摘要:
An array of sidewall-contacted antifuses is formed by a method that reduces the sensitivity of the array to masking alignment errors. The array includes a plurality of spaced-apart bit lines which are formed in a semiconductor material. Rows and columns of insulated contacts are formed on the semiconductor material such that each bit line is contacted a plurality of times by an insulated contact. In each row of contacts, each contact has an exposed sidewall. A plurality of word lines are formed over the contacts such that a word line is formed over each exposed sidewall in a row of exposed sidewalls. The word line includes a dielectric layer and a conductive layer.
摘要:
The contamination introduced into a conventional fuse via the window opening of the fuse is eliminated by forming a fuse with a cavity. When the fuse is programmed by passing a current through the fuse which is sufficient to heat up the fuse material, the heated fuse material flows up into the cavity, thereby providing an open current path.
摘要:
Multiple bits of data are stored in an erasable Frohmann-Bentchkowsky p-channel memory transistor which has a plurality of upper plates that are switchably connectable to an erase voltage. The multiple bits of data define a number of logic states which, in turn, define a number of corresponding charge ranges on the floating gate. The charge ranges include a first charge range and a plurality of remaining charge ranges. Each remaining charge range is associated with a different combination of upper plates. Electrons are injected onto the floating gate so that the charge on the floating gate falls within the first charge range. To place the charge within one of the remaining charge ranges, electrons are removed from the floating gate by connecting the upper plates that are associated with the desired charge range to the erase voltage to partially erase the transistor.
摘要:
A memory device has a plurality of memory cells formed in rows and columns. Each memory cell includes an erasable Frohmann-Bentchkowsky p-channel memory transistor and an n-channel MOS access transistor. The memory device utilizes a plurality of erase lines which are connected to p- wells which, in turn, are capacitively coupled to the floating gates of the memory transistors to provide electrical erasability.
摘要:
A memory device is disclosed which includes a plurality of memory cells formed in rows and columns. Each memory cell includes an erasable Frohmann-Bentchkowsky p-channel memory transistor and an n-channel MOS access transistor. The memory device utilizes a plurality of erase lines which are formed adjacent to the floating gates of the memory transistors to provide electrical erasability.
摘要:
A semiconductor device having memory cells, high-voltage CMOS transistors, and low-voltage, deep sub-micron CMOS transistors is formed in a process that allows the same low-voltage device parameters to be used regardless of whether the low-voltage transistors are formed with or without the memory cells and the high-voltage CMOS transistors.
摘要:
The silicon real estate consumed by a conventional Schottky diode is reduced in the present invention by forming the Schottky diode through a field oxide isolation region. Etching through the field oxide isolation region requires extra etch time which is provided by conventional etch steps that typically specify a 50-100% overetch during contact formation.
摘要:
In a non-volatile memory cell that has a select transistor and a memory transistor, the substrate trenching that occurs when the gate of the select transistor and the stacked gate of the memory transistor are initially defined is eliminated by forming the gate of the select transistor and the stacked gate of the memory transistor to have substantially the same step height.
摘要:
A dielectric-based anti-fuse cell and cell array, that include a doped polysilicon contact plug, with a low resistance in the programmed state, a low capacitance, and a small cell area. The dielectric-based anti-fuse cell includes a first insulating layer, typically SiO2, on the surface of a semiconductor substrate. A first doped polysilicon (poly 1) layer is on the upper surface of the first insulating layer and a second insulating layer is over the poly 1 layer. A doped polysilicon contact plug extends through the second insulating layer and into the poly 1 layer. A dielectric layer, typically either an ONO or NO dielectric composite layer, covers the upper surface of the doped polysilicon contact plug. A second doped polysilicon (poly 2) layer is disposed on the dielectric layer. A process for manufacturing the anti-fuse cell and array includes first providing a semiconductor substrate and forming a first insulating layer on its surface. Next a poly 1 layer (e.g. bit lines) is formed on the surface of the first insulating layer followed by the formation of a second insulating layer over the poly 1 layer. A contact opening that extends into the poly 1 layer is then created in the second insulating layer and filled with a doped polysilicon contact plug. Next, a dielectric layer is formed on the upper surface of the doped polysilicon contact plug, followed by the formation of a poly 2 layer (e.g. word lines) on the upper surface of the dielectric layer.
摘要:
A memory device is disclosed which includes a plurality of memory cells formed in rows and columns. Each memory cell includes a Frohmann-Bentchkowsky p-channel memory transistor and an n-channel MOS access transistor. A plurality of page lines are utilized to contact each memory transistor, while a plurality of enable lines are utilized to contact each access transistor.