Mini-lidar sensor for the remote stand-off sensing of chemical/biological substances and method for sensing same
    21.
    发明授权
    Mini-lidar sensor for the remote stand-off sensing of chemical/biological substances and method for sensing same 失效
    微型激光雷达传感器,用于远距离检测化学/生物物质及其感应方法

    公开(公告)号:US06608677B1

    公开(公告)日:2003-08-19

    申请号:US09659202

    申请日:2000-09-13

    CPC classification number: G01N21/65 G01N21/3504 G01N2021/1793

    Abstract: A method and apparatus for remote, stand-off, and high efficiency spectroscopic detection of biological and chemical substances. The apparatus including an optical beam transmitter which transmits a beam having an axis of transmission to a target, the beam comprising at least a laser emission. An optical detector having an optical detection path to the target is provided for gathering optical information. The optical detection path has an axis of optical detection. A beam alignment device fixes the transmitter proximal to the detector and directs the beam to the target along the optical detection path such that the axis of transmission is within the optical detection path. Optical information gathered by the optical detector is analyzed by an analyzer which is operatively connected to the detector.

    Abstract translation: 一种用于远程,分离和高效率生物和化学物质光谱检测的方法和装置。 所述装置包括将具有传输轴的光束传输到目标的光束发射器,所述光束至少包括激光发射。 提供具有到目标的光学检测路径的光学检测器用于收集光学信息。 光学检测路径具有光学检测的轴。 光束对准​​装置将发射器固定在检测器附近,并将光束沿着光学检测路径引导到目标,使得透射轴在光学检测路径内。 通过可操作地连接到检测器的分析仪分析由光学检测器收集的光学信息。

    Micro-Raman spectroscopy system for identifying foreign material on a semiconductor wafer
    22.
    发明授权
    Micro-Raman spectroscopy system for identifying foreign material on a semiconductor wafer 失效
    用于识别半导体晶片上的异物的微拉曼光谱系统

    公开(公告)号:US06545755B1

    公开(公告)日:2003-04-08

    申请号:US09723318

    申请日:2000-11-27

    Abstract: A micro-Raman spectroscopy system capable of making effective use of the unique analyzing capabilities of Raman spectroscopy and still capable of employing information about foreign materials obtained by a separate foreign material inspection system. The micro-Raman spectroscopy system uses a sample stage having a function of reproducing an image of a foreign material on a wafer under an optical microscope, based on positional information previously obtained from foreign materials by the separate foreign material inspection system. Furthermore, the micro-Raman spectroscopy system has a function of searching a built-in database for the substance of the foreign material on the wafer, using a Raman spectrum presently obtained from the foreign material. The system includes a Raman analysis optical system and a Raman spectrometer that are connected by optical fiber.

    Abstract translation: 一种能够有效利用拉曼光谱的独特分析能力的微拉曼光谱系统,并且仍然能够采用通过单独的异物检测系统获得的关于异物的信息。 微拉曼光谱系统基于通过分离的异物检查系统先前从异物获得的位置信息,使用具有在光学显微镜下在晶片上再现异物的图像的功能的样品台。 此外,微拉曼光谱系统具有使用目前从异物获得的拉曼光谱,在晶片上搜索内部数据库中的异物的物质的功能。 该系统包括通过光纤连接的拉曼分析光学系统和拉曼光谱仪。

    Raman system for rapid sample indentification
    23.
    发明授权
    Raman system for rapid sample indentification 失效
    拉曼系统快速样品识别

    公开(公告)号:US06483581B1

    公开(公告)日:2002-11-19

    申请号:US09446673

    申请日:1999-12-22

    Abstract: A hand-held material identification apparatus 10 uses a spectrograph and detector array detecting a Raman spectrum produced by a sample illuminated by a laser source to recognize a variety of materials with a command to recognition time cycle of about one second or less. The width of the spectrum detected by each detector in the array is less than ¼th the excitation source wavelength deviation to permit smoothing of the spectrum detected by the discrete spectral elements to eliminate pixel noise without loss of Raman spectral information. The Raman spectra are produced by materials illuminated by an inexpensive near-infrared multimode laser operated in a pulse mode to deliver between 0.05 and 0.5 joules of photon energy, with the Raman spectra being detected before any significant heating of the sample occurs. The identification apparatus 10 qualitatively determines the chemical composition of reinforced and unreinforced copolymers and composites such as ABS, polypropylene, talc-filled polypropylene, polycarbonate, PMMA, polyethylene, and PVC, from samples of different colors and textures with a high degree of success without the need for special positioning or sample preparation.

