Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation
    21.
    发明授权
    Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation 有权
    通过选择性搅拌均匀电解抛光镶嵌结构的方法和装置

    公开(公告)号:US06709565B2

    公开(公告)日:2004-03-23

    申请号:US09967075

    申请日:2001-09-28

    IPC分类号: B23H1100

    摘要: The present invention pertains to apparatus and methods for planarization of metal surfaces having both recessed and raised features, over a large range of feature sizes. The invention accomplishes this by increasing the fluid agitation in raised regions with respect to recessed regions. That is, the agitation of the electropolishing bath fluid is agitated or exchanged as a function of elevation on the metal film profile. The higher the elevation, the greater the movement or exchange rate of bath fluid. In preferred methods of the invention, this agitation is achieved through the use of a microporous electropolishing pad that moves over (either near or in contact with) the surface of the wafer during the electropolishing process. Thus, methods of the invention are electropolishing methods, which in some cases include mechanical polishing elements.

    摘要翻译: 本发明涉及在大范围的特征尺寸上具有凹陷和凸起特征的金属表面的平坦化的装置和方法。 本发明通过增加相对于凹陷区域的凸起区域中的流体搅拌来实现。 也就是说,作为金属膜轮廓上的仰角的函数来搅动或更换电抛光浴液的搅动。 海拔越高,浴液的运动或汇率越高。 在本发明的优选方法中,通过使用在电解抛光过程中在晶片表面上移动(接近或接触)的微孔电解抛光垫来实现该搅拌。 因此,本发明的方法是电抛光方法,其在一些情况下包括机械抛光元件。

    Mixed lithium manganese oxide and lithium nickel cobalt oxide positive electrodes
    22.
    发明授权
    Mixed lithium manganese oxide and lithium nickel cobalt oxide positive electrodes 失效
    混合锂锰氧化物和锂镍钴氧化物正极

    公开(公告)号:US06379842B1

    公开(公告)日:2002-04-30

    申请号:US09413744

    申请日:1999-10-06

    申请人: Steven T. Mayer

    发明人: Steven T. Mayer

    IPC分类号: H01M458

    摘要: Positive electrodes including a lithium nickel cobalt metal oxide are disclosed. The lithium nickel cobalt metal oxides have the general formula LixNiyCOzMnO2, where M is selected from the group consisting of aluminum, titanium, tungsten, chromium, molybdenum, magnesium, tantalum, silicon, and combinations thereof, x is between about 0 and about 1 and can be varied within this range by electrochemical insertion and extraction, the sum of y+z+n is about 1, n ranges between above 0 to about 0.25, y and z are both greater than 0, and the ratio z/y ranges from above 0 to about 1/3. Also disclosed are composite positive electrodes including the above-described lithium nickel cobalt metal oxides together with a lithium manganese metal oxide of the formula LixMn2−rM1rO4, where r is a value between 0 and 1 and M1 is chromium, titanium, tungsten, nickel, cobalt, iron, tin, zinc, zirconium, silicon, or a combination thereof.

    摘要翻译: 公开了包括锂镍钴金属氧化物的正电极。 锂镍钴金属氧化物具有通式LixNiyCOzMnO2,其中M选自铝,钛,钨,铬,钼,镁,钽,硅及其组合,x为约0至约1,以及 可以在该范围内通过电化学插入和提取而变化,y + z + n的和为约1,n在0至约0.25之间,y和z都大于0,z / y的比率范围为 高于0至约1/3。 还公开了包括上述锂镍钴金属氧化物和式LixMn2-rM1rO4的锂锰金属氧化物的复合正电极,其中r是0和1之间的值,M1是铬,钛,钨,镍, 钴,铁,锡,锌,锆,硅或其组合。

    Disk-assisted editing for recorded video material
    23.
    发明授权
    Disk-assisted editing for recorded video material 失效
    用于录制视频素材的磁盘辅助编辑

