Method of fabricating lanthanum oxide layer and method of fabricating MOSFET and capacitor using the same
    31.
    发明申请
    Method of fabricating lanthanum oxide layer and method of fabricating MOSFET and capacitor using the same 有权
    制造氧化镧层的方法及使用其制造MOSFET和电容器的方法

    公开(公告)号:US20050156256A1

    公开(公告)日:2005-07-21

    申请号:US11034512

    申请日:2005-01-12

    Abstract: Methods of fabricating a lanthanum oxide layer, and methods of fabricating a MOSFET and/or a capacitor especially adapted for semiconductor applications using such a lanthanum oxide layer are disclosed. The methods include a preliminary step of disposing a semiconductor substrate into a chamber. Tris(bis(trimethylsilyl)amino)Lanthanum as a lanthanum precursor is then injected into the chamber such that the lanthanum precursor is chemisorbed on the semiconductor substrate. Then, after carrying out a first purge of the chamber, at least one oxidizer is injected into the chamber such that the oxidizer is chemisorbed with the lanthanum precursor on the semiconductor substrate. Then, the chamber is purged a second time. The described steps of injecting the lanthanum precursor into the chamber, first-purging the chamber, injecting an oxidizer into the chamber, and second-purging the chamber may be sequentially and repeatedly performed to form a lanthanum oxide layer of a desired thickness having enhanced semiconductor characteristics.

    Abstract translation: 公开了制造氧化镧层的方法以及特别适用于使用这种氧化镧层的半导体应用的MOSFET和/或电容器的制造方法。 所述方法包括将半导体衬底设置到腔室中的预备步骤。 然后将三(双(三甲基甲硅烷基)氨基)镧作为镧前体注入室中,使得镧前体在半导体衬底上被化学吸附。 然后,在进行室的第一次吹扫之后,至少一个氧化剂被注入到室中,使得氧化剂与半导体衬底上的镧前体化学吸附。 然后,房间被第二次清除。 将镧前体注入到室中,首先清洗室,将氧化剂注入到室中,以及对室进行第二次净化的所述步骤可以被顺序地和重复地进行,以形成具有增强的半导体的所需厚度的氧化镧层 特点

    OLED having stacked organic light-emitting units
    32.
    发明授权
    OLED having stacked organic light-emitting units 有权
    OLED具有堆叠的有机发光单元

    公开(公告)号:US08680693B2

    公开(公告)日:2014-03-25

    申请号:US12087929

    申请日:2007-01-17

    CPC classification number: H01L27/3209 H01L51/5278 H01L2251/564

    Abstract: The present invention provides a stacked organic light emitting device, comprising a first conductive layer, at least one intermediate conductive layer and a second conductive layer, and light emitting units disposed between the conductive layers, wherein at least two non-neighboring conductive layers among the conductive layers are conductive layers belonging to Group 1 such that they are electrically connected with each other to a common potential; at least one non-neighboring conductive layer among the conductive layers which are not electrically connected with the conductive layers belonging to Group 1 to a common potential are conductive layers belonging to Group 2 such that they are electrically connected with each other to a common potential; and the conductive layers belonging to Group 1 and the conductive layers belonging to Group 2 are connected with each other via a voltage regulator for alternately applying a positive voltage and a negative voltage.

    Abstract translation: 本发明提供了一种层叠的有机发光器件,包括第一导电层,至少一个中间导电层和第二导电层,以及设置在导电层之间的发光单元,其中,至少两个不相邻的导电层 导电层是属于组1的导电层,使得它们彼此电连接成共同的电位; 导电层中不与属于组1的导电层电连接至公共电位的至少一个不相邻的导电层是属于组2的导电层,使得它们彼此电连接成共同的电位; 并且属于组1的导电层和属于组2的导电层通过用于交替施加正电压和负电压的电压调节器相互连接。

    Fabrication method for organic electronic device and organic electronic device fabricated by the same method
    33.
    发明授权
    Fabrication method for organic electronic device and organic electronic device fabricated by the same method 有权
    通过相同的方法制造的有机电子器件和有机电子器件的制造方法

