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114 条记录 (耗时 0.034 秒)

    Catadioptric Projection Objective
    33.
    发明申请
    Catadioptric Projection Objective 有权
    反射折射投影目标

    公开(公告)号：US20080037111A1

    公开(公告)日：2008-02-14

    申请号：US10576265

    申请日：2004-10-15

    申请人： David Shafer ,  Alexander Epple ,  Aurelian Dodoc ,  Wilhelm Ulrich ,  Karl-Heinz Schuster

    发明人： David Shafer ,  Alexander Epple ,  Aurelian Dodoc ,  Wilhelm Ulrich ,  Karl-Heinz Schuster

    IPC分类号： G02B17/08

    CPC分类号： G02B13/143 ,  G02B17/08 ,  G02B17/0812 ,  G02B17/0892 ,  G03F7/70225 ,  G03F7/70275

    摘要： A catadioptric projection objective for projecting a pattern arranged in the object plane of the projection objective into the image plane of the projection objective, having: a first objective part for projecting an object field lying in the object plane into a first real intermediate image; a second objective part for generating a second real intermediate image with the radiation coming from the first objective part; a third objective part for generating a third real intermediate image with the radiation coming from the second objective part; and a fourth objective part for projecting the third real intermediate image into the image plane.

    摘要翻译： 一种反折射投射物镜，用于将布置在投影物镜的物平面中的图案投影到投影物镜的像平面中，具有：第一物镜部分，用于将物平面中的物场投影到第一实际中间像中; 第二目标部分，用于利用来自第一目标部分的辐射产生第二实际中间图像; 第三目标部分，用于利用来自第二目标部分的辐射产生第三实际中间图像; 以及用于将第三实际中间图像投影到图像平面中的第四目标部分。

    Objectives as a microlithography projection objective with at least one liquid lens
    34.
    发明申请
    Objectives as a microlithography projection objective with at least one liquid lens 有权
    目标作为具有至少一个液体透镜的微光刻投影物镜

    公开(公告)号：US20060221456A1

    公开(公告)日：2006-10-05

    申请号：US10562257

    申请日：2004-12-14

    申请人： David Shafer ,  Susanne Beder ,  Karl-Heinz Schuster

    发明人： David Shafer ,  Susanne Beder ,  Karl-Heinz Schuster

    IPC分类号： G02B3/00

    CPC分类号： G02B3/12 ,  G02B17/0812 ,  G02B17/0856 ,  G03F7/70225 ,  G03F7/70241 ,  G03F7/70341 ,  G03F7/70958 ,  G03F7/70966

    摘要： The invention relates to an objective designed as a microlithography projection objective for an operating wavelength. The objective has a greatest adjustable image-side numerical aperture NA, at least one first lens made from a solid transparent body, in particular glass or crystal, with a refractive index nL and at least one liquid lens (F) made from a transparent liquid, with a refractive index NF. At the operating wavelength the first lens has the greatest refractive index nL of all solid lenses of the objective, the refractive index nF of the at least one liquid lens (F) is bigger than the refractive index nL of the first lens and the value of the numerical aperture NA is bigger than 1.

    摘要翻译： 本发明涉及被设计为用于工作波长的微光刻投射物镜的物镜。 目标具有最大的可调节图像侧数值孔径NA，由实心透明体，特别是玻璃或晶体制成的至少一个第一透镜，具有折射率n L L和至少一个液体透镜 （F）由折射率为NF的透明液体制成。 在工作波长下，第一透镜的物镜的所有实心透镜的折射率nL最大，所述至少一个液体透镜（F）的折射率n F F大于折射率n 第一透镜的L 和数值孔径NA的值大于1。

    Projection system, in particular for a microlithographic projection exposure apparatus
    35.
    发明申请
    Projection system, in particular for a microlithographic projection exposure apparatus 有权
    投影系统，特别是用于微光刻投影曝光装置

    公开(公告)号：US20060187555A1

    公开(公告)日：2006-08-24

    申请号：US11346201

    申请日：2006-02-03

    申请人： David Shafer

    发明人： David Shafer

    IPC分类号： G02B3/00

    CPC分类号： G02B13/143 ,  G03F7/70225

    摘要： A projection system for imaging an object field onto an image field, including at least two partial objectives (S1, S2); at least one intermediate image field between the partial objectives (S1, S2); and a concave reflector (119, 219) having a concave reflecting surface. The concave reflecting surface crosses an optical axis of the projection system proximate along the optical axis to the intermediate image field. Alternatively or in addition, the concave reflecting surface crosses an optical axis of the projection system at a position where the condition |HCR/HMR|≧2 is met, with HCR being a chief ray height and HMR being a marginal ray height with respect to the optical axis. Alternatively or in addition, the concave reflecting surface crosses an optical axis of the projection system at a position where the condition: d=y*L is met, with d being an axial distance from the concave reflecting surface to the intermediate image field, and with L being the total geometrical light path travelled by a light beam along the optical axis from the object field to the image field, wherein y ranges from 0 to 0.10.

