公开(公告)号：US4548698A

公开(公告)日：1985-10-22

申请号：US575873

申请日：1984-02-01

申请人： Michael Sellschopp

发明人： Michael Sellschopp

IPC分类号： C23C14/04 ,  H01L21/203 ,  H01L21/31 ,  C23C15/00

CPC分类号： C23C14/044

摘要： The invention concerns equipment for producing coatings having a rotationally symmetric thickness profile on substrates. The equipment comprises an evaporizing cathode and, for each substrate, a mask and a rotatable substrate holder arranged behind the mask. The mask has a cut-away portion such that the desired thickness profile of the coating can be produced by rotating the substrate.According to the invention and for the purpose of increasing the throughput of the equipment while maintaining close tolerances for the thickness profile of the coatings, a plurality of masks (6) and a plurality of substrate holders (13) associated with the masks are provided on a common movable frame (1). The movable frame (1) is displaceable relatively to the evaporizing cathode (10), continuous rotary movement being imparted to the substrate holders.

摘要翻译： 本发明涉及用于生产在基底上具有旋转对称厚度分布的涂层的设备。 该设备包括蒸发阴极，并且对于每个基底，布置在掩模后面的掩模和可旋转基底保持器。 掩模具有切除部分，使得可以通过旋转基底来产生涂层的期望厚度分布。 根据本发明，为了增加设备的生产能力，同时保持涂层的厚度分布的严格的公差，与掩模相关联的多个掩模（6）和多个基板保持器（13）设置在 公共可移动框架（1）。 可移动框架（1）可相对于蒸发阴极（10）移动，连续的旋转运动被赋予衬底保持器。

公开(公告)号：US4525129A

公开(公告)日：1985-06-25

申请号：US450424

申请日：1982-12-16

申请人： Hanns-Peter Berges ,  Peter Frieden ,  Wolfgang Leier

发明人： Hanns-Peter Berges ,  Peter Frieden ,  Wolfgang Leier

IPC分类号： F04C27/02 ,  F01C21/04 ,  F04C25/02

CPC分类号： F04C27/02

摘要： An oil-sealed vacuum pump comprises an oil circuit for supplying a pump chamber and bearings of the vacuum pump with oil. The oil circuit includes first and second branch conduits leading to the bearings and the pump chamber, respectively. The vacuum pump further has an oil pump coupled to the oil circuit for driving oil therethrough, a valve assembly coupled to the oil circuit for shutting off oil supply to the pump chamber during standstill of the vacuum pump, and a pressure reducer coupled to the oil circuit for reducing the oil pressure to environmental pressure. The first branch conduit leading to the bearings is situated upstream of, and the second branch conduit leading to the pump chamber and the valve assembly are situated downstream of the pressure reducer as viewed in the direction of oil flow in the oil circuit.

摘要翻译： 油封真空泵包括用于向泵室供应真空泵的轴承和油的油回路。 油回路分别包括通向轴承和泵室的第一和第二分支导管。 真空泵还具有联接到油路的油泵，用于驱动油通过其中连接到油回路的阀组件，用于在真空泵停止期间关闭向泵室供油，以及连接到油的减压器 将油压降低到环境压力的电路。 通向轴承的第一分支导管位于上游，并且通向泵室的第二分支导管和阀组件位于减压器的下游，从油路中的油流方向观察。

公开(公告)号：US4517057A

公开(公告)日：1985-05-14

申请号：US385236

申请日：1982-06-04

申请人： Friedrich Fauser ,  Willi Fischer

发明人： Friedrich Fauser ,  Willi Fischer

IPC分类号： B01D3/10 ,  B01D3/12

CPC分类号： B01D3/12

摘要： In a method and apparatus for short-path, high-vacuum distillation from a liquid on plate-like evaporating surfaces from which distillable fractions evaporate and precipitate onto condensation surfaces a short distance away, the liquid is placed upon the evaporating surfaces at a temperature such that the energy required for its evaporation is taken, at least in part, from the still-unevaporated fraction of the liquid.

