公开(公告)号：US20090103211A1

公开(公告)日：2009-04-23

申请号：US11877570

申请日：2007-10-23

申请人： Tsung Yuan Chen ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Changqing Shi

发明人： Tsung Yuan Chen ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Changqing Shi

IPC分类号： G11B5/127 ,  G11B5/11

CPC分类号： G11B5/3116 ,  G11B5/1278

摘要： A magnetic write head for perpendicular magnetic data recording having a trailing shield with a two step throat height. The trailing shield is formed over a non-magnetic bump that forms a notch in the leading edge of the trailing shield. This notch defines a first, smaller throat height closest to the write pole and a larger throat height away from the write pole. The smaller throat height near the write pole prevents excess magnetic flux from leaking to the write pole, thereby ensuring efficient strong write field. The larger trailing shield throat height away from the write pole prevents magnetic saturation oft the trailing shield and also greatly facilitates manufacturing avoiding problems related to variations and deviations in manufacturing processes used to define the trailing shield.

摘要翻译： 用于垂直磁数据记录的磁写头，具有具有两段喉部高度的后挡板。 后挡板形成在非磁性凸块上，该非磁性凸块在后挡板的前缘形成凹口。 该凹口限定了最靠近写入极的第一较小的喉部高度和远离写入极的较大的喉部高度。 写极附近的较小的喉部高度可防止过多的磁通量泄漏到写入极，从而确保有效的强写入场。 远离写入极的较大的后屏蔽喉部高度防止尾部屏蔽层的磁饱和，并且还极大地有助于制造，避免与用于限定后屏蔽的制造工艺中的变化和偏差相关的问题。

公开(公告)号：US07506431B2

公开(公告)日：2009-03-24

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) is deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的ALD层的一部分。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US20080271308A1

公开(公告)日：2008-11-06

申请号：US11744022

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127 ,  C23C14/00

CPC分类号： G11B5/3163 ,  G11B5/3116 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method allows the write head to be formed with a write pole having a concave trailing edge. The method further allows the amount of concavity of the trailing edge to be accurately and carefully controlled both within a wafer and between wafers. A write pole is formed using a mask that includes a hard mask, a RIEable layer and an endpoint detection layer. A layer of non-magnetic material (ALD layer) h deposited, and then, an ion milling process is used to remove a portion of the ALD layer disposed over the write pole and mask. A reactive ion etch process is performed to remove the RIEable layer leaving the ALD layer to form non-magnetic side walls with upper portions that extend above the write pole. Another ion milling is then performed, preferably at an angle relative to normal, such that shadowing from the upper portions of the non-magnetic side walls causes the ion milling to form the write pole with a concave trailing edge.

摘要翻译： 一种用于制造用于垂直磁记录的磁写头的方法。 该方法允许写头形成有具有凹形后缘的写入极。 该方法还允许在晶片内和晶片之间精确地和仔细地控制后缘的凹陷量。 使用包括硬掩模，RIEable层和端点检测层的掩模形成写入极。 沉积一层非磁性材料（ALD层），然后使用离子铣削工艺去除设置在写入极和掩模上的一部分ALD层。 执行反应离子蚀刻工艺以去除离开ALD层的RIEable层以形成非磁性侧壁，其上部在写极上方延伸。 然后进行另一个离子铣削，优选以相对于法线成一角度，使得来自非磁性侧壁的上部的阴影使得离子铣削形成具有凹形后缘的写入极。

公开(公告)号：US07576951B2

公开(公告)日：2009-08-18

申请号：US11411556

申请日：2006-04-25

申请人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

发明人： Donald G. Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien David Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aaron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。

公开(公告)号：US07848054B2

公开(公告)日：2010-12-07

申请号：US11744054

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic write head having a conformal wrap around trailing shield. The write head includes a write pole that can be configured with a trapezoidal shape as viewed from the Air Bearing Surface (ABS) and which includes a wrap around trailing magnetic shield. The magnetic shield has a trailing portion that is separated from the leading edge of the write pole by a non-magnetic trailing gap, and has side shield portions that are separated from first and second side portions of the write pole by first and second non-magnetic side gaps. The magnetic shield can be configured with notches at either side of the trailing portion of magnetic shield. These notches can extend in the trailing direction by a distance that is preferably ¼ to 1 times the trailing gap thickness. The width of the straight, trailing portion of the shield is preferable ½ to 1 times of the main pole width.