    摘要翻译： 一种用于将物场成像到包括至少两个部分目标（S 1，S 2）的图像场的投影系统; 部分目标之间的至少一个中间图像场（S 1，S 2）; 和具有凹面反射面的凹面反射体（119,219）。 凹反射表面沿着光轴与投影系​​统的光轴交叉到中间像场。 或者或另外，凹面反射表面在满足条件| H / H> MR2 = 2的位置处与投影系统的光轴交叉， 其中H 是主光线高度，H SUB是相对于光轴的边缘光线高度。 或者或另外，凹面反射面在满足条件：d = y * L的位置处与投影系统的光轴交叉，其中d是从凹面反射面到中间像场的轴向距离， 其中L是由光束沿着光轴从物场到图像场行进的总几何光路，其中y的范围为0至0.10。

    Lens for microscopic inspection
    38.
    发明授权
    Lens for microscopic inspection 有权
    镜片用于显微镜检查

    公开(公告)号：US06362923B1

    公开(公告)日：2002-03-26

    申请号：US09602920

    申请日：2000-06-23

    申请人： Steve R. Lange ,  David Shafer

    发明人： Steve R. Lange ,  David Shafer

    IPC分类号： G02B1514

    CPC分类号： G02B21/04 ,  G02B17/0808 ,  G02B17/0856 ,  G02B17/0892 ,  G02B21/0016 ,  G02B21/025

    摘要： An optical system comprising three lens sections, a catadioptric objective lens section, a reimaging lens section and a zoom lens section, which are all aligned along the optical path of the optical system. The reimaging lens section re-images the system pupil such that the re-imaged pupil is accessible separately from any of the lens sections. The reimaging lens section includes an intermediate focus lens group, which is used to create an intermediate focus, a recollimating lens group, which is used to recollimate the light traveling from the intermediate focus lens group, refocusing group to generate the re-image of the pupil. The optical system may also include a beamsplitter, which creates a separated illumination pupil and collection pupil. The illumination pupil and the collection pupil may then be manipulated with an illumination aperture and a collection aperture, respectively, so that the optical system may operate in various test modes such as brightfield, ring darkfield, full-sky illumination, and laser darkfield with Fourier filtering capability. Another aspect of the invention pertains to a method for using the broad spectral region catadioptric optical system. The method includes the operations of directing radiation from a radiation source so that the radiation passes through the illumination pupil and the collection pupil of the optical system. The method also includes operations for configuring the illumination pupil and the collection pupil so that the optical system may operate in brightfield, ring darkfield, full-sky or laser darkfield illumination mode, with Fourier filtering capability.

    摘要翻译： 一种光学系统，包括三个透镜部分，反射折射物镜部分，再成像透镜部分和变焦透镜部分，它们都沿光学系统的光路对准。 重新成像的镜头部分重新成像系统光瞳，使得重新成像的光瞳可以与任何透镜部分分离地接近。 再成像透镜部分包括用于产生中间焦点的中间聚焦透镜组，用于重新聚焦从中间聚焦透镜组行进的光的再准焦透镜组，重聚焦组，以产生中间焦点的再图像 瞳孔。 光学系统还可以包括分束器，其产生分离的照明光瞳和收集光瞳。 然后可以分别用照明孔和收集孔来操纵照明光瞳和收集光瞳，使得光学系统可以在诸如亮场，环形暗场，全天空照明和具有傅立叶的激光暗场的各种测试模式中操作 过滤能力。 本发明的另一方面涉及一种使用宽光谱区反射折射光学系统的方法。 该方法包括从辐射源引导辐射的操作，使得辐射通过照明光瞳和光学系统的收集光瞳。 该方法还包括用于配置照明光瞳和收集光瞳的操作，使得光学系统可以在具有傅立叶滤波能力的明场，环形暗场，全天空或激光暗场照明模式下操作。

    Reflecting telescope with correcting lens
    39.
    发明授权
    Reflecting telescope with correcting lens 失效
    反光望远镜配镜头

    公开(公告)号：US4571036A

    公开(公告)日：1986-02-18

    申请号：US660916

    申请日：1984-10-15

    申请人： Rolin J. Gebelein ,  David Shafer

    发明人： Rolin J. Gebelein ,  David Shafer

    IPC分类号： G02B17/08 ,  G02B23/02 ,  G02B23/06

    CPC分类号： G02B17/0852 ,  G02B17/08 ,  G02B23/02

    摘要： A reflecting telescope is provided in which a meniscus lens corrects for coma of the primary parabolic reflecting mirror, and also for coma and spherical aberration of an eyepiece, when an eyepiece is used. The meniscus lens may be formed from a plano-concave lens and a plano-convex lens positioned with their planar sides mutually parallel.

    摘要翻译： 提供了一种反射望远镜，其中弯月透镜校正主抛物面反射镜的彗差，并且当使用目镜时，还可以校正目镜的彗差和球面像差。 弯月透镜可以由平凹透镜和平面相平行的平凸透镜形成。

    Reflecting telescope with correcting lens
    40.
    发明授权
    Reflecting telescope with correcting lens 失效
    反光望远镜配镜头

    公开(公告)号：US4477156A

    公开(公告)日：1984-10-16

    申请号：US316134

    申请日：1981-10-29

    申请人： Rolin J. Gebelein ,  David Shafer

    发明人： Rolin J. Gebelein ,  David Shafer

    IPC分类号： G02B17/08 ,  G02B23/02

    CPC分类号： G02B17/0852 ,  G02B17/08 ,  G02B23/02

    摘要： A reflecting telescope is provided in which a meniscus lens corrects for coma of the primary parabolic reflecting mirror, and also for coma and spherical aberration of an eyepiece, when an eyepiece is used. The meniscus lens may be formed from a plano-concave lens and a plano-convex lens positioned with their planar sides mutually parallel.

    摘要翻译： 提供了一种反射望远镜，其中弯月透镜校正主抛物面反射镜的彗差，并且当使用目镜时，还可以校正目镜的彗差和球面像差。 弯月透镜可以由平凹透镜和平面相平行的平凸透镜形成。