摘要翻译： 在用于从板状蒸发表面上的液体进行短路径，高真空蒸馏的方法和装置中，蒸馏部分蒸发并沉淀到短距离的冷凝表面上，液体以如下温度放置在蒸发表面上： 其蒸发所需的能量至少部分地来自液体的未蒸发部分。

公开(公告)号：US4509807A

公开(公告)日：1985-04-09

申请号：US412462

申请日：1982-08-27

申请人： Uwe Reimpell ,  Otto Stenzel

发明人： Uwe Reimpell ,  Otto Stenzel

IPC分类号： H01R41/00 ,  F27D11/10 ,  H01R39/26 ,  H01R39/40

CPC分类号： H01R39/40 ,  H01R39/26

摘要： A sliding contact arrangement for transmitting heavy currents to and from a bus bar has a cage with conductive contact faces and an arrangement to cause a conductive sliding contact to bear on the bus bar and only one of the contact faces.

摘要翻译： 用于将大电流传送到汇流条和从汇流条传送大电流的滑动接触装置具有带导电接触面的保持架和用于使导电滑动接触承受在汇流条上且仅一个接触面的布置。

公开(公告)号：US4483667A

公开(公告)日：1984-11-20

申请号：US450423

申请日：1982-12-16

申请人： Hanns-Peter Berges ,  Peter Frieden ,  Hans-Peter Kabelitz

发明人： Hanns-Peter Berges ,  Peter Frieden ,  Hans-Peter Kabelitz

IPC分类号： F04C25/02 ,  F04C27/02 ,  F04C28/24 ,  F04C29/02 ,  F01C21/04

CPC分类号： F04C28/24 ,  F04C27/02 ,  F04C29/02

摘要： A vacuum pump comprises a suction nipple valve including a cylinder, a piston slidably received therein and a movable valve closing member operatively connected to the piston. The vacuum pump further has a pressure medium conduit having a first end communicating with the cylinder; an inlet opening at a second end of the conduit for pressure medium to flow through the inlet opening to the piston; a control arrangement for closing and opening the inlet opening dependent upon run or standstill of the vacuum pump. In the closed state of the inlet opening an oil quantity is maintained above the inlet opening.

摘要翻译： 真空泵包括一个吸嘴，其包括一个气缸，一个可滑动地容纳在其中的活塞和一个可操作地连接到活塞上的活动闭阀构件。 真空泵还具有压力介质导管，其具有与气缸连通的第一端; 在导管的第二端处的入口开口，用于压力介质流过入口到活塞; 用于根据真空泵的运行或停止来关闭和打开入口开口的控制装置。 在入口开口的关闭状态下，油量保持在入口开口的上方。

公开(公告)号：US4412131A

公开(公告)日：1983-10-25

申请号：US249246

申请日：1981-03-30

申请人： Hermann Froitzheim

发明人： Hermann Froitzheim

IPC分类号： H01J37/05 ,  H01J49/26 ,  H01J49/48

CPC分类号： H01J49/26 ,  H01J37/05

摘要： A monochromator for charged particles comprises a premonochromator and a main monochromator is tandem with a retarding lens disposed therebetween. The arrangement is suitable for electron energy loss spectrometry due to the high achievable intensities.

摘要翻译： 用于带电粒子的单色器包括预分选机，并且主单色仪与设置在其间的延迟透镜串联。 由于高可实现的强度，该装置适用于电子能量损失光谱测定。

公开(公告)号：US4407488A

公开(公告)日：1983-10-04

申请号：US437844

申请日：1982-10-29

申请人： Erwin Wanetzky ,  Franz Hugo ,  Fernand Kuhlmann

发明人： Erwin Wanetzky ,  Franz Hugo ,  Fernand Kuhlmann

IPC分类号： B01D3/00 ,  B01D3/08 ,  B01D3/10 ,  B01D7/00 ,  F27D7/06

CPC分类号： B01D3/10 ,  B01D3/08 ,  B01D7/00

摘要： The invention relates to a distillation and sublimation apparatus having a receiving vessel and a number of containers for the starting product. Each container has a bottom, an outer wall and an inner wall with a vapor duct, and the containers are stacked one upon the other in such manner that the vapor ducts are arranged in series. An annular space is present outside the stack of containers. The apparatus comprises a condenser into which the vapor duct of the bottom container discharges.For the purpose of solving the problem of preventing condensation of vapor on the receiving vessel, it is proposed, in accordance with the invention, that capillary gaps (28), which are open towards the receiving vessel (3), be present between the containers (26). Furthermore, the condenser (8) communicates with the annular space (10) by way of at least one return-flow orifice (19) for the gases. The arrangement is such that the annular space (10), the capillary gaps (28), the vapor ducts (26), the condenser (8) and the return-flow orifice or orifices (19) are parts of a closed gas-circulation path.

