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公开(公告)号：US06634851B1
公开(公告)日：2003-10-21
申请号：US09483625
申请日：2000-01-14
IPC分类号： B25J1804
CPC分类号： H01L21/68707 , B25J9/042 , B25J9/104 , B25J18/02 , B25J18/04 , B25J19/0079 , H01L21/67742 , Y10T74/20323
摘要： A wafer handling robot is disclosed for transporting workpieces such as semiconductor wafers and flat panel displays between process tools and/or workpiece storage locations within a wafer fab. The robot includes a base comprising a rigid backbone for providing a significant degree of structural stability to the robot. The base further includes a mast, a linear drive system for translating the mast, and a shoulder drive system for rotating the mast. The shoulder drive system includes a harmonic drive reduction system for providing a stiff, smooth and precise output rotation of the mast section. The robot further includes a proximal link fixedly mounted to the mast for rotation with the mast, and a distal link rotatably mounted to the proximal link. An end effector for supporting various workpieces is rotationally mounted to the distal end of the distal link. An elbow drive is mounted to the proximal link, extending down into the mast section, for driving rotation of the distal link with respect to the proximal link. Torque is transmitted from the elbow drive to the distal link by steel straps wrapped around a drive pulley from the elbow drive and a driven pulley in the distal link. Similarly, torque is transmitted from the distal link to the end effector via a second set of steel straps wrapped around pulleys provided in the distal link and end effector, respectively.
摘要翻译： 公开了一种晶片处理机器人，用于在晶片制造厂内的工艺工具和/或工件存储位置之间输送诸如半导体晶片和平板显示器的工件。 机器人包括一个底座，它包括一个刚性骨架，为机器人提供了很大程度的结构稳定性。 基座还包括桅杆，用于平移桅杆的线性驱动系统和用于旋转桅杆的台肩驱动系统。 肩部驱动系统包括用于提供桅杆部分的刚性，平滑和精确的输出旋转的谐波驱动减速系统。 机器人还包括固定地安装到桅杆上以使桅杆旋转的近端链节和可旋转地安装到近端连杆的远端连杆。 用于支撑各种工件的端部执行器旋转地安装到远端连杆的远端。 肘部驱动器安装到近端连杆，向下延伸到桅杆部分中，用于驱动远端连杆相对于近端连杆的旋转。 扭矩由弯头驱动器和远端连杆的从动皮带轮缠绕在驱动皮带轮周围的钢带从弯头传动装置传递到远端连杆。 类似地，扭矩通过分别缠绕在设置在远端连杆和端部执行器中的滑轮周围的第二组钢带从远端连杆传递到末端执行器。
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公开(公告)号：US06612797B1
公开(公告)日：2003-09-02
申请号：US09313945
申请日：1999-05-18
IPC分类号： B65G4907
CPC分类号： G03F7/70541 , G03F7/70741 , G03F7/7075 , H01L21/67769 , H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A SMIF interface is disclosed for buffering one or more cassettes within a minienvironment affixed to a process tool. The interface includes a load port formed of a port door and a port plate circumjacent thereabout, and a minienvironment mounted to port plate. The SMIF interface and/or process tool includes at least one shelf for storing a cassette after the load port separates the cassette from its transport pod. In operation, while a first cassette is located within the process tool, a second pod is seated on the load port, the cassette is separated from the pod and the cassette is stored on a storage shelf. When processing on the first cassette is completed, the second cassette is loaded into the processing tool. The first cassette is returned to the pod and removed from the load port. A cassette from a new pod is then seated on the load port, separated from its pod and stored on the storage shelf. This process continues until processing on each scheduled wafer lot is completed. By providing a buffer of cassettes within the minienvironment of the SMIF interface, the processing tool is no longer dependent on timely delivery of pods to the interface to ensure that the process tool does not sit idle.
