,  Masanao Murata

发明人： Toshitsugu Ohba ,  Masanao Murata

IPC分类号： G05D1/02 ,  G05D1/00

CPC分类号： G05D1/0265

摘要： A process for changing a running direction of an electromagnetically guided driverless vehicle is provided which process is applicable to the vehicles of both a single conduction wire guided type and a two conduction, wires guided type. The vehicle has right and left drive wheels and independent drive motors for the respective wheels. The drive motor is controlled by a motor speed control drive to which steering signals from a route sensors are supplied. The route sensor also delivers an on-route signal to a steering control device which produces a speed setting signal, a steering signal on-off command, and a forward/reverse command for the right/left drive wheels to supply them to the motor speed control device. The process for changing the running direction of the vehicle is characterized in the method of driving the right and left wheels independently with each other forward and reverse according to the turning direction. The vehicle turns round from an old route to a new route at a turning point, thus making a turning radius smaller than that of a conventional curve turning.

摘要翻译： 提供了一种用于改变电磁引导的无人驾驶车辆的行驶方向的过程，该方法适用于单导线引导型和双导线引导型的车辆。 车辆具有左右驱动轮和用于相应车轮的独立驱动马达。 驱动马达由马达速度控制驱动器控制，来自路线传感器的转向信号被提供给该驱动马达。 路线传感器还向转向控制装置传送路由信号，该转向控制装置产生速度设定信号，转向信号开 - 关指令以及右/左驱动轮的前向/后向指令，以将它们提供给电动机速度 控制装置 用于改变车辆行驶方向的处理的特征在于根据转动方向将左右车轮相互独立地向前和向后驱动的方法。 车辆在转弯点从旧路线转向新路线，从而使转弯半径小于传统曲线转弯的转弯半径。

公开(公告)号：US07917245B2

公开(公告)日：2011-03-29

申请号：US11887278

申请日：2006-03-27

申请人： Masanao Murata

发明人： Masanao Murata

IPC分类号： G05D1/02 ,  B23Q41/02 ,  B65G1/00 ,  G05B19/418

CPC分类号： H01L21/67294 ,  B65G2201/0297 ,  G06Q10/06 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67775 ,  H01L21/68707

摘要： Objects to be transported which are transported between at least one storage unit and a plurality of manufacturing apparatuses by a plurality of transport vehicles in accordance with a command of a controller are managed inexpensively and easily and with high reliability. An ID card 20 incorporating a wireless communication function is installed on all carriers 18, and an ID read/write unit 25 is installed in some transport vehicles 10. Further, a carrier ID is read or written with respect to the ID card 20 in accordance with a command of an MCS 4 connected to the ID read/write unit 25, so as to manage the carrier ID by a carrier ID management unit 4a.

摘要翻译： 通过控制器的命令，通过多个运输车辆在至少一个存储单元和多个制造装置之间运输的运输对象被廉价且容易且高可靠性地管理。 在所有载体18上安装了包含无线通信功能的ID卡20，并且ID读/写单元25安装在一些运输车辆10中。此外，根据ID卡20读取或写入相对于ID卡20的载体ID 连接到ID读/写单元25的MCS 4的命令，以便由载体ID管理单元4a管理载波ID。

公开(公告)号：US06884989B2

公开(公告)日：2005-04-26

申请号：US10225141

申请日：2002-08-22

申请人： Masanao Murata

发明人： Masanao Murata

IPC分类号： B61B13/06 ,  B61B13/00 ,  B66C15/04 ,  G01N9/04 ,  G06M7/00 ,  H01J40/14 ,  H01L21/00

CPC分类号： H01L21/67259

摘要： This invention has as an object thereof to provide an overhead-traveling carrying apparatus which is capable of inexpensively incorporating countermeasures for detecting the presence of an obstacle such as a human being or a carelessly placed object during the lowering of an object to be carried onto the load port of a semiconductor manufacturing device prior to the contact of the obstacle with the object to be carried, thereby avoiding such contact. A structure is adopted in which obstacle detecting sensors which scan the raising and lowering path between a carriage and the load port of each semiconductor manufacturing apparatus, and which detect the presence of obstacles, are provided on the carriage with attached hoist.

摘要翻译： 本发明的目的在于提供一种架空行进式运载装置，其能够廉价地结合对象物，以便在将待运送物体降低到对象物上时，检测出诸如人或障碍物等障碍物的存在 在障碍物与待携带物体接触之前，半导体制造装置的负载端口，从而避免这种接触。 采用这样的结构，其中，在具有附带的起重机的滑架上设置有扫描每个半导体制造装置的托架和负载端口之间的升降路径并且检测障碍物的存在的障碍物检测传感器。

公开(公告)号：US06592080B2

公开(公告)日：2003-07-15

申请号：US10224053

申请日：2002-08-20

申请人： Masanao Murata ,  Senzo Kyutoku ,  Hisashi Onishi

发明人： Masanao Murata ,  Senzo Kyutoku ,  Hisashi Onishi

IPC分类号： B61L2300

CPC分类号： B61L23/041 ,  B61L23/005

摘要： An object of the present invention is to improve the transportation efficiency of an automatic transport system for transporting an article. In order to attain the above object, the automatic transport system of the present invention comprises a front detecting device which detects an obstruction in a non-contact state in an area through which an automatic transport vehicle passes and a projection surface of said automatic transport vehicle, and when said front detecting device detects the obstruction in said area, the running speed of said automatic transport vehicle is reduced or said automatic transport vehicle is stopped.

