公开(公告)号：US07142761B2

公开(公告)日：2006-11-28

申请号：US10731559

申请日：2003-12-09

申请人： Ansheng Liu ,  Mario J. Paniccia

发明人： Ansheng Liu ,  Mario J. Paniccia

IPC分类号： G02B6/10

CPC分类号： G02F1/025 ,  G02F2201/063

摘要： An apparatus and method for modulating a phase of optical beam in an electrically isolated active region of an optical waveguide. In one embodiment, an apparatus according to embodiments of the present invention includes an active region of an optical waveguide disposed in a semiconductor layer. The active region includes a p doped region and an n doped region. The apparatus further includes an insulating region disposed in the semiconductor layer surrounding the active region in the semiconductor layer. The insulating region electrically isolates the active region of the optical waveguide from a passive region of the optical waveguide disposed in the semiconductor layer. An optical beam is to be directed through the optical waveguide and through the active region to be phase shifted in response to a modulated charge region in the active region in the optical waveguide.

摘要翻译： 一种用于调制光波导的电隔离有源区中的光束相位的装置和方法。 在一个实施例中，根据本发明的实施例的装置包括设置在半导体层中的光波导的有源区。 有源区包括p掺杂区和n掺杂区。 该装置还包括设置在半导体层中的绝缘区域，该半导体层围绕半导体层中的有源区域。 绝缘区域将光波导的有源区域与设置在半导体层中的光波导的无源区域电隔离。 光束将被引导通过光波导并且通过有源区域响应于光波导中的有源区域中的调制的电荷区域被相移。

公开(公告)号：US07088877B2

公开(公告)日：2006-08-08

申请号：US09881218

申请日：2001-06-13

申请人： Ansheng Liu ,  Mario J. Paniccia ,  Remus Nicolaescu

发明人： Ansheng Liu ,  Mario J. Paniccia ,  Remus Nicolaescu

IPC分类号： G02F1/295

CPC分类号： G02F1/025 ,  G02B6/124 ,  G02B2006/12097 ,  G02B2006/12135 ,  G02F1/0147 ,  G02F2201/307

摘要： A tunable Bragg grating method and apparatus. In one aspect of the present invention, a method according to an embodiment of the present invention includes directing an optical beam into a first end of an optical path having the first end and a second end disposed in a semiconductor substrate, reflecting a first portion of the optical beam having a first center wavelength back out from the first end of the optical path and tuning the optical path to reflect a second portion of the optical beam having a second center wavelength back out from the first end of the optical path. In one embodiment, the Bragg grating is tuned with a heater used to adjust a temperature of the semiconductor substrate. In another embodiment, charge in charge modulated regions along the optical path is modulated to tune the Bragg grating.

公开(公告)号：US06603893B1

公开(公告)日：2003-08-05

申请号：US09819160

申请日：2001-03-27

申请人： Ansheng Liu ,  Mario J. Paniccia ,  Dean A. Samara-Rubio ,  Chi Chu

发明人： Ansheng Liu ,  Mario J. Paniccia ,  Dean A. Samara-Rubio ,  Chi Chu

IPC分类号： G02B626

CPC分类号： G02F1/3136 ,  G02B6/2813 ,  G02F2001/217

摘要： An optical switching method and apparatus. In one aspect of the present invention, the disclosed apparatus includes first and second multi-mode interference (MMI) splitting devices in a semiconductor substrate. First and second outputs of the first MMI splitting device are optically coupled to first and second inputs, respectively, of the second MMI splitting device. First and second phase control devices are included in the semiconductor substrate. The first input of the second MMI splitting device is optically coupled to the first output of the first MMI splitting device through the first phase control device. The second input of the second MMI splitting device is optically coupled to the second output of the first MMI splitting device through the second phase control device. The first input of the first MMI splitting device is selectively optically coupled to the first and second outputs of the second MMI splitting device in response to the first and second phase control devices. The second input of the first MMI splitting device is selectively optically coupled to the first and second outputs of the second MMI splitting device in response to the first and second phase control devices.

