公开(公告)号：US20080001541A1

公开(公告)日：2008-01-03

申请号：US11898028

申请日：2007-09-07

申请人： Hideki Shimoi ,  Akira Atsumi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Akira Atsumi ,  Hiroyuki Kyushima

IPC分类号： H01J43/04

CPC分类号： H01J43/24 ,  H01J43/28

摘要： A photomultiplier tube, a photomultiplier tube unit, and a performance-improved radiation detector for increasing a fixing area of a side tube in a faceplate while increasing an effective sensitive area of the faceplate. In the photomultiplier tube, a side face (3c) of the faceplate (3) protrudes outward from an outer side wall (2b) of a metal side tube (2), so that a light receiving area for receiving light passing through a light receiving face (3d) of the faceplate (3) is increased. The overhanging structure of the faceplate (3) is conceived based on a glass refractive index. The overhanging structure is aimed to receive light as much as possible which has not been received before. When the metal side tube (2) is fused to the glass faceplate (3), a fusing method is adopted due to joint between glass and metal. Joint operation between the faceplate (3) and the side tube (2) is reliably ensured. Accordingly, the overhanging structure of the faceplate (3) is effective.

摘要翻译： 光电倍增管，光电倍增管单元和性能改进的辐射检测器，用于增加面板中的侧管的固定面积，同时增加面板的有效敏感区域。 在光电倍增管中，面板（3）的侧面（3c）从金属侧管（2）的外侧壁（2b）向外突出，使得用于接收通过 面板（3）的光接收面（3d）增加。 基于玻璃折射率设计面板（3）的悬垂结构。 突出的结构旨在尽可能接收以前没有收到的光。 当金属侧管（2）熔合到玻璃面板（3）时，由于玻璃和金属之间的接合而采用熔合方法。 可靠地确保面板（3）和侧管（2）之间的联合操作。 因此，面板（3）的突出结构是有效的。

公开(公告)号：US07148461B2

公开(公告)日：2006-12-12

申请号：US10973336

申请日：2004-10-27

申请人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Akira Atsumi

发明人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Akira Atsumi

IPC分类号： H01J40/14

CPC分类号： H01J43/28 ,  H01J43/04

摘要： A metal side tube (2), a glass faceplate (3), and a stem plate (4) constitute a hermetically sealed vessel (5) for a photomultiplier tube. An edge portion (20) is provided at on open end (A) of the side tube (2). The edge portion (2) is embedded in the faceplate (3) in such a manner as to strike on the faceplate (3). Accordingly, high hermeticity at a joint between the side tube (2) and the faceplate (3) is ensured. The edge portion (20) extends upright in an axial direction of the side tube (2), so that the edge portion (20) can be embedded as close to a side face (3c) of the faceplate (3) as possible. This structure increases an effective sensitive area of the faceplate (3) to nearly 100%, and decreases dead area as close to 0 as possible. As described above, the photomultiplier tube (1) according to the present invention has enlarged effective sensitive area of the side tube (3) and enhanced hermeticity of the joint between the faceplate (3) and the side tube (2).

摘要翻译： 金属侧管（2），玻璃面板（3）和杆板（4）构成用于光电倍增管的气密密封容器（5）。 边缘部分（20）设置在侧管（2）的开口端（A）上。 边缘部分（2）以与面板（3）相撞的方式嵌入面板（3）中。 因此，确保侧管（2）和面板（3）之间的接合处的高密封性。 边缘部分（20）沿侧管（2）的轴向竖直延伸，使得边缘部分（20）可以尽可能靠近面板（3）的侧面（3c）嵌入。 这种结构将面板（3）的有效敏感区域增加到近100％，并尽可能地将死区减少到接近0。 如上所述，根据本发明的光电倍增管（1）具有扩大的侧管（3）的有效敏感区域，并且增加了面板（3）和侧管（2）之间的接合的气密性。

公开(公告)号：US06998778B2

公开(公告)日：2006-02-14

申请号：US11007243

申请日：2004-12-09

申请人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

发明人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

IPC分类号： H01J43/04 ,  H01J43/10

CPC分类号： H01J31/507 ,  H01J43/045 ,  H01J43/22

摘要： A dynode (8) constituting an electron multiplier or a photomultiplier is provided with eight rows of channels (15) each defined by an outer frame (16) and a partitioning part (17) of the dynode (8). In each channel (15), a plurality of electron multiplying holes (14) are arranged. In specified positions of the outer frame (16) and the partitioning part (17) of the dynode (8), glass receiving parts (21) wider than the outer frame (16) and the partitioning part (17) are provided integrally with the dynode (8). Glass parts (22) are bonded to all the glass receiving parts (21). The glass parts (22) are bonded by applying glass to the glass receiving parts (21) and hardening the glass and each have a generally dome-like convex shape. Each dynode (8) is formed after the dome-like glass part (22) is bonded to the glass receiving part (21).

