公开(公告)号：US11616139B2

公开(公告)日：2023-03-28

申请号：US17224108

申请日：2021-04-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chung-Yen Feng ,  Chen-An Kuo ,  Ching-Wei Teng ,  Po-Chun Lai

IPC: H01L29/78 ,  H01L29/10 ,  H01L29/66 ,  H01L21/285 ,  H01L21/74 ,  H01L29/45

Abstract: An LDMOS includes a semiconductor substrate. A well is disposed within the semiconductor substrate. A body region is disposed within the well. A first gate electrode is disposed on the semiconductor substrate. A source electrode is disposed at one side of the first gate electrode. The source electrode includes a source contact area and numerous vias. The vias connect to the source contact area. The vias extend into the semiconductor substrate. A first drain electrode is disposed at another side of the first gate electrode and is opposed to the source electrode.

公开(公告)号：US20230091364A1

公开(公告)日：2023-03-23

申请号：US18073574

申请日：2022-12-02

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Wei Chen ,  Hui-Lin Wang ,  Yu-Ru Yang ,  Chin-Fu Lin ,  Yi-Syun Chou ,  Chun-Yao Yang

IPC: H01L27/22 ,  H01L23/552 ,  H01L43/10 ,  H01F41/34 ,  H01L43/02 ,  G11C11/16 ,  H01F10/32 ,  H01L43/12

Abstract: A magnetic tunnel junction (MTJ) device includes two magnetic tunnel junction elements and a magnetic shielding layer. The two magnetic tunnel junction elements are arranged side by side. The magnetic shielding layer is disposed between the magnetic tunnel junction elements. A method of forming said magnetic tunnel junction (MTJ) device includes the following steps. An interlayer including a magnetic shielding layer is formed. The interlayer is etched to form recesses in the interlayer. The magnetic tunnel junction elements fill in the recesses. Or, a method of forming said magnetic tunnel junction (MTJ) device includes the following steps. A magnetic tunnel junction layer is formed. The magnetic tunnel junction layer is patterned to form magnetic tunnel junction elements. An interlayer including a magnetic shielding layer is formed between the magnetic tunnel junction elements.

公开(公告)号：US11611035B2

公开(公告)日：2023-03-21

申请号：US17182146

申请日：2021-02-22

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chung-Liang Chu ,  Jian-Cheng Chen ,  Yu-Ping Wang ,  Yu-Ruei Chen

IPC: H01L27/22 ,  H01L43/02 ,  G11C11/16 ,  H01L27/02

Abstract: A semiconductor device includes a substrate having an array region defined thereon, a ring of magnetic tunneling junction (MTJ) region surrounding the array region, a gap between the array region and the ring of MTJ region, and metal interconnect patterns overlapping part of the ring of MTJ region. Preferably, the array region includes a magnetic random access memory (MRAM) region and a logic region and the ring of MTJ region further includes a first MTJ region and a second MTJ region extending along a first direction and a third MTJ region and a fourth MTJ region extending along a second direction.

公开(公告)号：US11610973B2

公开(公告)日：2023-03-21

申请号：US17564104

申请日：2021-12-28

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Zhi-Cheng Lee ,  Kai-Lin Lee ,  Wei-Jen Chen

IPC: H01L29/423 ,  H01L29/40 ,  H01L29/49 ,  H01L29/66

Abstract: A high voltage transistor structure includes a substrate. A metal gate is disposed on the substrate. At least one insulating material structure penetrates the metal gate. A metal compound layer is disposed between the metal gate and the substrate, between the insulating material structure and the substrate. The metal compound layer is a continuous structure. A gate dielectric layer is disposed under the metal compound layer and contacts the substrate.

公开(公告)号：US20230079155A1

公开(公告)日：2023-03-16

申请号：US17990749

申请日：2022-11-21

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Po-Yu Yang

IPC: H01L29/423 ,  H01L29/786 ,  H01L27/092

Abstract: A manufacturing method of a semiconductor device includes the following steps. A first transistor is formed on a substrate. The first transistor includes a first semiconductor channel structure and two first source/drain structures. The first semiconductor channel structure includes first horizontal portions and a first vertical portion. The first horizontal portions are stacked in a vertical direction and separated from one another. Each of the first horizontal portions is elongated in a horizontal direction. The first vertical portion is elongated in the vertical direction and connected with the first horizontal portions. The two first source/drain structures are disposed at two opposite sides of each of the first horizontal portions in the horizontal direction respectively. The two first source/drain structures are connected with the first horizontal portions.

