利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

28 条记录 (耗时 0.028 秒)

    Direct exposure apparatus and direct exposure method
    21.
    发明授权
    Direct exposure apparatus and direct exposure method 有权
    直接曝光装置和直接曝光方法

    公开(公告)号：US07486383B2

    公开(公告)日：2009-02-03

    申请号：US11291658

    申请日：2005-11-30

    申请人： Kazunari Sekigawa ,  Hiroaki Samizu ,  Takahiro Inoue

    发明人： Kazunari Sekigawa ,  Hiroaki Samizu ,  Takahiro Inoue

    IPC分类号： G03B27/54 ,  G03B27/72

    CPC分类号： G03F7/70666 ,  G03F7/70141

    摘要： A direct exposure apparatus having a light source for projecting light onto an exposure target or, more specifically, an exposure target substrate, comprises: measuring means for measuring the illuminance distribution of light on an area corresponding to the exposure surface of the exposure target substrate; and control means for controlling, based on the measurement result supplied from the measuring means, the light source so that the intended illuminance distribution can be obtained.

    摘要翻译： 具有用于将光投射到曝光对象物上的光源的直接曝光装置，更具体而言，是曝光对象基板，包括：测量装置，用于测量与曝光对象基板的曝光面对应的面积上的光的照度分布; 以及控制装置，用于基于从测量装置提供的测量结果控制光源，从而可以获得预期的照度分布。

    Driving circuit and driving method for laser light source
    25.
    发明申请
    Driving circuit and driving method for laser light source 审中-公开
    激光光源的驱动电路及驱动方法

    公开(公告)号：US20070030868A1

    公开(公告)日：2007-02-08

    申请号：US11494996

    申请日：2006-07-28

    申请人： Kazunari Sekigawa

    发明人： Kazunari Sekigawa

    IPC分类号： H01S3/13

    CPC分类号： H01S5/0683

    摘要： A driving circuit comprises: a constant-current source which supplies a current to a photodiode so as to forward-bias the photodiode; detecting means for detecting the forward voltage of the photodiode; determining means for determining whether or not the forward voltage detected by the detecting means is smaller than a predetermined reference voltage; and control means for controlling the supply of current from a current source to a laser diode, wherein when the determining means determines that the forward voltage is smaller than the predetermined reference voltage, the control means controls the current source so as to stop the supply of current to the laser diode.

    摘要翻译： 驱动电路包括：恒流源，其向光电二极管提供电流以使光电二极管正向偏置; 用于检测光电二极管的正向电压的检测装置; 用于确定由所述检测装置检测到的正向电压是否小于预定参考电压的确定装置; 以及控制装置，用于控制从电流源到激光二极管的电流供应，其中当确定装置确定正向电压小于预定参考电压时，控制装置控制电流源以停止供应 电流到激光二极管。

    Surface light source control apparatus and surface light source control method
    26.
    发明申请
    Surface light source control apparatus and surface light source control method 有权

    公开(公告)号：US20060279720A1

    公开(公告)日：2006-12-14

    申请号：US11449352

    申请日：2006-06-08

    申请人： Kazunari Sekigawa ,  Hiroaki Samizu ,  Takahiro Inoue

    发明人： Kazunari Sekigawa ,  Hiroaki Samizu ,  Takahiro Inoue

    IPC分类号： G03B27/72

    CPC分类号： G03B27/72

    摘要： A surface light source control apparatus for a direct exposure apparatus comprises a light-emission level determining means for determining the light-emission level of each point light source for each of a plurality of groups so that a uniform illuminance distribution is achieved at a position corresponding to an exposure surface of an exposure target when a projection device is set so as to reflect all light rays incident thereon toward the exposure surface, the plurality of groups being formed in advance by grouping the point light sources based on similarity in tendency in terms of illuminance distribution characteristics that the point light sources have at the position corresponding to the exposure surface, wherein the light-emission level determining means determines the light-emission level so that all the point light sources belonging to the same group have the same light-emission level.

    Drawing apparatus and drawing method
    27.
    发明申请
    Drawing apparatus and drawing method 有权
    绘图装置和绘图方法

    公开(公告)号：US20060022982A1

    公开(公告)日：2006-02-02

    申请号：US11191021

    申请日：2005-07-28

    申请人： Kazunari Sekigawa

    发明人： Kazunari Sekigawa

    IPC分类号： G06T11/20

    CPC分类号： G06T7/0006 ,  G03F7/70291 ,  G03F7/70508

    摘要： A drawing apparatus, for forming a desired drawing pattern by drawing the pattern directly on a drawing target surface using a drawing engine equipped with a plurality of drawing devices arranged along a direction of relative movement of the drawing target surface, the drawing engine being designed so that the design spacing of the thus arranged drawing devices is equal to a product of a unit pixel spacing in drawing data and an integer, comprises: correcting means for generating corrected drawing data by correcting the drawing data based on the difference between the design spacing and the actual spacing of the drawing devices; and supplying means for supplying the drawing engine with the corrected drawing data just necessary for direct drawing to a drawing block that the drawing engine can draw at a time on the drawing target surface, each time the drawing target substrate moves in relative fashion by a distance corresponding to an actual pixel spacing that is obtained by dividing the actual spacing of the drawing devices by that integer.

    摘要翻译： 一种绘图装置，用于通过使用配备有沿着绘图对象表面的相对移动方向布置的多个绘图装置的绘图引擎将绘制图案直接绘制在绘制目标表面上来形成期望的绘制图案，绘图引擎被设计为 这样布置的绘图装置的设计间距等于绘图数据中的单位像素间距和整数的乘积，包括：校正装置，用于通过基于设计间距和 绘图装置的实际间距; 以及提供装置，用于向绘图引擎提供校正的绘图数据，该直接绘图数据直接绘制到绘图引擎可以在绘制目标表面上一次绘制的绘图块，每次绘制目标衬底相对移动距离 对应于通过将绘图装置的实际间隔除以该整数而获得的实际像素间隔。