摘要翻译： 一种光学切换方法和装置。 在本发明的一个方面，所公开的设备包括半导体衬底中的第一和第二多模干涉（MMI）分离器件。 第一MMI分割装置的第一和第二输出分别光耦合到第二MMI分割装置的第一和第二输入。 第一和第二相位控制装置包括在半导体衬底中。 第二MMI分割装置的第一输入通过第一相位控制装置光耦合到第一MMI分配装置的第一输出端。 第二MMI分配装置的第二输入通过第二相位控制装置光耦合到第一MMI分配装置的第二输出端。 响应于第一和第二相位控制装置，第一MMI分配装置的第一输入选择性地光耦合到第二MMI分配装置的第一和第二输出端。 响应于第一和第二相位控制装置，第一MMI分配装置的第二输入被选择性地光耦合到第二MMI分配装置的第一和第二输出端。

公开(公告)号：US08530818B2

公开(公告)日：2013-09-10

申请号：US12825257

申请日：2010-06-28

申请人： John Heck ,  Ansheng Liu ,  Mario J. Paniccia

发明人： John Heck ,  Ansheng Liu ,  Mario J. Paniccia

IPC分类号： H03F3/08

CPC分类号： G02B6/4214 ,  G02B6/422

摘要： Techniques and architectures for providing a reflective target area of an integrated circuit die assembly. In an embodiment, a reflective bevel surface of a die allows an optical signal to be received from the direction of a side surface of a die assembly for reflection into a photodetector. In another embodiment, one or more grooves in a coupling surface of the die provide respective leverage points for aligning a target area of the bevel surface with a detecting surface of the photodetector.

摘要翻译： 用于提供集成电路管芯组件的反射目标区域的技术和架构。 在一个实施例中，模具的反射斜面可允许从模组件的侧表面的方向接收光信号以反射到光电检测器中。 在另一个实施例中，模具的联接表面中的一个或多个凹槽提供相应的杠杆点，用于将斜面的目标区域与光电检测器的检测表面对准。

公开(公告)号：US07508576B2

公开(公告)日：2009-03-24

申请号：US11040238

申请日：2005-01-20

申请人： Ansheng Liu ,  Mario J. Paniccia

发明人： Ansheng Liu ,  Mario J. Paniccia

IPC分类号： H01S3/00

CPC分类号： H01S3/30 ,  H01S3/063 ,  H01S3/0637 ,  H01S5/32

摘要： An optical bistable silicon Raman laser is disclosed, which provides digital signal regeneration, reshaping and wavelength conversion. An apparatus according to aspects of the present invention includes an optical waveguide disposed in semiconductor material. First and second reflectors are disposed in the optical waveguide. The first and second reflectors define a cavity in the optical waveguide. The cavity is to receive a first optical beam having a first wavelength. A power level of the first optical beam received by the cavity rising above a second power level results in emission of a second optical beam of a second wavelength from the cavity until the power level of the first optical beam received by the cavity falls below a first power level. The first power level is less than the second power level.

摘要翻译： 公开了一种光学双稳态硅拉曼激光器，其提供数字信号再生，整形和波长转换。 根据本发明的方面的装置包括设置在半导体材料中的光波导。 第一和第二反射器设置在光波导中。 第一和第二反射器限定光波导中的空腔。 腔体将接收具有第一波长的第一光束。 由空腔接收的第一光束的功率电平升高到高于第二功率电平，导致从空腔发射第二波长的第二光束，直到由空腔接收的第一光束的功率电平落在第一 能量等级。 第一功率电平小于第二功率电平。

