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公开(公告)号：US20070252476A1
公开(公告)日：2007-11-01
申请号：US11790806
申请日：2007-04-27
申请人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
发明人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
IPC分类号： H01L41/00 , H01L41/047
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。
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公开(公告)号：US07567023B2
公开(公告)日：2009-07-28
申请号：US11790806
申请日：2007-04-27
申请人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
发明人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
IPC分类号： H01L41/08
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。
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公开(公告)号：US20100117762A1
公开(公告)日：2010-05-13
申请号：US12547235
申请日：2009-08-25
申请人： Shinji Taniguchi , Tokihiro Nishihara , Masafumi Iwaki , Masanori Ueda , Go Endo , Tsuyoshi Yokoyama , Takeshi Sakashita , Motoaki Hara
发明人： Shinji Taniguchi , Tokihiro Nishihara , Masafumi Iwaki , Masanori Ueda , Go Endo , Tsuyoshi Yokoyama , Takeshi Sakashita , Motoaki Hara
IPC分类号： H03H9/15
摘要： A resonator includes a substrate, a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. The lower electrode includes a first film provided on the substrate, and a second film that is provided on the first film and has a specific gravity greater than that of the first film. The piezoelectric film is provided on the second film. The upper electrode includes a third film provided on the piezoelectric film, and a fourth film provided on the third film, the third film having a specific gravity greater than that of the fourth film. The third film is thicker than the second film.
摘要翻译： 谐振器包括基板，下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。 下电极包括设置在基板上的第一膜和设置在第一膜上并具有比第一膜大的比重的第二膜。 压电薄膜设置在第二薄膜上。 上电极包括设置在压电膜上的第三膜和设置在第三膜上的第四膜，第三膜的比重大于第四膜的比重。 第三个薄膜比第二个薄膜厚。
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公开(公告)号：US07884527B2
公开(公告)日：2011-02-08
申请号：US11259347
申请日：2005-10-27
申请人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01L41/047
CPC分类号： H03H9/02149 , H03H9/02118 , H03H9/132 , H03H9/174 , H03H2003/0428
摘要： A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an upper electrode that is formed on the piezoelectric film, with the piezoelectric film being partially interposed between the lower electrode and the upper electrode facing each other. In this piezoelectric thin-film resonator, at least a part of the outer periphery of the piezoelectric film interposed between the lower electrode and the upper electrode overlaps the outer periphery of the region formed by the upper electrode and the lower electrode facing each other.
摘要翻译： 压电薄膜谐振器包括：基板; 形成在基板上的下电极; 形成在下电极和基板上的压电膜; 以及形成在所述压电膜上的上电极，所述压电膜被部分插入在所述下电极和所述上电极彼此面对之间。 在该压电薄膜谐振器中，夹在下电极和上电极之间的压电薄膜的外周的至少一部分与由上电极和下电极相对的区域的外周重叠。
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公开(公告)号：US07579761B2
公开(公告)日：2009-08-25
申请号：US11430184
申请日：2006-05-09
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H01L41/047
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.
摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在下电极上的压电膜; 以及形成在压电膜上的上电极。 在压电薄膜谐振器中，上电极具有比下电极更大的膜厚度。
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公开(公告)号：US07498899B2
公开(公告)日：2009-03-03
申请号：US11236861
申请日：2005-09-28
申请人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
发明人： Masafumi Iwaki , Tokihiro Nishihara , Jun Tsutsumi , Shinji Taniguchi , Takeshi Sakashita , Tsuyoshi Yokoyama , Masanori Ueda , Tsutomu Miyashita
CPC分类号： H03H9/564 , H03H7/18 , H03H7/46 , H03H9/0571 , H03H9/706
摘要： A duplexer includes: first and second filters including film bulk acoustic resonators (FBARs) arranged in a ladder form; first and second integrated-passive devices (IPDs) provided between a common terminal and the first and second filters; and a substrate on which the first and second filters and the first and second IPDs are mounted. The substrate includes conductive patterns that realize inductances connected between the first and second filters and ground. The first and second IPDs includes inductors connected to the first and second filters.
