Filter having multiple piezoelectric thin-film resonators
    22.
    发明授权
    Filter having multiple piezoelectric thin-film resonators 有权
    具有多个压电薄膜谐振器的滤波器

    公开(公告)号:US07545077B2

    公开(公告)日:2009-06-09

    申请号:US11806129

    申请日:2007-05-30

    IPC分类号: H03H9/00 H01L41/08

    摘要: A filter includes multiple piezoelectric thin-film resonators each having a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode provided on the piezoelectric film so that the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators include a first resonator in which at least a part of an outer curved portion of the piezoelectric film of the first resonator is located further out than an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film. The multiple piezoelectric thin-film resonators includes a second resonator in which at least a part of an outer curved portion of the piezoelectric film of the second resonator substantially coincides with an outer curved portion of a region in which the upper electrode and the lower electrode face each other across the piezoelectric film or is further in than the outer curved portion of the region.

    摘要翻译: 滤波器包括多个压电薄膜谐振器,每个压电薄膜谐振器均具有基板,形成在基板上的下电极,形成在下电极上的压电薄膜和设置在压电薄膜上的上电极,使得上电极和下电极面 彼此横跨压电薄膜。 多个压电薄膜谐振器包括:第一谐振器,其中第一谐振器的压电膜的外弯曲部分的至少一部分位于比上电极和下电极的区域的外弯曲部分更远的位置 电极彼此面对压电薄膜。 多个压电薄膜谐振器包括第二谐振器,其中第二谐振器的压电膜的外部弯曲部分的至少一部分基本上与上电极和下电极面的区域的外弯曲部分重合 彼此隔着压电膜,或者比该区域的外部弯曲部分进一步。

    Piezoelectric thin film resonator, filter, and communication apparatus
    24.
    发明授权
    Piezoelectric thin film resonator, filter, and communication apparatus 有权
    压电薄膜谐振器,滤波器和通信装置

    公开(公告)号:US08085115B2

    公开(公告)日:2011-12-27

    申请号:US12397932

    申请日:2009-03-04

    IPC分类号: H03H9/54 H03H9/13 H03H9/15

    摘要: A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.

    摘要翻译: 压电薄膜谐振器包括基板,形成在基板上的下电极,形成在基板和下电极上的压电膜,以及形成在压电膜上并与下电极相对的上电极,形成在基板上的上电极 压电薄膜。 上部电极具有与主体部分连接的主要部分和延伸部分,与下部电极相对的主要部分和设置在基板和下部电极之间的开口,延伸部分具有与开口和基板相对的部分。

    PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS
    29.
    发明申请
    PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND COMMUNICATION APPARATUS 有权
    压电薄膜共振器,过滤器和通讯设备

    公开(公告)号:US20100060385A1

    公开(公告)日:2010-03-11

    申请号:US12397932

    申请日:2009-03-04

    IPC分类号: H03H9/15

    摘要: A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the substrate and the lower electrode, and an upper electrode formed on the piezoelectric film and opposing the lower electrode, an upper electrode formed on the piezoelectric film. The upper electrode has a main portion and an extended portion connected to the main portion, the main portion opposing the lower electrode and an opening disposed between the substrate and the lower electrode, the extended portion having a portion which opposes the opening and the substrate.

    摘要翻译: 压电薄膜谐振器包括基板,形成在基板上的下电极,形成在基板和下电极上的压电膜,以及形成在压电膜上并与下电极相对的上电极,形成在基板上的上电极 压电薄膜。 上部电极具有与主体部分连接的主要部分和延伸部分,与下部电极相对的主要部分和设置在基板和下部电极之间的开口,延伸部分具有与开口和基板相对的部分。