摘要翻译： 公开了一种SMIF接口，用于在附加到处理工具的微小环境内缓冲一个或多个盒。 该接口包括由端口门和其周围的端口板形成的负载端口，以及安装到端口板的小型环境。 SMIF接口和/或处理工具包括至少一个搁架，用于在装载端口将盒与其传送盒分离之后存储盒。 在操作中，当第一盒位于处理工具内时，第二盒位于装载端口上，盒与盒分离，盒被存储在存放架上。 当在第一盒上的处理完成时，第二盒装载到处理工具中。 第一个盒子返回到盒子并从装载端口移除。 然后将来自新容器的盒子放置在装载端口上，与其容器分离并存储在存储架上。 这个过程一直持续到每个预定的晶圆批次的处理完成。 通过在SMIF界面的微型环境中提供盒式磁带缓冲区，处理工具不再依赖于将端口及时传送到界面，以确保处理工具不会闲置。
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公开(公告)号：US06364595B1
公开(公告)日：2002-04-02
申请号：US09247695
申请日：1999-02-10
IPC分类号： B65B6900
CPC分类号： G03F7/70741 , H01L21/67778 , H01L21/68707 , Y10S414/137 , Y10S414/141
摘要： A reticle transfer system is disclosed for transferring reticles between a reticle-carrying SMIF container and a process tool. The reticle transfer system according to the present invention includes an arm assembly having a transfer arm and a gripping mechanism affixed to the end of the transfer arm. Once the container carrying the reticle has been opened, the gripping mechanism is rotated and translated to a position adjacent the reticle so that it may access the reticle and transfer it into the minienvironment through an access port in the minienvironment. In order to precisely, easily and repeatedly position the gripping mechanism in the desired location to grip and transfer the reticle, the gripping mechanism includes four downwardly extending posts spaced apart from each other so as to contact an outer rim of the container door as the gripping mechanism is lowered into position to grip and transfer the reticle. Once the four posts are seated in contact with the outer rim of the container door, the gripping mechanism is fixed in the proper position so that a pair of grippers within the gripping mechanism may rotate inward and grip the reticle. The posts also allow proper positioning of the gripping mechanism with respect to the container door and support platform within the minienvironment when returning the reticle to the container door or depositing the reticle on the minienvironment support platform.
摘要翻译： 公开了一种用于在标线片承载的SMIF容器和加工工具之间传送掩模版的掩模版传送系统。 根据本发明的掩模版传送系统包括具有传送臂和固定到传送臂的端部的夹持机构的臂组件。 一旦携带标线的容器已经打开，夹持机构就被旋转并转移到与掩模版相邻的位置，使得它可以进入掩模版并通过微型环境中的进入口将其传送到环境中。 为了精确地，容易地和重复地将夹持机构定位在期望的位置以夹持和传送掩模版，夹持机构包括彼此间隔开的四个向下延伸的柱，以便与容器门的外边缘接触，作为抓握 机构被降低到抓地力并传递标线的位置。 一旦四个柱子与容器门的外缘接触就位，夹持机构被固定在适当的位置，使得夹持机构内的一对夹具可以向内旋转并夹紧掩模版。 当将掩模版返回到容器门或将掩模版放置在微型环境支撑平台上时，柱还允许抓握机构相对于容器门和支撑平台在微型环境中的适当定位。
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公开(公告)号：US5166884A
公开(公告)日：1992-11-24
申请号：US797714
申请日：1991-11-25
IPC分类号： G03F7/20 , H01L21/673
CPC分类号： H01L21/67294 , G03F7/70541 , G03F7/7075 , G03F7/70991
摘要： A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.
