Antenna structure for inductively coupled plasma generator
    1.
    发明授权
    Antenna structure for inductively coupled plasma generator 失效
    电感耦合等离子体发生器的天线结构

    公开(公告)号:US07079085B2

    公开(公告)日:2006-07-18

    申请号:US10766665

    申请日:2004-01-27

    IPC分类号: H01Q21/00 H01Q11/12 H01J7/24

    CPC分类号: H01J37/321 H05H1/46

    摘要: An antenna structure for an inductively coupled plasma generator suitable for processing large-diameter wafers or large, flat-panel display devices by making a plasma density distribution uniform and symmetrical with respect to a rotating direction inside a circular or rectangular chamber in which a wafer is processed. In the antenna structure having a powered end to which RF power is applied and a ground end connected to the ground, at least two loop antenna elements are disposed electrically in parallel with each other, the powered ends and ground ends of the respective antennas are disposed symmetrically with respect to the center of the antennas, and the antennas crossing each other such that the powered ends and ground ends thereof are disposed at a part far from a chamber and central parts thereof are disposed at a part close to the chamber.

    摘要翻译: 一种用于电感耦合等离子体发生器的天线结构,其适用于通过使等离子体密度分布在圆形或矩形室内相对于旋转方向均匀且对称的方式处理大直径晶片或大型平板显示装置,其中晶片为 处理。 在具有施加RF功率的动力端和连接到地面的接地端的天线结构中,至少两个环形天线元件彼此并联设置,各个天线的动力端和接地端被布置 相对于天线的中心对称,并且天线彼此交叉,使得其动力端和接地端设置在远离室的一部分处,并且其中心部分设置在靠近室的部分。

    Conductive organic/inorganic composite composition and organic electroluminescent device comprising the same
    3.
    发明申请
    Conductive organic/inorganic composite composition and organic electroluminescent device comprising the same 有权
    导电有机/无机复合材料组合物和包含其的有机电致发光器件

    公开(公告)号:US20060175964A1

    公开(公告)日:2006-08-10

    申请号:US11348337

    申请日:2006-02-07

    CPC分类号: H01L51/0037 H01L51/5088

    摘要: A conductive organic/inorganic complex composition, a method of preparing the composition, a thin conductive organic/inorganic complex film prepared using the composition, an organic electroluminescent device comprising the thin conductive organic/inorganic complex film, and a method of manufacturing the organic electroluminescent device. The conductive organic/inorganic complex composition is prepared by mixing a mixed solution comprising a conductive polymeric monomer, an oxidizing agent, and an alcohol solvent with a silica sol solution comprising an organosilicon compound, water, an acid catalyst, and an alcohol solvent. According to the present invention, the conductive organic/inorganic complex composition is hydrophobic and insoluble in water and an organic solvent, has a high mechanical strength, and is thermally and chemically stable. Further, a compositional composition of the conductive organic/inorganic complex composition can be changed over a wide range.

    摘要翻译: 导电有机/无机复合组合物,制备该组合物的方法,使用该组合物制备的薄导电有机/无机复合膜,包含该薄导电有机/无机复合膜的有机电致发光器件及其制造方法 设备。 通过将包含导电聚合单体,氧化剂和醇溶剂的混合溶液与包含有机硅化合物,水,酸催化剂和醇溶剂的硅溶胶溶液混合来制备导电有机/无机复合组合物。 根据本发明,导电有机/无机复合组合物是疏水性的并且不溶于水和有机溶剂,具有高的机械强度,并且是热和化学稳定的。 此外,可以在宽范围内改变导电性有机/无机复合组合物的组成组成。

    Supercapacitor and manufacturing method thereof
    5.
    发明授权
    Supercapacitor and manufacturing method thereof 失效
    超级电容器及其制造方法

    公开(公告)号:US08107222B2

    公开(公告)日:2012-01-31

    申请号:US12155538

    申请日:2008-06-05

    IPC分类号: H01G9/00

    摘要: A supercapacitor and a manufacturing method thereof are disclosed. With manufacturing method of Supercapacitor including: arranging a plurality of filters to be spaced at a designated interval apart, forming a first plating layer connecting one end of the filter, forming a second plating layer lengthened along the filter from the first plating layer, polymerizing to form a conductive polymer layer between the second plating layer, and removing the filter, capacitance (C), power (kw) and energy (E) can be increased as the space for absorbing electrons is widened, by making the surface area of an electrode wider than the a general film.

