Method of inspecting a pattern formed on a sample for a defect, and an
apparatus thereof
    21.
    发明授权
    Method of inspecting a pattern formed on a sample for a defect, and an apparatus thereof 失效
    检查形成在缺陷的样品上的图案的方法及其装置

    公开(公告)号:US5744381A

    公开(公告)日:1998-04-28

    申请号:US614063

    申请日:1996-03-12

    摘要: A pattern defect inspection apparatus comprises a light irradiating portion, a light receive element, a light receive element amplifier, a preparation portion for preparing multi-valued design pattern image data, an offset adjusting portion, a gain adjusting portion, and an inspecting portion. The offset adjusting portion adjusts the offset of the light receive element amplifier such that measurement data of a translucent portion of a pattern on a sample surface corresponds to design pattern image data corresponding to the translucent portion, regarding the translucent portion as a non-transparent portion. The gain adjusting portion adjusts the gain of the light receive element amplifier such that measurement data of a transparent portion of the pattern on the sample surface corresponds to design pattern image data corresponding to the transparent portion.

    摘要翻译: 图案缺陷检查装置包括光照射部分,光接收元件,光接收元件放大器,用于制备多值设计图案图像数据的准备部分,偏移调整部分,增益调节部分和检查部分。 偏移调整部分调节光接收元件放大器的偏移,使得样本表面上的图案的透光部分的测量数据对应于与半透明部分对应的设计图案图像数据,关于作为不透明部分的半透明部分 。 增益调整部分调节光接收元件放大器的增益,使得样品表面上的图案的透明部分的测量数据对应于对应于透明部分的设计图案图像数据。

    Figure pattern generating apparatus for detecting pattern defects
    22.
    发明授权
    Figure pattern generating apparatus for detecting pattern defects 失效
    用于检测图案缺陷的图形生成装置

    公开(公告)号:US5577171A

    公开(公告)日:1996-11-19

    申请号:US25317

    申请日:1993-03-02

    IPC分类号: G01N21/956 G06K15/00

    CPC分类号: G01N21/95607

    摘要: There is provided a pattern generating apparatus in which a figure analyzer analyzes cell data relating to an input figure, figure unfolding sections unfold each basic figure into a figure pattern, the figure unfolding sections are connected in series with pattern memories, the figure unfolding sections and pattern memories are connected in a parallel form to a distribution controller which effects the control operation to cause the figure unfolding sections to effect the unfolding processes for each basic figure unit or each unit obtained by dividing an excessively large figure exceeding a preset threshold value into preset areas, and a readout section having a logical sum circuit for combining partial figure patterns of respective areas from the pattern memories into a single figure pattern outputs the pattern as an output in synchronism with scanning of the input figure.

    摘要翻译: 提供了一种图形生成装置,其中图形分析器分析与输入图形相关的单元数据,图形展开部分将每个基本图形展开成图形图案,图形展开部分与图案存储器串联连接,图形展开部分和 图案存储器以并行形式连接到分配控制器,分配控制器执行控制操作以使图形展开部分对每个基本图形单元或通过将超过预设阈值的过大的图划分为预设的单位获得的每个单位进行展开处理 区域和具有逻辑和电路的读出部分,用于将来自图案存储器的各个区域的部分图形图案组合为单个图形模式,与输入图形的扫描同步地输出该图案作为输出。

    Robot-teaching cassette
    23.
    发明授权
    Robot-teaching cassette 失效
    机器人教学盒式磁带

    公开(公告)号:US5438418A

    公开(公告)日:1995-08-01

    申请号:US49496

    申请日:1993-04-21

    摘要: A robot-teaching cassette is used to teach a robot to position a wafer cassette or a substrate cassette on a cassette-supporting base by the robot, without using the wafer cassette or the substrate cassette. The robot-teaching cassette includes a fixing section capable of being fixed in position on the cassette-supporting base, a moving section capable of being held with a robot-chucking section of the robot and moving separately from the fixing section, a light source provided on the fixing section or the moving section, and a target establishing a reference position, for receiving beams emitted by the light source and provided on the fixing section or the moving section.

    摘要翻译: 机器人教学盒用于教导机器人将机器人的晶片盒或基片盒定位在盒支撑座上,而不使用晶片盒或衬底盒。 机器人教学用盒具有能够固定在盒支撑基座上的位置的固定部,能够与机器人的机器人夹持部保持并与固定部分分离地移动的移动部,设置有光源 在固定部或移动部上,以及建立基准位置的目标,用于接收由光源发射并设置在固定部或移动部上的光。

    Circular arc illumination apparatus
    24.
    发明授权
    Circular arc illumination apparatus 失效
    圆弧照明装置

    公开(公告)号:US5416630A

    公开(公告)日:1995-05-16

    申请号:US070170

    申请日:1993-06-02

    摘要: A circular arc illumination apparatus includes a light source section for emitting rays, a condensing optical system for condensing the rays emitted by the light source section, a rotating mirror driven by a motor and reflecting the condensed rays from the condensing optical system, and a circular arc-shaped bending mirror for reflecting the rays reflected by the rotating mirror toward a mask so that the rays become incident on the mask. The apparatus effectively utilizes light emitted by the light source section, exposes an object uniformly, and is practical and economical for exposing a large substrate.