摘要翻译： 构成电子倍增器或光电倍增管的倍增电极（8）设置有由排列（8）的外框架（16）和分隔部分（17）限定的8行通道（15）。 在每个通道（15）中，布置有多个电子倍增孔（14）。 在倍增极（8）的外框架（16）和分隔部分（17）的指定位置，与外框架（16）和分隔部分（17）相比较宽的玻璃容纳部件（21）与 倍增极（8）。 玻璃部件（22）与所有玻璃接收部件（21）接合。 玻璃部分（22）通过将玻璃施加到玻璃接收部分（21）并使玻璃硬化并且各自具有大致圆顶状的凸起形状而接合。 在圆顶状玻璃部件22接合到玻璃接收部件21之后形成多个倍增极8。

公开(公告)号：US06946641B1

公开(公告)日：2005-09-20

申请号：US10275682

申请日：2000-05-08

申请人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Akira Atsumi

发明人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Akira Atsumi

IPC分类号： H01J40/14 ,  H01J43/04 ,  H01J43/18 ,  H01J43/28

CPC分类号： H01J43/28 ,  H01J43/04

摘要： A metal side tube (2), a glass faceplate (3), and a stem plate ( ) constitute a hermetically sealed vessel (5) for a photomultiplier tube. An edge portion (20) is provided at on open end (A) of the side tube (2). The edge portion (2) is embedded in the faceplate (3) in such a manner as to strike on the faceplate (3). Accordingly, high hermeticity at a joint between the side tube (2) and the faceplate (3) is ensured. The edge portion (20) extends upright in an axial direction of the side tube (2), so that the edge portion (20) can be embedded as close to a side face (3c) of the faceplate (3) as possible. This structure increases an effective sensitive area of the faceplate (3) to nearly 100%, and decreases dead area as close to 0 as possible. As described above, the photomultiplier tube (1) according to the present invention has enlarged effective sensitive area of the side tube (3) and enhanced hermeticity of the joint between the faceplate (3) and the side tube (2).

摘要翻译： 金属侧管（2），玻璃面板（3）和杆板（）构成用于光电倍增管的气密密封容器（5）。 边缘部分（20）设置在侧管（2）的开口端（A）上。 边缘部分（2）以与面板（3）相撞的方式嵌入面板（3）中。 因此，确保侧管（2）和面板（3）之间的接合处的高密封性。 边缘部分（20）沿侧管（2）的轴向竖直延伸，使得边缘部分（20）可以尽可能靠近面板（3）的侧面（3c）嵌入。 这种结构将面板（3）的有效敏感区域增加到近100％，并尽可能地将死区减少到接近0。 如上所述，根据本发明的光电倍增管（1）具有扩大的侧管（3）的有效敏感区域，并且增加了面板（3）和侧管（2）之间的接合的气密性。

公开(公告)号：US20050110379A1

公开(公告)日：2005-05-26

申请号：US11007243

申请日：2004-12-09

申请人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

发明人： Hiroyuki Kyushima ,  Akira Atsumi ,  Hideki Shimoi

IPC分类号： H01J43/00 ,  H01J43/04 ,  H01J43/22

CPC分类号： H01J31/507 ,  H01J43/045 ,  H01J43/22

摘要： A dynode (8) constituting an electron multiplier or a photomultiplier is provided with eight rows of channels (15) each defined by an outer frame (16) and a partitioning part (17) of the dynode (8). In each channel (15), a plurality of electron multiplying holes (14) are arranged. In specified positions of the outer frame (16) and the partitioning part (17) of the dynode (8), glass receiving parts (21) wider than the outer frame (16) and the partitioning part (17) are provided integrally with the dynode (8). Glass parts (22) are bonded to all the glass receiving parts (21). The glass parts (22) are bonded by applying glass to the glass receiving parts (21) and hardening the glass and each have a generally dome-like convex shape. Each dynode (8) is formed after the dome-like glass part (22) is bonded to the glass receiving part (21).

