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公开(公告)号：US20230324678A1
公开(公告)日：2023-10-12
申请号：US18206363
申请日：2023-06-06
Applicant: STMicroelectronics S.r.l.
Inventor： Giorgio ALLEGATO , Sonia COSTANTINI , Federico VERCESI , Roberto CARMINATI
CPC classification number: G02B26/105 , B81C1/00317 , G02B26/0833 , B81C2203/0109 , B81B2201/042 , B81C2203/019 , B81C1/00523
Abstract: A method of making a MEMS device including forming a mirror stack on a handle layer, applying a first bonding layer to the mirror stack, and disposing a substrate on the first bonding layer. The handle layer is removed and a second bonding layer is applied. A cap layer is disposed on the second bonding layer. The mirror stack is formed by disposing a silicon layer on the handle layer, disposing a first insulating layer on the silicon layer, etching portions of the first insulating layer, and depositing a first conductive layer on the first insulating layer. The formation also includes depositing a second insulating layer on the first conductive layer, a portion of the second insulating layer to expose a portion of the first conductive layer exposed, and forming a conductive pad on the exposed portion of the first conductive layer.
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公开(公告)号：US20230288696A1
公开(公告)日：2023-09-14
申请号：US18118333
申请日：2023-03-07
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
CPC classification number: G02B26/0858 , B81B3/0062 , G03B21/008 , B81B2201/042
Abstract: A microelectromechanical-mirror device has a fixed structure defining an external frame delimiting a cavity, an internal frame arranged above the cavity and defining a window, and a tiltable structure with a reflective surface and arranged in the window. Elastically coupled to the internal frame by first and second coupling elastic elements. An actuation structure is coupled to the internal frame to cause the rotation of the tiltable structure around first and second axes. The actuation structure has a first pair of driving arms, elastically coupled to the internal frame and carrying piezoelectric material regions to cause rotation of the tiltable structure around the first axis, and a further pair of driving arms carrying piezoelectric material regions to cause rotation of the tiltable structure around the second axis and interposed between the fixed structure and the internal frame, to which they are elastically coupled by first and second suspension elastic elements.
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公开(公告)号：US20230251556A1
公开(公告)日：2023-08-10
申请号：US18134671
申请日：2023-04-14
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
CPC classification number: G03B21/008 , B81B3/0021 , G02B26/0858 , G02B26/105 , G03B21/28 , B81B2201/042 , B81B2203/0118 , B81B2203/0315 , B81B2203/04 , B81B2203/058 , B81B2201/032
Abstract: Disclosed herein is a microelectromechanical device that features a fixed structure defining a cavity, a tiltable structure elastically suspended within the cavity, and a piezoelectrically driven actuation structure that rotates the tiltable structure about a first rotation axis. The actuation structure includes driving arms with piezoelectric material, elastically coupled to the tiltable structure by decoupling elastic elements that are stiff to out-of-plane movements but compliant to torsional movements. The tiltable structure is elastically coupled to the fixed structure at the first rotation axis using elastic suspension elements, while the fixed structure forms a frame surrounding the cavity with supporting elements. A lever mechanism is coupled between a supporting element and a driving arm.
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公开(公告)号：US20220187593A1
公开(公告)日：2022-06-16
申请号：US17124027
申请日：2020-12-16
Inventor： Christopher TOWNSEND , Roberto CARMINATI
IPC: G02B26/10 , G02B26/08 , G01S17/894
Abstract: An optical module includes an optical detector, laser emitter, and first and second support structures, each carried by a substrate. An optical layer includes first and second fixed portions carried by the support structures, a movable portion affixed between the fixed portions by a spring structure, and a lens system carried by the movable portion, the lens system including an objective lens and a beam shaping lens. The optical layer includes a comb drive with a first comb structure extending from the first fixed portion to interdigitate with a second comb structure extending from the movable portion, a third comb structure extending from the second fixed portion to interdigitate with a fourth comb structure extending from the movable portion, and actuation circuitry applying voltages to the comb structures to cause the movable portion of the optical layer to oscillate back and forth between the fixed portions.
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公开(公告)号：US20210178430A1
公开(公告)日：2021-06-17
申请号：US17118443
申请日：2020-12-10
Applicant: STMICROELECTRONICS S.r.l.
Inventor： Silvia ADORNO , Roberto CARMINATI
Abstract: A micro-machined ultrasonic transducer is proposed. The micro-machined ultrasonic transducer includes a membrane element for transmitting/receiving ultrasonic waves, during the transmission/reception of ultrasonic waves the membrane element oscillating, about an equilibrium position, at a respective resonance frequency. The equilibrium position of the membrane element is variable according to a biasing electric signal applied to the membrane element. The micro-machined ultrasonic transducer further comprises a cap structure extending above the membrane element; the cap structure identifies, between it and the membrane element, a cavity whose volume is variable according to the equilibrium position of the membrane element. The cap structure comprises an opening for inputting/outputting the ultrasonic waves into/from the cavity. The cap structure and the membrane element act as tunable Helmholtz resonator, whereby the resonance frequency is variable according to the volume of the cavity.
