Solid-state imaging device and manufacturing method thereof
    24.
    发明申请
    Solid-state imaging device and manufacturing method thereof 有权
    固态成像装置及其制造方法

    公开(公告)号:US20070096243A1

    公开(公告)日:2007-05-03

    申请号:US11523698

    申请日:2006-09-20

    IPC分类号: H01L31/06

    摘要: Provided is a manufacturing method of a solid-state imaging device, which is able to realize a solid-state imaging device whose reflection prevention coating is even and that does not have image noise in case of adopting a spincoating method in applying a material of the reflection prevention coating onto microlenses of the solid-state imaging device. In the solid-state imaging device 1 according to the present invention, a barrier wall pattern 7 is formed, as a step alleviating structure, in dicing areas 5X formed between adjacent imaging areas 9. The barrier wall pattern 7 has a rectangular sectional form. With use of the barrier wall pattern 7 in the spincoating method, reflection prevention coating 8 is coated onto the microlenses 6 more evenly than in conventional cases.

    摘要翻译: 提供一种固态成像装置的制造方法,其能够实现防反射涂层均匀的固态成像装置,并且在应用旋涂方法的情况下不具有图像噪声 反射防止涂层在固态成像装置的微透镜上。 在根据本发明的固态成像装置1中,在相邻成像区域9之间形成的切割区域5中形成有阻挡壁图案7作为阶梯缓和结构。 阻挡壁图案7具有矩形截面形状。 通过使用旋涂法中的阻挡壁图案7,与常规情况相比,防反射涂层8更均匀地涂覆在微透镜6上。

    Color filter materials, color filters, manufacturing method and image sensor
    25.
    发明申请
    Color filter materials, color filters, manufacturing method and image sensor 审中-公开
    彩色滤光片材料,滤色片,制造方法和图像传感器

    公开(公告)号:US20050186489A1

    公开(公告)日:2005-08-25

    申请号:US11060506

    申请日:2005-02-18

    CPC分类号: G02B5/201 G02B5/223

    摘要: Color filter materials 5 to 7 include a dye which has a light sensing function. The curing reaction may be one of radical polymerization, cationic polymerization, and anionic polymerization. The manufacturing method of color filters 15 to 17 includes processes: coat-forming, on the base, color filter material layers 5 to 7 including a dye which has a light sensing function; exposing a predetermined area on the color filter material layers 5 to 7; and removing color filter material layers 5 to 7 outside the predetermined area by a developer and forming color filters 15 to 17 on a predetermined area.

    摘要翻译: 滤色器5至7包括具有光感测功能的染料。 固化反应可以是自由基聚合,阳离子聚合和阴离子聚合中的一种。 彩色滤光片15〜17的制造方法包括以下工序:在基材上涂布形成包含具有感光功能的染料的滤色器材料层5〜7; 曝光在滤色器材料层5至7上的预定区域; 并通过显影剂除去预定区域外的滤色器材料层5至7并在预定区域上形成滤色器15至17。

    Color filter manufacturing method, solid state color image sensing apparatus and camera having color filter
    26.
    发明申请
    Color filter manufacturing method, solid state color image sensing apparatus and camera having color filter 审中-公开
    滤色片制造方法,固态彩色图像感测装置和具有滤色器的相机

    公开(公告)号:US20050142467A1

    公开(公告)日:2005-06-30

    申请号:US11016747

    申请日:2004-12-21

    IPC分类号: G02B5/20 H01L27/14

    CPC分类号: G02B5/201

    摘要: A color filter manufacturing method of the present invention including: applying a negative type dye color photoresist; applying an oxygen permeation prevention film on the negative type dye color photoresist; exposing a predetermined part of the oxygen permeation prevention film from above; and forming, on the predetermined part, a color filter made from the negative type dye color photoresist by removing, using a developer, at least a part of the negative type dye color photoresist formed outside the predetermined part and permeation prevention film.

    摘要翻译: 本发明的滤色器制造方法包括:施加负型染料着色光致抗蚀剂; 在负型染料光致抗蚀剂上涂覆防氧渗透膜; 从上面暴露预防氧透过膜的部分; 并且通过使用显影剂除去形成在预定部分外的负型染料光致抗蚀剂的至少一部分和防渗透膜,在预定部分上形成由负型染料着色光致抗蚀剂制成的滤色器。

    Lens array
    27.
    发明授权
    Lens array 有权
    镜头阵列

    公开(公告)号:US06606198B2

    公开(公告)日:2003-08-12

    申请号:US09817772

    申请日:2001-03-26

    IPC分类号: G02B2710

    摘要: In a lens array, a multiplicity of condenser lenses, each in a convex lens form, are arrayed in vertical and horizontal directions so as to correspond to pixel regions, respectively, and each condenser lens, when viewed from a direction perpendicular to a condenser lens-arrayed plane, takes a planar shape formed with a four straight sides along four sides of the pixel region and four circular arcs extending between the respective straight sides. A center of the four circular arcs substantially coincides with a center of the corresponding pixel region. This ensures an increase in area covered with the condenser lens in the pixel region, thereby causing more light rays to enter the condenser lens. In addition, a radius of curvature necessary for collecting can be obtained more easily. Consequently, light rays can be efficiently collected and guided to light receiving sections or the like provided in the pixel regions. Accordingly, sensitivity is improved when such a lens array is used in a solid-state imaging element, while luminance of a screen is improved when it is used in a panel display element. Besides, such a lens array is easily manufactured.

    摘要翻译: 在透镜阵列中,分别以凸透镜形式的多个聚光透镜分别沿着垂直于聚光透镜的方向从垂直方向排列成与像素区对应的聚焦透镜,并且每个聚光透镜 在平面形状的四边形状的四边形状的平面形状,四个圆弧在各个直边之间延伸。 四个圆弧的中心基本上与相应像素区域的中心重合。 这确保了像素区域中的聚光透镜覆盖的面积的增加,从而导致更多的光线进入聚光透镜。 此外,可以更容易地获得收集所需的曲率半径。 因此,可以将光线有效地收集并引导到设置在像素区域中的受光部等。 因此,当在固态成像元件中使用这种透镜阵列时,在面板显示元件中使用屏幕的亮度时,提高了灵敏度。 此外,这种透镜阵列容易制造。