摘要翻译： 构成电子倍增器或光电倍增管的倍增电极（8）设置有由排列（8）的外框架（16）和分隔部分（17）限定的8行通道（15）。 在每个通道（15）中，布置有多个电子倍增孔（14）。 在倍增极（8）的外框架（16）和分隔部分（17）的指定位置，与外框架（16）和分隔部分（17）相比较宽的玻璃容纳部件（21）与 倍增极（8）。 玻璃部件（22）与所有玻璃接收部件（21）接合。 玻璃部分（22）通过将玻璃施加到玻璃接收部分（21）并使玻璃硬化并且各自具有大致圆顶状的凸起形状而接合。 在圆顶状玻璃部件22接合到玻璃接收部件21之后形成多个倍增极8。

公开(公告)号：US06835922B1

公开(公告)日：2004-12-28

申请号：US10275683

申请日：2002-11-08

申请人： Hideki Shimoi ,  Yuji Masuda ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Yuji Masuda ,  Hiroyuki Kyushima

IPC分类号： H01J4014

CPC分类号： H01J43/28 ,  H01J9/24

摘要： A hermetically sealed vessel for a photomultiplier tube made of a side tube (2), a faceplate and a stem plate. The side tube is made by assembling a plurality of plates (80) with a curled end. An end face (81a) on a corner (81) at an open end of the side tube facing the faceplate is at a higher level than the faces other than the end face (81a). When being heated, the end face (81a) is deeply embedded into the faceplate, which enhances the joint between the side tube and the faceplate. Because the whole open end of the side tube (2) facing the faceplate is embedded into the faceplate, the joint between the side tube (2) and the faceplate is ensured, thereby improving throughput for the joining operation. The side tube is readily integral with the faceplate, which contributes to enhanced hermeticity of the sealed vessel.

摘要翻译： 用于由侧管（2），面板和杆板制成的光电倍增管的气密密封容器。 侧管通过组装具有卷曲端的多个板（80）制成。 在面向面板的侧管的开口端的角部（81）上的端面（81a）比除了端面（81a）以外的面高。 当加热时，端面（81a）深深地嵌入面板中，这增强了侧管和面板之间的接合。 由于侧管（2）的面向面板的整个开口端嵌入面板中，因此确保侧管（2）与面板之间的接合，从而提高接合操作的生产量。 侧管易于与面板一体化，这有助于增强密封容器的气密性。

公开(公告)号：US5917281A

公开(公告)日：1999-06-29

申请号：US954961

申请日：1997-10-21

申请人： Hideki Shimoi ,  Hiroyuki Kyushima

发明人： Hideki Shimoi ,  Hiroyuki Kyushima

IPC分类号： H01J1/32 ,  H01J43/06 ,  H01J43/10 ,  H01J43/12 ,  H01J43/22 ,  H01J43/18

CPC分类号： H01J43/06 ,  H01J43/22

摘要： According to the photomultiplier tube, the dynode unit 10 is constructed from a plurality of stages of dynodes 11 laminated one on another for multiplying incident electrons in a cascade manner through each of a plurality of channels. The anode unit 13 has a plurality of anodes 24 which define a plurality of electron passage gaps 14 each for transmitting the electrons emitted from the dynode unit 10 at a corresponding channel. The inverting dynode plate 15 is provided with a plurality of electron incident strips 17 each for receiving electrons having passed through a corresponding electron passage gap 14 in the anode unit 13, multiplying the electrons, and guiding the electrons back to the corresponding anode 24. The electron incident strip 17 is designed to have: the main surface 18a confronting the electron passage gap 14; and the rising surface 18c rising toward the anode unit 13 from the edge 18b of the main surface 18a which is located at a position confronting the electron passage gap 14 in the anode unit 13.

摘要翻译： 根据光电倍增管，倍增电极单元10由层叠在多个阶段的倍增电极11构成，用于通过多个通道中的每一个以级联方式对入射电子进行倍增。 阳极单元13具有多个阳极24，其限定多个电子通道间隙14，每个电子通道间隙14用于在相应的通道处传输从倍增极单元10发射的电子。 反相倍增极板15设置有多个电子入射条17，每个电子入射条17用于接收通过阳极单元13中的相应电子通道间隙14的电子，乘以电子，并将电子引导回相应的阳极24。 电子入射条17被设计为具有面对电子通道间隙14的主表面18a; 并且上升面18c从主面18a的位于与阳极单元13的电子通过间隙14相对的位置的边缘18b向阳极单元13上升。