    公开(公告)号:US06201924B1

    公开(公告)日:2001-03-13

    申请号:US08482905

    申请日:1995-06-07

    IPC分类号: H04N576

    摘要: A disk-assisted system for editing video tapes. Source material from video tapes is logged onto random access storage such as a hard disk drive using of a Macintosh-based computer system. At any one time, only a small portion of the tape material is stored as video frames on the computer disk. By software control, material is cached back and forth between the computer disk and the video tape. Thus editing is accomplished and an edit decision list constructed for compilation of the final video production. This provides the advantage of fast access time for editing of the material which is on the disk while allowing actual physical editing at the end of the project of the actual video tape material. The processes of logging the material onto the disk and editing the final tape are performed automatically.

    摘要翻译: 用于编辑录像带的磁盘辅助系统。 来自视频磁带的源材料被记录到使用基于Macintosh的计算机系统的随机存取存储器例如硬盘驱动器上。 在任何一个时间,只有一小部分磁带材料作为视频帧存储在计算机磁盘上。 通过软件控制,材料在计算机磁盘和录像带之间来回缓存。 因此编辑完成并且为编译最终的视频制作而构造的编辑决定列表。 这提供了用于编辑磁盘上的材料的快速访问时间的优点,同时允许在实际录像带材料的项目结束时的实际物理编辑。 将材料记录到磁盘上并编辑最终磁带的过程自动执行。

    Capacitor with a composite carbon foam electrode
    24.
    发明授权
    Capacitor with a composite carbon foam electrode 失效
    电容器用复合碳泡沫电极

    公开(公告)号:US5898564A

    公开(公告)日:1999-04-27

    申请号:US760852

    申请日:1996-12-02

    IPC分类号: H01B1/04 H01G9/04

    摘要: Carbon aerogels used as a binder for granularized materials, including other forms of carbon and metal additives, are cast onto carbon or metal fiber substrates to form composite carbon thin film sheets. The thin film sheets are utilized in electrochemical energy storage applications, such as electrochemical double layer capacitors (aerocapacitors), lithium based battery insertion electrodes, fuel cell electrodes, and electrocapacitive deionization electrodes. The composite carbon foam may be formed by prior known processes, but with the solid partides being added during the liquid phase of the process, i.e. prior to gelation. The other forms of carbon may include carbon microspheres, carbon powder, carbon aerogel powder or particles, graphite carbons. Metal and/or carbon fibers may be added for increased conductivity. The choice of materials and fibers will depend on the electrolyte used and the relative trade off of system resistivity and power to system energy.

    摘要翻译: 用作颗粒状材料(包括其他形式的碳和金属添加剂)的粘合剂的碳气凝胶被浇铸到碳或金属纤维基材上以形成复合碳薄膜片。 薄膜片用于电化学储能应用,例如电化学双层电容器(aerocapacitors),锂基电池插入电极,燃料电池电极和电容去离子电极。 复合碳泡沫可以通过先前已知的方法形成,但是在该方法的液相期间,即在凝胶化之前加入固体成分。 碳的其他形式可以包括碳微球,碳粉,碳气凝胶粉或石墨碳。 可以加入金属和/或碳纤维以增加导电性。 材料和纤维的选择将取决于所使用的电解质和系统电阻率和功率对系统能量的相对折衷。

    Removal of field and embedded metal by spin spray etching
    25.
    发明授权
    Removal of field and embedded metal by spin spray etching 失效
    通过旋转喷涂蚀刻去除场和嵌入金属

    公开(公告)号:US5486234A

    公开(公告)日:1996-01-23

    申请号:US375054

    申请日:1995-01-19

    CPC分类号: H01L21/76838 H01L21/32134

    摘要: A process of removing both the field metal, such as copper, and a metal, such as copper, embedded into a dielectric or substrate at substantially the same rate by dripping or spraying a suitable metal etchant onto a spinning wafer to etch the metal evenly on the entire surface of the wafer. By this process the field metal is etched away completely while etching of the metal inside patterned features in the dielectric at the same or a lesser rate. This process is dependent on the type of chemical etchant used, the concentration and the temperature of the solution, and also the rate of spin speed of the wafer during the etching. The process substantially reduces the metal removal time compared to mechanical polishing, for example, and can be carried out using significantly less expensive equipment.

