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公开(公告)号:US10546898B2
公开(公告)日:2020-01-28
申请号:US16062556
申请日:2016-12-09
Applicant: SONY CORPORATION
Inventor: Yusuke Otake , Toshifumi Wakano
Abstract: This technology relates to an imaging apparatus and an electronic device structured to perform pupil correction appropriately. There are provided a photoelectric conversion film configured to absorb light of a predetermined color component to generate signal charges, a first lower electrode configured to be formed under the photoelectric conversion film, a second lower electrode configured to be connected with the first lower electrode, a via configured to connect the first lower electrode with the second lower electrode, and a photodiode configured to be formed under the second lower electrode and to generate signal charges reflecting the amount of incident light. A first distance between the center of the photodiode and the center of the via at the center of the angle of view is different from a second distance therebetween at an edge of the angle of view. The present technology can be applied to imaging apparatuses.
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22.
公开(公告)号:US20180261635A1
公开(公告)日:2018-09-13
申请号:US15980433
申请日:2018-05-15
Applicant: Sony Corporation
Inventor: Nanako Kato , Toshifumi Wakano
IPC: H01L27/146
CPC classification number: H01L27/1462 , H01L27/1461 , H01L27/14612 , H01L27/14614 , H01L27/14616 , H01L27/14623 , H01L27/14627 , H01L27/14638 , H01L27/1464 , H01L27/14643 , H01L27/14685 , H01L27/14687 , H01L27/14689
Abstract: Provided is a solid-state imaging device including a lamination-type backside illumination CMOS (Complementary Metal Oxide Semiconductor) image sensor having a global shutter function. The solid-state imaging device includes a separation film including one of a light blocking film and a light absorbing film between a memory and a photo diode.
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23.
公开(公告)号:US10002897B2
公开(公告)日:2018-06-19
申请号:US15597843
申请日:2017-05-17
Applicant: Sony Corporation
Inventor: Nanako Kato , Toshifumi Wakano
IPC: H01L27/146
CPC classification number: H01L27/1462 , H01L27/1461 , H01L27/14612 , H01L27/14614 , H01L27/14616 , H01L27/14623 , H01L27/14627 , H01L27/14638 , H01L27/1464 , H01L27/14643 , H01L27/14685 , H01L27/14687 , H01L27/14689
Abstract: Provided is a solid-state imaging device including a lamination-type backside illumination CMOS (Complementary Metal Oxide Semiconductor) image sensor having a global shutter function. The solid-state imaging device includes a separation film including one of a light blocking film and a light absorbing film between a memory and a photo diode.
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公开(公告)号:US09947703B2
公开(公告)日:2018-04-17
申请号:US15113861
申请日:2015-02-05
Applicant: SONY CORPORATION
Inventor: Kenji Azami , Yusuke Otake , Yuko Ohgishi , Toshifumi Wakano , Atsushi Toda
IPC: H01L27/146 , H04N5/374 , H04N5/353
CPC classification number: H01L27/14614 , H01L27/1461 , H01L27/14612 , H01L27/1464 , H01L27/14656 , H01L27/14687 , H04N5/353 , H04N5/374 , H04N5/3745
Abstract: The present disclosure relates to a solid-state imaging device that can be made smaller in size, a method of manufacturing the solid-state imaging device, and an electronic apparatus.The solid-state imaging device includes a photoelectric conversion film that performs photoelectric conversion of light emitted from the back surface side of the semiconductor substrate. Also, in each pixel, a charge accumulation layer is formed to be in contact with the photoelectric conversion film on the back surface of the semiconductor substrate, a transfer path unit is formed to extend from the charge accumulation layer to a point near the front surface of the semiconductor substrate, and a memory unit is disposed near the back surface side of the semiconductor substrate, with a charge transfer gate being interposed between the memory unit and the transfer path unit. Then, the photoelectric conversion film is formed by stacking a layer formed with a material having a great light blocking effect on the back surface of the semiconductor substrate. The present technology can be applied to back-illuminated CMOS image sensors in global shutter mode.
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公开(公告)号:US20180083062A1
公开(公告)日:2018-03-22
申请号:US15812179
申请日:2017-11-14
Applicant: Sony Corporation
Inventor: Nanako Kato , Toshifumi Wakano , Yusuke Tanaka , Yusuke Otake
IPC: H01L27/146
CPC classification number: H01L27/14645 , H01L27/14603 , H01L27/14612 , H01L27/14621 , H01L27/14636 , H01L27/14641 , H04N5/37457
Abstract: The present technology relates to a solid-state image sensor, an imaging device, and electronic equipment configured such that an FD is shared by a plurality of pixels to further miniaturize the pixels at low cost without lowering of sensitivity and a conversion efficiency.In a configuration in which a plurality of pixels are arranged with respect to at least either of one of the OCCFs or one of the OCLs, a floating diffusion (FD) is shared by a sharing unit including a plurality of pixels, the plurality of pixels including pixels of at least either of different OCCFs or different OCLs. The present technology is applicable to a CMOS image sensor.
