-
公开(公告)号：US06561198B1
公开(公告)日：2003-05-13
申请号：US09623456
申请日：2000-11-06
IPC分类号： C25F500
CPC分类号： C23G5/00 , B08B7/0035
摘要： In this method for the surface treatment of a metal part (12) for the purpose of deoxidizing it and/or cleaning it, a sealed chamber (16), in which the part to be treated is placed, is filled with a low-pressure reducing gas mixture, a static magnetic field is created in a region of the chamber (16) separate from the region in which the part (12) to be treated is placed and the gas mixture is excited by means of an electromagnetic wave injected into the chamber (16) so as to generate a treatment plasma in the gas, the intensity of the static magnetic field corresponding to electron cyclotron resonance established in the chamber in a distributed manner.
摘要翻译： 在用于对其进行脱氧和/或清洁的金属部件（12）的表面处理的方法中，将待处理部件放置在其中的密封室（16）填充有低压 减少气体混合物，在与被处理部分（12）放置的区域分离的腔室（16）的区域中产生静态磁场，并且气体混合物通过注入到所述待处理的电磁波中而被激发 （16），以在气体中产生处理等离子体，以分布式的方式在腔室中建立对应于电子回旋共振的静磁场的强度。
-
22.发明授权Storage box for an object to be protected against physicochemical contamination 失效用于防止物理化学污染的物体的储存箱公开(公告)号：US06214425B1
公开(公告)日：2001-04-10
申请号：US08860471
申请日：1997-09-29
申请人： Philippe Spinelli , Claude Doche , Jean-Christophe Rostaing , François Coeuret , Sylvain Scotto D'Apolinia
发明人： Philippe Spinelli , Claude Doche , Jean-Christophe Rostaing , François Coeuret , Sylvain Scotto D'Apolinia
IPC分类号： B05D304
CPC分类号： H01L21/67353 , H01L21/67366 , Y10T428/1352 , Y10T428/1379 , Y10T428/1383 , Y10T428/265
摘要： The invention relates to a storage box for an object that is to be protected from physicochemical contamination. The storage box is intended to have low weight, good mechanical strength, a good electrical condition, with a low degassing rate in time with prevention of diffusion of gasses from the external atmosphere into the interior of the box. The inner and/or outer surface of the box's walls are coated with at least one protective layer. The box may be used to store silicon wafers.
摘要翻译： 本发明涉及一种用于物体的储存箱，其被保护免受物理化学污染。 存储箱旨在具有重量轻，机械强度好，电气条件好，并且具有低的脱气速度，同时防止气体从外部大气扩散到箱体内部。 箱壁的内表面和/或外表面涂覆有至少一个保护层。 该盒可用于存储硅晶片。
-
23.发明授权公开(公告)号：US06868312B2
公开(公告)日：2005-03-15
申请号：US09921786
申请日：2001-08-06
IPC分类号： G01J4/04 , C23C16/52 , G01B11/06 , G01N21/21 , G02B1/10 , H01L21/205 , H01L21/66 , H01H43/00
CPC分类号： G01B11/0641 , G01N21/211 , G01N2021/213
摘要： Method for real-time control of the fabrication of a thin-film structure comprising a substrate by ellipsometric measurement in which: variables directly linked to the ellipsometric ratio ρ=tanΨ exp(iΔ) are measured; and the said variables are compared with reference values. The comparison relates to the length of the path traveled at a time t in the plane of the variables with respect to an initial point at time t0, for each layer participating in the thin-film structure.
摘要翻译： 用于通过椭圆测量实现对包括基底的薄膜结构的制造进行实时控制的方法，其中测量直接连接到椭圆比r0 = tanPsi exp（iDelta）的变量; 并将所述变量与参考值进行比较。 该比较涉及对于参与薄膜结构的每一层，相对于时间t0的初始点在变量平面中的时间t行进的路径的长度。
-
24.发明授权公开(公告)号：US06328801B1
公开(公告)日：2001-12-11
申请号：US09019781
申请日：1998-02-06
IPC分类号： B05C1100
CPC分类号： B01D53/04 , B01D2253/108 , B01D2253/112 , B01D2258/0216 , Y02C20/10 , Y10S55/30 , Y10S118/90 , Y10S261/27
摘要： Provided is a novel method of and system for recovering and recirculating a deuterium-containing gas. According to the inventive method, a deuterium-containing feed gas is introduced into a chamber. An exhaust gas containing deuterium is removed from the chamber. The deuterium concentration of the exhaust gas is adjusted to a predetermined value, thereby producing a concentration-adjusted gas stream. Finally, the concentration-adjusted gas stream is introduced into the chamber as the deuterium-containing feed gas. The invention makes the use of deuterium, for example, in the mass production of semiconductor devices, commercially feasible.
摘要翻译： 提供了用于回收和再循环含氘气体的新方法和系统。 根据本发明的方法，将含氘原料气体引入室中。 从室中除去含有氘的废气。 将废气的氘浓度调整为规定值，由此生成浓度调节气体流。 最后，将浓度调节的气流作为含氘原料气体引入该室。 本发明例如在半导体器件的批量生产中可以使用氘，这在商业上是可行的。
-
25.发明授权Process for the preparation of an optical structure and optical structure obtained thereby 失效制备由此获得的光学结构和光学结构的方法
公开(公告)号：US5350605A
公开(公告)日：1994-09-27
申请号：US148422
申请日：1993-11-08
CPC分类号： G02B1/105
摘要： The invention concerns the preparation of an optical structure. On a polymeric substrate there is first provided a surface activation, and the deposit of a layer of SiO.sub.2, 2000 .ANG. thick after which there is a deposit of a plurality of functional layers and finally a deposit of SiO.sub.2, 3 microns thick followed by a deposit of Si.sub.3 N.sub.4 /SiO.sub.x N.sub.y 3 microns thick, the latter being produced under radio-frequency polarization. The thus obtained optical structure has properties of adhesiveness, resistance to abrasion and to thermal impacts.