公开(公告)号：US06947616B2

公开(公告)日：2005-09-20

申请号：US10335765

申请日：2003-01-02

申请人： Ansheng Liu ,  Mario J. Paniccia ,  Remus Nicolaescu

发明人： Ansheng Liu ,  Mario J. Paniccia ,  Remus Nicolaescu

IPC分类号： G02B6/12 ,  G02B6/124 ,  G02F1/01 ,  G02F1/025 ,  G02F1/295

CPC分类号： G02F1/025 ,  G02B6/124 ,  G02B2006/12097 ,  G02B2006/12135 ,  G02F1/0147 ,  G02F2201/307

摘要： A tunable Bragg grating method and apparatus. In one aspect of the present invention, a method according to an embodiment of the present invention includes directing an optical beam into a first end of an optical path having the first end and a second end disposed in a semiconductor substrate, reflecting a first portion of the optical beam having a first center wavelength back out from the first end of the optical path and tuning the optical path to reflect a second portion of the optical beam having a second center wavelength back out from the first end of the optical path. In one embodiment, the Bragg grating is tuned with a heater used to adjust a temperature of the semiconductor substrate. In another embodiment, charge in charge modulated regions along the optical path is modulated to tune the Bragg grating.

摘要翻译： 可调谐布拉格光栅方法和装置。 在本发明的一个方面，根据本发明实施例的方法包括将光束引导到具有第一端的光路的第一端和设置在半导体衬底中的第二端，反射第一部分 所述光束具有从光路的第一端返回的第一中心波长并调谐光路以将具有第二中心波长的光束的第二部分从光路的第一端反射出去。 在一个实施例中，布拉格光栅用用于调节半导体衬底的温度的加热器调谐。 在另一个实施例中，沿着光路的电荷调制区域的电荷被调制以调谐布拉格光栅。

公开(公告)号：US06650802B1

公开(公告)日：2003-11-18

申请号：US09470574

申请日：1999-12-22

申请人： Michael T. Morse ,  Mario J. Paniccia

发明人： Michael T. Morse ,  Mario J. Paniccia

IPC分类号： G02B626

CPC分类号： G02F1/025 ,  G02B6/43

摘要： A device for switching an optical beam. In one embodiment, the disclosed optical switching device includes an array of trench capacitors providing a phase array disposed between an optical input port and an optical output port in a semiconductor substrate of an integrated circuit die. In one embodiment, the trench capacitors are biased with control circuitry disposed in the semiconductor substrate on the same integrated circuit die. In one embodiment, the array of trench capacitors are biased by the control circuitry to control a charge distribution in the array to switch an optical beam passing from the optical input port through the array of trench capacitors to the optical output port. In another embodiment, there are a plurality of N optical output ports opposite the optical input port and a phase array is provided by the array of trench capacitors. The array of trench capacitors is biased to control a charge distribution across the phase array. Thus, an incident optical beam from the optical input port is selectively directed to any one of the plurality of N optical output ports. In yet another embodiment, there are a plurality of M optical input ports and corresponding phase arrays opposite the plurality of M optical output ports to provide an M×N optical switch.

摘要翻译： 一种用于切换光束的装置。 在一个实施例中，所公开的光开关器件包括沟槽电容器阵列，其提供设置在集成电路管芯的半导体衬底中的光输入端口和光输出端口之间的相位阵列。 在一个实施例中，沟槽电容器被设置在同一集成电路管芯上的半导体衬底中的控制电路偏压。 在一个实施例中，沟槽电容器阵列由控制电路偏置以控制阵列中的电荷分布，以将从光输入端口通过沟槽电容器阵列的光束切换到光输出端口。 在另一实施例中，存在与光输入端口相对的多个N个光输出端口，并且由阵列的沟槽电容器提供相位阵列。 沟槽电容器阵列被偏置以控制跨越相位阵列的电荷分布。 因此，来自光输入端口的入射光束被选择性地导向多个N个光输出端口中的任一个。 在又一实施例中，存在多个M个光输入端口和与多个M个光输出端口相对的相应的相位阵列，以提供MxN光开关。

公开(公告)号：US06587605B2

公开(公告)日：2003-07-01

申请号：US09780174

申请日：2001-02-09

申请人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R. M. Rao

发明人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R. M. Rao

IPC分类号： G02B612

CPC分类号： G02F1/025 ,  G02B6/43

摘要： A method and an apparatus providing an optical interconnection in an integrated circuit die. In one embodiment, an optical interconnection is used to optically interconnect a waveguide-based optical modulator through the insulating layer and back side of the semiconductor substrate of the integrated circuit die. In one embodiment, an insulating oxide layer is disposed between a semiconductor waveguide optical modulator and the back side of the semiconductor substrate. Optical conduits are disposed in the insulating oxide layer at the locations where light enters and exits the semiconductor waveguide optical modulator. In one embodiment, the optical conduits have indexes of refraction substantially equal to the indexes of refraction of the semiconductor substrate and the semiconductor waveguide optical modulator. Thus, attenuation of the light used to optically couple the semiconductor waveguide optical modulator through the back side of the semiconductor substrate is reduced.