摘要翻译： 一种安装有用于携带诸如半导体晶片的物品的可移动容器的系统，其包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。
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公开(公告)号：US4077485A
公开(公告)日：1978-03-07
申请号：US645834
申请日：1975-12-31
申请人： Anthony C. Bonora , Thomas Holt
发明人： Anthony C. Bonora , Thomas Holt
CPC分类号： B62J11/00
摘要： Apparatus for mounting a battery on an electrically powered vehicle, as for example a bicycle, including a bracket slidably mounted on the vehicle frame upon which in turn are mounted one of the sprockets of a belt drive system and the battery, the weight of the battery urging the sprocket to tension the belt. The battery is mounted on the bracket by a hinge packed with a compressible resilient material to permit damped rotation of the battery about a transverse axis while dampingly constraining all other movement of the battery. The bracket is further provided with pad means having resilient frictional surfaces to absorb impact of the battery against the bracket and damp transverse movement of the battery.
摘要翻译： 用于将电池安装在电动车辆上的装置，例如自行车，包括可滑动地安装在车辆框架上的支架，所述支架又安装在带驱动系统的链轮和电池之间，电池的重量 推动链轮张紧皮带。 电池通过装有可压缩弹性材料的铰链安装在支架上，以允许电池围绕横向轴线阻尼旋转，同时阻尼地限制电池的所有其它运动。 支架还设置有具有弹性摩擦表面的垫片装置，以吸收电池抵靠支架的冲击并阻止电池的横向移动。
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36.发明授权公开(公告)号：US09184078B2
公开(公告)日：2015-11-10
申请号：US13464923
申请日：2012-05-04
申请人： Anthony C. Bonora , Richard Garcia
发明人： Anthony C. Bonora , Richard Garcia
IPC分类号： H01L21/677 , H01L21/67 , H01L21/687
CPC分类号： H01L21/67775 , H01L21/67265 , H01L21/68707
摘要： A system and method of transporting substrates includes a loadport system including a frame, an articulating arm, a mini environment and a tower substantially centered in the frame. The tower includes multiple motors, a first motor mechanically coupled to the mini environment for moving the mini environment vertically. A second motors mechanically coupled to the articulating arm for moving the articulating arm vertically. A tower enclosure is also included. The tower enclosure enclosing the motors separate from the mini environment.
摘要翻译： 输送基材的系统和方法包括载荷输送系统，其包括框架，铰接臂，迷你环境和基本上位于框架中心的塔架。 该塔包括多个电动机，第一电动机机械耦合到迷你环境以垂直移动迷你环境。 机械地联接到铰接臂的第二马达用于垂直地移动铰接臂。 还包括一个塔架。 包围电机的塔架与迷你环境分开。
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公开(公告)号：US07737567B2
公开(公告)日：2010-06-15
申请号：US12143197
申请日：2008-06-20
IPC分类号： H01L23/544 , B65H1/00
CPC分类号： H01L23/544 , H01L21/67282 , H01L21/67294 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2223/54493 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译： 提供半导体衬底。 衬底包括第一表面和相对的第二表面，其中第一表面包括在第一表面的质心区域中的标记。 标记表示半导体衬底的第一表面上的中心点的位置或衬底独有的识别数据。 还提供了系统，运输和标记的方法以及用于读取基板标记的装置。
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公开(公告)号：US07597523B2
公开(公告)日：2009-10-06
申请号：US11774750
申请日：2007-07-09
IPC分类号： B65G49/07
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： A variable lot size load port assembly includes a tool interface, an advance plate, and a seal plate. The tool interface extends generally in a vertical dimension and has a front surface, a back surface generally parallel to the front surface, and an aperture. An advance plate is positioned to the front of the tool interface below the aperture. The advance plate extends generally horizontally and is configured to support a front opening unified pod (FOUP). The advance plate translates between a retracted position and an advanced position. The advanced position is proximate the tool interface and the retracted position is spaced from the tool interface. The seal plate has an upper end secured to the tool interface and a lower end covering a portion of the aperture to form a reduced aperture. The seal plate is shaped to form a proximity seal with a front flange of a FOUP of a selected capacity mounted to the advance plate and brought to the advanced position.
