High sensitivity semiconductor device for detecting fluid chemical species and related manufacturing method

    公开(公告)号:US11139411B2

    公开(公告)日:2021-10-05

    申请号:US16386184

    申请日:2019-04-16

    Abstract: A device for detecting a chemical species, including a Geiger-mode avalanche diode, which includes a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface. The detection device further includes: a sensitive structure arranged on the anode region and including at least one sensitive region, which has an electrical permittivity that depends upon the concentration of the chemical species; and a resistive region, arranged on the sensitive structure and electrically coupled to the anode region.

    Oscillation frequency measuring system and method for a MEMS sensor

    公开(公告)号:US10479674B2

    公开(公告)日:2019-11-19

    申请号:US15639203

    申请日:2017-06-30

    Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

    Proximity sensor having array of geiger mode avalanche photodiodes for estimating distance of an object to the array based on at least one of a dark current and a rate of current spikes generated in dark conditions
    27.
    发明授权
    Proximity sensor having array of geiger mode avalanche photodiodes for estimating distance of an object to the array based on at least one of a dark current and a rate of current spikes generated in dark conditions 有权
    接近传感器具有阵列的盖格模式雪崩光电二极管,用于基于暗电流和在黑暗条件下产生的电流尖峰率中的至少一种来估计物体与阵列的距离

    公开(公告)号:US09411049B2

    公开(公告)日:2016-08-09

    申请号:US14146175

    申请日:2014-01-02

    CPC classification number: G01S17/026 G01J1/44 G01S17/08

    Abstract: A proximity sensor may include an array of Geiger mode avalanche photodiodes, each including an anode contact and a cathode contact. A common cathode contact may be coupled to the cathode contacts of the array to define a first connection lead at a back side of the array. A common anode collecting grid contact may be coupled to the anode contacts of the array to define a second connection lead of the array. Circuitry may be coupled with the first and second connection leads and configured to sense at least one of a dark current and a rate of current spikes generated in dark conditions, and generate an output signal representing an estimated distance of an object from the array upon the sensing.

    Abstract translation: 接近传感器可以包括Geiger模式雪崩光电二极管阵列,每个包括阳极接触和阴极接触。 公共阴极接触件可以耦合到阵列的阴极触点,以在阵列的背面限定第一连接引线。 公共阳极集电栅极触点可以耦合到阵列的阳极触点以限定阵列的第二连接引线。 电路可以与第一和第二连接引线耦合并且被配置为感测暗电流和在黑暗条件下产生的电流尖峰的速率中的至少一个,并且产生表示物体在阵列上的估计距离的输出信号 感应。

    AVALANCHE PHOTODIODE OPERATING IN GEIGER MODE INCLUDING A STRUCTURE FOR ELECTRO-OPTICAL CONFINEMENT FOR CROSSTALK REDUCTION, AND ARRAY OF PHOTODIODES
    28.
    发明申请
    AVALANCHE PHOTODIODE OPERATING IN GEIGER MODE INCLUDING A STRUCTURE FOR ELECTRO-OPTICAL CONFINEMENT FOR CROSSTALK REDUCTION, AND ARRAY OF PHOTODIODES 审中-公开
    AVALANCHE光电工作在GEIGER模式下运行,包括用于减少CROSSTALK的电光学配置结构和光电子阵列

    公开(公告)号:US20160163906A1

    公开(公告)日:2016-06-09

    申请号:US15045384

    申请日:2016-02-17

    CPC classification number: H01L31/107 H01L27/1443 H01L27/1446 H01L31/02327

    Abstract: An avalanche photodiode includes a cathode region and an anode region. A lateral insulating region including a barrier region and an insulating region surrounds the anode region. The cathode region forms a planar optical guide within a core of the cathode region, the guide being configured to guide photons generated during avalanche. The barrier region has a thickness extending through the planar optical guide to surround the core and prevent propagation of the photons beyond the barrier region. The core forms an electrical-confinement region for minority carriers generated within the core.

    Abstract translation: 雪崩光电二极管包括阴极区域和阳极区域。 包括阻挡区域和绝缘区域的横向绝缘区域围绕阳极区域。 阴极区域在阴极区域的核心内形成平面光导,引导件构造成引导在雪崩期间产生的光子。 阻挡区域具有延伸穿过平面光引导件的厚度以围绕芯部并且防止光子传播超出阻挡区域。 核心形成了在核心内产生的少数载体的电气限制区域。

    AVALANCHE PHOTODIODE OPERATING IN GEIGER MODE INCLUDING A STRUCTURE FOR ELECTRO-OPTICAL CONFINEMENT FOR CROSSTALK REDUCTION, AND ARRAY OF PHOTODIODES
    29.
    发明申请
    AVALANCHE PHOTODIODE OPERATING IN GEIGER MODE INCLUDING A STRUCTURE FOR ELECTRO-OPTICAL CONFINEMENT FOR CROSSTALK REDUCTION, AND ARRAY OF PHOTODIODES 有权
    AVALANCHE光电工作在GEIGER模式下运行,包括用于减少CROSSTALK的电光限制结构和光电子阵列

    公开(公告)号:US20140339398A1

    公开(公告)日:2014-11-20

    申请号:US14270760

    申请日:2014-05-06

    CPC classification number: H01L31/107 H01L27/1443 H01L27/1446 H01L31/02327

    Abstract: An avalanche photodiode includes a cathode region and an anode region. A lateral insulating region including a barrier region and an insulating region surrounds the anode region. The cathode region forms a planar optical guide within a core of the cathode region, the guide being configured to guide photons generated during avalanche. The barrier region has a thickness extending through the planar optical guide to surround the core and prevent propagation of the photons beyond the barrier region. The core forms an electrical-confinement region for minority carriers generated within the core.

    Abstract translation: 雪崩光电二极管包括阴极区域和阳极区域。 包括阻挡区域和绝缘区域的横向绝缘区域围绕阳极区域。 阴极区域在阴极区域的核心内形成平面光导,引导件被配置为引导在雪崩期间产生的光子。 阻挡区域具有延伸穿过平面光引导件的厚度以围绕芯部并且防止光子传播超出阻挡区域。 核心形成了在核心内产生的少数载体的电气限制区域。

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