摘要翻译： 本发明涉及光学结构的制备。 首先在聚合物基材上提供表面活化，并沉积SiO 2，2000 ANGSTROM层，然后沉积多个功能层，最后沉积SiO 2，3微米厚，随后沉积 的Si 3 N 4 / SiO x N 3微米厚，后者是在射频极化下产生的。 由此获得的光学结构具有粘合性，耐磨性和热冲击的性质。
-
26.发明授权
公开(公告)号：US5246768A
公开(公告)日：1993-09-21
申请号：US694740
申请日：1991-05-02
CPC分类号： C23C16/30 , G02B1/10 , Y10T428/2495 , Y10T428/24975 , Y10T428/31507 , Y10T428/31663
摘要： Multilayer coating for polycarbonate substrate used as glass substitute essentially consisting of silicon, carbon, nitrogen, oxygen and hydrogen, characterized by a first anti-ultra-violet layer consisting of silicon, oxygen and/or nitrogen, carbon and hydrogen, according to formula:SiCx.sub.1 Oz.sub.1 Ht.sub.1,where x.sub.1 +z.sub.1 +t.sub.1 is between 1,2 and 1,5SiCx.sub.1 Ny.sub.1 Ht.sub.1,where x.sub.1 +y.sub.1 +t.sub.1 is between 1,2 and 1,5SiCx.sub.1 Ny.sub.1 Oz.sub.1 Ht.sub.1,where x.sub.1 +y.sub.1 +z.sub.1 +t.sub.1 is between 1,2 and 1,4and t.sub.1 is always between 0,1 and 0,7; x.sub.1 before y.sub.1 and/or z.sub.1 is small, so that the limit of optical absorption is concentrated at about 350 nm; the second transparent hard layer consists of silicon, oxygen, nitrogen, carbon and hydrogen, of formula SiCx.sub.2 Ny.sub.2 Oz.sub.2 Ht.sub.2, where, in particular:either y.sub.2 =0, z.sub.2 is between 1,7 and 2,0, t.sub.2 is between 0,1 and 0,7, x.sub.2 before z.sub.2 is small;or y.sub.2 is between 1,0 and 1,3, t.sub.2 is between 0,1 and 0,7, x.sub.2 and z.sub.2 before y.sub.2 are small.The invention finds application in the protection of polycarbonate against aging caused by ultra-violet radiation, in particular for glasses of automobile headlights, spectacle glasses.
摘要翻译： 用于聚碳酸酯底物的多层涂层，其用作基本由硅，碳，氮，氧和氢组成的玻璃替代物，其特征在于由根据下式的硅，氧和/或氮，碳和氢组成的第一抗紫外层： SiCx1Oz1Ht1，其中x1 + z1 + t1在1,2和1.5之间的SiCx1Ny1Ht1，其中x1 + y1 + t1在1,2和1.5之间SiCx1Ny1Oz1Ht1，其中x1 + y1 + z1 + t1在1,2和 1,4和t1总是在0,1和0,7之间; y1之前的x1和/或z1小，使得光吸收的极限集中在约350nm处; 第二透明硬质层由硅，氧，氮，碳和氢组成，分子式为SiCx2Ny2Oz2Ht2，其中特别地：y2 = 0，z2为1,7和2.0之间，t2为0,1至0 ，7，z2之前的x2小; 或y2在1,0和1,3之间，在y2小之前，t2在0,1和0.7之间，x2和z2之间。 本发明应用于保护聚碳酸酯免受紫外辐射引起的老化，特别是用于汽车头灯，眼镜眼镜的眼镜。
-
公开(公告)号：US5242740A
公开(公告)日：1993-09-07
申请号：US847309
申请日：1992-03-06
CPC分类号： G02B1/115 , C23C16/345 , C23C16/402 , Y10T428/24942 , Y10T428/261 , Y10T428/31507
摘要： Multilayer coating for polycarbonate substrate used as a glass substitute, consisting essentially of silica, oxygen and nitrogen, and hydrogen according to the formulaSiO.sub.2 :HSiN.sub.y :Hcharacterized by a composite structure of the coating combining an interferential system with a reflectance window extending over a narrow band of wavelengths from the lower edge of the visible region toward wavelengths shorter than ultraviolet on the one hand, and an absorptive system of which the band of wavelengths of transmission from the absorptive region to the transparent region is located in the reflectance window of the interferential system. There is thus provided a coating with an abrupt variation of coefficient of transmission. The multilayer coating is particularly useful as a glass substitute for automobile headlight lenses.
摘要翻译： 用作玻璃替代物的聚碳酸酯底物的多层涂层，其主要由二氧化硅，氧和氮组成，以及根据下式的二氧化硅：H SiNy：H的氢，其特征在于该涂层的复合结构，该组合结构将干涉系统与延伸超过 一方面从可见区域的下边缘朝向比紫外线短的波长的窄波长波段和从吸收区域到透明区域的透射波段位于反射窗口中的吸收系统 干涉制度。 因此，提供了具有突变变化系数的涂层。 多层涂层特别适用于汽车头灯透镜的玻璃替代品。
-
-
-
-
-
-
搜索结果
27 条记录 (耗时 0.03 秒)
