Abstract:
A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention also includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. The layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
Abstract:
A space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The invention pertains to a diffusion bonded integrated fluid flow network architecture, which includes, in addition to a layered substrate containing fluid flow channels, an in-line filter and may include various fluid handling and monitoring components. The integrated fluid delivery system that is formed from a layered substrate is diffusion bonded, and the various fluid handling and monitoring components may be partially integrated or fully integrated into the substrate, depending on design and material requirements.
Abstract:
A diffusion bonded space-conserving integrated fluid delivery system which is particularly useful for gas distribution in semiconductor processing equipment. The disclosure includes an integrated fluid flow network architecture, which may include, in addition to a layered substrate containing fluid flow channels, various fluid handling and monitoring components. A capacitive dual electrode pressure sensor which is integrated into a multilayered substrate is described. The pressure sensor may be used as a gage relative to atmospheric pressure if desired for a particular application.
Abstract:
An apparatus and method for treating dirty water or other liquids containing particles of varying size includes a magnetic treatment unit and a centrifugal separator through which the liquid flows as a stream in sequence. The magnetic treatment unit causes very small sized particles to agglomerate, nucleate or otherwise to be amassed into larger particles which are then more easily separated by the centrifugal separator.
Abstract:
Ice skateboards, ice skateboard conversion kits, and methods for converting a skateboard to an ice skateboard are presented. An ice skateboard or an ice skateboard conversion kit may include four blades. Each blade may include an elongate sharp lower edge and an opening for pivotally mounting the blade on one of four skateboard axle ends. Eight spacer bushings each may include a bore for pivotally mounting the spacer bushing on one of the axle ends. Lengths of two of the spacer bushings may be configured to dispose at least one of the blades along a middle third of one of the axle ends when the blade is pivotally mounted to the axle end between the two spacer bushings.
Abstract:
The present invention provides methods and apparatus for controlling gas flow to a semiconductor-processing chamber. The invention includes deactivating ratio setpoint feedback control in a flow ratio controller; initiating gas flow through the flow ratio controller; moving valves of the flow ratio controller to a preset position based on a stored position when an upstream pressure reaches a stored upstream pressure value, wherein the stored position and the stored upstream pressure value were stored during a prior process run; determining that steady state flow ratio controller output flows have been reached; and activating ratio setpoint feedback control in the flow ratio controller. Numerous additional features are disclosed.
Abstract:
A water treatment feed device includes a hopper and a receptacle. The hopper has a granule-receiving compartment defined by an upper hopper portion and a lower V-shaped hopper portion connected to the upper hopper portion. The lower V-shaped hopper portion is fabricated from a porous material having a plurality of pores sized to at least substantially retain conventional water treatment granules therein. The receptacle has a water-receiving compartment with a weir disposed therein to divide the water-receiving compartment into a water inlet sub-compartment and a water outlet sub-compartment with the water inlet sub-compartment sized to receive the hopper loaded with conventional water treatment granules. A water treatment feed system and a method for dissolving conventional water treatment granules in water are also described.
Abstract:
A package of water treatment pellets includes a first container and a second container. The first container is fabricated from a water-dissolvable sheet material and the first container is filled with and encases the water treatment pellets. The second container is fabricated from a non-water-dissolvable, porous material and is sized and adapted to receive the first container filled with and encasing the water treatment pellets. A water treatment feeder device includes a hollow, box-shaped magazine body defining an internal magazine chamber and a plurality of porous holders disposed in the internal magazine chamber. Each one of the plurality of porous holders retains a respective one of the packages of water treatment pellets. A water treatment feeder system for a structure operative to circulate water thereabout incorporates the water treatment feeder device and the package of water treatment pellets.
Abstract:
A water treatment feed device includes a hopper and a receptacle. The hopper has a granule-receiving compartment defined by an upper hopper portion and a lower V-shaped hopper portion connected to the upper hopper portion. The lower V-shaped hopper portion is fabricated from a porous material having a plurality of pores sized to at least substantially retain conventional water treatment granules therein. The receptacle has a water-receiving compartment with a weir disposed therein to divide the water-receiving compartment into a water inlet sub-compartment and a water outlet sub-compartment with the water inlet sub-compartment sized to receive the hopper loaded with conventional water treatment granules. A water treatment feed system and a method for dissolving conventional water treatment granules in water are also described.
Abstract:
A package of water treatment pellets includes a first container and a second container. The first container is fabricated from a water-dissolvable sheet material and the first container is filled with and encases the water treatment pellets. The second container is fabricated from a non-water-dissolvable, porous material and is sized and adapted to receive the first container filled with and encasing the water treatment pellets. A water treatment feeder device includes a hollow, box-shaped magazine body defining an internal magazine chamber and a plurality of porous holders disposed in the internal magazine chamber. Each one of the plurality of porous holders retains a respective one of the packages of water treatment pellets. A water treatment feeder system for a structure operative to circulate water thereabout incorporates the water treatment feeder device and the package of water treatment pellets.