Surface position detecting apparatus, exposure apparatus, surface position detecting method, and device manufacturing method
    22.
    发明授权
    Surface position detecting apparatus, exposure apparatus, surface position detecting method, and device manufacturing method 有权
    表面位置检测装置,曝光装置,表面位置检测方法和装置制造方法

    公开(公告)号:US08223345B2

    公开(公告)日:2012-07-17

    申请号:US12426651

    申请日:2009-04-20

    IPC分类号: G01B11/14

    摘要: A surface position detecting apparatus comprises a light-sending optical system which makes first light from a first pattern and second light from a second pattern incident at different incidence angles to a predetermined surface to project an intermediate image of the first pattern and an intermediate image of the second pattern onto the predetermined surface; a light-receiving optical system which guides the first light and the second light reflected on the predetermined surface, to a first observation surface and to a second observation surface, respectively, to form an observation image of the first pattern on the first observation surface and an observation image of the second pattern on the second observation surface; and a detecting section which detects position information of the observation image of the first pattern on the first observation surface and position information of the observation image of the second pattern on the second observation surface and which calculates a surface position of the predetermined surface, based on the position information of the observation image of the first pattern and the position information of the observation image of the second pattern.

    摘要翻译: 表面位置检测装置包括发光光学系统,其将来自第一图案的第一光和来自以不同入射角入射到预定表面的第二图案的第二光投射到第一图案的中间图像和第二图案的中间图像 第二图案到预定表面上; 分别将第一光和第二光反射到预定表面上的光接收光学系统分别连接到第一观察表面和第二观察表面,以在第一观察表面上形成第一图案的观察图像, 在第二观察面上的第二图案的观察图像; 以及检测部,其基于第一观察面检测第一图案的观察图像的位置信息和第二观察面上的第二图案的观察图像的位置信息,并且基于 第一图案的观察图像的位置信息和第二图案的观察图像的位置信息。

    Light-emitting device
    23.
    发明授权
    Light-emitting device 有权
    发光装置

    公开(公告)号:US07800124B2

    公开(公告)日:2010-09-21

    申请号:US11993956

    申请日:2006-06-30

    IPC分类号: H01L33/00

    摘要: A light-emitting device of the present invention includes: a LED chip 10; a chip mounting member 70 having a conductive plate (heat transfer plate) 71 one surface side of which the LED chip 10 is mounted on and a conductor patterns 73, 73 which is formed on the one surface side of the conductive plate 71 through an insulating part 72 and electrically connected to the LED chip 10; and a sheet-shaped connecting member 80 disposed on the other surface side of the conductive plate 71 to connect the conductive plate 71 to a body of the luminaire 90 which is a metal member for holding the chip mounting member 70. The connecting member 80 is made of a resin sheet which includes a filler and whose viscosity is reduced by heating, and the connecting member 80 has an electrical insulating property and thermally connects the conductive plate 71 and the body 90 of the luminaire to each other.

    摘要翻译: 本发明的发光装置包括:LED芯片10; 具有其一个表面侧安装有LED芯片10的导电板(传热板)71的芯片安装构件70和通过绝缘体形成在导电板71的一个表面侧上的导体图案73,73 部分72并且电连接到LED芯片10; 以及布置在导电板71的另一个表面侧上的片状连接件80,以将导电板71连接到作为用于保持芯片安装部件70的金属部件的照明器90的主体。连接部件80是 由包含填料的树脂片制成,其粘度通过加热而降低,并且连接构件80具有电绝缘性能,并且将导电板71和照明器的主体90彼此热连接。

    Pyrithione complex compound, process for producing the same and use thereof
    24.
    发明授权
    Pyrithione complex compound, process for producing the same and use thereof 失效
    吡啶硫酮络合物,其制备方法及其应用

    公开(公告)号:US07659397B2

    公开(公告)日:2010-02-09

    申请号:US10566501

    申请日:2004-10-22

    申请人: Yasuhiro Hidaka

    发明人: Yasuhiro Hidaka

    IPC分类号: C07F3/06 C23F11/00 C09K15/26

    摘要: Zinc pyrithione and copper pyrithione are highly evaluated in the market as an antidandruff agent for shampoo, or an antifouling agent for ship bottom paint and fish-farming net, or an antibacterial/antifungal agent or preservative/mildewcide for industrial products and household articles. For enhancing the market value thereof, there has been a demand for a product that not only attains an increase in conventional antibacterial/antifungal effects but also exhibits novel bioactive effects and that achieves improvement with respect to problems and drawbacks relating to properties, such as solubility in seawater, and stability, such as thermal stability and weather resistance, of polymer materials. There is provided a novel pyrithione complex compound obtained by converting the conventional pyrithione metal salt to a complex compound with an oxide or hydroxide of metal such as zinc, copper or aluminum. As compared with the conventional pyrithione metal salt, this complex compound exhibits superior antibacterial/antifungal effects, newly realizes a hair-regrowing effect and successfully attains improvement with respect to the solubility in seawater and thermal stability/weather resistance of polymer materials.

