公开(公告)号：US20080124858A1

公开(公告)日：2008-05-29

申请号：US11462773

申请日：2006-08-07

申请人： Bich-Yen Nguyen ,  Voon-Yew Thean

发明人： Bich-Yen Nguyen ,  Voon-Yew Thean

IPC分类号： H01L21/8238

CPC分类号： H01L21/84 ,  H01L21/823807 ,  H01L21/823814

摘要： A semiconductor fabrication process includes forming an NMOS gate electrode overlying a biaxially strained NMOS active region and forming a PMOS gate electrode overlying a biaxially strained PMOS active region. Amorphous silicon is created in a PMOS source/drain region to reduce PMOS channel direction tensile stress. A PMOS source/drain implant is performed in the amorphous PMOS source/drain. Creating amorphous silicon in the PMOS source/drain may include implanting an electrically neutral species (e.g., Ge, Ga, or Xe). The wafer then may be annealed and a second PMOS amorphizing implant performed. PMOS halo, source/drain extension, and deep source/drain implants may then be performed. Following the first amorphizing implant, a sacrificial compressive stressor may be formed over the PMOS region, the wafer annealed to recrystallize the amorphous PMOS region, and the compressive stressor removed. NMOS source/drain implants may be performed without a preceding amorphizing implant or with a low energy amorphizing implant.

摘要翻译： 半导体制造工艺包括形成覆盖双轴应变NMOS有源区的NMOS栅电极，并形成覆盖双轴应变PMOS有源区的PMOS栅电极。 在PMOS源极/漏极区域中产生非晶硅以减少PMOS沟道方向的拉伸应力。 在非晶PMOS源极/漏极中执行PMOS源极/漏极注入。 在PMOS源极/漏极中产生非晶硅可以包括植入电中性物质（例如Ge，Ga或Xe）。 然后可以对晶片进行退火，并执行第二个PMOS非晶化注入。 然后可以执行PMOS光晕，源极/漏极延伸和深源/漏极注入。 在第一非晶化植入物之后，可以在PMOS区域上形成牺牲压应力器，晶片退火以使非晶态PMOS区域重结晶，并且去除压应力。 可以在没有前面的非晶化植入物或低能量非晶化植入物的情况下进行NMOS源极/漏极植入物。

公开(公告)号：US20080014688A1

公开(公告)日：2008-01-17

申请号：US11428953

申请日：2006-07-06

申请人： Voon-Yew Thean ,  Bich-Yen Nguyen ,  Da Zhang

发明人： Voon-Yew Thean ,  Bich-Yen Nguyen ,  Da Zhang

IPC分类号： H01L21/8234

CPC分类号： H01L21/823807 ,  H01L21/823814 ,  H01L21/84 ,  H01L27/1203 ,  H01L29/66628 ,  H01L29/66636 ,  H01L29/7843 ,  H01L29/7848

摘要： A semiconductor fabrication process includes masking a first region, e.g., an NMOS region, of a semiconductor wafer, e.g., a biaxial, tensile strained silicon on insulator (SOI) wafer and creating recesses in source/drain regions of a second wafer region, e.g., a PMOS region. The wafer is then annealed in an ambient that promotes migration of silicon. The source/drain recesses are filled with source/drain structures, e.g., by epitaxial growth. The anneal ambient may include a hydrogen bearing species, e.g., H2 or GeH2, maintained at a temperature in the range of approximately 800 to 1000° C. The second region may be silicon and the source/drain structures may be silicon germanium. Creating the recesses may include creating shallow recesses with a first etch process, performing an amorphizing implant to create an amorphous layer, performing an inert ambient anneal to recrystallize the amorphous layer, and deepening the shallow recesses with a second etch process.

