摘要:
A banknote deposit apparatus includes: a storing box 70 configured to receive the banknote stacked in a stacking unit 60 so as to store the banknote; and a clamping and transporting mechanism 10 configured to clamp surfaces of the banknote stacked in the stacking unit 60 and to transport the banknote to a direction parallel to the surfaces of the clamped banknote so as to store the banknote in the storing box. A front opening 61 through which the stacked banknote is taken out from outside, and a front shutter unit 62 configured to open and close the front opening are disposed on a front surface of the stacking unit 60.
摘要:
A substrate processing apparatus of the present invention includes a substrate placement stage installed in the process chamber, and configured to place the substrate on a substrate placement surface, with a flange provided on its side face; a heating element arranged in the substrate placement stage and configured to heat the substrate; a plurality of struts configured to support the flange from below, and an exhaust unit configured to exhaust an atmosphere in the process chamber, wherein the supporting member is provided between the substrate placement stage and the plurality of struts.
摘要:
A substrate processing apparatus includes a processing chamber that processes a substrate, and a substrate placing base enclosed in the processing chamber, and a substrate transporting member that allows the substrate to wait temporarily on the substrate placing base, and exhaust holes provided so as to surround the substrate placing base, and a retracting space that allows the substrate transporting member to move in between lines each connecting the exhaust hole and an upper end of the substrate placing base and the substrate placing base.
摘要:
A hole injection electrode of a transparent conductive film such as indium-zinc-oxide is formed on a substrate, and a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer are formed in this order on the hole injection electrode. Then, an electron injection electrode made of a material such as aluminum is formed on the electron transport layer. The hole injection layer is made for example of fluorocarbon (CFx). The thickness of the hole injection layer is preferably in the range from 30 Å to 90 Å.
摘要:
In an organic EL device whose any layer of organic compound layers contains a phenylamine derivative (NPB, for instance), the weight concentration of copper atoms contained in the organic compound layer is controlled to not higher than 500 ppm, the weight concentration of aluminum atoms contained in the organic compound layer is controlled to not higher than 800 ppm, and the weight concentration of iron atoms contained in the organic compound layer is controlled to not higher than 800 ppm. Furthermore, the weight concentration of nickel atoms contained in the organic compound layer is controlled to not higher than 900 ppm, and the weight concentration of sodium atoms contained in the organic compound layer is controlled to not higher than 1000 ppm.
摘要:
An ultrafine tube is produced by a method comprising the steps of applying a highly polymerized material on a substrate to form a resist layer on a surface of said substrate, applying a laser beam to the resist layer under such a condition that said resist layer is melted to form an ultrafine tube between the substrate and resist layer in the predetermined pattern.
摘要:
A controller for a pressure reducing valve is applied to a fuel injection system which is provided with a pressure reducing valve in a common-rail and a fuel pressure sensor detecting a fuel pressure in a fuel supply passage from the accumulator to an injection port of the fuel injector. The controller includes a fuel-pressure-variation detector for detecting a fuel pressure variation timing at which a detection value of the fuel pressure sensor is varied due to an opening operation or a closing operation of the pressure reducing valve. The controller further includes a response-delay-time computing portion for computing a response delay time of the pressure reducing valve based on a command timing and a fuel pressure variation timing.
摘要:
A substrate processing apparatus of the present invention includes a substrate placement stage installed in the process chamber, and configured to place the substrate on a substrate placement surface, with a flange provided on its side face; a heating element arranged in the substrate placement stage and configured to heat the substrate; a plurality of struts configured to support the flange from below, and an exhaust unit configured to exhaust an atmosphere in the process chamber, wherein the supporting member is provided between the substrate placement stage and the plurality of struts.
摘要:
Provided is a substrate processing apparatus configured to attain conflicting purposes of high throughput and footprint reduction. The substrate processing apparatus comprises a carrying chamber, and a loadlock chamber and at least two process chambers that are arranged around the carrying chamber. The carrying chamber comprises a substrate carrying unit configured to carry a substrate between the loadlock chamber and the process chambers. The substrate carrying unit comprises a first arm provided with a first finger and a second finger, and leading ends of the first and second fingers extend horizontally in the same direction. Each of the process chambers comprises a first process unit and a second process unit, and the second process unit is disposed at a side of the process chamber distant from the carrying chamber with the first process unit being disposed therebetween.
摘要:
A substrate processing apparatus includes a processing chamber that processes a substrate, and a substrate placing base enclosed in the processing chamber, and a substrate transporting member that allows the substrate to wait temporarily on the substrate placing base, and exhaust holes provided so as to surround the substrate placing base, and a retracting space that allows the substrate transporting member to move in between lines each connecting the exhaust hole and an upper end of the substrate placing base and the substrate placing base.