公开(公告)号：US06427824B1

公开(公告)日：2002-08-06

申请号：US09446194

申请日：1999-12-17

申请人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

发明人： Masanao Murata ,  Teruya Morita ,  Hitoshi Kawano

IPC分类号： B65G3700

CPC分类号： B66C7/12 ,  B66C11/06 ,  B66C11/08 ,  Y10S414/14

摘要： An overhead conveyance device and an overhead conveyance vehicle that can convey a conveying object, while keeping it at a minimum distance from surrounding equipment when the overhead conveying vehicle turns around during conveyance of the conveying object. The overhead conveyance device (1) is so structured that even when a carriage part (6) of the overhead conveyance vehicle (5) enters a branching part (3) for allowing the carriage part to change in traveling direction and turns around, the conveying object (25) grasped by a hand (9) can be kept unchanged in direction.

摘要翻译： 一种架空输送装置和架空输送车辆，其能够在输送物体的输送期间在架空输送车辆转过时将输送物体输送到与周围设备的最小距离处。 架空输送装置（1）的结构使得即使当顶棚运输车辆（5）的托架部分（6）进入分支部分（3）以允许托架部分在行进方向上改变并转动时，输送 用手（9）抓住的物体（25）可以在方向上保持不变。

公开(公告)号：US06152669A

公开(公告)日：2000-11-28

申请号：US747113

申请日：1996-11-08

申请人： Teruya Morita ,  Masanao Murata ,  Hitoshi Kawano ,  Tsuyoshi Tanaka ,  Hiroyuki Oyobe ,  Toshiyuki Takaoka

发明人： Teruya Morita ,  Masanao Murata ,  Hitoshi Kawano ,  Tsuyoshi Tanaka ,  Hiroyuki Oyobe ,  Toshiyuki Takaoka

IPC分类号： B65D85/86 ,  H01L21/673 ,  H01L21/677 ,  B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67772 ,  Y10S414/139 ,  Y10S414/14

摘要： A mechanical interface apparatus which is capable of loading semiconductor wafers stored in a sealed container into a processing apparatus without adversely affecting the surfaces of the semiconductor wafers due to exposure to external air or dust. When a sealed container 100 is placed on top of a processing apparatus 200, latch mechanisms 201 are activated to engage with a flange 103, so as to affix the container body 101. Then, valves 3 and 5 are opened to perform a gas purge, after which a drive mechanism provided inside a lock operating mechanism 220 is operated in order to withdraw lock arms 111 from concave portions 103a, thereby unlocking the bottom lid 110. Then, wafer cassettes 106 inside the container are lowered to a predetermined position by means of an in-apparatus elevator mechanism 202, and the wafer cassettes are loaded into the processing apparatus 200 by a cassette loading mechanism.

摘要翻译： 一种机械接口装置，其能够将存储在密封容器中的半导体晶片装载到处理设备中，而不会由于暴露于外部空气或灰尘而不利地影响半导体晶片的表面。 当将密封容器100放置在处理装置200的顶部时，闩锁机构201被启动以与凸缘103接合，以便固定容器主体101.然后，打开阀3和5以进行气体吹扫， 之后，设置在锁定操作机构220内部的驱动机构，以将锁定臂111从凹部103a中撤出，从而解锁底盖110.然后，容器内部的晶片盒106通过 装置内电梯机构202，并且晶片盒通过盒装载机构装载到处理装置200中。

公开(公告)号：US6092678A

公开(公告)日：2000-07-25

申请号：US323833

申请日：1999-06-02

申请人： Hitoshi Kawano ,  Masanao Murata ,  Susumu Nakagawa ,  Motonori Inagaki ,  Toshiyuki Takaoka

发明人： Hitoshi Kawano ,  Masanao Murata ,  Susumu Nakagawa ,  Motonori Inagaki ,  Toshiyuki Takaoka

IPC分类号： B25J13/08 ,  B65G17/20 ,  B66C13/18 ,  B66C13/48

CPC分类号： H01L21/67733 ,  H01L21/67736 ,  H01L21/681

摘要： In an overhead hoist transfer having a moving carriage with a hand portion, which holds a load, elevatably suspended therefrom; and a means for teaching an appointed stop position on a placement base, on which said load is placed, to said moving carriage, LEDs 7a and 7b are installed at the hand portion 6, and a position detecting portion 12 consisting of a lens 12a and PSD 12b is installed at the placement base 53 side, in order to automatically and accurately enable a teaching of position correcting data in a short time without use of any manpower. Further, a teaching portion is installed, which detects a deviation between the present stop position and the above appointed stop position on the basis of the relative position of the hand portion 6 with respect to the placement base, which is obtained by the position detecting portion 12, and carries out a teaching to the moving carriage by, for example, radio, whereby it is not necessary for an operator to carry out a teaching by actually moving the hand portion, wherein it is possible to accurately carry out a teaching of position correcting data in a short time.

摘要翻译： 在具有具有手部的移动的支架的顶架式起重机转移中，其保持负载，可升降地悬挂在其上; 以及用于在所述移动托架上放置所述载荷的放置基座上指定指定的停止位置的装置，LED 7a和7b安装在手部6处，以及位置检测部分12，由透镜12a和 PSD 12b安装在放置基座53侧，以便在短时间内自动且准确地实现位置校正数据的教导而不使用任何人力。 此外，安装示教部，其基于由手部6相对于配置基座的相对位置来检测当前停止位置与上述指定停止位置之间的偏差，该位置由位置检测部 如图12所示，通过例如无线电向移动托架进行教导，由此操作者不需要通过实际移动手部来执行教导，其中可以准确地执行位置的教导 在短时间内纠正数据。