    摘要翻译: 公开了一种超级电容器及其制造方法。 利用超级电容器的制造方法,其特征在于,包括:以规定的间隔排列多个滤波器,形成连接所述滤波器一端的第一镀层,形成沿着所述第一镀层沿着所述过滤器延长的第二镀层,聚合成 在第二镀层之间形成导电聚合物层,并且除去过滤器之后,可以通过使电极的表面积变宽来增加电容(C),功率(kw)和能量(E),因为吸收电子的空间变宽 比一般电影宽。

    Conductive layer and organic electroluminescent device including the same
    6.
    发明授权
    Conductive layer and organic electroluminescent device including the same 有权
    导电层和包括其的有机电致发光器件

    公开(公告)号:US08053023B2

    公开(公告)日:2011-11-08

    申请号:US11634116

    申请日:2006-12-06

    IPC分类号: B05D5/06

    摘要: In a method of forming a conductive layer, a conductive layer formed using the method, an organic electroluminescent device including the conductive layer, and a method of manufacturing the organic electroluminescent device, the method of forming the conductive layer comprises: pre-treating a substrate in order to improve adhesive force; coating a mixture solution which contains a sulfonate-based catalyst and a solvent on the substrate, and then drying the coated product; and performing vapor-phase polymerization by contacting the substrate on which the catalyst is coated with monomers which make up a conductive polymer in a vapor phase. The conductive layer obtained using the method of forming a conductive layer has high conductivity, high transmittance with respect to light having a wavelength of 300 nm to 700 nm, uniform thickness, and thermal-chemical stability.

    摘要翻译: 在形成导电层的方法中,使用该方法形成的导电层,包括该导电层的有机电致发光器件和制造该有机电致发光器件的方法形成导电层的方法包括:预处理衬底 以提高粘合力; 在基材上涂布含有磺酸酯类催化剂和溶剂的混合溶液,然后干燥涂布的产品; 并通过使其上涂覆有催化剂的基材与构成导电聚合物的气相的单体接触进行气相聚合。 使用形成导电层的方法获得的导电层具有高导电性,相对于波长为300nm至700nm的光的高透射率,均匀的厚度和热化学稳定性。

    Supercapacitor and manufacturing method thereof
    8.
    发明申请
    Supercapacitor and manufacturing method thereof 失效
    超级电容器及其制造方法

    公开(公告)号:US20090027828A1

    公开(公告)日:2009-01-29

    申请号:US12155538

    申请日:2008-06-05

    IPC分类号: H01G9/025 B05D5/12 B05D3/14

    摘要: A supercapacitor and a manufacturing method thereof are disclosed. With manufacturing method of Supercapacitor including: arranging a plurality of filters to be spaced at a designated interval apart, forming a first plating layer connecting one end of the filter, forming a second plating layer lengthened along the filter from the first plating layer, polymerizing to form a conductive polymer layer between the second plating layer, and removing the filter, capacitance (C), power (kw) and energy (E) can be increased as the space for absorbing electrons is widened, by making the surface area of an electrode wider than the a general film.

    摘要翻译: 公开了一种超级电容器及其制造方法。 利用超级电容器的制造方法,其特征在于,包括:以规定的间隔排列多个滤波器,形成连接所述滤波器一端的第一镀层,形成沿着所述第一镀层沿着所述过滤器延长的第二镀层,聚合成 在第二镀层之间形成导电聚合物层,并且除去过滤器之后,可以通过使电极的表面积变宽来增加电容(C),功率(kw)和能量(E),因为吸收电子的空间变宽 比一般电影宽。

    Conductive layer and organic electroluminescent device including the same
    9.
    发明申请
    Conductive layer and organic electroluminescent device including the same 有权
    导电层和包括其的有机电致发光器件

    公开(公告)号:US20070196643A1

    公开(公告)日:2007-08-23

    申请号:US11634116

    申请日:2006-12-06

    摘要: In a method of forming a conductive layer, a conductive layer formed using the method, an organic electroluminescent device including the conductive layer, and a method of manufacturing the organic electroluminescent device, the method of forming the conductive layer comprises: pre-treating a substrate in order to improve adhesive force; coating a mixture solution which contains a sulfonate-based catalyst and a solvent on the substrate, and then drying the coated product; and performing vapor-phase polymerization by contacting the substrate on which the catalyst is coated with monomers which make up a conductive polymer in a vapor phase. The conductive layer obtained using the method of forming a conductive layer has high conductivity, high transmittance with respect to light having a wavelength of 300 nm to 700 nm, uniform thickness, and thermal-chemical stability.

    摘要翻译: 在形成导电层的方法中,使用该方法形成的导电层,包括该导电层的有机电致发光器件和制造该有机电致发光器件的方法形成导电层的方法包括:预处理衬底 以提高粘合力; 在基材上涂布含有磺酸酯类催化剂和溶剂的混合溶液,然后干燥涂布的产品; 并通过使其上涂覆有催化剂的基材与构成导电聚合物的气相的单体接触进行气相聚合。 使用形成导电层的方法获得的导电层具有高导电性,相对于波长为300nm至700nm的光的高透射率,均匀的厚度和热化学稳定性。