    Abstract translation: 手持材料识别装置10使用检测由激光源照射的样品产生的拉曼光谱的光谱仪和检测器阵列,以识别大约1秒以下的识别时间周期的指令来识别各种材料。 由阵列中的每个检测器检测到的光谱的宽度小于激发源波长偏差的1/4,以允许平滑由离散光谱元素检测的光谱,以消除像素噪声而不损耗拉曼光谱信息。 拉曼光谱由以脉冲模式操作的便宜的近红外多模激光器照射的材料产生,以传递0.05至0.5焦耳的光子能量,在样品发生任何显着加热之前,检测拉曼光谱。 识别装置10从不同颜色和纹理的样品定性地确定增强和非增强共聚物和复合材料如ABS,聚丙烯,填充滑石的聚丙烯,聚碳酸酯,PMMA,聚乙烯和PVC的化学组成,而没有 需要特殊定位或样品制备。

    Raman probe with spatial filter and semi-confocal lens
    25.
    发明授权
    Raman probe with spatial filter and semi-confocal lens 失效
    具有空间滤光片和半透镜的拉曼探头

    公开(公告)号:US06310686B1

    公开(公告)日:2001-10-30

    申请号:US09447878

    申请日:1999-11-23

    Applicant: Yanan Jiang

    Inventor: Yanan Jiang

    Abstract: A material identification apparatus 10 uses a spectrograph and detector array detecting a Raman spectrum produced by a sample illuminated by a laser source to recognize a variety of materials. The Raman spectra are produced by materials illuminated by an inexpensive near-infrared multimode laser operated in a pulse mode to deliver between 0.05 and 0.5 joules of photon energy, with the Raman spectra being detected before any significant heating of the sample occurs. The identification apparatus 10 qualitatively determines the chemical composition of reinforced and unreinforced copolymers and composites such as ABS, polypropylene, talc-filled polypropylene, polycarbonate, PMMA, PVB, polyethylene, and PVC, from samples of different colors, layers, and textures with a high degree of success without the need for special sample preparation.

    Abstract translation: 材料识别装置10使用检测由激光源照射的样品产生的拉曼光谱的光谱仪和检测器阵列来识别各种材料。 拉曼光谱由以脉冲模式操作的便宜的近红外多模激光器照射的材料产生,以传递0.05至0.5焦耳的光子能量,在样品发生任何显着加热之前,检测拉曼光谱。 识别装置10从不同颜色,层和纹理的样品定性地确定增强和非增强共聚物和复合材料如ABS,聚丙烯,填充滑石的聚丙烯,聚碳酸酯,PMMA,PVB,聚乙烯和PVC的化学组成 高度成功,无需特殊的样品制备。

    Method for adjusting spectral measurements to produce a standard Raman spectrum
    26.
    发明授权
    Method for adjusting spectral measurements to produce a standard Raman spectrum 有权
    用于调节光谱测量以产生标准拉曼光谱的方法

    公开(公告)号:US06281971B1

    公开(公告)日:2001-08-28

    申请号:US09658708

    申请日:2000-09-08

    Abstract: A method for producing a standard Raman spectrum of a sample. A source of incident radiation is provided. Means provide an incident beam and a monitor beam from the incident radiation. The incident beam is directed to the sample and a Raman beam is generated from the sample. Spectral data may be collected directly from the monitor beam and the Raman beam simultaneously. The occurrence of a frequency shift in the incident radiation is determined. One spectral measurement is made after the occurrence of the frequency shift, or a first spectral measurement is made before and a second spectral measurement is made after the frequency shift. One or more arithmetic calculations are applied to the single spectral measurement, or the second spectral measurement is subtracted from the first spectral measurement. One or more integral transforms are applied to the resulting spectral measurement data to produce the standard Raman spectrum.

    Abstract translation: 用于制备样品的标准拉曼光谱的方法。 提供入射辐射源。 装置提供来自入射辐射的入射光束和监视光束。 入射光束被引导到样品,并从样品产生拉曼光束。 光谱数据可以直接从监视光束和拉曼光束同时收集。 确定入射辐射中频移的发生。 在发生频移之后进行一次频谱测量,或者进行第一频谱测量,并且在频移之后进行第二频谱测量。 将一个或多个算术计算应用于单个光谱测量,或者从第一光谱测量中减去第二光谱测量。 将一个或多个积分变换应用于所得到的光谱测量数据以产生标准拉曼光谱。

    System and method for polarization coherent anti-stokes Raman scattering microscopy
    27.
    发明授权
    System and method for polarization coherent anti-stokes Raman scattering microscopy 有权
    用于偏振相干反斯托克斯拉曼散射显微镜的系统和方法