公开(公告)号：US09302410B2

公开(公告)日：2016-04-05

申请号：US13383487

申请日：2010-07-21

申请人： Hideki Shimoi ,  Naoki Uchiyama ,  Daisuke Kawaguchi

发明人： Hideki Shimoi ,  Naoki Uchiyama ,  Daisuke Kawaguchi

IPC分类号： B32B38/04 ,  B28D5/00 ,  B23K26/00 ,  H01L21/78 ,  B23K26/40

CPC分类号： B32B37/06 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50 ,  B28D5/00 ,  B28D5/0011 ,  B32B38/0004 ,  H01L21/78 ,  Y10T29/49002 ,  Y10T29/49787 ,  Y10T156/1052

摘要： A silicon substrate 12 has a main face in a (100) plane, whereby a fracture 17 generated from a molten processed region 13 acting as a start point extends in a cleavage direction of the silicon substrate 12 (a direction orthogonal to the main face of the silicon substrate 12). Here, a rear face 1b of an object to be processed 1A and a front face 10a of an object to be processed for separation 10A are bonded to each other by anode bonding, whereby the fracture 17 reaches a front face 1a of the object 1A continuously without substantially changing its direction. When generating a stress in the object for separation 10A, the fracture 17 has reached a rear face 10b of the object for separation 10A and thus easily extends toward the object 1A.

摘要翻译： 硅基板12具有（100）面内的主面，由作为起点的熔融处理区域13产生的断裂线17沿硅基板12的切割方向（与 硅衬底12）。 这里，待处理物体1A的后表面1b和待加工物体10A的前面10a通过阳极接合彼此接合，从而断裂17连续地到达物体1A的前表面1a 而不会大幅改变其方向。 当在分离对象物10A中产生应力时，断裂部17已到达分离对象物10A的背面10b，因此容易向物体1A延伸。

公开(公告)号：US09293309B2

公开(公告)日：2016-03-22

申请号：US13484663

申请日：2012-05-31

申请人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Keisuke Inoue

发明人： Hideki Shimoi ,  Hiroyuki Kyushima ,  Keisuke Inoue

IPC分类号： H01J43/22

CPC分类号： H01J43/22

摘要： The present invention relates to an electron multiplier and others to effectively suppress luminescence noise, even in compact size, in which each of multistage dynodes has a plurality of columns each having a peripheral surface separated physically, and in which each column is processed in such a shape that an area or a peripheral length of a section parallel to an installation surface on which the electron multiplier is arranged becomes minimum at a certain position on the peripheral surface in the column of interest.

摘要翻译： 本发明涉及一种电子倍增器及其它有效抑制发光噪声的方法，即使在紧凑的尺寸下，多级倍增电极中的每一个具有多个柱体，每一列具有在物理上分离的外围表面，并且其中每列处理 形成与感兴趣的列的外周表面上的特定位置处平行于其上布置有电子倍增器的安装表面的部分的面积或周长的最小值。

公开(公告)号：US08802544B2

公开(公告)日：2014-08-12

申请号：US13389053

申请日：2011-07-19

申请人： Hideki Shimoi ,  Keisuke Araki

发明人： Hideki Shimoi ,  Keisuke Araki

IPC分类号： H01L21/78

CPC分类号： H01L21/78 ,  H01L21/7806

摘要： A method for manufacturing a chip constituted by a functional device formed on a substrate comprises a functional device forming step of forming the functional device on one main face of a sheet-like object to be processed made of silicon; a first modified region forming step of converging a laser light at the object so as to form a first modified region along the one main face of the object at a predetermined depth corresponding to the thickness of the substrate from the one main face; a second modified region forming step of converging the laser light at the object so as to form a second modified region extending such as to correspond to a side edge of the substrate as seen from the one main face on the one main face side in the object such that the second modified region joins with the first modified region along the thickness direction of the object; and an etching step of selectively advancing etching along the first and second modified regions after the first and second modified region forming steps so as to cut out a part of the object and form the substrate.

摘要翻译： 由形成在基板上的功能元件构成的芯片的制造方法包括功能元件形成步骤，在由硅制成的被加工片状物体的一个主面上形成功能元件; 第一改质区域形成步骤，使激光在物体处会聚，以便沿着与该基板的厚度对应的预定深度从该主面形成沿物体的一个主面的第一改质区域; 第二改质区域形成步骤，将激光会聚在物体上，以形成第二改质区域，该第二改质区域从物体的一个主面侧的一个主面看，对应于基板的侧缘延伸 使得所述第二改质区域沿着所述物体的厚度方向与所述第一改质区域连接; 以及蚀刻步骤，在第一和第二改质区域形成步骤之后沿着第一和第二改质区选择性地进行蚀刻，以便切割出物体的一部分并形成衬底。