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    Integrated electrostatic slider fly height control
    21.
    发明授权
    Integrated electrostatic slider fly height control 失效
    集成静电滑块飞行高度控制

    公开(公告)号：US06876509B2

    公开(公告)日：2005-04-05

    申请号：US10055448

    申请日：2002-01-23

    Applicant: Wayne A. Bonin ,  Zine-Eddine Boutaghou

    Inventor： Wayne A. Bonin ,  Zine-Eddine Boutaghou

    IPC: G11B5/58 ,  G11B5/60 ,  G11B9/00 ,  G11B21/21 ,  G11B21/02

    CPC classification number: B82Y10/00 ,  G11B5/581 ,  G11B5/6005 ,  G11B9/1445 ,  G11B21/21

    Abstract: A disc drive that includes a slider with a field emission sensor that senses fly height. The sensor has an electrode tip disposed on the slider. The electrode tip faces a media surface across a gap. The sensor conducts a tunneling current through the gap and provides an output representing the length of the gap. An actuator adjusts the fly height spacing. A feedback circuit provides an actuator electrical input as a feedback function of the sensor output to control the fly height spacing.

    Abstract translation: 磁盘驱动器，其包括具有感测飞行高度的场致发射传感器的滑块。 传感器具有设置在滑块上的电极头。 电极尖端跨越间隙面向介质表面。 传感器通过间隙传导隧穿电流，并提供表示间隙长度的输出。 执行器调节飞行高度间距。 反馈电路提供致动器电输入作为传感器输出的反馈功能以控制飞行高度间隔。

    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining
    22.
    发明授权
    Laterally supported handle wafer for through-wafer reactive-ion etch micromachining 失效
    用于通过晶片反应离子蚀刻微加工的侧面支撑的处理晶片

    公开(公告)号：US06733681B1

    公开(公告)日：2004-05-11

    申请号：US09707698

    申请日：2000-11-07

    Applicant: Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    Inventor： Roger L. Hipwell, Jr. ,  Lee Walter ,  Wayne A. Bonin ,  Barry D. Wissman ,  Zine-Eddine Boutaghou ,  Barbara J. Ihlow-Mahrer

    IPC: B81C100

    CPC classification number: B81C1/00357 ,  B81C2201/019 ,  Y10T29/49025

    Abstract: A method of handling a wafer for through-wafer plasma etching includes lateral support provided between a handle wafer and a product wafer without wafer bonding or an adhesive film using mating mechanical structures. The product wafer is easily separated from the handle wafer following etching without stripping or cleaning. Because the connection between the wafers is mechanical, not from an adhesive layer/bonded layer, a wafer can be etched, inspected, and subsequently continue to be etched without the hindrance of repeated bonding, separation, and cleaning. A non-bonded support for released devices following a through-etch process is also provided.

    Abstract translation: 用于晶圆等离子体蚀刻处理晶片的方法包括在晶片接合之间提供的手柄晶片和产品晶片之间的侧向支撑，或者使用配合机械结构的粘合膜。 在没有剥离或清洁的情况下，产品晶片在蚀刻之后容易地与处理晶片分离。 因为晶片之间的连接是机械的，而不是粘合层/接合层，所以可以蚀刻，检查晶片并且随后继续蚀刻晶片，而不会重复地进行接合，分离和清洁。 还提供了在通过蚀刻工艺之后的释放器件的非接合支撑。

    Low mass microactuator and method of manufacture
    23.
    发明授权
    Low mass microactuator and method of manufacture 失效
    低质量微致动器及其制造方法

    公开(公告)号：US06731471B1

    公开(公告)日：2004-05-04

    申请号：US09148239

    申请日：1998-09-04

    Applicant: Wayne A. Bonin

    Inventor： Wayne A. Bonin

    IPC: G11B548

    CPC classification number: G11B5/5552

    Abstract: A disc drive includes a disc mounted to a motor, an access arm, and a slider connected to the access arm. A comb-type microactuator is mounted on the slider and a transducer is mounted to the microactuator such that actuation of the microactuator moves the transducer relative to the slider.