摘要翻译： 半导体制造工艺包括掩蔽半导体晶片的第一区域（例如，NMOS区域），例如双轴拉伸应变绝缘体上硅（SOI）晶片，并在第二晶片区域的源/漏区域中产生凹陷，例如 ，PMOS区域。 然后将晶片在促进硅迁移的环境中退火。 源极/漏极凹槽用源极/漏极结构填充，例如通过外延生长。 退火环境可以包括保持在约800至1000℃范围内的温度的含氢物质，例如H 2 H 2或GeH 2 H 2。第二区域 可以是硅，并且源极/漏极结构可以是硅锗。 创建凹槽可以包括用第一蚀刻工艺创建浅凹槽，执行非晶化注入以产生非晶层，执行惰性环境退火以使非晶层重结晶，以及用第二蚀刻工艺加深浅凹槽。

公开(公告)号：US20070262385A1

公开(公告)日：2007-11-15

申请号：US11383113

申请日：2006-05-12

申请人： Bich-Yen Nguyen ,  Voon-Yew Thean

发明人： Bich-Yen Nguyen ,  Voon-Yew Thean

IPC分类号： H01L27/12 ,  H01L21/8238 ,  H01L27/01 ,  H01L31/0392

CPC分类号： H01L27/1203 ,  H01L21/823807 ,  H01L21/823814 ,  H01L21/84 ,  H01L27/0207 ,  H01L29/1033 ,  H01L29/41758 ,  H01L29/41775 ,  H01L29/6659 ,  H01L29/7843 ,  H01L29/7848 ,  H01L29/78654

摘要： An integrated circuit includes NMOS and PMOS transistors. The NMOS has a strained channel having first and second stress values along first and second axes respectively. The PMOS has a strained channel having third and fourth stress values along the first and second axes. The first value stress differs from the third value and the second value differs from the fourth value. The NMOS and PMOS have a common length (L) and effective width (W), but differ in length of diffusion (SA) and/or width of source/drain (WS). The NMOS WS may exceed the PMOS WS. The NMOS may include multiple dielectric structures in the active layer underlying the gate. The SA of the PMOS may be less than the SA of the NMOS. The integrated circuit may include a tensile stressor of silicon nitride over the NMOS and a compressive stressor of silicon nitride over the PMOS.

摘要翻译： 集成电路包括NMOS和PMOS晶体管。 NMOS具有分别具有沿着第一和第二轴的第一和第二应力值的应变通道。 PMOS具有沿第一和第二轴具有第三和第四应力值的应变通道。 第一值应力与第三值不同，第二值与第四值不同。 NMOS和PMOS具有公共长度（L）和有效宽度（W），但扩散长度（SA）和/或源极/漏极（WS）的宽度不同。 NMOS WS可能超过PMOS WS。 NMOS可以包括位于栅极下方的有源层中的多个电介质结构。 PMOS的SA可以小于NMOS的SA。 集成电路可以包括氮化硅在NMOS上的拉伸应力源和在PMOS上的氮化硅的压应力。

公开(公告)号：US20070241403A1

公开(公告)日：2007-10-18

申请号：US11402395

申请日：2006-04-12

申请人： Voon-Yew Thean ,  Bich-Yen Nguyen ,  Mariam Sadaka ,  Victor Vartanian ,  Ted White

发明人： Voon-Yew Thean ,  Bich-Yen Nguyen ,  Mariam Sadaka ,  Victor Vartanian ,  Ted White

IPC分类号： H01L29/76 ,  H01L21/8238

CPC分类号： H01L21/823807 ,  H01L21/823878 ,  H01L21/8258 ,  H01L27/1203

摘要： A substrate includes a first region and a second region. The first region comprises a III-nitride layer, and the second region comprises a first semiconductor layer. A first transistor (such as an n-type transistor) is formed in and on the III-nitride layer, and a second transistor (such as a p-type transistor) is formed in and on the first semiconductor layer. The III-nitride layer may be indium nitride. In the first region, the substrate may include a second semiconductor layer, a graded transition layer over the second semiconductor layer, and a buffer layer over the transition layer, where the III-nitride layer is over the buffer layer. In the second region, the substrate may include the second semiconductor layer and an insulating layer over the second semiconductor layer, where the first semiconductor layer is over the insulating layer.