摘要翻译： 垂直磁性写头，其具有围绕后屏蔽的保形包裹。 写入头包括写入极，其可以被配置为从空气轴承表面（ABS）观察到的梯形形状，并且包括围绕尾部磁屏蔽的包裹。 磁屏蔽具有通过非磁性拖尾间隔与写入极的前端分离的后部，并且具有通过第一和第二非间隙与写入极的第一和第二侧部分离的侧面屏蔽部分， 磁侧隙。 磁屏蔽可以在磁屏蔽的尾部的任一侧配置有凹口。 这些凹口可以在拖尾方向上延伸一段距离，优选为后缘间隙厚度的1/4至1倍。 屏蔽的直的后部的宽度优选为主极宽度的1/2至1倍。

公开(公告)号：US07083738B2

公开(公告)日：2006-08-01

申请号：US10632631

申请日：2003-07-31

申请人： Edward Hin Pong Lee ,  Aron Pentek ,  Wen-Chien David Hsiao

发明人： Edward Hin Pong Lee ,  Aron Pentek ,  Wen-Chien David Hsiao

IPC分类号： B29D11/00 ,  H01L21/00

CPC分类号： G11B5/1877 ,  G11B5/3163

摘要： A method for fabricating a magnetic head using a modified P1 cap process. A first pole is formed. A cap is formed above the first pole. A gap layer is formed above the cap. A second pole is formed above the gap layer. Exposed portions of the gap layer are removed. The cap and first pole are milled for creating a shoulder of the first pole tapered upwardly towards the cap. Another method for fabricating a magnetic head includes forming a first pole, forming a gap layer above the first pole, forming a second pole above the gap layer, forming a layer of photoresist above the second pole, patterning the photoresist such that the photoresist covers areas of the gap layer positioned towards the second pole, removing exposed portions of the gap layer, removing part of exposed portions of the first pole for forming steps in the first pole on opposite sides of the photoresist, removing the photoresist, and milling for creating a shoulder of the first pole tapering upwardly towards the cap.

摘要翻译： 一种使用改进的P 1帽工艺制造磁头的方法。 形成第一极。 在第一极上方形成帽。 在盖上形成间隙层。 在间隙层上方形成第二极。 去除间隙层的露出部分。 铣头和第一杆被铣削以产生第一杆的肩部向上朝向帽部锥形。 制造磁头的另一方法包括形成第一极，在第一极上方形成间隙层，在间隙层上方形成第二极，在第二极上形成光致抗蚀剂层，使光致抗蚀剂覆盖区域 间隔层定位成朝向第二极，去除间隙层的暴露部分，去除第一极的暴露部分的一部分，以在光致抗蚀剂的相对侧上的第一极中形成台阶，去除光致抗蚀剂，并研磨以产生 第一杆的肩部朝向帽部向上逐渐变细。

公开(公告)号：US08031432B2

公开(公告)日：2011-10-04

申请号：US11955277

申请日：2007-12-12

申请人： Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Jennifer Ai-Ming Leung

发明人： Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Jennifer Ai-Ming Leung

IPC分类号： G11B5/17 ,  G11B5/40

CPC分类号： G11B5/3123 ,  G11B5/3136

摘要： A magnetic write head having a write coil configured to dissipate heat away from the write head to minimize thermal protrusion. The write coil is formed as a helical coil having upper and lower leads that are connected by electrically conductive studs formed therebetween. The first and leads extend beyond the studs to form heat conducting fins that conduct heat away from the write head where it can be dissipated into surrounding structure.

摘要翻译： 具有写入线圈的磁写头，该写入线圈构造成从写入头部散发热量以最小化热突起。 写入线圈形成为螺旋线圈，其具有通过在它们之间形成的导电柱而连接的上引线和下引线。 第一和引线延伸超过螺柱，以形成导热翅片，其将热量从写入头传导到可以被散发到周围结构中。

公开(公告)号：US07835111B2

公开(公告)日：2010-11-16

申请号：US11675516

申请日：2007-02-15

申请人： Eric Wayne Flint ,  Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Michael Ming Hsiang Yang

发明人： Eric Wayne Flint ,  Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Michael Ming Hsiang Yang

IPC分类号： G11B5/147

CPC分类号： G11B5/3146 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116

摘要： A magnetic write head for perpendicular magnetic recording that is resistant to write pole and trailing shield protrusion. The write pole includes a magnetic return pole that is magnetically connected with the trailing shield, the return pole being resistant to deformation or recession such as from mechanically abrasive slider cleaning operations such as soda blast.