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Patent Agency Ranking
26.发明申请公开(公告)号：US20200302205A1
公开(公告)日：2020-09-24
申请号：US16826983
申请日：2020-03-23
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto CARMINATI , Fabio BOTTINELLI
IPC: G06K9/20 , G06K9/00 , G01S17/894
Abstract: A substrate and a covering structure coupled to the substrate form a chamber. The chamber houses an emitter configured to emit a radiation, a resonant reflector, a detector, and a fixed reflector. First and second windows extend through the covering structure. The emitter, the first reflector and the second reflector are reciprocally arranged such that radiation emitted from the emitter is reflected by the fixed reflector towards the MEMS reflector for further reflection towards the first window to form an output signal. The detector and the second window are reciprocally arranged such that an incoming radiation passing through the second window is received by the detector. The electronic module can be used for a 3D sensing application.
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27.发明申请公开(公告)号：US20190196177A1
公开(公告)日：2019-06-27
申请号：US16222027
申请日：2018-12-17
Applicant: STMicroelectronics S.r.l.
Inventor： Roberto CARMINATI , Massimiliano MERLI , Nicolo' BONI
CPC classification number: G02B26/0858 , B81B3/0083 , G02B26/101 , G02B26/105 , H04N1/029 , H04N9/3173
Abstract: A microelectromechanical device includes a body of semiconductor material, which forms a cavity, a mobile structure, and an actuation structure. The actuation structure includes at least one first deformable element which faces the cavity and is mechanically coupled to the body and to the mobile structure, and a piezoelectric-actuation system which can be controlled so as to deform the first deformable element and cause a consequent rotation of the mobile structure. The mobile structure includes a supporting region and at least one first pillar region, the first pillar region being mechanically coupled to the first deformable element, the supporting region being set on the first pillar region and overlying at least part of the first deformable element.
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28.发明申请公开(公告)号：US20190121122A1
公开(公告)日：2019-04-25
申请号：US16225881
申请日：2018-12-19
Applicant: STMicroelectronics S.r.l.
Inventor： Sonia COSTANTINI , Marta CARMINATI , Daniela Angela Luisa GATTI , Laura Maria CASTOLDI , Roberto CARMINATI
Abstract: A micro-electro-mechanical (MEMS) device is formed in a first wafer overlying and bonded to a second wafer. The first wafer includes a fixed part, a movable part, and elastic elements that elastically couple the movable part and the fixed part. The movable part further carries actuation elements configured to control a relative movement, such as a rotation, of the movable part with respect to the fixed part. The second wafer is bonded to the first wafer through projections extending from the first wafer. The projections may, for example, be formed by selectively removing part of a semiconductor layer. A composite wafer formed by the first and second wafers is cut to form many MEMS devices.
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29.发明公开公开(公告)号：US20240043263A1
公开(公告)日：2024-02-08
申请号：US18244479
申请日：2023-09-11
Applicant: STMicroelectronics S.r.l.
Inventor： Luca SEGHIZZI , Nicolo' BONI , Laura OGGIONI , Roberto CARMINATI , Marta CARMINATI
CPC classification number: B81B3/0021 , B81C1/0069 , B81C2201/013 , B81C2201/0156
Abstract: A method for manufacturing an optical microelectromechanical device, includes forming, in a first wafer of semiconductor material having a first surface and a second surface, a suspended mirror structure, a fixed structure surrounding the suspended mirror structure, elastic supporting elements extending between the fixed structure and the suspended mirror structure, and an actuation structure coupled to the suspended mirror structure. The method continues with forming, in a second wafer, a chamber delimited by a bottom wall having a through opening, and bonding the second wafer to the first surface of the first wafer and bonding a third wafer to the second surface of the first wafer so that the chamber overlies the actuation structure, and the through opening is aligned to the suspended mirror structure, thus forming a device composite wafer. The device composite wafer is diced to form an optical microelectromechanical device.
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公开(公告)号：US20230408808A1
公开(公告)日：2023-12-21
申请号：US18208464
申请日：2023-06-12
Applicant: STMicroelectronics S.r.l.
Inventor： Nicolo' BONI , Roberto CARMINATI , Massimiliano MERLI
CPC classification number: G02B26/0858 , B81B2201/042 , B81B3/0062 , G02B26/101
Abstract: A microelectromechanical device has a first tiltable mirror structure extending in a horizontal plane defined by first and second horizontal axes and includes a fixed structure defining a frame delimiting a cavity, a tiltable element carrying a reflecting region, elastically suspended above the cavity having first and second median axes of symmetry, elastically coupled to the frame by first and second coupling structures on opposite sides of the second horizontal axis. The first tiltable mirror structure has a driving structure coupled to the tiltable element to cause rotation around the first horizontal axis. The first tiltable mirror structure is asymmetrical with respect to the second horizontal axis and has, along the first horizontal axis, a first extension on a first side of the second horizontal axis, and a second extension greater than the first extension, on a second side of the second horizontal axis opposite to the first side.
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