    摘要翻译: 通过将合适的金属蚀刻剂滴落或喷涂到旋转的晶片上以均匀地蚀刻金属,以基本上相同的速率将现场金属(例如铜)和金属(例如铜)两者嵌入电介质或基底中的步骤 晶片的整个表面。 通过该处理,在以相同或较小的速率蚀刻电介质中的图案化特征内的金属的同时蚀刻完全场地金属。 该过程取决于所使用的化学蚀刻剂的类型,溶液的浓度和温度,以及蚀刻期间晶片的旋转速度。 例如,与机械抛光相比,该方法显着降低了金属去除时间,并且可以使用显着更便宜的设备进行。

    Video display system with multicolor graphics selection
    28.
    发明授权
    Video display system with multicolor graphics selection 失效
    具有多色图形选择的视频显示系统

    公开(公告)号:US4471465A

    公开(公告)日:1984-09-11

    申请号:US495314

    申请日:1983-05-16

    摘要: A microprocessor based data processing system including a microprocessor, a memory unit, and a display unit is provided with a programmable graphics generator that transfers graphics information from the memory unit to the display unit in response to and control of a set of display instructions also stored in the memory unit. The graphics generator includes a first addressing unit for sequentially accessing the display instructions from the memory unit; a control unit for receiving, storing and decoding such instruction and for issuing supervisory and control signals in response to the binary state of each instruction; a second addressing unit for accessing graphics information from the memory unit in response to the supervisory signals from the control unit; and a third addressing unit for accessing movable object graphics stored in the memory unit.

    摘要翻译: 包括微处理器,存储器单元和显示单元的基于微处理器的数据处理系统设置有可编程图形生成器,其响应于并且控制也存储的一组显示指令将图形信息从存储器单元传送到显示单元 在内存单元中。 图形生成器包括用于从存储器单元顺序访问显示指令的第一寻址单元; 控制单元,用于接收,存储和解码这样的指令,并响应于每条指令的二进制状态发出监控信号; 第二寻址单元,用于响应于来自控制单元的监控信号从存储器单元访问图形信息; 以及用于访问存储在存储器单元中的可移动对象图形的第三寻址单元。

    Method and apparatus for generating moving objects on a video display
screen
    30.
    发明授权
    Method and apparatus for generating moving objects on a video display screen 失效
    用于在视频显示屏上产生移动物体的方法和装置

    公开(公告)号:US4112422A

    公开(公告)日:1978-09-05

    申请号:US749725

    申请日:1976-12-13

    摘要: A method and apparatus for generating moving objects for a video game display. Common apparatus including a microprocessor with RAM provides vertical motion for all objects and separate horizontal position counting hardware horizontal motion for each object. The microprocessor operating on a horizontal line pair basis drives a parallel to serial converter which stores one eight bit line portion of the object to be displayed which in turn is connected to a shift register. When the converted data is read out to the video display by action of the appropriate horizontal position hardware, it is recirculated to provide a repeat on the next horizontal line of the identical data. An effective one line moving resolution is obtained by utilizing another shift register for a one line delay by means of a switch which is set by a latch driven by the microprocessor.

    摘要翻译: 一种用于产生用于视频游戏显示的移动物体的方法和装置。 包括具有RAM的微处理器的通用设备为所有物体提供垂直运动,并且为每个物体分开水平位置计数硬件水平运动。 以水平线对为单位的微处理器驱动一个并行到串行转换器,该串行转换器存储待显示对象的一个​​八位线部分,后者又连接到移位寄存器。 当通过适当的水平位置硬件的动作将转换的数据读出到视频显示器时,它被再循环以在相同数据的下一个水平行上提供重复。 通过利用由微处理器驱动的锁存器设置的开关来利用用于一行延迟的另一移位寄存器来获得有效的一行移动分辨率。