    摘要翻译: 圆弧照明装置包括用于发射光线的光源部分,用于聚光由光源部分发射的光线的聚光光学系统,由电动机驱动的反射镜并将来自会聚光学系统的聚光反射的圆形照明装置, 弧形弯曲镜,用于将由旋转镜反射的光线朝向掩模反射,使得光线入射到掩模上。 该装置有效地利用由光源部发出的光,使物体均匀地曝光,对于大型基板的曝光是实用且经济的。

    Circular arc illumination apparatus
    25.
    发明授权
    Circular arc illumination apparatus 失效
    圆弧照明装置

    公开(公告)号:US5390044A

    公开(公告)日:1995-02-14

    申请号:US70686

    申请日:1993-06-02

    CPC分类号: G02B26/10

    摘要: A circular arc illumination apparatus includes a light source device, a condensing optical system for condensing rays emitted by the light source device, and a scanning optical system for transmitting the rays to an object to be scanned. The scanning optical system includes a driving device, a rotating mirror driven by the driving device, an angular velocity detecting device for detecting an angular velocity of the rotating mirror, a controller for controlling the driving device based on an angular velocity of the rotating mirror detected by the angular velocity detecting device so as to vary the angular velocity in one time scanning, and a circular arc-shaped bending mirror for reflecting scanning rays reflected by the rotating mirror to the object. The axis of the bending mirror is coincident with a rotary axis of the rotating mirror.

    摘要翻译: 一种圆弧照明装置,包括:光源装置,用于聚光由光源装置发射的光的聚光光学系统;以及用于将光线传输到被扫描物体的扫描光学系统。 扫描光学系统包括驱动装置,由驱动装置驱动的旋转镜,用于检测旋转镜的角速度的角速度检测装置,用于基于检测到的旋转镜的角速度来控制驱动装置的控制器 通过角速度检测装置对一次扫描中的角速度进行变化;以及圆弧形弯曲镜,用于将由旋转镜反射的扫描光线反射到物体。 弯曲镜的轴线与旋转镜的旋转轴线重合。

    Method for assembling tire and rim and filling inner pressure
    26.
    发明授权
    Method for assembling tire and rim and filling inner pressure 失效
    用于组装轮胎和轮胎并填充内压的方法

    公开(公告)号:US5224532A

    公开(公告)日:1993-07-06

    申请号:US811234

    申请日:1991-12-20

    CPC分类号: B60C25/132 B60C25/14

    摘要: A method and an apparatus for fitting bead portions of the tire onto a wheel substantially uniformly and at the same time for filling inner pressure into the tire. A wheel cap-shaped jig in the form of a disc is arranged on the side surface of the wheel. The periphery of the wheel cap-shaped jig progressively reduces outwardly in the rotating axial direction of the wheel. The tire is then obliquely arranged on the wheel through the wheel cap-shaped jig, and the bead portions are radially outwardly expanded along their circumferences so as to assemble onto the rim. An outer cylindrical member having an inclined annular end surface and an inner cylindrical member telescopically arranged in the outer cylindrical member are brought into air-tight contact with the rim and a side surface of the tire, respectively. While inner pressure is filled into the tire through the clearance between the wheel and the bead portion of the tire, the outer cylindrical member is lowered relative to the inner cylindrical member to bring the bead portions into close contact with the rim.

    Method of and device for detecting displacement of paper sheets
    27.
    发明授权
    Method of and device for detecting displacement of paper sheets 失效
    检测纸张位移的方法和装置

    公开(公告)号:US4630813A

    公开(公告)日:1986-12-23

    申请号:US636290

    申请日:1984-07-31

    CPC分类号: B65H7/14 B65H2701/1912

    摘要: A displacement detection device which detects the displacement of a paper sheet in transit in a paper sheet sorter that picks up and transports the paper sheet such as the bank-notes. The displacement detection device includes photo sensors which detect the leading edge of the paper sheet that is being transported, and a photo position detector which detects the distance from the conveyer belt to the side edge of said paper sheet. Each of said photo sensors comprises of a light emitter and a light receiver which are arranged on opposite sides of the paper sheet. The photo position detector is placed on the downstream side in the conveyance direction of the photo sensors, extending perpendicularly to the conveyance line, and comprises a light projector and a light receiver with linear form and equal length arranged symmetrically with respect to the paper sheet. Signals from the photo sensors and photo position detector are processed by a microcomputer to determine the passing interval, the inclination, and the lateral shift of the paper sheet.

