Optical disk drive apparatus
    23.
    发明申请
    Optical disk drive apparatus 失效
    光盘驱动装置

    公开(公告)号:US20060161940A1

    公开(公告)日:2006-07-20

    申请号:US11333171

    申请日:2006-01-18

    IPC分类号: G11B7/09 G11B7/085 G11B7/08

    摘要: In order to improve reliability of an optical disk drive apparatus at low cost, a flexible substrate for making connection between an optical pick-up device incorporated in the optical disk drive apparatus and a drive side is divided into a first flexible substrate fixed to the optical pick-up body (for example, upper surface), and a second flexible substrate connected to the first flexible substrate and extending to the drive, wiring conductors formed on a connection end portion of the first flexible substrate and wiring conductors formed on a connection end portion of the second flexible substrate are superposed at a region adjacent an end of the case of the optical pick-up device body, and connected to each other by joining material, and a connection section between the wiring conductors is held down by a cover for protecting the optical pick-up device body.

    摘要翻译: 为了以低成本提高光盘驱动装置的可靠性,用于连接在光盘驱动装置中的光学拾取装置与驱动侧之间的连接的柔性基板被分成固定到光学器件的第一柔性基板 以及连接到第一柔性基板并延伸到驱动器的第二柔性基板,形成在第一柔性基板的连接端部上的布线导体和形成在连接端上的布线导体 第二柔性基板的一部分重叠在与光拾取装置主体的壳体的端部相邻的区域处,并且通过接合材料彼此连接,并且布线导体之间的连接部分被盖盖住 保护光学拾取装置主体。

    Tire pressure monitoring apparatus and process
    25.
    发明授权
    Tire pressure monitoring apparatus and process 失效
    轮胎压力监测仪和过程

    公开(公告)号:US06941803B2

    公开(公告)日:2005-09-13

    申请号:US10760724

    申请日:2004-01-21

    IPC分类号: B60C23/04 B60C23/02

    摘要: A tire pressure monitoring apparatus includes transmitter units provided, respectively, for sensing tire pressures of a vehicle, and receiver units for receiving wireless signals from the transmitter units. A tire pressure monitoring controller registers tire identification code transmitted from each transmitter unit, by measuring signal strengths of wireless signals, and comparing the signal strengths.

    摘要翻译: 轮胎压力监测装置包括分别设置用于感测车辆的轮胎压力的发射机单元和用于从发射机单元接收无线信号的接收机单元。 轮胎压力监测控制器通过测量无线信号的信号强度和比较信号强度来记录从每个发射机单元发射的轮胎识别码。

    Substrate processing apparatus and method of aligning substrate carrier apparatus
    26.
    发明授权
    Substrate processing apparatus and method of aligning substrate carrier apparatus 失效
    基板处理装置和基板载体装置的对准方法

    公开(公告)号:US06915183B2

    公开(公告)日:2005-07-05

    申请号:US10854163

    申请日:2004-05-27

    摘要: The present invention has a first optical detection mark having a predetermined positional coordinate in a lateral direction with respect to a carrier opening of a processing unit through which a carrier apparatus enters and exits, a second optical detection mark having a predetermined positional coordinate in a vertical direction with respect to the carrier opening, and an optical sensor provided on the substrate carrier apparatus for detecting the first or second optical detection mark. The substrate carrier apparatus is rotated by a predetermined angle from a position of the substrate carrier apparatus where the optical sensor detects the first optical detection mark, and the substrate carrier apparatus is moved in the vertical direction by a predetermined amount of movement from a position of the substrate carrier apparatus where the optical sensor detects the second optical detection mark. After the substrate carrier apparatus faces the carrier opening of the processing unit, the substrate carrier apparatus is allowed to enter the processing unit to acquire in advance a precise transfer position when transferring a substrate to a predetermined position on a mounting table in the processing unit.

    摘要翻译: 本发明具有第一光学检测标记,该第一光学检测标记相对于载体装置进出的处理单元的载体开口在横向上具有预定的位置坐标,具有在垂直方向上具有预定位置坐标的第二光学检测标记 相对于载体开口的方向,以及设置在用于检测第一或第二光学检测标记的基板载体装置上的光学传感器。 基板载体装置从光学传感器检测到第一光学检测标记的基板载体装置的位置旋转预定角度,并且基板载体装置从垂直方向移动预定量的运动,从 光传感器检测第二光检测标记的基板载体装置。 在衬底载体装置面向处理单元的载体开口之后,允许衬底载体装置进入处理单元,以在将衬底转移到处理单元中的安装台上的预定位置时提前获得精确的转移位置。

    Substrate processing apparatus and substrate processing method
    27.
    发明授权
    Substrate processing apparatus and substrate processing method 失效
    基板加工装置及基板处理方法

    公开(公告)号:US06746197B2

    公开(公告)日:2004-06-08

    申请号:US10202090

    申请日:2002-07-25

    IPC分类号: B65G4907

    摘要: A substrate processing apparatus comprises a processing section for performing processing for a substrate, a substrate carrier transfer section into/out of which a substrate carrier holding a plurality of substrates is carried, and a substrate transfer mechanism for taking an unprocessed substrate out of the substrate carrier carried into the substrate carrier transfer section to deliver it to the processing section and for receiving a processed substrate from the processing section to deliver it into the substrate carrier placed on the substrate carrier transfer section. The substrate carrier transfer section shifts the position of the substrate carrier between a first position at which the substrate carrier is carried to/from the outside and a second position at which the substrate in the substrate carrier is delivered to/from the substrate transfer mechanism.

    摘要翻译: 基板处理装置包括:用于对基板进行处理的处理部分,承载保持多个基板的基板载体的基板载体转移部分,以及用于将未处理的基板从基板取出的基板转移机构 携带到基板载体传送部分中的载体传送到处理部分并且用于从处理部分接收经处理的基板,以将其传送到放置在基板载体传送部分上的基板载体。 衬底载体传送部分将衬底载体的载体的第一位置/从外部移动到衬底载体的第一位置和衬底载体中的衬底被输送到衬底传送机构的第二位置之间移动衬底载体的位置。

    Substrate processing apparatus
    29.
    发明授权
    Substrate processing apparatus 有权
    基板加工装置

    公开(公告)号:US06319322B1

    公开(公告)日:2001-11-20

    申请号:US09353023

    申请日:1999-07-13

    IPC分类号: B05C1108

    CPC分类号: H01L21/67178 H01L21/67109

    摘要: Temperature regulation is performed at a buffer cassette in which a wafer is temporarily housed before and after being delivered to/from an aligner, or at an inlet-side delivery stage of a portion for delivering a wafer to the aligner, in reference with a state of temperature regulation of the wafer in the aligner, so that the temperature of the wafer can be more accurately regulated on a temperature regulating plate in the aligner in a shorter time. Therefore, circuit patterns can be accurately transferred, and throughput can be improved by speeding up the processing.

    摘要翻译: 在缓冲盒中进行温度调节,在缓冲盒中,参考一个状态,在缓冲盒中暂时容纳晶片,在输送到对准器之前和之后,或在用于将晶片输送到对准器的部分的入口侧输送阶段 在对准器中的晶片的温度调节,使得可以在更短的时间内更精确地调节晶片的温度在校准器中的温度调节板上。 因此,可以精确地传送电路图案,并且可以通过加快处理来提高吞吐量。