公开(公告)号：US20230073022A1

公开(公告)日：2023-03-09

申请号：US17987867

申请日：2022-11-16

Applicant: United Microelectronics Corp.

Inventor： Nuo Wei Luo ,  Huabiao Wu

IPC: H01L21/68 ,  H01L21/027 ,  G03F7/20 ,  H01L23/544

Abstract: Provided is a semiconductor device includes a substrate, an isolation structure, an alignment mark, and a dielectric layer. The substrate includes a first region and a second region. The isolation structure is disposed in the substrate in the first region, wherein the isolation structure extends from a first surface of the substrate toward a second surface of the substrate.
The alignment mark is disposed in the substrate in the second region. The alignment mark extends from the first surface of the substrate toward the second surface of the substrate and at the same level as the isolation structure. The dielectric layer is buried in the substrate in the second region and overlapping the alignment mark.

公开(公告)号：US20230058811A1

公开(公告)日：2023-02-23

申请号：US17981499

申请日：2022-11-07

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Fu-Jung Chuang ,  Po-Jen Chuang ,  Yu-Ren Wang ,  Chi-Mao Hsu ,  Chia-Ming Kuo ,  Guan-Wei Huang ,  Chun-Hsien Lin

IPC: H01L21/8238 ,  H01L27/092 ,  H01L21/762

Abstract: A method for fabricating semiconductor device includes the steps of first providing a substrate having a fin-shaped structure thereon, forming a single diffusion break (SDB) structure in the substrate to divide the fin-shaped structure into a first portion and a second portion, and then forming more than one gate structures such as a first gate structure and a second gate structure on the SDB structure. Preferably, each of the first gate structure and the second gate structure overlaps the fin-shaped structure and the SDB structure.

公开(公告)号：US20230058468A1

公开(公告)日：2023-02-23

申请号：US17409756

申请日：2021-08-23

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： BO TAO ,  RUNSHUN WANG ,  Li Wang ,  Ching-Yang Wen ,  Purakh Raj Verma ,  DONG YIN ,  Jian Xie

IPC: H01L21/768

Abstract: A method of fabricating an air gap includes receiving a first thickness information of an inter-metal dielectric layer formed on a substrate and receiving a second thickness information of an inter-layer dielectric layer formed on the substrate. Then, a first etching is performed, wherein the first etching includes etch the inter-metal dielectric layer based on a first etching control value corresponding to the first thickness information. After the first etching, a second etching is performed to etch the inter-layer dielectric layer based on a second etching control value corresponding to the second thickness information.

公开(公告)号：US11581422B2

公开(公告)日：2023-02-14

申请号：US17161707

申请日：2021-01-29

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chun-Hao Lin ,  Hsin-Yu Chen ,  Shou-Wei Hsieh

IPC: H01L29/66 ,  H01L21/762

Abstract: A semiconductor device includes a gate isolation structure on a shallow trench isolation (STI), a first epitaxial layer on one side of the gate isolation structure, a second epitaxial layer on another side of the gate isolation structure, first fin-shaped structures directly under the first epitaxial layer, and second fin-shaped structures directly under the second epitaxial layer, in which the STI surrounds the first fin-shaped structures and the second fin-shaped structures.

公开(公告)号：US20230043723A1

公开(公告)日：2023-02-09

申请号：US17970590

申请日：2022-10-21

Applicant: United Microelectronics Corp.

Inventor： Chih-Yuan Chung ,  Te-Chang Wu

IPC: H02H3/08 ,  H02H3/06

Abstract: An electrostatic discharge (ESD) circuit is used to protect an internal circuit. The ESD circuit includes: an ESD clamp, having a first terminal connected to a power and a second terminal connected to a ground voltage; and a first switch, connected between an ESD terminal of the ESD clamp and the internal circuit. A gate of the first switch is controlled by a state signal in the ESD clamp to turn off the first switch when an ESD event occurs on the first terminal of the ESD clamp and turn on the first switch when the ESD event does not occur.