公开(公告)号：US09653327B2

公开(公告)日：2017-05-16

申请号：US13291286

申请日：2011-11-08

Applicant: Kwangduk Douglas Lee ,  Sudha Rathi ,  Chiu Chan ,  Martin J. Seamons ,  Bok Heon Kim

Inventor： Kwangduk Douglas Lee ,  Sudha Rathi ,  Chiu Chan ,  Martin J. Seamons ,  Bok Heon Kim

IPC: H01L21/3065 ,  H01L21/67 ,  C23C16/02 ,  H01L21/02 ,  H01L21/311 ,  H01L21/768

CPC classification number: H01L21/6704 ,  C23C16/0245 ,  H01L21/02063 ,  H01L21/31122 ,  H01L21/31144 ,  H01L21/76814

Abstract: Embodiments of the invention generally relate to methods of removing and/or cleaning a substrate surface having different material layers disposed thereon using water vapor plasma treatment. In one embodiment, a method for cleaning a surface of a substrate includes positioning a substrate into a processing chamber, the substrate having a dielectric layer disposed thereon forming openings on the substrate, exposing the dielectric layer disposed on the substrate to water vapor supplied into the chamber to form a plasma in the water vapor, maintaining a process pressure in the chamber at between about 1 Torr and about 120 Torr, and cleaning the contact structure formed on the substrate.

公开(公告)号：USD719711S1

公开(公告)日：2014-12-16

申请号：US29471977

申请日：2013-11-07

Applicant: Michael Mozeika, III ,  Michael Mozeika, Jr. ,  Chiu Chan ,  Robert Mohr

Designer： Michael Mozeika, III ,  Michael Mozeika, Jr. ,  Chiu Chan ,  Robert Mohr

公开(公告)号：US08513129B2

公开(公告)日：2013-08-20

申请号：US12790203

申请日：2010-05-28

Applicant: Martin Jay Seamons ,  Kwangduk Douglas Lee ,  Chiu Chan ,  Patrick Reilly ,  Sudha Rathi

Inventor： Martin Jay Seamons ,  Kwangduk Douglas Lee ,  Chiu Chan ,  Patrick Reilly ,  Sudha Rathi

IPC: H01L21/311 ,  H01L23/58

CPC classification number: H01L21/02115 ,  H01L21/02274 ,  H01L21/0332 ,  H01L21/0337

Abstract: Methods for manufacturing a semiconductor device are provided. In one embodiment, a method includes providing a base material having a first film stack deposited thereon, wherein the base material is formed over the substrate and has a first set of interconnect features. The first film stack comprises a first amorphous carbon layer deposited on a surface of the base material, a first anti-reflective coating layer deposited on the first amorphous carbon layer, and a first photoresist layer deposited on the first anti-reflective coating layer. The first photoresist layer is patterned by shifting laterally a projection of a mask on the first photoresist layer relative to the substrate a desired distance, thereby introducing into the first photoresist layer a first feature pattern to be transferred to the underlying base material, wherein the first feature pattern is not aligned with the first set of interconnect features.

Abstract translation: 提供了制造半导体器件的方法。 在一个实施例中，一种方法包括提供具有沉积在其上的第一膜堆叠的基底材料，其中基底材料形成在衬底上并且具有第一组互连特征。 第一薄膜叠层包括沉积在基材表面上的第一非晶碳层，沉积在第一非晶碳层上的第一抗反射涂层和沉积在第一抗反射涂层上的第一光致抗蚀剂层。 通过在第一光致抗蚀剂层上相对于衬底的掩模的投影横向移动所需的距离来对第一光致抗蚀剂层进行构图，从而将第一特征图案引入第一光刻胶层以转移到下面的基底材料，其中第一 特征图案不与第一组互连特征对齐。

公开(公告)号：US20130155071A1

公开(公告)日：2013-06-20

申请号：US13332315

申请日：2011-12-20

Applicant: Wang Chiu Chan ,  Charles J. Migos ,  Keng Fai Lee ,  M. Frank Emanuel

Inventor： Wang Chiu Chan ,  Charles J. Migos ,  Keng Fai Lee ,  M. Frank Emanuel

IPC: G06T13/00

CPC classification number: G06T13/00 ,  G06T19/00 ,  G06T2219/024

Abstract: Various features and processes related to document collaboration are disclosed. In some implementations, animations are presented when updating a local document display to reflect changes made to the document at a remote device. In some implementations, a user can selectively highlight changes made by collaborators in a document. In some implementations, a user can select an identifier associated with another user to display a portion of a document that includes the other user's cursor location. In some implementations, text in document chat sessions can be automatically converted into hyperlinks which, when selected, cause a document editor to perform an operation.