    Abstract translation: 磁盘驱动器包括安装到电动机的盘，接入臂和连接到接入臂的滑块。 梳状微型致动器安装在滑块上，传感器安装在微型致动器上，使得微型致动器的致动使换能器相对于滑块移动。

    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam
    24.
    发明授权
    Method of fabricating electrically isolated metal MEMS beams and microactuator incorporating the MEMS beam 有权
    制造电隔离金属MEMS光束的方法和结合MEMS光束的微型致动器

    公开(公告)号：US06674614B2

    公开(公告)日：2004-01-06

    申请号：US10037679

    申请日：2002-01-02

    Applicant: Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    Inventor： Wayne A. Bonin ,  Lee Walter ,  Zine-Eddine Boutaghou

    IPC: G11B2124

    CPC classification number: G11B5/5552

    Abstract: A microactuator is formed by defining stator and rotor regions on a wafer. Isolation barriers are formed in the stator and rotor regions to define a isolation regions. Conductive suspension beam are formed between the first and second isolation regions, and wafer material between the stator and rotor regions is removed to form a stator and a rotor. The microactuator is arranged to position a load device having an electrical component. The suspension beams support the rotor and load device and provide electrical connection between the stator and rotor for the microactuator and/or the load device.

    Abstract translation: 通过在晶片上限定定子和转子区域来形成微致动器。 在定子和转子区域中形成隔离屏障，以限定隔离区域。 在第一和第二隔离区域之间形成导电悬架梁，并且去除定子和转子区域之间的晶片材料以形成定子和转子。 微型致动器布置成定位具有电气部件的负载装置。 悬架梁支撑转子和负载装置，并为微型致动器和/或负载装置提供定子和转子之间的电连接。

    Seal for micro-electro-mechanical devices
    25.
    发明授权
    Seal for micro-electro-mechanical devices 有权
    微电机械密封

    公开(公告)号：US06590747B1

    公开(公告)日：2003-07-08

    申请号：US09507136

    申请日：2000-02-18

    Applicant: Zine-Eddine Boutaghou ,  Wayne A. Bonin

    Inventor： Zine-Eddine Boutaghou ,  Wayne A. Bonin

    IPC: G11B555

    CPC classification number: G11B5/5552

    Abstract: A sealed micro-actuator device for positioning a slider in a disc drive comprises a micro-actuator body, which includes a stator, a rotor, and a motor for moving the rotor with respect to the stator. The micro-actuator device includes means for sealing the micro-actuator body to prevent debris from reaching the motor. In a preferred embodiment, the means for sealing comprises a plurality of cavities formed in the micro-actuator body and an injection molded polymer seal with a plurality of protrusions that extend into the plurality of cavities. A first subset of the plurality of protrusions make contact with the stator, thereby holding the means for sealing in place. A second subset of the plurality of protrusions extend into cavities formed in the rotor. The second subset of protrusions does not contact the rotor. In an alternative preferred embodiment, a first and a second surface of the rotor are recessed from a first and a second surface of the stator, and the means for sealing comprises a first flexible film heat sealed to the first surface of the stator and a second flexible film heat sealed to the second surface of the stator. In another alternative embodiment, a sealed actuator is incorporated into a slider of a disc drive. The slider comprises a slider body, a data transfer element, and an actuator. The data transfer element transfers data to or from a magnetic medium. The actuator is coupled between the slider body and the data transfer element. The actuator is operable to move the data transfer element relative to the slider body. The slider includes sealing means to prevent debris from reaching the actuator.

    Abstract translation: 用于将滑块定位在盘驱动器中的密封微致动器装置包括微致动器本体，其包括定子，转子和用于相对于定子移动转子的电动机。 微致动器装置包括用于密封微致动器主体以防止碎片到达马达的装置。 在优选实施例中，用于密封的装置包括形成在微致动器本体中的多个空腔和具有延伸到多个空腔中的多个突起的注塑聚合物密封件。 多个突起的第一子集与定子接触，从而将用于密封的装置保持在适当位置。 多个突起的第二子集延伸到形成在转子中的空腔中。 突起的第二子集不接触转子。 在替代的优选实施例中，转子的第一和第二表面从定子的第一和第二表面凹入，并且用于密封的装置包括热密封到定子的第一表面的第一柔性膜， 热定形的第二表面热密封的柔性薄膜。 在另一替代实施例中，将密封的致动器并入盘驱动器的滑块中。 滑块包括滑块体，数据传送元件和致动器。 数据传输元件将数据传送到磁介质或从磁介质传送数据。 致动器联接在滑块体和数据传送元件之间。 致动器可操作以相对于滑块体移动数据传送元件。 滑块包括密封装置，以防止碎屑到达致动器。

    Microactuator suspension with multiple narrow beams
    26.
    发明授权
    Microactuator suspension with multiple narrow beams 有权
    具有多个窄梁的微型制动器悬架

