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公开(公告)号:US20100055394A1
公开(公告)日:2010-03-04
申请号:US12551071
申请日:2009-08-31
申请人: Zhishan Hua , Erdogan Gulari , Mark A. Burns , Rohit Pal , Onnop Srivannavit
发明人: Zhishan Hua , Erdogan Gulari , Mark A. Burns , Rohit Pal , Onnop Srivannavit
CPC分类号: F16K99/0032 , B01L3/502707 , B01L3/502715 , B01L3/50273 , B01L3/502738 , B01L3/502746 , B01L2300/0819 , B01L2400/0481 , B01L2400/0655 , B01L2400/0677 , F15B15/10 , F16K99/0044 , Y10T137/0391 , Y10T137/1624 , Y10T137/1812 , Y10T137/2142 , Y10T137/218 , Y10T137/2191 , Y10T137/2196 , Y10T137/2202 , Y10T137/2218 , Y10T428/23 , Y10T428/234 , Y10T428/24322 , Y10T428/24331 , Y10T428/24612
摘要: A microactuator may be configured by activating a source of electromagnetic radiation to heat and melt a selected set of phase-change plugs embedded in a substrate of the microactuator, pressurizing a common pressure chamber adjacent to each of the plugs to deform the melted plugs, and deactivating the source of electromagnetic radiation to cool and solidify the melted plugs.
摘要翻译: 微致动器可以通过激活电磁辐射源来加热和熔化嵌入在微致动器的衬底中的一组相变插塞,对与每个插塞相邻的公共压力室进行加压以使熔化的插头变形,以及 停用电磁辐射源以冷却和固化熔化的塞子。