摘要翻译： 衬底包括第一区域和第二区域。 第一区域包括III族氮化物层，第二区域包括第一半导体层。 在III族氮化物层上形成第一晶体管（例如n型晶体管），并且在第一半导体层上形成第二晶体管（例如p型晶体管）。 III族氮化物层可以是氮化铟。 在第一区域中，衬底可以包括第二半导体层，在第二半导体层上的渐变过渡层，以及过渡层上的缓冲层，其中III族氮化物层在缓冲层之上。 在第二区域中，衬底可以包括第二半导体层和在第二半导体层上的绝缘层，其中第一半导体层在绝缘层之上。

公开(公告)号：US07282415B2

公开(公告)日：2007-10-16

申请号：US11092291

申请日：2005-03-29

申请人： Da Zhang ,  Bich-Yen Nguyen ,  Voon-Yew Thean ,  Yasuhito Shiho ,  Veer Dhandapani

发明人： Da Zhang ,  Bich-Yen Nguyen ,  Voon-Yew Thean ,  Yasuhito Shiho ,  Veer Dhandapani

IPC分类号： H01L21/336

CPC分类号： H01L29/7848 ,  H01L29/165 ,  H01L29/66545 ,  H01L29/66628 ,  H01L29/66636

摘要： A semiconductor device with strain enhancement is formed by providing a semiconductor substrate and an overlying control electrode having a sidewall. An insulating layer is formed adjacent the sidewall of the control electrode. The semiconductor substrate and the control electrode are implanted to form first and second doped current electrode regions, a portion of each of the first and second doped current electrode regions being driven to underlie both the insulating layer and the control electrode in a channel region of the semiconductor device. The first and second doped current electrode regions are removed from the semiconductor substrate except for underneath the control electrode and the insulating layer to respectively form first and second trenches. An insitu doped material containing a different lattice constant relative to the semiconductor substrate is formed within the first and second trenches to function as first and second current electrodes of the semiconductor device.

摘要翻译： 通过提供半导体衬底和具有侧壁的上覆控制电极来形成具有应变增强的半导体器件。 在控制电极的侧壁附近形成绝缘层。 注入半导体衬底和控制电极以形成第一和第二掺杂电流电极区域，第一和第二掺杂电流电极区域中的每一个的一部分被驱动以在第一和第二掺杂电流电极区域的沟道区域中的绝缘层和控制电极之下 半导体器件。 第一和第二掺杂电流电极区域除了在控制电极和绝缘层之下除去分别形成第一和第二沟槽的半导体衬底外。 在第一和第二沟槽内形成有相对于半导体衬底具有不同晶格常数的原位掺杂材料，用作半导体器件的第一和第二电流电极。

公开(公告)号：US20070238250A1

公开(公告)日：2007-10-11

申请号：US11393340

申请日：2006-03-30

申请人： Da Zhang ,  Ted White ,  Bich-Yen Nguyen

发明人： Da Zhang ,  Ted White ,  Bich-Yen Nguyen

IPC分类号： H01L21/336

CPC分类号： H01L29/7848 ,  H01L21/76254 ,  H01L21/76283 ,  H01L29/66772 ,  H01L29/78684

摘要： A semiconductor fabrication process includes forming an etch stop layer (ESL) overlying a buried oxide (BOX) layer and an active semiconductor layer overlying the ESL. A gate electrode is formed overlying the active semiconductor layer. Source/drain regions of the active semiconductor layer are etched to expose the ESL. Source/drain stressors are formed on the ESL where the source/drain stressors strain the transistor channel. Forming the ESL may include epitaxially growing a silicon germanium ESL having a thickness of approximately 30 nm or less. Preferably a ratio of the active semiconductor layer etch rate to the ESL etch rate exceeds 10:1. A wet etch using a solution of NH4OH:H2O heated to a temperature of approximately 75° C. may be used to etch the source/drain regions. The ESL may be silicon germanium having a first percentage of germanium. The source/drain stressors may be silicon germanium having a second percentage of germanium for P-type transistors, and they may be silicon carbon for N-type transistors.

