摘要:
The present invention provides a method of cleaning a storage case to be used for storing or transporting mask substrates such as photomasks and photomask blanks, semiconductor substrates such as semiconductor wafers, pellicles, or the like. The present invention: facilitates a regular cleaning operation, can be used also for a storage case of a complicated shape, does not require a large scale equipment or an expensive equipment to facilitate an environmental countermeasure, and provides high cleaning effect. The method of cleaning a storage case polluted by adhesion of a foreign substance of an organic material, an ionic foreign substances or an ionic crystal foreign substance physically absorbed, comprises a step of placing the storage case still in air flow of cleaned air or an inert gas in a temperature range from room temperature to 80° C. for desorbing and removing the foreign substance adhered to the storage case.
摘要:
A braking apparatus for a blind, used to reduce the speed of a shielding member of the blind when it is lifted and lowered, in which weights are stably supported and operated without an increase in the size of the braking apparatus. The braking apparatus has a casing, a rotor rotatably supported with in the casing, and weights adapted to rotate together with the rotor in such a way that they can be in contact with the inner peripheral surface of the casing. A cylindrical shaft portion and weight support portions radially projecting from the peripheral surface of the shaft portion at equal intervals in the circumferential direction are formed on the rotor. One end of each weight is swingably supported by the weight support portion extending over the axial-direction entire length of the weight.
摘要:
Disclosed is a multiprocessor apparatus including a plurality of processors connected to a common bus, a co-processor provided in common to the processors, and an arbitration circuit that arbitrates contention among the processors with respect to use of a resource in the co-processor through a tightly coupled bus by the processors.
摘要:
A method for designing a system LSI includes the step of defining, for each of instructions of the processor, a behavior function description and an instruction description specifying the behavior function description, and the step of synthesizing the instructions by behavior synthesis to define the processor. The behavior function description and the instruction description are separately stored in a database as design resources for the next design of a system LSI. The instruction description is retrieved as accompanied by the associated behavior function description from the database.
摘要:
A method for designing a system LSI includes the step of defining, for each of instructions of the processor, a behavior function description and an instruction description specifying the behavior function description, and the step of synthesizing the instructions by behavior synthesis to define the processor. The behavior function description and the instruction description are separately stored in a database as design resources for the next design of a system LSI. The instruction description is retrieved as accompanied by the associated behavior function description from the database.
摘要:
An optical disc is provided with a plurality of information units arranged in the circumferential direction on the track, each of which has a square shape, and has a predetermined unit length in the circumferential direction and a predetermined unit length in the radial direction. A plurality of surface deformed portions are formed each in one of the information units respectively and comprises a plurality of surface deformed pieces having substantially the same size. The surface deformed portions have at least M kinds of forms, which are different in directions of M kinds from each other by combinations of the surface deformed pieces. Each of the surface deformed portions has a plane figure form substantially symmetrical with respect to a straight line passing through a center point of the information unit, and each of the surface deformed portions having a predetermined optical height or depth.
摘要:
An automatic logic designing method and system in which a control table describing a condition and a behavior corresponding to the condition which express the specification of a computer is inputted and processed in a processor so that a logic circuit having no redundancy which can be easily seen by the designer is designed at a high speed. The control table is converted into the logic circuit whose function is expressed by a detailed Boolean expression. In an instance, selector logics are allocated in consideration of the polarity of the logic. A redundancy detection process or a redundancy logic elimination process is executed for the redundancy logics designated by a redundancy indicate file. A signal name which can be easily understood by the logic designer is formed. An implementing system includes an input control table file, a functional structure converting section of a conditional equation and a behavioral structure, a regular logic expanding processing section, and a redundancy logic elimination processing section, so that the logic circuit formed is outputted to a Boolean expression file.
摘要:
The present invention is directed to a method of forming and removing a resist pattern, used in a semiconductor manufacture.In a first mode of the present invention, an upper resist layer containing germanium is selectively formed on a bottom resist layer and a resist pattern is formed with the upper resist layer as a mask. In a second mode of the present invention, a resist layer formed on a substrate is selectively exposed to introduce a germanium compound into the exposed portions and the above described resist layer is subjected to an anisotropic dry etching to remove the nonexposed portions of the resist layer, whereby forming a resist pattern. Accordingly, the fine pattern can be formed on the substrate in high accuracy by the use of the above described resist pattern. In addition, in the first and the second modes of the present invention, the resist pattern is removed by the use of an acid having an oxidizing power, so that the resist pattern can be easily removed from the substrate.
摘要:
A method of and an apparatus for generating and/or updating a cooccurrence relation dictionary in a natural language processing system such as a machine translation system including an input/output device, a memory for storing therein dictionary information, and a processor for processing an input sentence by use of the dictionary information. In the system, a syntactic analysis is performed on the input sentence, ambiguity is examined on each possible pair of words included in the result of the syntactic analysis, and only pairs of words determined to be free from ambiguity based on the result of the examination is converted into information of a predetermined format so as to register the converted information to the cooccurrence relation dictionary for a source language.
摘要:
An epoxy impregnating resin composition comprising 100 parts by weight of a compound having at least two epoxy groups in one molecule, from 0.1 to 100 parts by weight of an allyl epoxy compound having both allyl and epoxy groups in one molecule and represented by the general formula: ##STR1## where R is hydrogen, halogen or a monovalent organic group, from 30 to 300 parts by weight of a liquid cyclic acid anhydride, and from 5 to 300 parts by weight of a compound having a polymerizable double bond.