    摘要翻译: 吡啶硫酮锌和吡啶硫酮铜在市场上被高度评价为用于洗发剂的防头发剂,或船底漆和鱼养网的防污剂,或用于工业产品和家用制品的抗菌/抗真菌剂或防腐/防霉剂。 为了提高其市场价值,存在对不仅获得常规抗菌/抗真菌效果增加的产品的需求,而且还表现出新的生物活性效果,并且对于与性质有关的问题和缺点,例如溶解度 在海水中,以及聚合物材料的稳定性,如热稳定性和耐候性。 提供了通过将常规的吡啶硫酮金属盐与金属如锌,铜或铝的氧化物或氢氧化物的络合物转化而获得的新型吡啶硫酮配合物。 与常规吡啶硫酮金属盐相比,该复合化合物表现出优异的抗菌/抗真菌效果,新近实现了再生长效应,并且在海水中的溶解度和聚合物材料的热稳定性/耐候性方面成功地得到改善。

    Exposure Apparatus, Exposure Method and Device Manufacturing Method, and Surface Shape Detection Unit
    25.
    发明申请
    Exposure Apparatus, Exposure Method and Device Manufacturing Method, and Surface Shape Detection Unit 审中-公开
    曝光装置,曝光方法和装置制造方法以及表面形状检测装置

    公开(公告)号:US20070247640A1

    公开(公告)日:2007-10-25

    申请号:US10594509

    申请日:2005-03-30

    IPC分类号: G01B11/30

    摘要: In subroutine 201 and step 205, a best image-forming plane of a projection optical system and an offset component of a multipoint AF system are detected as calibration information. During measurement of a wafer alignment mark by an alignment system in step 215, the multipoint AF system detects information related to a surface shape of a surface subject to exposure of a wafer (Z map). In step 219, a Z position order profile regarding position order (Z, θx, θy) related to autofocus leveling control is made, along with an XY position order profile of a wafer stage during scanning exposure, and in step 221, scanning exposure is performed while performing open control based on the position order.

    摘要翻译: 在子程序201和步骤205中,检测投影光学系统的最佳图像形成平面和多点AF系统的偏移分量作为校准信息。 在步骤215中通过对准系统测量晶片对准标记期间,多点AF系统检测与经过晶片曝光的表面的表面形状有关的信息(Z图)。 在步骤219中,与扫描曝光期间的晶片台的XY位置顺序轮廓一起进行与自动聚焦调平控制有关的位置顺序(Z,thetax,thetay)的Z位置阶轮廓,并且在步骤221中,扫描曝光是 在基于位置顺序执行打开控制时执行。

    Stage apparatus and exposure apparatus
    26.
    发明申请
    Stage apparatus and exposure apparatus 审中-公开
    舞台装置和曝光装置

    公开(公告)号:US20070188732A1

    公开(公告)日:2007-08-16

    申请号:US11659280

    申请日:2005-08-02

    IPC分类号: G03B27/58

    CPC分类号: G03F7/70775

    摘要: The position of a movable stage is detected without increasing cost or the size of apparatus. An apparatus comprises movable stages (WST, MST) that move along a plane of motion (12a); and a position-detection apparatus that detects the positions of the movable stages (WST, MST) with beams (B1 to B3). The apparatus further comprises driving apparatuses (82, 84) that drives the movable stages (WST, MST); follow-up optical members (30 to 33) which are provided on the driving apparatuses (81, 84) and cause the beams (B1 to B3) to follow the movable stages (WST, MST) as the movable stages (WST, MST) move; and first optical members (34 to 39) which are provided on the movable stages (WST, MST) and are optically coupled with the follow-up optical members (30 to 33).

    摘要翻译: 检测可移动台的位置,而不增加装置的成本或尺寸。 一种装置包括沿着运动平面(12a)移动的可动台(WST,MST); 以及利用光束(B 1〜B 3)检测可动台(WST,MST)的位置的位置检测装置。 该装置还包括驱动可移动级(WST,MST)的驱动装置(82,84)。 设置在驱动装置(81,84)上的随动光学构件(30〜33),并使梁(B 1〜B 3)作为可动台(WST, MST)移动; 和第一光学构件(34至39),其设置在可移动台(WST,MST)上并且与后续光学构件(30至33)光学耦合。

    Toner for electrostatic image development
    27.
    发明申请
    Toner for electrostatic image development 审中-公开
    调色剂用于静电图像显影

    公开(公告)号:US20060046176A1

    公开(公告)日:2006-03-02

    申请号:US11199250

    申请日:2005-08-09

    申请人: Yasuhiro Hidaka

    发明人: Yasuhiro Hidaka

    IPC分类号: G03G9/08

    摘要: A toner for electrostatic image development, containing a resin binder comprising a polyester having a softening point of from 125° to 160° C.; a releasing agent containing a paraffin wax having a melting point of from 70° to 90° C. and a penetration at 25° C. of from 4 to 10, wherein the n(normal)-paraffin is contained in an amount of 82 to 92% by weight of the paraffin wax; and a colorant. The toner for electrostatic image development of the present invention can be used, for example in electrophotography, electrostatic recording method, electrostatic printing method or the like.