摘要翻译： 半导体制造工艺包括形成覆盖掩埋氧化物（BOX）层和覆盖ESL的有源半导体层的蚀刻停止层（ESL）。 形成覆盖有源半导体层的栅电极。 蚀刻有源半导体层的源极/漏极区域以露出ESL。 源极/漏极应力源在ESL上形成，其源极/漏极应力应变应变晶体管沟道。 形成ESL可以包括外延生长厚度为约30nm或更小的硅锗ESL。 优选地，有源半导体层蚀刻速率与ESL蚀刻速率的比率超过10:1。 使用加热到约75℃温度的NH 4 OH：H 2 O 2的溶液进行湿蚀刻可以用于蚀刻源/漏区。 ESL可以是具有第一百分比的锗的硅锗。 源极/漏极应力源可以是对于P型晶体管具有第二百分比的锗的硅锗，并且它们可以是N型晶体管的硅碳。

公开(公告)号：US20070238233A1

公开(公告)日：2007-10-11

申请号：US11393563

申请日：2006-03-30

申请人： Mariam Sadaka ,  Bich-Yen Nguyen ,  Ted White

发明人： Mariam Sadaka ,  Bich-Yen Nguyen ,  Ted White

IPC分类号： H01L21/337

CPC分类号： H01L21/84 ,  H01L21/823412 ,  H01L21/823481 ,  H01L21/823807 ,  H01L21/823878 ,  H01L27/1203 ,  H01L27/1207

摘要： A method of having transistors formed in enhanced performance crystal orientations begins with a wafer having a semiconductor substrate (12,52) of a first surface orientation, a thin etch stop layer (14,54) on the semiconductor substrate, a buried oxide layer (16,56) on the thin etch stop layer, and a semiconductor layer (18,58) of a second surface orientation on the buried oxide layer. An etch penetrates to the thin etch stop layer. Another etch, which is chosen to minimize the damage to the underlying semiconductor substrate, exposes a portion of the semiconductor substrate. An epitaxial semiconductor (28,66) is then grown from the exposed portion of the semiconductor substrate to form a semiconductor region having the first surface orientation and having few, if any, defects. The epitaxially grown semiconductor region is then used for enhancing one type of transistor while the semiconductor layer of the second surface orientation is used for enhancing a different type of transistor.

摘要翻译： 以增强的性能晶体​​取向形成的晶体管的方法从具有第一表面取向的半导体衬底（12,52），半导体衬底上的薄蚀刻停止层（14,54），掩埋氧化物层（ 16,56）和在所述掩埋氧化物层上的第二表面取向的半导体层（18,58）。 蚀刻渗透到薄的蚀刻停止层。 被选择以最小化对下面的半导体衬底的损害的另一蚀刻暴露了半导体衬底的一部分。 然后从半导体衬底的暴露部分生长外延半导体（28,66）以形成具有第一表面取向并且具有很少（如果有的话）缺陷的半导体区域。 然后外延生长的半导体区域用于增强一种类型的晶体管，而第二表面取向的半导体层用于增强不同类型的晶体管。

公开(公告)号：US20070215908A1

公开(公告)日：2007-09-20

申请号：US11375894

申请日：2006-03-15

申请人： Da Zhang ,  Bich-Yen Nguyen

发明人： Da Zhang ,  Bich-Yen Nguyen

IPC分类号： H01L29/76

CPC分类号： H01L29/785 ,  H01L29/4908 ,  H01L29/66507 ,  H01L29/66795 ,  H01L29/78684

摘要： An electronic device can include a semiconductor fin overlying an insulating layer. The electronic device can also include a semiconductor layer overlying the semiconductor fin. The semiconductor layer can have a first portion and a second portion that are spaced-apart from each other. In one aspect, the electronic device can include a conductive member that lies between and spaced-apart from the first and second portions of the semiconductor layer. The electronic device can also include a metal-semiconductor layer overlying the semiconductor layer. In another aspect, the semiconductor layer can abut the semiconductor fin and include a dopant. In a further aspect, a process of forming the electronic device can include reacting a metal-containing layer and a semiconductor layer to form a metal-semiconductor layer. In another aspect, a process can include forming a semiconductor layer, including a dopant, abutting a wall surface of a semiconductor fin.

