Assembly and method for transferring imprint lithography templates
    21.
    发明授权
    Assembly and method for transferring imprint lithography templates 失效
    传输压印光刻模板的装配和方法

    公开(公告)号:US06951173B1

    公开(公告)日:2005-10-04

    申请号:US10437476

    申请日:2003-05-14

    摘要: Disclosed is a template transfer assembly and method that features a template transfer substrate, and a template having first and second sides, with the first side facing away from the template transfer substrate and the second side facing the template transfer substrate and having mold pattern formed thereon. Polymerized imprint material is disposed between the second side and the template transfer substrate to fixedly attach the template to the template transfer substrate. The method of transferring an imprint lithography template includes dispensing a selected volume of imprinting fluid onto the template transfer substrate, placing the template upon the selected volume; and converting the imprinting fluid to solid imprint material. The selected volume of imprint material is of sufficient quantity to fixedly attach the template to the template transfer substrate while maintaining a space between the mold and the template transfer substrate.

    摘要翻译: 公开了一种具有模板转移基板的模板转印组件和方法,以及具有第一和第二侧面的模板,其中第一侧背离模板转印基板,第二面朝向模板转印基板并且具有形成在其上的模具图案 。 聚合压印材料设置在第二侧和模板转移衬底之间,以将模板固定地附着到模板转移衬底上。 传送压印光刻模板的方法包括将选定体积的压印流体分配到模板转移衬底上,将模板放置在所选择的体积上; 并将压印流体转换成固体印记材料。 所选择的压印材料量足以将模板固定到模板转移基板上,同时保持模具和模板转印基板之间的空间。

    Keyboard device of an electronic keyboard instrument
    22.
    发明授权
    Keyboard device of an electronic keyboard instrument 失效
    电子键盘仪表的键盘装置

    公开(公告)号:US5204486A

    公开(公告)日:1993-04-20

    申请号:US689972

    申请日:1991-04-23

    IPC分类号: G10B3/12 G10H1/34

    CPC分类号: G10H1/346

    摘要: Disclosed is a keyboard device of an electronic keyboard instrument generating a sound upon actuation of a switch disposed on a main plate by a pushing operation of a keyboard; the device includes a touch element varying in position according to the operation of the keyboard and a guide element for guiding the touch element, so that pushing force of the keyboard may be regulated. Therefore, this device enables a player to feel the same sense of touch as that in a common piano by eliminating a sense of friction which may be exerted upon his finger when pushing down the keyboard.

    Template for room temperature, low pressure micro-and nano-imprint lithography
    25.
    发明授权
    Template for room temperature, low pressure micro-and nano-imprint lithography 有权
    模板用于室温,低压微型和纳米压印光刻

    公开(公告)号:US06696220B2

    公开(公告)日:2004-02-24

    申请号:US09976681

    申请日:2001-10-12

    IPC分类号: G03C176

    摘要: Described are imprint lithography templates, methods of forming and using the templates, and a template holder device. An imprint lithography template may include a body with a plurality of recesses on a surface of the body. The body may be of a material that is substantially transparent to activating light. At least a portion of the plurality of recesses may define features having a feature size less than about 250 nm. A template may be formed by obtaining a material that is substantially transparent to activating light and forming a plurality or recesses on a surface of the template. In some embodiments, a template may further include at least one alignment mark. In some embodiments, a template may further include a gap sensing area. An imprint lithography template may be used to form an imprinted layer in a light curable liquid disposed on a substrate. During use, the template may be disposed within a template holder. The template holder may include a body with an opening configured to receive the template, a support plate, and at least one piezo actuator coupled to the body. The piezo actuator may be configured to alter a physical dimension of the template during use.

    摘要翻译: 描述了压印光刻模板,形成和使用模板的方法以及模板保持装置。 压印光刻模板可以包括在主体的表面上具有多个凹部的主体。 身体可以是对于激活光是基本上透明的材料。 多个凹部的至少一部分可以限定具有小于约250nm的特征尺寸的特征。 可以通过获得对于激活光而基本上透明并在模板的表面上形成多个或多个凹陷的材料来形成模板。 在一些实施例中,模板还可以包括至少一个对准标记。 在一些实施例中,模板还可以包括间隙感测区域。 可以使用压印光刻模板来在设置在基板上的可光固化液体中形成印刷层。 在使用期间,模板可以设置在模板保持器内。 模板保持器可以包括具有构造成接收模板的开口的主体,支撑板和耦合到主体的至少一个压电致动器。 压电致动器可以被配置为在使用期间改变模板的物理尺寸。