公开(公告)号：US06393169B1

公开(公告)日：2002-05-21

申请号：US09226783

申请日：1999-01-06

申请人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R.M. Rao

发明人： Mario J. Paniccia ,  Michael T. Morse ,  Valluri R.M. Rao

IPC分类号： G02B612

CPC分类号： G02B6/43 ,  G02B2006/12107 ,  G02B2006/12142 ,  G02F1/218 ,  G02F2001/0152 ,  G02F2201/307

摘要： A method and an apparatus providing an optical interconnection in an integrated circuit die. In one embodiment, an optical interconnection is used to optically interconnect a waveguide-based optical modulator through the insulating layer and back side of the semiconductor substrate of the integrated circuit die. In one embodiment, an insulating oxide layer is disposed between a semiconductor waveguide optical modulator and the back side of the semiconductor substrate. Optical conduits are disposed in the insulating oxide layer at the locations where light enters and exits the semiconductor waveguide optical modulator. In one embodiment, the optical conduits have indexes of refraction substantially equal to the indexes of refraction of the semiconductor substrate and the semiconductor waveguide optical modulator. Thus, attenuation of the light used to optically couple the semiconductor waveguide optical modulator through the back side of the semiconductor substrate is reduced.

摘要翻译： 一种在集成电路管芯中提供光互连的方法和装置。 在一个实施例中，光互连用于通过集成电路管芯的半导体衬底的绝缘层和背面光学地互连基于波导的光学调制器。 在一个实施例中，绝缘氧化物层设置在半导体波导光调制器和半导体衬底的背面之间。 在光入射到半导体波导光调制器的位置处，光导管设置在绝缘氧化物层中。 在一个实施例中，光导管的折射指数基本上等于半导体衬底和半导体波导光调制器的折射率。 因此，减少了通过半导体衬底的背面光耦合半导体波导光学调制器的光的衰减。

公开(公告)号：US06351326B1

公开(公告)日：2002-02-26

申请号：US09465222

申请日：1999-12-14

申请人： Michael T. Morse ,  Mario J. Paniccia ,  Dmitri Nikonov

发明人： Michael T. Morse ,  Mario J. Paniccia ,  Dmitri Nikonov

IPC分类号： G02F103

CPC分类号： G02F1/2257 ,  G02F2201/302 ,  G02F2201/346 ,  G02F2202/104 ,  G02F2203/15

摘要： An optical modulator that modulates an optical beam through directed through an integrated circuit die. In one embodiment, the optical beam is directed into and out of a flip chip packaged integrated circuit die. In one embodiment, the optical modulator includes a resonant cavity structure. In one embodiment, the resonant cavity structure is disposed in the dielectric layer of the integrated circuit die. In one embodiment, the optical beam is directed into the integrated circuit die and through the resonant cavity structure and is modulated in response to an integrated circuit signal of the integrated circuit die. In one embodiment, the optical beam is modulated by modulating the resonant wavelength of the resonant cavity structure in response to the integrated circuit signal. A modulated optical beam is directed from the resonant cavity structure back out of the integrated circuit die.

摘要翻译： 光调制器，其通过引导通过集成电路管芯来调制光束。 在一个实施例中，光束被引导到倒装芯片封装的集成电路管芯中和外。 在一个实施例中，光调制器包括谐振腔结构。 在一个实施例中，谐振腔结构设置在集成电路管芯的电介质层中。 在一个实施例中，光束被引导到集成电路管芯中并通过谐振腔结构，并且响应于集成电路管芯的集成电路信号被调制。 在一个实施例中，通过响应于集成电路信号调制谐振腔结构的谐振波长来调制光束。 调制光束从谐振腔结构引出集成电路管芯。