摘要翻译： 双工器包括：第一和第二滤波器，包括以梯形布置的薄膜体声共振器（FBAR）; 提供在公共端子与第一和第二滤波器之间的第一和第二集成无源器件（IPD）; 以及其上安装有第一和第二滤光器以及第一和第二IPD的基板。 衬底包括实现连接在第一和第二滤波器和地之间的电感的导电图案。 第一和第二IPD包括连接到第一和第二滤波器的电感器。
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公开(公告)号：US20060255693A1
公开(公告)日：2006-11-16
申请号：US11430184
申请日：2006-05-09
申请人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tokihiro Nishihara , Tsuyoshi Yokoyama , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H01L41/00
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the lower electrode; and an upper electrode that is formed on the piezoelectric film. In the piezoelectric thin-film resonator, the upper electrode has a greater film thickness than the lower electrode.
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公开(公告)号：US20060244553A1
公开(公告)日：2006-11-02
申请号：US11413104
申请日：2006-04-28
申请人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
发明人： Tsuyoshi Yokoyama , Tokihiro Nishihara , Shinji Taniguchi , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Masanori Ueda
IPC分类号： H03H9/56
CPC分类号： H03H9/173 , H03H3/04 , H03H9/132 , H03H9/174 , H03H2003/0428 , H03H2003/0457
摘要： A piezoelectric thin-film resonator includes a lower electrode provided on a substrate, a piezoelectric thin film provided on the lower electrode, and an upper electrode provided on the piezoelectric thin film. A membrane region is defined by a region where the upper electrode and the lower electrode overlap each other to sandwich the piezoelectric thin film therebetween and has an elliptical shape, and the lower electrode is also provided at an outer side of the membrane region in a region in which neither an extraction electrode of the upper electrode nor an extraction electrode of the lower electrode is provided.
摘要翻译： 压电薄膜谐振器包括设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域由上电极和下电极彼此重叠的区域限定，以夹在其间的压电薄膜并具有椭圆形状，并且下电极也设置在膜区域的外侧，区域 其中不设置上电极的引出电极和下电极的引出电极。
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公开(公告)号：US20060091764A1
公开(公告)日：2006-05-04
申请号：US11259347
申请日：2005-10-27
申请人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Jun Tsutsumi , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01L41/08
CPC分类号： H03H9/02149 , H03H9/02118 , H03H9/132 , H03H9/174 , H03H2003/0428
摘要： A piezoelectric thin-film resonator includes: a substrate; a lower electrode that is formed on the substrate; a piezoelectric film that is formed on the lower electrode and the substrate; and an upper electrode that is formed on the piezoelectric film, with the piezoelectric film being partially interposed between the lower electrode and the upper electrode facing each other. In this piezoelectric thin-film resonator, at least a part of the outer periphery of the piezoelectric film interposed between the lower electrode and the upper electrode overlaps the outer periphery of the region formed by the upper electrode and the lower electrode facing each other.
摘要翻译： 压电薄膜谐振器包括：基板; 形成在基板上的下电极; 形成在下电极和基板上的压电膜; 以及形成在所述压电膜上的上电极，所述压电膜被部分插入在所述下电极和所述上电极彼此面对之间。 在该压电薄膜谐振器中，夹在下电极和上电极之间的压电薄膜的外周的至少一部分与由上电极和下电极相对的区域的外周重叠。
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公开(公告)号：US07482738B2
公开(公告)日：2009-01-27
申请号：US11586731
申请日：2006-10-26
申请人： Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
发明人： Shinji Taniguchi , Tsuyoshi Yokoyama , Motoaki Hara , Takeshi Sakashita , Jun Tsutsumi , Masafumi Iwaki , Tokihiro Nishihara , Masanori Ueda
IPC分类号： H01L41/08
CPC分类号： H03H9/132 , H03H3/02 , H03H9/02133 , H03H9/173 , H03H9/568 , H03H2003/021
摘要： A piezoelectric thin-film resonator includes a lower electrode formed on a substrate to define a rounded dome-shaped cavity between the lower electrode and the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. A membrane region is an overlapping region of the lower electrode and the upper electrode interposing the piezoelectric film and a projected area of the cavity onto the substrate includes the membrane region.
摘要翻译： 压电薄膜谐振器包括形成在基板上的下电极，以在下电极和基板之间限定圆顶形空腔，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极。 膜区域是下电极的重叠区域，并且插入压电膜的上电极，并且空腔的投影面积包括膜区域。
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