Abstract translation: 公开了与文档协作相关的各种特征和过程。 在一些实现中，当更新本地文档显示以反映在远程设备处对文档所做的更改时，呈现动画。 在一些实现中，用户可以有选择地突出显示协作者在文档中所做的更改。 在一些实现中，用户可以选择与另一用户相关联的标识符来显示包括其他用户的光标位置的文档的一部分。 在一些实现中，文档聊天会话中的文本可以自动转换成超链接，当被选择时，文本编辑器执行操作。

公开(公告)号：US20120285481A1

公开(公告)日：2012-11-15

申请号：US13291286

申请日：2011-11-08

Applicant: Kwangduk Douglas Lee ,  Sudha Rathi ,  Chiu Chan ,  Martin J. Seamons ,  Bok Heon Kim

Inventor： Kwangduk Douglas Lee ,  Sudha Rathi ,  Chiu Chan ,  Martin J. Seamons ,  Bok Heon Kim

IPC: B08B6/00 ,  B08B7/04 ,  B08B5/00

CPC classification number: H01L21/6704 ,  C23C16/0245 ,  H01L21/02063 ,  H01L21/31122 ,  H01L21/31144 ,  H01L21/76814

Abstract: Embodiments of the invention generally relate to methods of removing and/or cleaning a substrate surface having different material layers disposed thereon using water vapor plasma treatment. In one embodiment, a method for cleaning a surface of a substrate includes positioning a substrate into a processing chamber, the substrate having a dielectric layer disposed thereon forming openings on the substrate, exposing the dielectric layer disposed on the substrate to water vapor supplied into the chamber to form a plasma in the water vapor, maintaining a process pressure in the chamber at between about 1 Torr and about 120 Torr, and cleaning the contact structure formed on the substrate.

Abstract translation: 本发明的实施方案一般涉及使用水蒸气等离子体处理去除和/或清洁其上设置有不同材料层的衬底表面的方法。 在一个实施例中，一种用于清洁衬底的表面的方法包括将衬底定位到处理室中，所述衬底具有设置在其上的电介质层，在衬底上形成开口，将设置在衬底上的电介质层暴露于供应到衬底 在水蒸气中形成等离子体，将腔室中的处理压力保持在约1托至约120托之间，并清洁形成在基底上的接触结构。

公开(公告)号：US20110104400A1

公开(公告)日：2011-05-05

申请号：US12987688

申请日：2011-01-10

Applicant: Deenesh Padhi ,  Hyoung-Chan Ha ,  Sudha Rathi ,  Derek R. Witty ,  Chiu Chan ,  Sohyun Park ,  Ganesh Balasubramanian ,  Karthik Janakiraman ,  Martin Jay Seamons ,  Visweswaren Sivaramakrishnan ,  Bok Hoen Kim ,  Hichem M'Saad

Inventor： Deenesh Padhi ,  Hyoung-Chan Ha ,  Sudha Rathi ,  Derek R. Witty ,  Chiu Chan ,  Sohyun Park ,  Ganesh Balasubramanian ,  Karthik Janakiraman ,  Martin Jay Seamons ,  Visweswaren Sivaramakrishnan ,  Bok Hoen Kim ,  Hichem M'Saad

IPC: C23C26/00 ,  H05H1/24

CPC classification number: H01L21/02115 ,  C23C16/045 ,  C23C16/26 ,  C23C16/5096 ,  C23C16/56 ,  H01L21/02274 ,  H01L21/31144 ,  H01L21/3146

Abstract: A method for depositing an amorphous carbon layer on a substrate includes the steps of positioning a substrate in a chamber, introducing a hydrocarbon source into the processing chamber, introducing a heavy noble gas into the processing chamber, and generating a plasma in the processing chamber. The heavy noble gas is selected from the group consisting of argon, krypton, xenon, and combinations thereof and the molar flow rate of the noble gas is greater than the molar flow rate of the hydrocarbon source. A post-deposition termination step may be included, wherein the flow of the hydrocarbon source and the noble gas is stopped and a plasma is maintained in the chamber for a period of time to remove particles therefrom.

Abstract translation: 在基板上沉积无定形碳层的方法包括以下步骤：将基板定位在室中，将烃源引入处理室，将重稀有气体引入处理室，以及在处理室中产生等离子体。 重稀土气体选自氩，氪，氙及其组合，惰性气体的摩尔流量大于烃源的摩尔流量。 可以包括沉积终止步骤，其中停止烃源和惰性气体的流动，并且将等离子体保持在室中一段时间​​以从中除去颗粒。

公开(公告)号：US20100237103A1

公开(公告)日：2010-09-23

申请号：US12406905

申请日：2009-03-18

Applicant: Sven Habermann ,  Brian Perrin ,  Freddie Tsang ,  Ying-Chiu Chan

Inventor： Sven Habermann ,  Brian Perrin ,  Freddie Tsang ,  Ying-Chiu Chan

IPC: B67D5/06

CPC classification number: F41H9/10

Abstract: A self defense spray device comprising a spray unit having a spray canister with an irritant spray, a nozzle operable to release the irritant spray, and a first connector attached to the spray canister. The device further includes a holder having a second connector adapted to releasably engage the first connector to releasably connect the spray unit to the holder, and a safety mechanism that prevents the nozzle from releasing the spray when the spray unit is connected to the holder, thus disarming the device. Once the spray unit is removed from the holder, the safety no longer blocks the nozzle thus arming the device.

