摘要:
A pattern defect inspection apparatus comprises a light irradiating portion, a light receive element, a light receive element amplifier, a preparation portion for preparing multi-valued design pattern image data, an offset adjusting portion, a gain adjusting portion, and an inspecting portion. The offset adjusting portion adjusts the offset of the light receive element amplifier such that measurement data of a translucent portion of a pattern on a sample surface corresponds to design pattern image data corresponding to the translucent portion, regarding the translucent portion as a non-transparent portion. The gain adjusting portion adjusts the gain of the light receive element amplifier such that measurement data of a transparent portion of the pattern on the sample surface corresponds to design pattern image data corresponding to the transparent portion.
摘要:
There is provided a pattern generating apparatus in which a figure analyzer analyzes cell data relating to an input figure, figure unfolding sections unfold each basic figure into a figure pattern, the figure unfolding sections are connected in series with pattern memories, the figure unfolding sections and pattern memories are connected in a parallel form to a distribution controller which effects the control operation to cause the figure unfolding sections to effect the unfolding processes for each basic figure unit or each unit obtained by dividing an excessively large figure exceeding a preset threshold value into preset areas, and a readout section having a logical sum circuit for combining partial figure patterns of respective areas from the pattern memories into a single figure pattern outputs the pattern as an output in synchronism with scanning of the input figure.
摘要:
A robot-teaching cassette is used to teach a robot to position a wafer cassette or a substrate cassette on a cassette-supporting base by the robot, without using the wafer cassette or the substrate cassette. The robot-teaching cassette includes a fixing section capable of being fixed in position on the cassette-supporting base, a moving section capable of being held with a robot-chucking section of the robot and moving separately from the fixing section, a light source provided on the fixing section or the moving section, and a target establishing a reference position, for receiving beams emitted by the light source and provided on the fixing section or the moving section.
摘要:
A circular arc illumination apparatus includes a light source section for emitting rays, a condensing optical system for condensing the rays emitted by the light source section, a rotating mirror driven by a motor and reflecting the condensed rays from the condensing optical system, and a circular arc-shaped bending mirror for reflecting the rays reflected by the rotating mirror toward a mask so that the rays become incident on the mask. The apparatus effectively utilizes light emitted by the light source section, exposes an object uniformly, and is practical and economical for exposing a large substrate.
摘要:
A circular arc illumination apparatus includes a light source device, a condensing optical system for condensing rays emitted by the light source device, and a scanning optical system for transmitting the rays to an object to be scanned. The scanning optical system includes a driving device, a rotating mirror driven by the driving device, an angular velocity detecting device for detecting an angular velocity of the rotating mirror, a controller for controlling the driving device based on an angular velocity of the rotating mirror detected by the angular velocity detecting device so as to vary the angular velocity in one time scanning, and a circular arc-shaped bending mirror for reflecting scanning rays reflected by the rotating mirror to the object. The axis of the bending mirror is coincident with a rotary axis of the rotating mirror.
摘要:
A method and an apparatus for fitting bead portions of the tire onto a wheel substantially uniformly and at the same time for filling inner pressure into the tire. A wheel cap-shaped jig in the form of a disc is arranged on the side surface of the wheel. The periphery of the wheel cap-shaped jig progressively reduces outwardly in the rotating axial direction of the wheel. The tire is then obliquely arranged on the wheel through the wheel cap-shaped jig, and the bead portions are radially outwardly expanded along their circumferences so as to assemble onto the rim. An outer cylindrical member having an inclined annular end surface and an inner cylindrical member telescopically arranged in the outer cylindrical member are brought into air-tight contact with the rim and a side surface of the tire, respectively. While inner pressure is filled into the tire through the clearance between the wheel and the bead portion of the tire, the outer cylindrical member is lowered relative to the inner cylindrical member to bring the bead portions into close contact with the rim.
摘要:
A displacement detection device which detects the displacement of a paper sheet in transit in a paper sheet sorter that picks up and transports the paper sheet such as the bank-notes. The displacement detection device includes photo sensors which detect the leading edge of the paper sheet that is being transported, and a photo position detector which detects the distance from the conveyer belt to the side edge of said paper sheet. Each of said photo sensors comprises of a light emitter and a light receiver which are arranged on opposite sides of the paper sheet. The photo position detector is placed on the downstream side in the conveyance direction of the photo sensors, extending perpendicularly to the conveyance line, and comprises a light projector and a light receiver with linear form and equal length arranged symmetrically with respect to the paper sheet. Signals from the photo sensors and photo position detector are processed by a microcomputer to determine the passing interval, the inclination, and the lateral shift of the paper sheet.
摘要:
A silver halide color photographic light-sensitive material is disclosed. The material is comprised of a support base having thereon a silver halide emulsion layer and two distinct types of couplers. One coupler is a diffusing dye-forming coupler which can form a dye capable of having moderate diffusibility in an emulsion layer through coupling with an oxidation product of a color developing agent. The other coupler is a high reaction rate coupler which can form a dye of the same color as that of the diffusing dye-forming coupler and that, has a coupling speed higher than that of the diffusing dye-forming coupler by a factor of 1.3 to 15. By utilizing the two types of couplers in combination with each other the resulting material can provide images with improved graininess over the entire density region of the dye image.
摘要:
A separator for a nonaqueous electrolyte secondary battery that at least includes a resin (A) having a crosslinked structure, which is obtained by irradiating with an energy ray an oligomer polymerizable by irradiation with an energy ray. The separator has an average pore size of 0.005 to 0.5 μm, an air permeability of 50 sec/100 mL or more and less than 500 sec/100 mL, where the air permeability is expressed as a Gurley value, and a thermal shrinkage of less than 2% at 175° C. The separator for a nonaqueous secondary battery can be produced by the production method of the present invention, which includes the steps of: applying to a substrate a separator forming composition containing the oligomer, two or more kinds of solvents having different polarity from each other, and the like; irradiating the applied composition with an energy ray; and drying the energy ray-irradiated composition.