    公开(公告)号:US06798507B2

    公开(公告)日:2004-09-28

    申请号:US10186104

    申请日:2002-06-27

    CPC classification number: G01J3/44 G01N21/65 G01N2021/653

    Abstract: Systems and methods are disclosed for detecting a nonlinear coherent field induced in a microscopic sample. The system includes in an embodiment, a first source for generating a first polarized electromagnetic field at a first frequency and a second source for generating a second polarized electromagnetic field at a second frequency that is different from the first frequency. The system further includes optics for combining the first polarized electromagnetic field and the second polarized electromagnetic field in a collinear fashion such that the difference in polarization angles is &phgr; wherein &phgr; is not equal to zero. The optics further direct the combined electromagnetic field toward a common focal volume. The system also includes a polarization sensitive detector for detecting a nonlinear coherent field that is generated responsive to the first and second polarized electromagnetic fields in the focal volume.

    Abstract translation: 公开了用于检测在微观样品中诱导的非线性相干场的系统和方法。 该系统在一个实施例中包括用于产生第一频率的第一极化电磁场的第一源和用于产生与第一频率不同的第二频率的第二极化电磁场的第二源。 该系统还包括用于以共线方式组合第一极化电磁场和第二极化电磁场的光学器件,使得偏振角的差是phi,其中phi不等于零。 光学器件进一步将组合的电磁场引向公共焦点体积。 该系统还包括用于检测响应于焦点体积中的第一和第二极化电磁场产生的非线性相干场的偏振敏感检测器。

    Method of analyzing silicon-germanium alloys and apparatus for manufacturing semiconductor layer structures with silicon-germanium alloy layers
    28.
    发明授权
    Method of analyzing silicon-germanium alloys and apparatus for manufacturing semiconductor layer structures with silicon-germanium alloy layers 失效
    硅 - 锗合金分析方法和硅 - 锗合金层半导体层结构制造装置

    公开(公告)号:US06744501B2

    公开(公告)日:2004-06-01

    申请号:US10247269

    申请日:2002-09-18

    Applicant: Manfred Klose

    Inventor: Manfred Klose

    CPC classification number: G01N21/65

    Abstract: In order to improve a method of analyzing Si—Ge alloys, with which a Raman spectrum of a sample is recorded and Raman frequencies and Raman intensities of the Si—Si modes and the Si—Ge modes of the alloy layer are evaluated, such that any strain and any Ge portion in an alloy layer can be ascertained in a simple and as exact a manner as possible, it is provided for one or more spectrum contributions lying outside the Si—Ge modes and the Si—Si modes to be evaluated as oscillation modes.

    Abstract translation: 为了改进分析记录样品的拉曼光谱的Si-Ge合金的分析方法,并评价合金层的Si-Si模式和Si-Ge模式的拉曼频率和拉曼强度,使得 可以以简单且尽可能准确的方式确定合金层中的任何应变和任何Ge部分,提供位于Si-Ge模式之外的一个或多个光谱贡献,并且Si-Si模式被评估为 振荡模式。

    Process for determining the dye uptake of polyethylene terephthalate fibers
    29.
    发明授权
    Process for determining the dye uptake of polyethylene terephthalate fibers 失效
    确定聚对苯二甲酸乙二醇酯纤维染料吸收的方法

    公开(公告)号:US06710869B1

    公开(公告)日:2004-03-23

    申请号:US09913063

    申请日:2001-09-27

    CPC classification number: G01N21/65 G01N21/8915 G01N33/36

    Abstract: The invention pertains to a process for determining the dye uptake of polyethylene terephthalate fibers in which the fibers are irradiated with high-intensity monochromatic light. A light-sensitive sensor is used to measure the Raman scattering and compare it with that of an earlier established model on the basis of Raman spectra of polyethylene terephthalate fibers of known composition and structure. A model is used to calculate the density, which constitutes a quantitative measure of the dye uptake. In the calculation use is made of measurement points from a number of regions in the spectral measuring region of 598 to 1900 cm−1.

    Abstract translation: 本发明涉及用高强度单色光照射纤维的聚对苯二甲酸乙二醇酯纤维的染料摄取方法。 基于已知组成和结构的聚对苯二甲酸乙二醇酯纤维的拉曼光谱,使用光敏传感器来测量拉曼散射并将其与早先建立的模型进行比较。 一个模型用于计算密度,这构成了染料吸收的定量测量。 在计算中,使用从598〜1900cm -1的光谱测量区域的多个区域的测量点。

Patent Agency Ranking