METHOD FOR MANUFACTURING PRINTED CIRCUIT BOARD
    31.
    发明申请
    METHOD FOR MANUFACTURING PRINTED CIRCUIT BOARD 审中-公开
    制造印刷电路板的方法

    公开(公告)号:US20130008938A1

    公开(公告)日:2013-01-10

    申请号:US13234935

    申请日:2011-09-16

    IPC分类号: B23K1/20 B23K31/02

    摘要: Disclosed herein is a method for manufacturing a printed circuit board, the method including: preparing a base substrate having a connection pad; forming a surface treatment layer on the connection pad; refrigeration-treating the base substrate having the connection pad on which the surface treatment layer is formed; and printing a solder paste on the connection pad of the refrigeration-treated base substrate.

    摘要翻译: 本发明公开了印刷电路板的制造方法,该方法包括:准备具有连接垫的基底基板; 在连接垫上形成表面处理层; 对具有形成表面处理层的连接焊盘的基底基板进行制冷处理; 以及在所述冷冻处理过的基底基板的连接垫上印刷焊膏。

    Antenna structure for inductively coupled plasma generator
    34.
    发明授权
    Antenna structure for inductively coupled plasma generator 失效
    电感耦合等离子体发生器的天线结构

    公开(公告)号:US07079085B2

    公开(公告)日:2006-07-18

    申请号:US10766665

    申请日:2004-01-27

    IPC分类号: H01Q21/00 H01Q11/12 H01J7/24

    CPC分类号: H01J37/321 H05H1/46

    摘要: An antenna structure for an inductively coupled plasma generator suitable for processing large-diameter wafers or large, flat-panel display devices by making a plasma density distribution uniform and symmetrical with respect to a rotating direction inside a circular or rectangular chamber in which a wafer is processed. In the antenna structure having a powered end to which RF power is applied and a ground end connected to the ground, at least two loop antenna elements are disposed electrically in parallel with each other, the powered ends and ground ends of the respective antennas are disposed symmetrically with respect to the center of the antennas, and the antennas crossing each other such that the powered ends and ground ends thereof are disposed at a part far from a chamber and central parts thereof are disposed at a part close to the chamber.

    摘要翻译: 一种用于电感耦合等离子体发生器的天线结构,其适用于通过使等离子体密度分布在圆形或矩形室内相对于旋转方向均匀且对称的方式处理大直径晶片或大型平板显示装置,其中晶片为 处理。 在具有施加RF功率的动力端和连接到地面的接地端的天线结构中,至少两个环形天线元件彼此并联设置,各个天线的动力端和接地端被布置 相对于天线的中心对称,并且天线彼此交叉,使得其动力端和接地端设置在远离室的一部分处,并且其中心部分设置在靠近室的部分。