    摘要翻译: 一种用于静电图像显影的调色剂,含有包含软化点为125-160℃的聚酯的树脂粘合剂; 含有熔点为70〜90℃,25℃下的渗透为4〜10的石蜡的脱模剂,其中,n(正常) - 石蜡的含量为82〜 92重量%的石蜡; 和着色剂。 本发明的静电图像显影用调色剂可以用于例如电子照相法,静电记录法,静电印刷法等。

    Toner for electrophotography and reinforcing agent for said toner
    28.
    发明授权
    Toner for electrophotography and reinforcing agent for said toner 失效
    用于电子照相的调色剂和用于所述调色剂的增强剂

    公开(公告)号:US5714294A

    公开(公告)日:1998-02-03

    申请号:US666586

    申请日:1996-06-24

    IPC分类号: G03G9/08 G03G9/087 G03G13/08

    摘要: A toner for electrophotography including a binder resin, a colorant, and a reinforcing agent, the toner being characterized in that the reinforcing agent is resin particles comprising a core layer coated with a vinyl polymer having a glass transition temperature of 50.degree. C. or more, the core layer comprising an acrylic acid ester copolymer and/or a methacrylic acid ester copolymer having a glass transition temperature of 0.degree. C. or less, or a diene copolymer having a glass transition temperature of 0.degree. C. or less; a reinforcing agent for toner including the above resin particles; and in a method for forming fixed images by utilizing a nonmagnetic one-component developing method employing a developer device including a developer roller and a blade, the blade serving to regulate a thickness of a toner layer formed on the developer roller and to supply electric charges to the toner, the method for forming fixed images being characterized by the use of the above toner for electrophotography.

    摘要翻译: PCT No.PCT / JP94 / 02142 Sec。 371日期1996年6月24日 102(e)1996年6月24日PCT 1994年12月19日PCT PCT。 WO95 / 18401 PCT出版物 日期:1995年7月6日,用于电子照相的调色剂,包括粘合剂树脂,着色剂和增强剂,该调色剂的特征在于,增强剂是包含涂覆有玻璃化转变温度为50℃的乙烯基聚合物的芯层的树脂颗粒 ℃以上,所述芯层包含玻璃化转变温度为0℃以下的丙烯酸酯共聚物和/或甲基丙烯酸酯共聚物,或玻璃化转变温度为0℃的二烯共聚物。 或更少; 包含上述树脂颗粒的调色剂增强剂; 并且在利用采用包括显影辊和刮板的显影剂装置的非磁性单组分显影方法形成固定图像的方法中,所述刮板用于调节形成在显影辊上的调色剂层的厚度并提供电荷 对于调色剂,形成固定图像的方法的特征在于使用上述用于电子照相的调色剂。

    Nonmagnetic one-component toner and method for producing the same
    30.
    发明授权
    Nonmagnetic one-component toner and method for producing the same 失效
    非磁性单组分调色剂及其制备方法

    公开(公告)号:US5503954A

    公开(公告)日:1996-04-02

    申请号:US238046

    申请日:1994-05-04

    IPC分类号: G03G9/08 G03G9/087 G03G9/097

    摘要: A nonmagnetic one-component toner is produced by the steps of applying inorganic fine particles having an average particle diameter of not less than 30 nm and less than 100 nm to the surface of the toner having a binder resin and a colorant; and removing agglomerations of the inorganic fine particles remaining unadhered on the toner surface using a cyclone in a gas stream. The inorganic fine particles used in the present invention have a particle diameter in suitable ranges, so that the resulting toner can have suitable powder fluidity, and that these inorganic fine particles are less likely to be embedded into the inner portion of the toner by the nip pressure exerted by such members as the charging blade. Therefore, by using the toner of the present invention, a nonmagnetic one-component developing system with small variations in image density and image quality after continuous copying can be provided.

    摘要翻译: 通过以下步骤制造非磁性单组分调色剂:具有平均粒径不小于30nm且小于100nm的无机细颗粒到具有粘合剂树脂和着色剂的调色剂的表面; 并且使用气流中的旋风分离器去除保留在调色剂表面上的无机细颗粒的团聚。 本发明中使用的无机微粒具有适当范围的粒径,使得得到的调色剂具有合适的粉末流动性,并且这些无机细颗粒不太可能通过辊隙嵌入调色剂的内部 由充电刮板等构件施加的压力。 因此,通过使用本发明的调色剂,可以提供连续复印后图像浓度和图像质量变化小的非磁性单组分显影系统。