摘要翻译： 本发明涉及一种蒸馏和升华装置，其具有接收容器和用于起始产品的许多容器。 每个容器具有底部，外壁和具有蒸汽管道的内壁，并且容器以使得蒸气管串联布置的方式彼此堆叠。 在容器堆叠之外存在环形空间。 该装置包括一个冷凝器，底部容器的蒸汽管道排放到该冷凝器中。 为了解决防止蒸汽在接收容器上的冷凝的问题，根据本发明，提出在容器（3）之间开放的毛细管间隙（28）存在于容器 （26）。 此外，冷凝器（8）通过用于气体的至少一个回流孔（19）与环形空间（10）连通。 该布置使得环形空间（10），毛细管间隙（28），蒸汽管道（26），冷凝器（8）和回流孔口或孔口（19）是闭合气体循环的部分 路径。

公开(公告)号：US4397156A

公开(公告)日：1983-08-09

申请号：US313697

申请日：1981-10-21

申请人： Rolf Heisig ,  Hans-Hermann Klein ,  Karl-Heinz Volker

发明人： Rolf Heisig ,  Hans-Hermann Klein ,  Karl-Heinz Volker

IPC分类号： F25B9/14 ,  F25J3/00 ,  F25B9/00

CPC分类号： F25J5/002 ,  F25B9/14 ,  F25B2309/003

摘要： A displacer for low-temperature refrigerating machines having a regenerator disposed in a hollow space of the displacer, wherein the regenerator is formed at least in part of a sintered material, preferably sintered bronze spheres.

摘要翻译： 一种用于具有设置在置换器的中空空间中的再生器的低温冷冻机的置换器，其中所述再生器至少部分地由烧结材料形成，优选地形成烧结的青铜球。

公开(公告)号：US4394765A

公开(公告)日：1983-07-19

申请号：US324995

申请日：1981-11-25

申请人： Uwe Reimpell ,  Helmut Grof ,  Franz-Georg Knell ,  Anton Wamser

发明人： Uwe Reimpell ,  Helmut Grof ,  Franz-Georg Knell ,  Anton Wamser

IPC分类号： B22D23/10 ,  H05B7/109

CPC分类号： B22D23/10

摘要： An electro-slag remelting furnace having consumable electrodes and a mold for receiving a melt formed from the electrode material; at least one drive motor and at least one spindle and an associated stationary spindle nut for vertical movement of the electrode; at least one guide column, which is provided for vertically guiding the consumable electrodes and which extends parallel with the spindle and relative to which the spindle is rotatable mounted at its two ends; and at least one clamping device for the consumable electrodes.

摘要翻译： 一种具有消耗电极的电渣重熔炉和用于接收由电极材料形成的熔体的模具; 至少一个驱动马达和至少一个主轴和相关联的固定主轴螺母，用于电极的垂直运动; 至少一个引导柱，其被设置用于垂直地引导所述可消耗电极并且与所述主轴平行地延伸，并且所述主轴可旋转地安装在其两端; 以及用于可消耗电极的至少一个夹持装置。

公开(公告)号：US4362936A

公开(公告)日：1982-12-07

申请号：US210596

申请日：1980-11-26

申请人： Dieter Hofmann ,  Reiner Wechsung

发明人： Dieter Hofmann ,  Reiner Wechsung

IPC分类号： H01J49/10 ,  B01D59/44

CPC分类号： H01J49/10

摘要： Apparatus for monitoring a plasma process in which a plasma is formed to occupy a specified region, which apparatus is composed of: a mass spectrometer system including a mass analyzer having an ion inlet and an ion outlet and an ion detector disposed in operative association with the ion outlet; an output device connected to the detector for providing an output signal representative of the mass spectrum of ions observed by the mass spectrometer system; and an ion-optical system having an inlet opening located in the vicinity of the specified region and disposed for extracting ions from the plasma and focussing the ions thus extracted onto the ion inlet of the analyzer, whereby the output signal produced by the output device is representative of the mass spectrum of ions in the plasma.

摘要翻译： 用于监测其中形成等离子体以占据特定区域的等离子体工艺的装置，该装置由以下组成：质谱仪系统，包括具有离子入口和离子出口的质量分析器和与 离子出口; 连接到检测器的输出装置，用于提供代表由质谱仪系统观察到的离子质谱的输出信号; 以及离子光学系统，其具有位于所述指定区域附近的入口，并且设置成用于从所述等离子体中提取离子，并且将由此提取的离子聚焦到所述分析器的离子入口上，由此输出装置产生的输出信号为 代表等离子体中离子的质谱。