公开(公告)号：US20250087584A1

公开(公告)日：2025-03-13

申请号：US18666962

申请日：2024-05-17

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dohyung KIM ,  Chulhae PARK ,  Younghwan SON ,  Sukkang SUNG

IPC: H01L23/528 ,  H01L23/522 ,  H01L25/065 ,  H10B41/27 ,  H10B41/35 ,  H10B43/27 ,  H10B43/35 ,  H10B80/00

Abstract: A semiconductor device includes a first semiconductor structure including, circuit devices on a substrate, a lower interconnection structure, and a capacitor structure on a same level as a level of at least a portion of the lower interconnection structure, and a second semiconductor structure on the first semiconductor structure and including a plurality of memory cells arranged three-dimensionally. The lower interconnection structure includes a lower contact, a lower line on the lower contact, an upper contact on the lower line, and an upper line on the upper contact. The capacitor structure includes first electrode structures extending in a first direction and spaced apart from each other in a second direction intersecting the first direction, second electrode structures positioned alternately alongside the first electrode structures and spaced apart from each other in the second direction, and dielectric layers between the first electrode structures and the second electrode structures.

公开(公告)号：US20240219848A1

公开(公告)日：2024-07-04

申请号：US18519497

申请日：2023-11-27

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sanghwan LEE ,  Dohyung KIM ,  Jinhong PARK ,  Hachul SHIN ,  Seongchul HONG

IPC: G03F7/00 ,  G03F1/42

CPC classification number: G03F7/7085 ,  G03F1/42 ,  G03F7/70175 ,  G03F7/702 ,  G03F7/70558 ,  G03F7/70716

Abstract: A mask stage, including a body, a support on a lower surface of the body including an attachable extreme ultraviolet mask, a fiducial mark on the lower surface of the body and spaced apart from the support, and a sensor area including a plurality of measurement sensors configured to measure an energy of a portion of extreme ultraviolet light incident on the body, wherein the sensor area is on the lower surface of the body and is spaced apart from the support in a scan direction of the extreme ultraviolet light, and the plurality of measurement sensors are spaced apart from one another in a direction perpendicular to the scan direction.

公开(公告)号：US20220408550A1

公开(公告)日：2022-12-22

申请号：US17573156

申请日：2022-01-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Dongyoon SEO ,  Hwanwook PARK ,  Dohyung KIM ,  Bora KIM ,  Seungyeong LEE ,  Wonseop LEE ,  Yunho LEE ,  Yejin CHO

IPC: H05K1/02 ,  H05K1/11 ,  G11C11/4076

Abstract: A PCB includes a plurality of layers spaced apart in a vertical direction, a first detection pattern and a second detection pattern and pads connected to the first detection pattern and the second detection pattern. The first detection pattern and the second detection pattern are provided in a respective one of a first layer and a second layer adjacent to each other such that the first detection pattern and the second detection pattern are opposed to each other. The pads are provided in an outmost layer. Each of the first detection pattern and the second detection includes at least one main segment extending in at least one of first and second horizontal directions and a diagonal direction. A time domain reflectometry connected to a pair of pads detects a misalignment of the PCB by measuring differential characteristic impedance of the first detection pattern and the second detection pattern.