    公开(公告)号：US06282066B1

    公开(公告)日：2001-08-28

    申请号：US09148178

    申请日：1998-09-04

    Applicant: Wayne A. Bonin

    Inventor： Wayne A. Bonin

    IPC: G11B555

    CPC classification number: G11B21/08 ,  G11B5/5552

    Abstract: A microactuator suspension having a stator portion for connection to a gimbal, a rotor portion for connection to a slider and a plurality of microbeams connected therebetween. The microbeams have an aspect ratio of 30:1, 60:1, 90:1, 120:1 or more. The microbeams may be manufactured from a material that is different than the material of the stator, such as Titanium, Tungsten, Molybdenum, Nickel or Silicon Nitride.

    Abstract translation: 具有用于连接到万向节的定子部分，用于连接到滑块的转子部分和连接在其间的多个微束的微型致动器悬架。 微束具有30：1，60：1，90：1，120：1或更高的长宽比。 微束可以由不同于定子的材料的材料制成，例如钛，钨，钼，镍或氮化硅。

    Magnetic data storage system
    28.
    发明授权
    Magnetic data storage system 失效
    磁数据存储系统

    公开(公告)号：US4580178A

    公开(公告)日：1986-04-01

    申请号：US593869

    申请日：1984-03-27

    Applicant: Edward R. Wuori ,  Wayne A. Bonin

    Inventor： Edward R. Wuori ,  Wayne A. Bonin

    IPC: G11B5/00 ,  G11B5/027 ,  G11B5/09

    CPC classification number: G11B5/09 ,  G11B5/027 ,  G11B2005/0029

    Abstract: A magnetic data storage system includes a storage medium wherein bits of data are stored by perpendicular recording with a density sufficiently high to provide for the simultaneous presence of more than one data bit beneath the magnetic sensing element of a read head. A relative motion is imparted between the head and the medium during playback of data, and the sensed magnetic field changes produce sensor signals. The sensor signals are delayed by one or more delay elements providing delay times which differ from each other by one increment of delay, such delay increment being equal to the amount of time elapsed by a stored data bit passing a point on the pole piece of the read head. By summing together the respective delayed signals, cancellation of the spurious response is obtained so that the stored data can be retrieved.

    Abstract translation: 磁数据存储系统包括存储介质，其中通过具有足够高的密度的垂直记录来存储数据位，以提供同时存在读头的磁感测元件下方的多于一个数据位的存储介质。 在重放数据期间在头部和介质之间施加相对运动，并且感测的磁场变化产生传感器信号。 传感器信号被延迟一个或多个延迟元件延迟，延迟时间彼此相差一个延迟增量，这样的延迟增量等于通过存储的数据位经过的时间量 读头 通过将各个延迟信号相加在一起，获得了寄生响应的消除，从而可以检索存储的数据。

    Co-located microactuator lever assembly
    29.
    发明授权
    Co-located microactuator lever assembly 失效
    同轴微致动器杆组件

    公开(公告)号：US07466520B2

    公开(公告)日：2008-12-16

    申请号：US10960266

    申请日：2004-10-07

    Applicant: Andrew D. White ,  Wayne A. Bonin ,  Zine-Eddine Boutaghou

    Inventor： Andrew D. White ,  Wayne A. Bonin ,  Zine-Eddine Boutaghou

    IPC: G11B5/56 ,  G11B21/21

    CPC classification number: G11B5/5552 ,  G11B5/4826 ,  G11B5/4873

    Abstract: A suspension comprises a load beam having a leading portion and a trailing portion, a gimbal sheet mounted to the leading portion and forming a first pad, a second pad, and a displacement lever assembly including at least a first lever arm having a first end adjacent and connected to the first pad and a second end opposite the first end and connected to the second pad. The displacement lever assembly is configured to translate a linear displacement of the first pad to a differing displacement of the second pad. The suspension comprises a piezoelectric element attached to the first pad and extending across the second pad.

    Abstract translation: 悬架包括具有引导部分和后部的负载梁，安装到引导部分并形成第一焊盘，第二焊盘和位移杆组件的万向片，其包括至少第一杠杆臂，所述第一杠杆臂具有相邻的第一端 并且连接到第一焊盘和与第一端相对的第二端并且连接到第二焊盘。 位移杆组件构造成将第一垫的线性位移平移到第二垫的不同位移。 悬架包括附接到第一焊盘并延伸穿过第二焊盘的压电元件。

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