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公开(公告)号:US20170287957A1
公开(公告)日:2017-10-05
申请号:US15626567
申请日:2017-06-19
Applicant: Sony Corporation
Inventor: Toshifumi Wakano , Fumihiko Koga
IPC: H01L27/146 , H04N5/374 , H04N5/357
CPC classification number: H01L27/14612 , H01L27/14609 , H01L27/14636 , H01L27/1464 , H01L27/14641 , H01L27/14656 , H01L27/14812 , H01L27/14887 , H04N5/357 , H04N5/374 , H04N5/378
Abstract: Provided is a solid state imaging device including: a pixel portion where pixel sharing units are disposed in an array shape and where another one pixel transistor group excluding transfer transistors is shared by a plurality of photoelectric conversion portions; transfer wiring lines which are connected to the transfer gate electrodes of the transfer transistors of the pixel sharing unit and which are disposed to extend in a horizontal direction and to be in parallel in a vertical direction as seen from the top plane; and parallel wiring lines which are disposed to be adjacent to the necessary transfer wiring lines in the pixel sharing unit and which are disposed to be in parallel to the transfer wiring lines as seen from the top plane, wherein voltages which are used to suppress potential change of the transfer gate electrodes are supplied to the parallel wiring lines.
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公开(公告)号:US20160276391A1
公开(公告)日:2016-09-22
申请号:US15170002
申请日:2016-06-01
Applicant: Sony Corporation
Inventor: Toshifumi Wakano
IPC: H01L27/146 , H04N5/3745
CPC classification number: H01L27/14643 , H01L27/14607 , H01L27/14634 , H01L27/14636 , H01L27/1464 , H01L27/14641 , H04N5/37457
Abstract: There is provided a solid-state image sensor including a semiconductor substrate in which a plurality of pixels are arranged, and a wiring layer stacked on the semiconductor substrate and formed in such a manner that a plurality of conductor layers having a plurality of wirings are buried in an insulation film. In the wiring layer, wirings connected to the pixels are formed of two conductor layers.
Abstract translation: 提供了一种固态图像传感器,其包括其中布置有多个像素的半导体衬底,以及堆叠在半导体衬底上并以这样的方式形成的布线层,使得具有多个布线的多个导体层被掩埋 在绝缘膜中。 在布线层中,连接到像素的布线由两个导体层形成。
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公开(公告)号:US09397133B2
公开(公告)日:2016-07-19
申请号:US14946507
申请日:2015-11-19
Applicant: Sony Corporation
Inventor: Toshifumi Wakano
IPC: H01L31/00 , H01L27/146
CPC classification number: H01L27/14643 , H01L27/14607 , H01L27/14634 , H01L27/14636 , H01L27/1464 , H01L27/14641 , H04N5/37457
Abstract: There is provided a solid-state image sensor including a semiconductor substrate in which a plurality of pixels are arranged, and a wiring layer stacked on the semiconductor substrate and formed in such a manner that a plurality of conductor layers having a plurality of wirings are buried in an insulation film. In the wiring layer, wirings connected to the pixels are formed of two conductor layers.
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公开(公告)号:US20160079296A1
公开(公告)日:2016-03-17
申请号:US14946507
申请日:2015-11-19
Applicant: Sony Corporation
Inventor: Toshifumi Wakano
IPC: H01L27/146
CPC classification number: H01L27/14643 , H01L27/14607 , H01L27/14634 , H01L27/14636 , H01L27/1464 , H01L27/14641 , H04N5/37457
Abstract: There is provided a solid-state image sensor including a semiconductor substrate in which a plurality of pixels are arranged, and a wiring layer stacked on the semiconductor substrate and formed in such a manner that a plurality of conductor layers having a plurality of wirings are buried in an insulation film. In the wiring layer, wirings connected to the pixels are formed of two conductor layers.
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公开(公告)号:US11411034B2
公开(公告)日:2022-08-09
申请号:US16853315
申请日:2020-04-20
Applicant: SONY CORPORATION
Inventor: Nanako Kato , Toshifumi Wakano , Yusuke Otake
IPC: H01L27/146 , H01L31/107 , H01L27/30 , H04N5/369
Abstract: A solid-state imaging device according to the present disclosure includes a photoelectric conversion film that is provided outside a semiconductor substrate on a pixel-by-pixel basis, performs photoelectric conversion on light having a predetermined wavelength range, and transmits light having wavelength ranges other than the predetermined wavelength range, and a photoelectric conversion region that is provided inside the semiconductor substrate on a pixel-by-pixel basis and performs photoelectric conversion on the light having the wavelength ranges, the light having the wavelength ranges having passed through the photoelectric conversion film. The photoelectric conversion film includes a film having an avalanche function.
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