    公开(公告)号:US08338223B2

    公开(公告)日:2012-12-25

    申请号:US12227144

    申请日:2007-05-10

    Abstract: The present invention provides a fabrication method for an organic electronic device comprising a step of stacking sequentially a first electrode made of a metal, one or more organic material layers, and a second electrode on a substrate, wherein the method comprises the steps of: 1) forming a layer on the first electrode using a metal having a higher oxidation rate than the first electrode before forming the organic material layer, 2) treating the layer formed using a metal having a higher oxidation rate than the first electrode with oxygen plasma to form a metal oxide layer, and 3) treating the metal oxide layer with inert gas plasma to remove a native oxide layer on the first electrode, and an organic electronic device fabricated by the same method.

    Abstract translation: 本发明提供了一种有机电子器件的制造方法,其包括在衬底上依次堆叠由金属制成的第一电极,一个或多个有机材料层和第二电极的步骤,其中所述方法包括以下步骤:1 )在形成有机材料层之前,使用具有比第一电极更高的氧化速率的金属在第一电极上形成层,2)用氧等离子体处理使用比第一电极具有更高氧化速率的金属形成的层,以形成 金属氧化物层,以及3)用惰性气体等离子体处理金属氧化物层以除去第一电极上的自然氧化物层,以及通过相同方法制造的有机电子器件。

    Method of manufacturing organic light emitting device and organic light emitting device manufactured by using the method
    35.
    发明授权
    Method of manufacturing organic light emitting device and organic light emitting device manufactured by using the method 有权
    使用该方法制造有机发光器件和有机发光器件的方法

    公开(公告)号:US07935977B2

    公开(公告)日:2011-05-03

    申请号:US12309614

    申请日:2007-07-25

    Abstract: Disclosed is a method of manufacturing an organic light emitting device, an organic light emitting device manufactured by using the method, and an electronic device including the organic light emitting device. The method includes (a) forming an insulating layer on a lower electrode, (b) etching the insulating layer to form an opening ranging from an upper surface of the insulating layer to the lower electrode so that an overhang structure having a lowermost circumference that is larger than an uppermost circumference is formed, (c) forming a conductive layer on an upper surface of the lower electrode in the opening and a surface of the insulating layer other than the overhang structure, (d) forming an organic material layer on the conductive layer formed on the upper surface of the lower electrode in the opening, and (e) forming an upper electrode on an upper surface of the conductive layer disposed on the upper surface of the insulating layer and an upper surface of the organic material layer.

    Abstract translation: 公开了一种制造有机发光器件的方法,使用该方法制造的有机发光器件和包括该有机发光器件的电子器件。 该方法包括:(a)在下电极上形成绝缘层,(b)蚀刻绝缘层以形成从绝缘层的上表面到下电极的开口,使得具有最低圆周的悬垂结构 (c)在开口中的下电极的上表面和除了突出结构之外的绝缘层的表面上形成导电层,(d)在导电上形成有机材料层 并且(e)在设置在绝缘层的上表面上的导电层的上表面和有机材料层的上表面上形成上电极。

    Fabrication Method for Organic Light Emitting Device and Organic Light Emitting Device Fabricated by the Same Method
    38.
    发明申请
    Fabrication Method for Organic Light Emitting Device and Organic Light Emitting Device Fabricated by the Same Method 有权
    通过相同方法制造的有机发光器件和有机发光器件的制造方法

    公开(公告)号:US20100176378A1

    公开(公告)日:2010-07-15

    申请号:US12223255

    申请日:2007-02-02

    Abstract: The present invention relates to a method for producing an organic light emitting device, comprising a step of sequentially forming on a substrate a first electrode formed of a metal, one or more organic material layers including a light emitting layer, and a second electrode, which comprises a step of forming a layer on the first electrode using a metal having the higher oxidation rate than the first electrode before forming the organic material layer, and to an organic light emitting device produced by the same.

    Abstract translation: 本发明涉及一种有机发光器件的制造方法,其特征在于,包括:在基板上依次形成由金属形成的第一电极,一个或多个包含发光层的有机材料层和第二电极的工序, 包括在形成有机材料层之前使用具有比第一电极更高的氧化速率的金属在第一电极上形成层的步骤以及由其制造的有机发光器件。

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