摘要翻译： 电子器件可以包括覆盖绝缘层的半导体鳍片。 电子器件还可以包括覆盖半导体鳍片的半导体层。 半导体层可以具有彼此间隔开的第一部分和第二部分。 在一个方面，电子设备可以包括位于半导体层的第一和第二部分之间并与之隔开的导电构件。 电子器件还可以包括覆盖半导体层的金属 - 半导体层。 在另一方面，半导体层可以邻接半导体鳍并包括掺杂剂。 在另一方面，形成电子器件的方法可以包括使含金属层和半导体层反应以形成金属 - 半导体层。 在另一方面，一种方法可以包括形成邻接半导体鳍片的壁表面的包括掺杂剂的半导体层。

公开(公告)号：US20070184601A1

公开(公告)日：2007-08-09

申请号：US11349595

申请日：2006-02-08

申请人： Da Zhang ,  Bich-Yen Nguyen

发明人： Da Zhang ,  Bich-Yen Nguyen

IPC分类号： H01L21/8238

CPC分类号： H01L21/823842 ,  H01L21/823814 ,  H01L29/7848

摘要： A method for forming a semiconductor device includes providing a semiconductor substrate having a first doped region and a second doped region, providing a dielectric over the first doped region and the second doped region, and forming a first gate stack over the dielectric over at least a portion of the first doped region. The first gate stack includes a metal portion over the dielectric, a first in situ doped semiconductor portion over the metal portion, and a first blocking cap over the in situ doped semiconductor portion. The method further includes performing implantations to form source/drain regions adjacent the first and second gate stack, where the first blocking cap has a thickness sufficient to substantially block implant dopants from entering the first in situ doped semiconductor portion. Source/drain embedded stressors are also formed.

摘要翻译： 一种用于形成半导体器件的方法包括提供具有第一掺杂区域和第二掺杂区域的半导体衬底，在第一掺杂区域和第二掺杂区域上提供电介质，以及在电介质上至少形成第一栅极叠层 第一掺杂区域的一部分。 第一栅极堆叠包括电介质上的金属部分，金属部分上方的第一原位掺杂半导体部分以及原位掺杂半导体部分上的第一阻挡盖。 该方法还包括执行注入以形成与第一和第二栅极堆叠相邻的源极/漏极区域，其中第一阻挡盖具有足以基本上阻挡注入掺杂剂进入第一原位掺杂半导体部分的厚度。 源/漏嵌入式应力源也形成。

公开(公告)号：US20070171700A1

公开(公告)日：2007-07-26

申请号：US11337355

申请日：2006-01-23

申请人： James Burnett ,  Bich-Yen Nguyen ,  Brian Winstead

发明人： James Burnett ,  Bich-Yen Nguyen ,  Brian Winstead

IPC分类号： G11C11/00

CPC分类号： G11C11/412 ,  H01L21/845 ,  H01L27/1211 ,  H01L29/045

摘要： An electronic device can include a static-random-access memory cell. The static-random-access memory cell can include a first transistor of a first type and a second transistor of a second type. The first transistor can have a first channel length extending along a first line, and the second transistor can have a second channel length extending along a second line. The first line and the second line can intersect at an angle having a value other than any integer multiple of 22.5°. In a particular embodiment, the first transistor can include a pull-up transistor, and the second transistor can include a pass gate or pull-down transistor. A process can be used to form semiconductor fins and conductive members, which include gate electrode portions, to achieve the electronic device including the first and second transistors.

摘要翻译： 电子设备可以包括静态随机存取存储器单元。 静态随机存取存储器单元可以包括第一类型的第一晶体管和第二类型的第二晶体管。 第一晶体管可以具有沿着第一线延伸的第一沟道长度，并且第二晶体管可以具有沿着第二线延伸的第二沟道长度。 第一行和第二行可以以不同于22.5°的整数倍的值相交。 在特定实施例中，第一晶体管可以包括上拉晶体管，并且第二晶体管可以包括通过栅极或下拉晶体管。 可以使用一种方法来形成包括栅电极部分的半导体鳍片和导电构件，以实现包括第一和第二晶体管的电子器件。