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公开(公告)号:US10032886B2
公开(公告)日:2018-07-24
申请号:US15170230
申请日:2016-06-01
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: Jae-Yup Chung , Hyun-Jo Kim , Seong-Yul Park , Se-Wan Park , Jong-Mil Youn , Jeong-Hyo Lee , Hwa-Sung Rhee , Hee-Don Jeong , Ji-Yong Ha
IPC: H01L21/02 , H01L29/66 , H01L27/092 , H01L29/08 , H01L29/78 , H01L21/762 , H01L21/8234 , H01L27/088 , H01L29/165
Abstract: A semiconductor device includes a fin-type pattern including a first short side and a second short side opposed to each other, a first trench in contact with the first short side, a second trench in contact with the second short side, a first field insulating film in the first trench, the first field insulating film including a first portion and a second portion arranged sequentially from the first short side, and a height of the first portion being different from a height of the second portion, a second field insulating film in the second trench, and a first dummy gate on the first portion of the first field insulating film.
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公开(公告)号:US09461173B2
公开(公告)日:2016-10-04
申请号:US14964830
申请日:2015-12-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Ju-Youn Kim , Hyung-Soon Jang , Jong-Mil Youn , Tae-Won Ha
IPC: H01L29/78 , H01L29/423 , H01L21/8238 , H01L27/092 , H01L29/49 , H01L29/51 , H01L29/06 , H01L29/161 , H01L29/20 , H01L29/165
CPC classification number: H01L29/7848 , H01L21/823807 , H01L21/823814 , H01L21/823821 , H01L21/823842 , H01L21/823871 , H01L27/0207 , H01L27/092 , H01L27/0922 , H01L27/0924 , H01L29/0642 , H01L29/0649 , H01L29/0653 , H01L29/161 , H01L29/165 , H01L29/20 , H01L29/42364 , H01L29/42372 , H01L29/42376 , H01L29/495 , H01L29/4966 , H01L29/4983 , H01L29/51 , H01L29/513 , H01L29/517
Abstract: A semiconductor device includes a substrate including a first active region, a second active region and a field region between the first and second active regions, and a gate structure formed on the substrate to cross the first active region, the second active region and the field region. The gate structure includes a p type metal gate electrode and an n-type metal gate electrode directly contacting each other, the p-type metal gate electrode extends from the first active region less than half way toward the second active region.
Abstract translation: 半导体器件包括:衬底,包括第一有源区,第二有源区和第一有源区和第二有源区之间的场区;以及栅极结构,形成在衬底上以跨过第一有源区,第二有源区和场 地区。 栅极结构包括彼此直接接触的p型金属栅电极和n型金属栅极电极,p型金属栅极电极从第一有源区域延伸到第二有源区域的一半以下。
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