RF electrode contact assembly for a detachable electrostatic chuck
    21.
    发明授权
    RF electrode contact assembly for a detachable electrostatic chuck 失效
    用于可拆卸静电卡盘的RF电极接触组件

    公开(公告)号:US06159055A

    公开(公告)日:2000-12-12

    申请号:US126895

    申请日:1998-07-31

    CPC classification number: H01R13/33 H01L21/6833 H01R13/2421 Y10S439/927

    Abstract: An substrate support pedestal having an RF contact assembly that utilizes a canted spring to make electrical connection to the cathode. The canted spring has coils that are tilted in one direction and joined end to end to form a doughnut shape. Such a spring creates multiple parallel self-loading electrical connections via the turns of the spring. The turns act like electrical wires to ensure reliable RF electrical energy transfer. The canted spring contact of the present invention allows for flat contact between the pedestal and the chuck.

    Abstract translation: 具有RF接触组件的衬底支撑座,该接触组件利用倾斜弹簧与阴极电连接。 倾斜弹簧具有在一个方向上倾斜并且端对端连接以形成环形形状的线圈。 这种弹簧通过弹簧的转动产生多个并联的自负载电连接。 匝数像电线一样,以确保可靠的射频电能传输。 本发明的倾斜弹簧触点允许基座和卡盘之间的平坦接触。

    Coil and coil feedthrough
    22.
    发明授权
    Coil and coil feedthrough 失效
    线圈和线圈馈通

    公开(公告)号:US6139679A

    公开(公告)日:2000-10-31

    申请号:US173664

    申请日:1998-10-15

    CPC classification number: H01J37/321

    Abstract: A coil for a plasma chamber in a semiconductor fabrication process comprises a continuous, one-piece conductive conduit having a first end and a second end positioned on the chamber exterior, a coil portion positioned in the chamber interior and a feedthrough portion positioned in an aperture of the chamber wall. Because the conduit lacks any joints between the feedthrough and the interior coil portions, a potential source of coolant leak is eliminated.

    Abstract translation: 在半导体制造工艺中用于等离子体室的线圈包括连续的一件式导电导管,其具有位于室外部的第一端和第二端,位于室内部的线圈部分和位于孔内的馈通部分 的室壁。 因为导管在馈通和内部线圈部分之间缺少任何接头,所以消除了潜在的冷却剂泄漏源。

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