Abstract translation: 一种自我防护喷雾装置，包括具有喷雾罐的喷雾装置，所述喷雾装置具有刺激性喷雾，喷嘴可操作以释放所述刺激性喷雾，以及附接到喷雾罐的第一连接器。 该装置还包括具有适于可释放地接合第一连接器以将喷雾单元可释放地连接到保持器的第二连接器的保持器，以及当喷雾单元连接到保持器时防止喷嘴释放喷雾的安全机构，因此 撤防设备 一旦喷涂单元从支架上取下，安全就不再堵塞喷嘴，从而使设备布防。

公开(公告)号：US07787450B1

公开(公告)日：2010-08-31

申请号：US11545587

申请日：2006-10-11

Applicant: Chi Chiu Chan ,  Amit Patel

Inventor： Chi Chiu Chan ,  Amit Patel

IPC: H04L12/28

CPC classification number: H04L45/02 ,  H04L12/5602 ,  H04L45/028 ,  H04W40/24

Abstract: An efficient network formation technique for mobile ad-hoc wireless networks according to the present invention overcomes bandwidth overhead due to generation of database update or Link State Advertisement (LSA) messages in response to changes in certain parameters (e.g., node group size, etc.) with respect to both single and plural node group scenarios. The present invention controls flooding of LSA messages triggered by changes in these parameters (e.g., node group size), thereby reducing overhead traffic during network start-up. This is achieved without impact on message delivery capability and group merge operations. After network start-up is complete and the network is formed, the present invention continues to reduce LSA flooding in a mobile scenario when radios or nodes move into and out of range with one another.

Abstract translation: 根据本发明的用于移动自组织无线网络的有效的网络形成技术克服了由于响应于某些参数（例如，节点组大小等）的变化而产生数据库更新或链路状态通告（LSA）消息而导致的带宽开销。 ）相对于单个节点组和多个节点组情景。 本发明控制由这些参数的变化（例如，节点组大小）触发的LSA消息的泛滥，从而减少网络启动期间的开销流量。 这不会影响消息传递能力和组合并操作。 在网络启动完成并形成网络之后，当无线电或节点彼此进入和离开范围时，本发明继续减少在移动场景中的LSA洪泛。

公开(公告)号：US20090160640A1

公开(公告)日：2009-06-25

申请号：US12338773

申请日：2008-12-18

Applicant: Paul C.P. Leung ,  Kenneth Ho ,  Ying-Chiu Chan

Inventor： Paul C.P. Leung ,  Kenneth Ho ,  Ying-Chiu Chan

IPC: G08B1/08

CPC classification number: G06F1/163 ,  G06F1/1626 ,  G06F1/1632

Abstract: A system is disclosed including an electronic device having a case housing an operative portion, such as a sound system, CD Player, or the like. A bay is formed in the case and includes a communication channel interface electrically coupled to the operative portion. The system further includes a portable computer, such as a personal digital assistant (PDA). The portable computer is sized to fit within the bay having a communication channel thereof in data communication with the communication channel interface. The portable computer stores applications including one or more control applications programmed to generate control signals in response to user inputs. Applications may display an interface on a touch screen and receive user inputs therefrom. The control signals are transmitted to the operative portion which responds to the control signals by playing music, adjusting a volume level, and the like.

Abstract translation: 公开了一种包括具有容纳诸如声音系统，CD播放器等的操作部分的壳体的电子设备的系统。 在壳体中形成隔间并且包括电耦合到操作部分的通信通道接口。 该系统还包括便携式计算机，例如个人数字助理（PDA）。 便携式计算机的大小适合于具有与通信信道接口进行数据通信的通信信道的间隔。 便携式计算机存储包括编程为响应于用户输入产生控制信号的一个或多个控制应用的应用。 应用可以在触摸屏上显示接口并从其接收用户输入。 控制信号被发送到通过播放音乐来响应控制信号的操作部分，调节音量水平等。

公开(公告)号：USD593560S1

公开(公告)日：2009-06-02

申请号：US29295304

申请日：2007-09-25

Applicant: Paul C. P. Leung ,  Kenneth Kee Ho ,  Ying-Chiu Chan

Designer： Paul C. P. Leung ,  Kenneth Kee Ho ,  Ying-Chiu Chan