摘要翻译： 可变批量装载端口组件包括工具接口，前进板和密封板。 工具界面大致垂直延伸，并且具有前表面，大体平行于前表面的后表面和孔。 前进板位于孔下方的工具界面的前部。 前进板大致水平地延伸并且被配置为支撑前开口统一舱（FOUP）。 推进板在缩回位置和高级位置之间平移。 前进位置靠近工具界面，缩回位置与工具界面间隔开。 密封板具有固定到工具接口的上端，并且下端覆盖孔的一部分以形成减小的孔。 密封板成形为与安装到前进板的选定容量的FOUP的前凸缘形成邻近密封件并且被带到前进位置。
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公开(公告)号：US07445415B2
公开(公告)日：2008-11-04
申请号：US11177645
申请日：2005-07-08
申请人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
发明人： Anthony C. Bonora , Michael Krolak , Roger G. Hine
IPC分类号： B65G1/133
CPC分类号： H01L21/67775 , H01L21/67736 , Y10S414/14
摘要： The present invention comprises a load port for providing access to an article that is stored in a container having a container door removably coupled to a container shell. The load port preferably loads/unloads a container directly from a container transport system. In one embodiment, the load port includes a plate having an opening, a container support plate, a drive assembly for moving the support plate vertically and a shroud to partially enclose the opening. The shroud, which may be affixed to the mounting plate, has an open top and bottom. The shroud contains a mechanism for retaining the container shell at a controllable height. During operation, a container is raised from the transport system into the shroud until the container shell is retained by the mechanism. After the container shell is uncoupled from the container door, the container support plate is lowered until the article is accessible through the opening. The container shell remains located at the controllable height. The container shell, in combination with the shroud, creates a mini-environment isolating the article from ambient conditions in the fabrication facility.
摘要翻译： 本发明包括一个负载端口，用于提供对存储在具有可拆卸地联接到容器壳体的容器门的容器中的物品的通路。 负载端口优选地从容器运输系统直接装载/卸载容器。 在一个实施例中，负载端口包括具有开口的板，容器支撑板，用于垂直移动支撑板的驱动组件和用于部分地封闭开口的护罩。 可以固定到安装板的护罩具有敞开的顶部和底部。 护罩包含用于将容器壳保持在可控高度的机构。 在操作期间，容器从运输系统升起到护罩中，直到容器壳体被机构保持。 在容器壳与容器门分离后，容器支撑板被降低直到制品通过开口接近。 容器壳保持位于可控高度。 容器壳与护罩组合形成了将制品与制造设备中的环境条件隔离的迷你环境。
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公开(公告)号：US20080118334A1
公开(公告)日：2008-05-22
申请号：US11603714
申请日：2006-11-22
申请人： Anthony C. Bonora
发明人： Anthony C. Bonora
IPC分类号： B65H1/00
CPC分类号： B65G1/02
摘要： The present invention generally comprises a container storage system for efficiently storing large capacity and small capacity containers or FOUPs. In one embodiment, each storage location within the stocker comprises a pair of spaced apart supports. A large capacity container or a small capacity container may be seated in any storage location. The storage locations are arranged within the stocker to minimize the amount of empty space between the supports of a storage location and a container seated in an adjacent storage location. In one embodiment, the vertical pitch between supports of adjacent storage locations is less than the height of a large capacity FOUP container shell. Thus, when a FOUP is seated in a storage location, its container shell extends between the supports of the storage location located directly above.
摘要翻译： 本发明通常包括用于有效地存储大容量和小容量容器或FOUP的容器储存系统。 在一个实施例中，储盘器内的每个储存位置包括一对间隔开的支撑件。 大容量容器或小容量容器可以放置在任何存放位置。 存储位置被布置在储存器内，以最小化存储位置的支撑件和位于相邻存储位置的容器之间的空间空间的量。 在一个实施例中，相邻存储位置的支撑件之间的垂直间距小于大容量FOUP容器壳体的高度。 因此，当FOUP位于存储位置时，其容器壳体在位于直接位于上方的存储位置的支撑件之间延伸。
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