摘要翻译： 用于垂直磁记录的磁写头，耐写写极和后屏蔽突起。 写入极包括与后挡板磁连接的磁返回极，返回极抵抗变形或衰退，例如机械研磨的滑块清洁操作，例如苏打爆炸。

公开(公告)号：US07633711B2

公开(公告)日：2009-12-15

申请号：US11672483

申请日：2007-02-07

申请人： Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Jennifer Ai-Ming Loo

发明人： Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Jennifer Ai-Ming Loo

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3123 ,  G11B5/315

摘要： A magnetic write head for perpendicular magnetic recording that has a helical coil design that reduces manufacturing complexity and increases cycle time for manufacture. The write head includes a write pole and a helical write coil having upper coil portions that pass above the write pole and lower coil portions that pass below the write pole. The upper and lower coil portions are connected with another by connection studs. Whereas the upper and lower coil portions are constructed of a non-magnetic, electrically conductive material such as Cu, the connection studs are constructed of a magnetic, electrically conductive material such as NiFe. By constructing the connection studs of a magnetic material, they can be constructed in the same manufacturing steps used to manufacture various magnetic structures of the write head, such as a magnetic shaping layer and/or the back gap. This greatly simplifies the manufacture of the write head by eliminating many additional manufacturing steps that would otherwise be required to manufacture a helical coil having non-magnetic connection studs.

摘要翻译： 一种用于垂直磁记录的磁头，具有螺旋线圈设计，可降低制造复杂性并增加制造周期。 写入头包括写入极和螺旋写入线圈，其具有通过写入磁极之下的上部线圈部分和通过写入极下方的下部线圈部分。 上下线圈部分通过连接柱连接。 尽管上部和下部线圈部分由诸如Cu的非磁性导电材料构成，但是连接柱由诸如NiFe的磁性导电材料构成。 通过构造磁性材料的连接柱，它们可以以用于制造写入头的各种磁性结构的相同的制造步骤，例如磁性成形层和/或后部间隙来构造。 这通过消除制造具有非磁性连接柱螺旋线圈的另外制造步骤而大大简化了写入头的制造。

公开(公告)号：US20090244787A1

公开(公告)日：2009-10-01

申请号：US12059539

申请日：2008-03-31

申请人： Alan Paul Giorgi ,  Wesley LeRoy Hillman ,  Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Tony Mello ,  Randall George Simmons

发明人： Alan Paul Giorgi ,  Wesley LeRoy Hillman ,  Wen-Chien David Hsiao ,  Edward Hin Pong Lee ,  Tony Mello ,  Randall George Simmons

IPC分类号： G11B5/33

CPC分类号： G11B5/1278 ,  G01R31/31707 ,  G01R31/31718 ,  G01R31/318511 ,  G01R31/31912 ,  G01R31/3193 ,  G11B20/1816 ,  G11B20/1879 ,  G11B2020/1823 ,  G11B2220/2516

摘要： A system according to one embodiment comprises a head having a perpendicular writer, the writer comprising: a first pole structure having a pole tip positioned towards an air bearing surface of the head, the first pole structure having a portion that is recessed from an extent of the pole tip closest the air bearing surface; a return pole having an end positioned towards the air bearing surface of the head; and a gap between the first pole structure and the return pole, wherein the recessed portion is recessed less than about 1.25 microns relative to the extent of the pole tip closest the air bearing surface. Additional embodiments as well as methods are presented.

摘要翻译： 根据一个实施例的系统包括具有垂直写入器的头部，所述写入器包括：第一极结构，其具有朝向头部的空气支承表面定位的极尖，所述第一极结构具有从一定程度上凹陷的部分， 极尖最靠近空气轴承表面; 具有朝向头部的空气支承表面定位的端部的返回杆; 以及第一极结构和返回极之间的间隙，其中凹部相对于最靠近空气支承表面的极尖的程度凹陷到小于约1.25微米。 提出了其他实施例以及方法。