    摘要翻译: 一种位移检测装置,其检测纸张分类器中的纸张在运送中的位移,该纸张分类器拾取并传送诸如纸币的纸张。 位移检测装置包括检测正被输送的纸张的前端的光传感器,以及检测从输送带到纸张的侧边缘的距离的照片位置检测器。 每个所述光传感器包括布置在纸张的相对侧上的光发射器和光接收器。 照片位置检测器被放置在光传感器的输送方向的下游侧,垂直于输送线延伸,并且包括相对于纸张对称布置的直线形式和等长的光投射器和光接收器。 来自光传感器和照相位置检测器的信号由微型计算机处理,以确定纸张的通过间隔,倾斜度和横向偏移。

    Silver halide color photographic light-sensitive material
    28.
    发明授权
    Silver halide color photographic light-sensitive material 失效
    卤化银彩色摄影感光材料

    公开(公告)号:US4567135A

    公开(公告)日:1986-01-28

    申请号:US572048

    申请日:1984-01-19

    IPC分类号: G03C7/32 G03C1/46

    CPC分类号: G03C7/3225 G03C7/32

    摘要: A silver halide color photographic light-sensitive material is disclosed. The material is comprised of a support base having thereon a silver halide emulsion layer and two distinct types of couplers. One coupler is a diffusing dye-forming coupler which can form a dye capable of having moderate diffusibility in an emulsion layer through coupling with an oxidation product of a color developing agent. The other coupler is a high reaction rate coupler which can form a dye of the same color as that of the diffusing dye-forming coupler and that, has a coupling speed higher than that of the diffusing dye-forming coupler by a factor of 1.3 to 15. By utilizing the two types of couplers in combination with each other the resulting material can provide images with improved graininess over the entire density region of the dye image.

    摘要翻译: 公开了一种卤化银彩色照相感光材料。 该材料由其上具有卤化银乳剂层和两种不同类型的成色剂的支撑基底组成。 一种成色剂是一种扩散染料形成成色剂,可以通过与彩色显影剂的氧化产物偶联,形成能够在乳剂层中具有适度扩散性的染料。 另一种成色剂是一种高反应速率的成色剂,可以形成与漫射染料形成成色剂相同颜色的染料,并且其耦合速度高于扩散染料形成成色剂的耦合速度为1.3至 通过使用两种类型的耦合器彼此组合,所得到的材料可以在染料图像的整个密度区域上提供具有改善的颗粒度的图像。

    SEPARATOR FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY, METHOD FOR PRODUCING THE SAME, AND NONAQUEOUS ELECTROLYTE SECONDARY BATTERY
    30.
    发明申请
    SEPARATOR FOR NONAQUEOUS ELECTROLYTE SECONDARY BATTERY, METHOD FOR PRODUCING THE SAME, AND NONAQUEOUS ELECTROLYTE SECONDARY BATTERY 审中-公开
    非电解电解质二次电池的分离器,其制造方法和非电解电解质二次电池

    公开(公告)号:US20130224559A1

    公开(公告)日:2013-08-29

    申请号:US13702985

    申请日:2012-02-23

    IPC分类号: H01M2/16

    摘要: A separator for a nonaqueous electrolyte secondary battery that at least includes a resin (A) having a crosslinked structure, which is obtained by irradiating with an energy ray an oligomer polymerizable by irradiation with an energy ray. The separator has an average pore size of 0.005 to 0.5 μm, an air permeability of 50 sec/100 mL or more and less than 500 sec/100 mL, where the air permeability is expressed as a Gurley value, and a thermal shrinkage of less than 2% at 175° C. The separator for a nonaqueous secondary battery can be produced by the production method of the present invention, which includes the steps of: applying to a substrate a separator forming composition containing the oligomer, two or more kinds of solvents having different polarity from each other, and the like; irradiating the applied composition with an energy ray; and drying the energy ray-irradiated composition.

    摘要翻译: 一种非水电解质二次电池用隔膜,其至少包括具有交联结构的树脂(A),其通过用能量射线照射能量射线可聚合的低聚物而获得。 隔膜的平均孔径为0.005〜0.5μm,透气度为50秒/ 100以上且小于500秒/ 100mL,透气度表示为Gurley值,热收缩率较小 在175℃时为2%以上。非水系二次电池用隔膜可以通过本发明的制造方法制造,其包括以下步骤:将含有该低聚物的隔板形成用组合物涂布在基板上, 具有彼此极性不同的溶剂等; 用能量射线照射施加的组合物; 并干燥能量射线照射的组合物。